GB2006344B - Method for the production of a high vacuum in a container - Google Patents
Method for the production of a high vacuum in a containerInfo
- Publication number
- GB2006344B GB2006344B GB7836912A GB7836912A GB2006344B GB 2006344 B GB2006344 B GB 2006344B GB 7836912 A GB7836912 A GB 7836912A GB 7836912 A GB7836912 A GB 7836912A GB 2006344 B GB2006344 B GB 2006344B
- Authority
- GB
- United Kingdom
- Prior art keywords
- container
- production
- high vacuum
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
- B01J3/006—Processes utilising sub-atmospheric pressure; Apparatus therefor
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Physical Vapour Deposition (AREA)
- Laminated Bodies (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CH1278077A CH634606A5 (en) | 1977-10-20 | 1977-10-20 | METHOD FOR GENERATING HIGH VACUUM FOR CARRYING OUT COATING PROCESSES. |
Publications (2)
Publication Number | Publication Date |
---|---|
GB2006344A GB2006344A (en) | 1979-05-02 |
GB2006344B true GB2006344B (en) | 1982-04-07 |
Family
ID=4386322
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB7836912A Expired GB2006344B (en) | 1977-10-20 | 1978-09-14 | Method for the production of a high vacuum in a container |
Country Status (5)
Country | Link |
---|---|
CH (1) | CH634606A5 (en) |
DE (1) | DE2838212C2 (en) |
FR (1) | FR2406673A1 (en) |
GB (1) | GB2006344B (en) |
NL (1) | NL172214C (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6056431B2 (en) * | 1980-10-09 | 1985-12-10 | 三菱電機株式会社 | plasma etching equipment |
DE3512614A1 (en) * | 1985-04-06 | 1986-10-16 | Leybold-Heraeus GmbH, 5000 Köln | METHOD FOR COMMISSIONING AND / OR REGENERATING A CRYOPUM PUMP AND CYRUM PUMP SUITABLE FOR THIS METHOD |
DE3516933A1 (en) * | 1985-05-10 | 1986-11-13 | Deutsche Forschungs- und Versuchsanstalt für Luft- und Raumfahrt e.V., 5300 Bonn | METHOD FOR APPLYING A MOS (DOWN ARROW) 2 (DOWN ARROW) COATING TO A SUBSTRATE |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CH621714A5 (en) * | 1976-06-08 | 1981-02-27 | Balzers Hochvakuum |
-
1977
- 1977-10-20 CH CH1278077A patent/CH634606A5/en not_active IP Right Cessation
-
1978
- 1978-01-06 NL NL7800199A patent/NL172214C/en not_active IP Right Cessation
- 1978-09-01 DE DE19782838212 patent/DE2838212C2/en not_active Expired
- 1978-09-14 GB GB7836912A patent/GB2006344B/en not_active Expired
- 1978-10-19 FR FR7829740A patent/FR2406673A1/en active Granted
Also Published As
Publication number | Publication date |
---|---|
CH634606A5 (en) | 1983-02-15 |
NL7800199A (en) | 1979-04-24 |
DE2838212C2 (en) | 1983-03-17 |
NL172214B (en) | 1983-03-01 |
FR2406673A1 (en) | 1979-05-18 |
NL172214C (en) | 1983-08-01 |
DE2838212A1 (en) | 1979-04-26 |
FR2406673B1 (en) | 1982-10-29 |
GB2006344A (en) | 1979-05-02 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PCNP | Patent ceased through non-payment of renewal fee |