FR2406673A1 - Procede pour creer un vide pousse dans un recipient - Google Patents

Procede pour creer un vide pousse dans un recipient

Info

Publication number
FR2406673A1
FR2406673A1 FR7829740A FR7829740A FR2406673A1 FR 2406673 A1 FR2406673 A1 FR 2406673A1 FR 7829740 A FR7829740 A FR 7829740A FR 7829740 A FR7829740 A FR 7829740A FR 2406673 A1 FR2406673 A1 FR 2406673A1
Authority
FR
France
Prior art keywords
vacuum
walls
creating
container
high vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7829740A
Other languages
English (en)
Other versions
FR2406673B1 (fr
Inventor
Thaddaus Kraus
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
OC Oerlikon Balzers AG
Original Assignee
Balzers AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers AG filed Critical Balzers AG
Publication of FR2406673A1 publication Critical patent/FR2406673A1/fr
Application granted granted Critical
Publication of FR2406673B1 publication Critical patent/FR2406673B1/fr
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
    • B01J3/006—Processes utilising sub-atmospheric pressure; Apparatus therefor
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Physical Vapour Deposition (AREA)
  • Laminated Bodies (AREA)

Abstract

L'invention concerne les techniques du vide. Procédé pour créer un vide poussé dans un récipient pour la mise en oeuvre de traitements sous vide, dans lequel un dégazage est assuré par augmentation de la température des parois délimitant l'espace de traitement, avec évacuation par pompage simultanée. Le chauffage des parois 11 est commandé, une fois qu'un vide partiel prédéterminé a été atteint, de manière que ce vide reste entre des valeurs limites inférieure et supérieure présélectionnées, jusqu'à ce que les parois aient atteint une température prédéterminée. Application notamment à la fabrication de couches minces par évaporation sous vide.
FR7829740A 1977-10-20 1978-10-19 Procede pour creer un vide pousse dans un recipient Granted FR2406673A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH1278077A CH634606A5 (de) 1977-10-20 1977-10-20 Verfahren zur erzeugung von hochvakuum zur durchfuehrung von beschichtungsprozessen.

Publications (2)

Publication Number Publication Date
FR2406673A1 true FR2406673A1 (fr) 1979-05-18
FR2406673B1 FR2406673B1 (fr) 1982-10-29

Family

ID=4386322

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7829740A Granted FR2406673A1 (fr) 1977-10-20 1978-10-19 Procede pour creer un vide pousse dans un recipient

Country Status (5)

Country Link
CH (1) CH634606A5 (fr)
DE (1) DE2838212C2 (fr)
FR (1) FR2406673A1 (fr)
GB (1) GB2006344B (fr)
NL (1) NL172214C (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6056431B2 (ja) * 1980-10-09 1985-12-10 三菱電機株式会社 プラズマエツチング装置
DE3512614A1 (de) * 1985-04-06 1986-10-16 Leybold-Heraeus GmbH, 5000 Köln Verfahren zur inbetriebnahme und/oder regenerierung einer kryopumpe und fuer dieses verfahren geeignete kryopumpe
DE3516933A1 (de) * 1985-05-10 1986-11-13 Deutsche Forschungs- und Versuchsanstalt für Luft- und Raumfahrt e.V., 5300 Bonn Verfahren zum aufbringen einer mos(pfeil abwaerts)2(pfeil abwaerts)-beschichtung auf ein substrat

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2354392A2 (fr) * 1976-06-08 1978-01-06 Balzers Patent Beteilig Ag Installation pour le traitement sous vide d'un produit, notamment pour l'evaporation sous vide

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2354392A2 (fr) * 1976-06-08 1978-01-06 Balzers Patent Beteilig Ag Installation pour le traitement sous vide d'un produit, notamment pour l'evaporation sous vide

Also Published As

Publication number Publication date
FR2406673B1 (fr) 1982-10-29
NL172214B (nl) 1983-03-01
NL7800199A (nl) 1979-04-24
GB2006344B (en) 1982-04-07
CH634606A5 (de) 1983-02-15
GB2006344A (en) 1979-05-02
DE2838212A1 (de) 1979-04-26
NL172214C (nl) 1983-08-01
DE2838212C2 (de) 1983-03-17

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Legal Events

Date Code Title Description
ST Notification of lapse