FR2350639A1 - Regulation de la pression gazeuse dans les installations de decharges luminescentes de forte intensite - Google Patents

Regulation de la pression gazeuse dans les installations de decharges luminescentes de forte intensite

Info

Publication number
FR2350639A1
FR2350639A1 FR7713847A FR7713847A FR2350639A1 FR 2350639 A1 FR2350639 A1 FR 2350639A1 FR 7713847 A FR7713847 A FR 7713847A FR 7713847 A FR7713847 A FR 7713847A FR 2350639 A1 FR2350639 A1 FR 2350639A1
Authority
FR
France
Prior art keywords
gas
mass spectrometer
gases
nitriding
adjust
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
FR7713847A
Other languages
English (en)
Inventor
Werner Oppel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
IONIT ANSTALT BERNHARD BERGHAUS
Original Assignee
IONIT ANSTALT BERNHARD BERGHAUS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by IONIT ANSTALT BERNHARD BERGHAUS filed Critical IONIT ANSTALT BERNHARD BERGHAUS
Publication of FR2350639A1 publication Critical patent/FR2350639A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D16/00—Control of fluid pressure
    • G05D16/20—Control of fluid pressure characterised by the use of electric means
    • G05D16/2006—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means
    • G05D16/2013—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using throttling means as controlling means
    • G05D16/2026—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using throttling means as controlling means with a plurality of throttling means
    • G05D16/2046—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using throttling means as controlling means with a plurality of throttling means the plurality of throttling means being arranged for the control of a single pressure from a plurality of converging pressures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/24—Vacuum systems, e.g. maintaining desired pressures

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
  • Discharge Heating (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
FR7713847A 1976-05-08 1977-05-06 Regulation de la pression gazeuse dans les installations de decharges luminescentes de forte intensite Withdrawn FR2350639A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19762620391 DE2620391A1 (de) 1976-05-08 1976-05-08 Regeln des gasdrucks bei stromstarken glimmentladungen

Publications (1)

Publication Number Publication Date
FR2350639A1 true FR2350639A1 (fr) 1977-12-02

Family

ID=5977397

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7713847A Withdrawn FR2350639A1 (fr) 1976-05-08 1977-05-06 Regulation de la pression gazeuse dans les installations de decharges luminescentes de forte intensite

Country Status (4)

Country Link
JP (1) JPS5340645A (fr)
BR (1) BR7702960A (fr)
DE (1) DE2620391A1 (fr)
FR (1) FR2350639A1 (fr)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0005641A1 (fr) * 1978-05-24 1979-11-28 Gould Inc. Procédé et dispositif pour contrôler et régler le processus de dépôt par pulvérisation cathodique
EP0122006A2 (fr) * 1983-03-04 1984-10-17 UTI Instrument Co. Système d'alimentation en gaz sous pression contrôlée
FR2595801A1 (fr) * 1986-03-12 1987-09-18 Innovatique Sa Procede et dispositif pour l'elaboration d'un melange gazeux apte a assurer une atmosphere de traitement dans un four de traitement thermochimique par bombardement ionique
EP0326843A1 (fr) * 1988-01-29 1989-08-09 Multi-Arc Oberflächentechnik GmbH Chambre de revêtement avec composition contrôlée des gaz

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58154458U (ja) * 1982-04-12 1983-10-15 株式会社日立製作所 空燃比制御装置
JPS59158765U (ja) * 1983-04-11 1984-10-24 イ−グル工業株式会社 非常用シ−ル
JPH0257675A (ja) * 1988-08-23 1990-02-27 Daido Steel Co Ltd プラズマ浸炭窒化炉におけるガスの送入方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5135676A (ja) * 1974-09-20 1976-03-26 Fuji Electric Co Ltd Ionchitsukasochinoseigyosochi

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0005641A1 (fr) * 1978-05-24 1979-11-28 Gould Inc. Procédé et dispositif pour contrôler et régler le processus de dépôt par pulvérisation cathodique
EP0122006A2 (fr) * 1983-03-04 1984-10-17 UTI Instrument Co. Système d'alimentation en gaz sous pression contrôlée
EP0122006A3 (en) * 1983-03-04 1987-01-21 Uti Instruments Company Electron impact ion source for trace analysis
FR2595801A1 (fr) * 1986-03-12 1987-09-18 Innovatique Sa Procede et dispositif pour l'elaboration d'un melange gazeux apte a assurer une atmosphere de traitement dans un four de traitement thermochimique par bombardement ionique
EP0326843A1 (fr) * 1988-01-29 1989-08-09 Multi-Arc Oberflächentechnik GmbH Chambre de revêtement avec composition contrôlée des gaz

Also Published As

Publication number Publication date
BR7702960A (pt) 1978-04-04
JPS5340645A (en) 1978-04-13
DE2620391A1 (de) 1977-11-10
JPS5622949B2 (fr) 1981-05-28

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Legal Events

Date Code Title Description
ST Notification of lapse