NL7800199A - METHOD FOR GENERATING A HIGH VACUUM IN A HOLDER. - Google Patents

METHOD FOR GENERATING A HIGH VACUUM IN A HOLDER.

Info

Publication number
NL7800199A
NL7800199A NL7800199A NL7800199A NL7800199A NL 7800199 A NL7800199 A NL 7800199A NL 7800199 A NL7800199 A NL 7800199A NL 7800199 A NL7800199 A NL 7800199A NL 7800199 A NL7800199 A NL 7800199A
Authority
NL
Netherlands
Prior art keywords
holder
generating
high vacuum
vacuum
Prior art date
Application number
NL7800199A
Other languages
Dutch (nl)
Other versions
NL172214B (en
NL172214C (en
Original Assignee
Balzers Hochvakuum
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers Hochvakuum filed Critical Balzers Hochvakuum
Publication of NL7800199A publication Critical patent/NL7800199A/en
Publication of NL172214B publication Critical patent/NL172214B/en
Application granted granted Critical
Publication of NL172214C publication Critical patent/NL172214C/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
    • B01J3/006—Processes utilising sub-atmospheric pressure; Apparatus therefor
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Physical Vapour Deposition (AREA)
  • Laminated Bodies (AREA)
NL7800199A 1977-10-20 1978-01-06 METHOD FOR GENERATING A HIGH VACUUM IN A RECIPIENT. NL172214C (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH1278077A CH634606A5 (en) 1977-10-20 1977-10-20 METHOD FOR GENERATING HIGH VACUUM FOR CARRYING OUT COATING PROCESSES.

Publications (3)

Publication Number Publication Date
NL7800199A true NL7800199A (en) 1979-04-24
NL172214B NL172214B (en) 1983-03-01
NL172214C NL172214C (en) 1983-08-01

Family

ID=4386322

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7800199A NL172214C (en) 1977-10-20 1978-01-06 METHOD FOR GENERATING A HIGH VACUUM IN A RECIPIENT.

Country Status (5)

Country Link
CH (1) CH634606A5 (en)
DE (1) DE2838212C2 (en)
FR (1) FR2406673A1 (en)
GB (1) GB2006344B (en)
NL (1) NL172214C (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6056431B2 (en) * 1980-10-09 1985-12-10 三菱電機株式会社 plasma etching equipment
DE3512614A1 (en) * 1985-04-06 1986-10-16 Leybold-Heraeus GmbH, 5000 Köln METHOD FOR COMMISSIONING AND / OR REGENERATING A CRYOPUM PUMP AND CYRUM PUMP SUITABLE FOR THIS METHOD
DE3516933A1 (en) * 1985-05-10 1986-11-13 Deutsche Forschungs- und Versuchsanstalt für Luft- und Raumfahrt e.V., 5300 Bonn METHOD FOR APPLYING A MOS (DOWN ARROW) 2 (DOWN ARROW) COATING TO A SUBSTRATE

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH621714A5 (en) * 1976-06-08 1981-02-27 Balzers Hochvakuum

Also Published As

Publication number Publication date
GB2006344A (en) 1979-05-02
FR2406673A1 (en) 1979-05-18
FR2406673B1 (en) 1982-10-29
GB2006344B (en) 1982-04-07
CH634606A5 (en) 1983-02-15
DE2838212A1 (en) 1979-04-26
NL172214B (en) 1983-03-01
NL172214C (en) 1983-08-01
DE2838212C2 (en) 1983-03-17

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Legal Events

Date Code Title Description
A1C A request for examination has been filed
TNT Modifications of names of proprietors of patents or applicants of examined patent applications

Owner name: BALZERS AKTIENGESELLSCHAFT

V1 Lapsed because of non-payment of the annual fee