FR2354392A2 - Installation pour le traitement sous vide d'un produit, notamment pour l'evaporation sous vide - Google Patents

Installation pour le traitement sous vide d'un produit, notamment pour l'evaporation sous vide

Info

Publication number
FR2354392A2
FR2354392A2 FR7714338A FR7714338A FR2354392A2 FR 2354392 A2 FR2354392 A2 FR 2354392A2 FR 7714338 A FR7714338 A FR 7714338A FR 7714338 A FR7714338 A FR 7714338A FR 2354392 A2 FR2354392 A2 FR 2354392A2
Authority
FR
France
Prior art keywords
product
treatment
vacuum
installation
sheets
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
FR7714338A
Other languages
English (en)
Inventor
Otto Winkler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers Patent und Beteiligungs AG
Original Assignee
Balzers Patent und Beteiligungs AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers Patent und Beteiligungs AG filed Critical Balzers Patent und Beteiligungs AG
Publication of FR2354392A2 publication Critical patent/FR2354392A2/fr
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
    • B01J3/006—Processes utilising sub-atmospheric pressure; Apparatus therefor

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Physical Vapour Deposition (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)

Abstract

L'invention concerne une installation à vide pour le traitement d'un produit, comportant une enceinte de traitement comprenant un raccord de pompe et des dispositifs pour recevoir le produit et pour effectuer le traitement souhaité, ainsi que des feuilles pouvant être chauffées, servant de parois intermédiaires, qui sont disposées enfin la paroi intérieure de l'enceinte de traitement et le produit à traiter. Pour le chauffage des feuilles, elle comporte un dispositif de chauffage indirect 7 disposé entre ces feuilles et la paroi de la chambre 1. L'invention est utilisable notamment dans une installation d'évaporation sous vide
FR7714338A 1976-06-08 1977-05-11 Installation pour le traitement sous vide d'un produit, notamment pour l'evaporation sous vide Pending FR2354392A2 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH717776A CH621714A5 (fr) 1976-06-08 1976-06-08

Publications (1)

Publication Number Publication Date
FR2354392A2 true FR2354392A2 (fr) 1978-01-06

Family

ID=4321100

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7714338A Pending FR2354392A2 (fr) 1976-06-08 1977-05-11 Installation pour le traitement sous vide d'un produit, notamment pour l'evaporation sous vide

Country Status (6)

Country Link
US (1) US4306515A (fr)
CH (1) CH621714A5 (fr)
DE (1) DE2714371A1 (fr)
FR (1) FR2354392A2 (fr)
GB (1) GB1562350A (fr)
NL (1) NL7608390A (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2406673A1 (fr) * 1977-10-20 1979-05-18 Balzers Hochvakuum Procede pour creer un vide pousse dans un recipient

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4970986A (en) * 1989-08-03 1990-11-20 General Electric Company Apparatus for synthetic diamond deposition including spring-tensioned filaments
JP2998903B2 (ja) * 1990-11-14 2000-01-17 東京エレクトロン株式会社 熱処理装置
US5972183A (en) * 1994-10-31 1999-10-26 Saes Getter S.P.A Getter pump module and system
US6109880A (en) * 1994-10-31 2000-08-29 Saes Pure Gas, Inc. Getter pump module and system including focus shields
US6142742A (en) * 1994-10-31 2000-11-07 Saes Pure Gas, Inc. Getter pump module and system
US5911560A (en) * 1994-10-31 1999-06-15 Saes Pure Gas, Inc. Getter pump module and system
US5685963A (en) * 1994-10-31 1997-11-11 Saes Pure Gas, Inc. In situ getter pump system and method
US20070137653A1 (en) * 2000-03-13 2007-06-21 Wood Thomas J Ventilation interface for sleep apnea therapy
US7518880B1 (en) 2006-02-08 2009-04-14 Bi-Link Shielding arrangement for electronic device
US20100257732A1 (en) * 2009-04-14 2010-10-14 Ziberna Frank J Shielding Arrangement for Electronic Device

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR878682A (fr) * 1941-01-28 1943-01-27 Licentia Gmbh Dispositif pour produire des couches métalliques par vaporisation thermique
US3095494A (en) * 1960-02-25 1963-06-25 New York Air Brake Co Ultra high vacuum device
FR1427137A (fr) * 1964-12-17 1966-02-04 Sedimmec Dispositif de dégazage pour installation de vide ou d'ultra-vide
FR1555010A (fr) * 1967-02-23 1969-01-24
FR2078067A5 (fr) * 1970-02-13 1971-11-05 Elektrophysikalische

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2239452A (en) * 1937-03-13 1941-04-22 Robley C Williams Method and apparatus for producing semitransparent coatings
US2398382A (en) * 1942-11-17 1946-04-16 Dean A Lyon Method for coating optical elements
US2727167A (en) * 1952-04-18 1955-12-13 Westinghouse Electric Corp Ion pump
US3324825A (en) * 1964-11-25 1967-06-13 Mhd Res Inc Glow discharge reactor
US3678889A (en) * 1970-02-06 1972-07-25 Tokyo Shibaura Electric Co Reflector assembly for reflecting the vapors of high temperature volatile materials
US3862397A (en) * 1972-03-24 1975-01-21 Applied Materials Tech Cool wall radiantly heated reactor

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR878682A (fr) * 1941-01-28 1943-01-27 Licentia Gmbh Dispositif pour produire des couches métalliques par vaporisation thermique
US3095494A (en) * 1960-02-25 1963-06-25 New York Air Brake Co Ultra high vacuum device
FR1427137A (fr) * 1964-12-17 1966-02-04 Sedimmec Dispositif de dégazage pour installation de vide ou d'ultra-vide
FR1555010A (fr) * 1967-02-23 1969-01-24
FR2078067A5 (fr) * 1970-02-13 1971-11-05 Elektrophysikalische

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2406673A1 (fr) * 1977-10-20 1979-05-18 Balzers Hochvakuum Procede pour creer un vide pousse dans un recipient

Also Published As

Publication number Publication date
CH621714A5 (fr) 1981-02-27
US4306515A (en) 1981-12-22
GB1562350A (en) 1980-03-12
DE2714371A1 (de) 1977-12-22
NL7608390A (nl) 1977-12-12

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Legal Events

Date Code Title Description
TP Transmission of property