JPS5622949B2 - - Google Patents
Info
- Publication number
- JPS5622949B2 JPS5622949B2 JP5297577A JP5297577A JPS5622949B2 JP S5622949 B2 JPS5622949 B2 JP S5622949B2 JP 5297577 A JP5297577 A JP 5297577A JP 5297577 A JP5297577 A JP 5297577A JP S5622949 B2 JPS5622949 B2 JP S5622949B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D16/00—Control of fluid pressure
- G05D16/20—Control of fluid pressure characterised by the use of electric means
- G05D16/2006—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means
- G05D16/2013—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using throttling means as controlling means
- G05D16/2026—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using throttling means as controlling means with a plurality of throttling means
- G05D16/2046—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using throttling means as controlling means with a plurality of throttling means the plurality of throttling means being arranged for the control of a single pressure from a plurality of converging pressures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/24—Vacuum systems, e.g. maintaining desired pressures
Landscapes
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Automation & Control Theory (AREA)
- Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
- Discharge Heating (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19762620391 DE2620391A1 (de) | 1976-05-08 | 1976-05-08 | Regeln des gasdrucks bei stromstarken glimmentladungen |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5340645A JPS5340645A (en) | 1978-04-13 |
JPS5622949B2 true JPS5622949B2 (fr) | 1981-05-28 |
Family
ID=5977397
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5297577A Granted JPS5340645A (en) | 1976-05-08 | 1977-05-09 | Method of regulating gas pressure in glow discgarge treatment and apparatus therefor |
Country Status (4)
Country | Link |
---|---|
JP (1) | JPS5340645A (fr) |
BR (1) | BR7702960A (fr) |
DE (1) | DE2620391A1 (fr) |
FR (1) | FR2350639A1 (fr) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58154458U (ja) * | 1982-04-12 | 1983-10-15 | 株式会社日立製作所 | 空燃比制御装置 |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4172020A (en) * | 1978-05-24 | 1979-10-23 | Gould Inc. | Method and apparatus for monitoring and controlling sputter deposition processes |
US4579144A (en) * | 1983-03-04 | 1986-04-01 | Uti Instrument Company | Electron impact ion source for trace analysis |
JPS59158765U (ja) * | 1983-04-11 | 1984-10-24 | イ−グル工業株式会社 | 非常用シ−ル |
FR2595801B1 (fr) * | 1986-03-12 | 1988-06-10 | Innovatique Sa | Procede et dispositif pour l'elaboration d'un melange gazeux apte a assurer une atmosphere de traitement dans un four de traitement thermochimique par bombardement ionique |
DE8801079U1 (de) * | 1988-01-29 | 1989-06-01 | INTERATOM GmbH, 5060 Bergisch Gladbach | Beschichtungskammer mit Einrichtung zur Regelung der Zusammensetzung einer Gasatmosphäre |
JPH0257675A (ja) * | 1988-08-23 | 1990-02-27 | Daido Steel Co Ltd | プラズマ浸炭窒化炉におけるガスの送入方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5135676A (ja) * | 1974-09-20 | 1976-03-26 | Fuji Electric Co Ltd | Ionchitsukasochinoseigyosochi |
-
1976
- 1976-05-08 DE DE19762620391 patent/DE2620391A1/de active Pending
-
1977
- 1977-05-06 FR FR7713847A patent/FR2350639A1/fr not_active Withdrawn
- 1977-05-06 BR BR7702960A patent/BR7702960A/pt unknown
- 1977-05-09 JP JP5297577A patent/JPS5340645A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5135676A (ja) * | 1974-09-20 | 1976-03-26 | Fuji Electric Co Ltd | Ionchitsukasochinoseigyosochi |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58154458U (ja) * | 1982-04-12 | 1983-10-15 | 株式会社日立製作所 | 空燃比制御装置 |
Also Published As
Publication number | Publication date |
---|---|
BR7702960A (pt) | 1978-04-04 |
FR2350639A1 (fr) | 1977-12-02 |
JPS5340645A (en) | 1978-04-13 |
DE2620391A1 (de) | 1977-11-10 |