JPS5340645A - Method of regulating gas pressure in glow discgarge treatment and apparatus therefor - Google Patents

Method of regulating gas pressure in glow discgarge treatment and apparatus therefor

Info

Publication number
JPS5340645A
JPS5340645A JP5297577A JP5297577A JPS5340645A JP S5340645 A JPS5340645 A JP S5340645A JP 5297577 A JP5297577 A JP 5297577A JP 5297577 A JP5297577 A JP 5297577A JP S5340645 A JPS5340645 A JP S5340645A
Authority
JP
Japan
Prior art keywords
discgarge
glow
treatment
gas pressure
apparatus therefor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5297577A
Other languages
English (en)
Other versions
JPS5622949B2 (ja
Inventor
Ooperu Buerunaa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NIPPON IONON KK
Original Assignee
NIPPON IONON KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NIPPON IONON KK filed Critical NIPPON IONON KK
Publication of JPS5340645A publication Critical patent/JPS5340645A/ja
Publication of JPS5622949B2 publication Critical patent/JPS5622949B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D16/00—Control of fluid pressure
    • G05D16/20—Control of fluid pressure characterised by the use of electric means
    • G05D16/2006—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means
    • G05D16/2013—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using throttling means as controlling means
    • G05D16/2026—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using throttling means as controlling means with a plurality of throttling means
    • G05D16/2046—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using throttling means as controlling means with a plurality of throttling means the plurality of throttling means being arranged for the control of a single pressure from a plurality of converging pressures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/24—Vacuum systems, e.g. maintaining desired pressures

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
  • Discharge Heating (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
JP5297577A 1976-05-08 1977-05-09 Method of regulating gas pressure in glow discgarge treatment and apparatus therefor Granted JPS5340645A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19762620391 DE2620391A1 (de) 1976-05-08 1976-05-08 Regeln des gasdrucks bei stromstarken glimmentladungen

Publications (2)

Publication Number Publication Date
JPS5340645A true JPS5340645A (en) 1978-04-13
JPS5622949B2 JPS5622949B2 (ja) 1981-05-28

Family

ID=5977397

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5297577A Granted JPS5340645A (en) 1976-05-08 1977-05-09 Method of regulating gas pressure in glow discgarge treatment and apparatus therefor

Country Status (4)

Country Link
JP (1) JPS5340645A (ja)
BR (1) BR7702960A (ja)
DE (1) DE2620391A1 (ja)
FR (1) FR2350639A1 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59158765U (ja) * 1983-04-11 1984-10-24 イ−グル工業株式会社 非常用シ−ル
JPH0257675A (ja) * 1988-08-23 1990-02-27 Daido Steel Co Ltd プラズマ浸炭窒化炉におけるガスの送入方法

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4172020A (en) * 1978-05-24 1979-10-23 Gould Inc. Method and apparatus for monitoring and controlling sputter deposition processes
JPS58154458U (ja) * 1982-04-12 1983-10-15 株式会社日立製作所 空燃比制御装置
US4579144A (en) * 1983-03-04 1986-04-01 Uti Instrument Company Electron impact ion source for trace analysis
FR2595801B1 (fr) * 1986-03-12 1988-06-10 Innovatique Sa Procede et dispositif pour l'elaboration d'un melange gazeux apte a assurer une atmosphere de traitement dans un four de traitement thermochimique par bombardement ionique
DE8801079U1 (de) * 1988-01-29 1989-06-01 INTERATOM GmbH, 5060 Bergisch Gladbach Beschichtungskammer mit Einrichtung zur Regelung der Zusammensetzung einer Gasatmosphäre

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5135676A (ja) * 1974-09-20 1976-03-26 Fuji Electric Co Ltd Ionchitsukasochinoseigyosochi

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5135676A (ja) * 1974-09-20 1976-03-26 Fuji Electric Co Ltd Ionchitsukasochinoseigyosochi

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59158765U (ja) * 1983-04-11 1984-10-24 イ−グル工業株式会社 非常用シ−ル
JPS6326602Y2 (ja) * 1983-04-11 1988-07-19
JPH0257675A (ja) * 1988-08-23 1990-02-27 Daido Steel Co Ltd プラズマ浸炭窒化炉におけるガスの送入方法

Also Published As

Publication number Publication date
FR2350639A1 (fr) 1977-12-02
BR7702960A (pt) 1978-04-04
DE2620391A1 (de) 1977-11-10
JPS5622949B2 (ja) 1981-05-28

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