FR2375336A1 - Procede pour la realisation par voie chimique de couches de metaux - Google Patents
Procede pour la realisation par voie chimique de couches de metauxInfo
- Publication number
- FR2375336A1 FR2375336A1 FR7739171A FR7739171A FR2375336A1 FR 2375336 A1 FR2375336 A1 FR 2375336A1 FR 7739171 A FR7739171 A FR 7739171A FR 7739171 A FR7739171 A FR 7739171A FR 2375336 A1 FR2375336 A1 FR 2375336A1
- Authority
- FR
- France
- Prior art keywords
- metal layers
- realization
- chemical
- chemical realization
- aluminum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/31—Coating with metals
- C23C18/32—Coating with nickel, cobalt or mixtures thereof with phosphorus or boron
- C23C18/34—Coating with nickel, cobalt or mixtures thereof with phosphorus or boron using reducing agents
- C23C18/36—Coating with nickel, cobalt or mixtures thereof with phosphorus or boron using reducing agents using hypophosphites
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1603—Process or apparatus coating on selected surface areas
- C23C18/1605—Process or apparatus coating on selected surface areas by masking
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/18—Pretreatment of the material to be coated
- C23C18/1803—Pretreatment of the material to be coated of metallic material surfaces or of a non-specific material surfaces
- C23C18/1824—Pretreatment of the material to be coated of metallic material surfaces or of a non-specific material surfaces by chemical pretreatment
- C23C18/1837—Multistep pretreatment
- C23C18/1844—Multistep pretreatment with use of organic or inorganic compounds other than metals, first
Landscapes
- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Chemically Coating (AREA)
- Wire Bonding (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
Procédé amélioré pour le dépôt sélectif d'une couche d'un métal par voie chimique sur une surface en aluminium ou en un alliage à l'aluminium. Ce procédé convient en particulier pour la réalisation de contacts sur des structures pour circuits intégrés.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US05/754,124 US4122215A (en) | 1976-12-27 | 1976-12-27 | Electroless deposition of nickel on a masked aluminum surface |
Publications (1)
Publication Number | Publication Date |
---|---|
FR2375336A1 true FR2375336A1 (fr) | 1978-07-21 |
Family
ID=25033569
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7739171A Withdrawn FR2375336A1 (fr) | 1976-12-27 | 1977-12-26 | Procede pour la realisation par voie chimique de couches de metaux |
Country Status (9)
Country | Link |
---|---|
US (3) | US4122215A (fr) |
JP (1) | JPS53112230A (fr) |
BE (1) | BE862195A (fr) |
DE (1) | DE2756801A1 (fr) |
ES (1) | ES465472A1 (fr) |
FR (1) | FR2375336A1 (fr) |
IT (1) | IT1089143B (fr) |
NL (1) | NL7714116A (fr) |
SE (1) | SE7714428L (fr) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19718971A1 (de) * | 1997-05-05 | 1998-11-12 | Bosch Gmbh Robert | Stromlose, selektive Metallisierung strukturierter Metalloberflächen |
Families Citing this family (61)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4232060A (en) * | 1979-01-22 | 1980-11-04 | Richardson Chemical Company | Method of preparing substrate surface for electroless plating and products produced thereby |
US4632857A (en) * | 1974-05-24 | 1986-12-30 | Richardson Chemical Company | Electrolessly plated product having a polymetallic catalytic film underlayer |
US4182781A (en) * | 1977-09-21 | 1980-01-08 | Texas Instruments Incorporated | Low cost method for forming elevated metal bumps on integrated circuit bodies employing an aluminum/palladium metallization base for electroless plating |
FR2421452A1 (fr) * | 1978-03-31 | 1979-10-26 | Pechiney Aluminium | Nouvelle methode de realisation de contacts electriques sur pieces en aluminium |
US4235648A (en) * | 1979-04-05 | 1980-11-25 | Motorola, Inc. | Method for immersion plating very thin films of aluminum |
DE3029785A1 (de) * | 1980-08-04 | 1982-03-25 | Schering Ag, 1000 Berlin Und 4619 Bergkamen | Saures goldbad zur stromlosen abscheidung von gold |
DE3104107C2 (de) * | 1981-02-06 | 1984-08-02 | SEMIKRON Gesellschaft für Gleichrichterbau u. Elektronik mbH, 8500 Nürnberg | Verfahren zum Herstellen von lötfähigen Überzügen |
US4352835A (en) * | 1981-07-01 | 1982-10-05 | Western Electric Co., Inc. | Masking portions of a substrate |
US4400415A (en) * | 1981-08-13 | 1983-08-23 | Lea Ronal, Inc. | Process for nickel plating aluminum and aluminum alloys |
JPS58187260A (ja) * | 1982-04-26 | 1983-11-01 | Mitsubishi Electric Corp | アルミニウム金属への半田被着法 |
US4552787A (en) * | 1984-02-29 | 1985-11-12 | International Business Machines Corporation | Deposition of a metal from an electroless plating composition |
US5202151A (en) * | 1985-10-14 | 1993-04-13 | Hitachi, Ltd. | Electroless gold plating solution, method of plating with gold by using the same, and electronic device plated with gold by using the same |
US4692349A (en) * | 1986-03-03 | 1987-09-08 | American Telephone And Telegraph Company, At&T Bell Laboratories | Selective electroless plating of vias in VLSI devices |
US4963512A (en) * | 1986-03-25 | 1990-10-16 | Hitachi, Ltd. | Method for forming conductor layers and method for fabricating multilayer substrates |
US5169680A (en) * | 1987-05-07 | 1992-12-08 | Intel Corporation | Electroless deposition for IC fabrication |
JPS6441194A (en) * | 1987-08-07 | 1989-02-13 | Komatsu Mfg Co Ltd | Manufacture of thin film electroluminescent element |
US4997686A (en) * | 1987-12-23 | 1991-03-05 | Surface Technology, Inc. | Composite electroless plating-solutions, processes, and articles thereof |
US4946563A (en) * | 1988-12-12 | 1990-08-07 | General Electric Company | Process for manufacturing a selective plated board for surface mount components |
US4954370A (en) * | 1988-12-21 | 1990-09-04 | International Business Machines Corporation | Electroless plating of nickel on anodized aluminum |
US5079343A (en) * | 1990-01-05 | 1992-01-07 | Dana-Farber Cancer Institute, Inc. | Intracellular antigen found in subpopulation of cd8+ t lymphocytes and monoclonal antibody reactive with same |
US5340935A (en) * | 1990-01-05 | 1994-08-23 | Dana-Farber Cancer Institute, Inc. | DNAS encoding proteins active in lymphocyte-medicated cytotoxicity |
NL9002163A (nl) * | 1990-10-05 | 1992-05-06 | Philips Nv | Werkwijze voor de vervaardiging van een halfgeleiderinrichting. |
US5260234A (en) * | 1990-12-20 | 1993-11-09 | Vlsi Technology, Inc. | Method for bonding a lead to a die pad using an electroless plating solution |
FR2676594B1 (fr) * | 1991-05-17 | 1997-04-18 | Sgs Thomson Microelectronics | Procede de prise de contact sur un composant semiconducteur. |
US5310965A (en) * | 1991-08-28 | 1994-05-10 | Nec Corporation | Multi-level wiring structure having an organic interlayer insulating film |
US5306389A (en) * | 1991-09-04 | 1994-04-26 | Osram Sylvania Inc. | Method of protecting aluminum nitride circuit substrates during electroless plating using a surface oxidation treatment |
US5306526A (en) * | 1992-04-02 | 1994-04-26 | Ppg Industries, Inc. | Method of treating nonferrous metal surfaces by means of an acid activating agent and an organophosphate or organophosphonate and substrates treated by such method |
JPH06241161A (ja) * | 1993-02-15 | 1994-08-30 | Sanden Corp | 圧縮機 |
US5380559A (en) * | 1993-04-30 | 1995-01-10 | At&T Corp. | Electroless metallization of optical fiber for hermetic packaging |
WO1995002900A1 (fr) * | 1993-07-15 | 1995-01-26 | Astarix, Inc. | Alliage d'aluminium-palladium destine a l'amorçage de plaquages non electrolytiques |
US5437887A (en) * | 1993-12-22 | 1995-08-01 | Enthone-Omi, Inc. | Method of preparing aluminum memory disks |
DE4431847C5 (de) | 1994-09-07 | 2011-01-27 | Atotech Deutschland Gmbh | Substrat mit bondfähiger Beschichtung |
US5583073A (en) * | 1995-01-05 | 1996-12-10 | National Science Council | Method for producing electroless barrier layer and solder bump on chip |
US6204074B1 (en) * | 1995-01-09 | 2001-03-20 | International Business Machines Corporation | Chip design process for wire bond and flip-chip package |
US5795619A (en) * | 1995-12-13 | 1998-08-18 | National Science Council | Solder bump fabricated method incorporate with electroless deposit and dip solder |
US6261637B1 (en) * | 1995-12-15 | 2001-07-17 | Enthone-Omi, Inc. | Use of palladium immersion deposition to selectively initiate electroless plating on Ti and W alloys for wafer fabrication |
US5916696A (en) * | 1996-06-06 | 1999-06-29 | Lucent Technologies Inc. | Conformable nickel coating and process for coating an article with a conformable nickel coating |
US5828031A (en) * | 1996-06-27 | 1998-10-27 | International Business Machines Corporation | Head transducer to suspension lead termination by solder ball place/reflow |
US6046882A (en) * | 1996-07-11 | 2000-04-04 | International Business Machines Corporation | Solder balltape and method for making electrical connection between a head transducer and an electrical lead |
US5944879A (en) * | 1997-02-19 | 1999-08-31 | Elf Atochem North America, Inc. | Nickel hypophosphite solutions containing increased nickel concentration |
US5801100A (en) * | 1997-03-07 | 1998-09-01 | Industrial Technology Research Institute | Electroless copper plating method for forming integrated circuit structures |
US6159663A (en) * | 1998-06-30 | 2000-12-12 | Intersil Corporation | Method of creating a solderable metal layer on glass or ceramic |
US6436816B1 (en) * | 1998-07-31 | 2002-08-20 | Industrial Technology Research Institute | Method of electroless plating copper on nitride barrier |
US6130149A (en) * | 1999-08-16 | 2000-10-10 | Taiwan Semiconductor Manufacturing Company | Approach for aluminum bump process |
JP4613271B2 (ja) * | 2000-02-29 | 2011-01-12 | シャープ株式会社 | 金属配線およびその製造方法およびその金属配線を用いた薄膜トランジスタおよび表示装置 |
JP3567142B2 (ja) | 2000-05-25 | 2004-09-22 | シャープ株式会社 | 金属配線およびそれを用いたアクティブマトリクス基板 |
GB2374607A (en) * | 2001-03-20 | 2002-10-23 | Metal Ion Technology Ltd | Plating metal matrix composites |
WO2002083980A1 (fr) * | 2001-04-12 | 2002-10-24 | National University Of Ireland, Cork | Depot autocatalytique |
US7002779B2 (en) * | 2002-05-02 | 2006-02-21 | Seagate Technology Llc | Thermal pole-tip recession/slide shape variation reduction |
US20040149689A1 (en) * | 2002-12-03 | 2004-08-05 | Xiao-Shan Ning | Method for producing metal/ceramic bonding substrate |
DE60232085D1 (de) * | 2002-12-04 | 2009-06-04 | Dowa Metaltech Co Ltd | Verfahren zur Herstellung eines Metall/Keramik-Verbindungssubstrates |
JP2005036285A (ja) * | 2003-07-15 | 2005-02-10 | Tokyo Electron Ltd | 無電解メッキ用前処理液及び無電解メッキ方法 |
KR100559040B1 (ko) * | 2004-03-22 | 2006-03-10 | 주식회사 하이닉스반도체 | 반도체 소자의 제조 방법 |
US7268074B2 (en) * | 2004-06-14 | 2007-09-11 | Enthone, Inc. | Capping of metal interconnects in integrated circuit electronic devices |
US7279407B2 (en) * | 2004-09-02 | 2007-10-09 | Micron Technology, Inc. | Selective nickel plating of aluminum, copper, and tungsten structures |
JP2006083442A (ja) * | 2004-09-17 | 2006-03-30 | Seiko Epson Corp | 成膜方法、電子デバイス、及び電子機器 |
US8067823B2 (en) * | 2004-11-15 | 2011-11-29 | Stats Chippac, Ltd. | Chip scale package having flip chip interconnect on die paddle |
US7566592B2 (en) * | 2006-03-07 | 2009-07-28 | Schlumberger Technology Corporation | Method and process of manufacturing robust high temperature solder joints |
EP2177646B1 (fr) * | 2008-10-17 | 2011-03-23 | ATOTECH Deutschland GmbH | multicouche de Ni-P/Pd à contrainte réduite pour revêtement de surfaces de connections electriques sur wafers |
US20100224994A1 (en) * | 2009-03-05 | 2010-09-09 | Analog Devices, Inc. | Low Temperature Metal to Silicon Diffusion and Silicide Wafer Bonding |
EP2628824B1 (fr) * | 2012-02-16 | 2014-09-17 | Atotech Deutschland GmbH | Procédé pour le dépôt d'alliage de nickel-phosphore anélectrolytique sur des substrats flexibles |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3123484A (en) * | 1964-03-03 | Ihzijm | ||
US2976181A (en) * | 1957-12-17 | 1961-03-21 | Hughes Aircraft Co | Method of gold plating by chemical reduction |
US3468676A (en) * | 1963-09-09 | 1969-09-23 | Photocircuits Corp | Electroless gold plating |
US3329522A (en) * | 1964-02-21 | 1967-07-04 | Enthone | Pyrophosphate copper strike zincating solution |
US3489603A (en) * | 1966-07-13 | 1970-01-13 | Motorola Inc | Surface pretreatment process |
US3551122A (en) * | 1967-12-18 | 1970-12-29 | Shipley Co | Surface finished aluminum alloys |
US3579375A (en) * | 1968-10-18 | 1971-05-18 | Rca Corp | Method of making ohmic contact to semiconductor devices |
US3642549A (en) * | 1969-01-15 | 1972-02-15 | Ibm | Etching composition indication |
US3666529A (en) * | 1969-04-02 | 1972-05-30 | Atomic Energy Commission | Method of conditioning aluminous surfaces for the reception of electroless nickel plating |
US3767582A (en) * | 1970-02-02 | 1973-10-23 | Texas Instruments Inc | Etching composition preparatory to nickel plating |
US3669734A (en) * | 1970-08-05 | 1972-06-13 | Rca Corp | Method of making electrical connections to a glass-encapsulated semiconductor device |
US3726771A (en) * | 1970-11-23 | 1973-04-10 | Stauffer Chemical Co | Process for chemical nickel plating of aluminum and its alloys |
US3672964A (en) * | 1971-03-17 | 1972-06-27 | Du Pont | Plating on aluminum,magnesium or zinc |
US4040897A (en) * | 1975-05-05 | 1977-08-09 | Signetics Corporation | Etchants for glass films on metal substrates |
US4082908A (en) * | 1976-05-05 | 1978-04-04 | Burr-Brown Research Corporation | Gold plating process and product produced thereby |
-
1976
- 1976-12-27 US US05/754,124 patent/US4122215A/en not_active Expired - Lifetime
-
1977
- 1977-12-19 SE SE7714428A patent/SE7714428L/xx unknown
- 1977-12-20 NL NL7714116A patent/NL7714116A/xx not_active Application Discontinuation
- 1977-12-20 DE DE19772756801 patent/DE2756801A1/de active Pending
- 1977-12-22 BE BE183751A patent/BE862195A/fr unknown
- 1977-12-23 IT IT31244/77A patent/IT1089143B/it active
- 1977-12-26 FR FR7739171A patent/FR2375336A1/fr not_active Withdrawn
- 1977-12-27 JP JP15663277A patent/JPS53112230A/ja active Pending
- 1977-12-27 ES ES465472A patent/ES465472A1/es not_active Expired
-
1978
- 1978-04-14 US US05/896,345 patent/US4154877A/en not_active Expired - Lifetime
- 1978-04-14 US US05/896,346 patent/US4125648A/en not_active Expired - Lifetime
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19718971A1 (de) * | 1997-05-05 | 1998-11-12 | Bosch Gmbh Robert | Stromlose, selektive Metallisierung strukturierter Metalloberflächen |
Also Published As
Publication number | Publication date |
---|---|
DE2756801A1 (de) | 1978-06-29 |
SE7714428L (sv) | 1978-06-28 |
US4154877A (en) | 1979-05-15 |
IT1089143B (it) | 1985-06-18 |
BE862195A (fr) | 1978-04-14 |
US4125648A (en) | 1978-11-14 |
NL7714116A (nl) | 1978-06-29 |
US4122215A (en) | 1978-10-24 |
ES465472A1 (es) | 1978-09-16 |
JPS53112230A (en) | 1978-09-30 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |