FR2335036A1 - Appareil pour realiser un modele d'irradiation sur une preparation - Google Patents

Appareil pour realiser un modele d'irradiation sur une preparation

Info

Publication number
FR2335036A1
FR2335036A1 FR7634267A FR7634267A FR2335036A1 FR 2335036 A1 FR2335036 A1 FR 2335036A1 FR 7634267 A FR7634267 A FR 7634267A FR 7634267 A FR7634267 A FR 7634267A FR 2335036 A1 FR2335036 A1 FR 2335036A1
Authority
FR
France
Prior art keywords
source
pattern
masker
specimen
prepared specimen
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
FR7634267A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of FR2335036A1 publication Critical patent/FR2335036A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
    • H01J37/3045—Object or beam position registration

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
FR7634267A 1975-12-08 1976-11-15 Appareil pour realiser un modele d'irradiation sur une preparation Withdrawn FR2335036A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19752555636 DE2555636A1 (de) 1975-12-08 1975-12-08 Geraet zur erzeugung eines bestrahlungsmusters auf einem praeparat

Publications (1)

Publication Number Publication Date
FR2335036A1 true FR2335036A1 (fr) 1977-07-08

Family

ID=5964020

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7634267A Withdrawn FR2335036A1 (fr) 1975-12-08 1976-11-15 Appareil pour realiser un modele d'irradiation sur une preparation

Country Status (4)

Country Link
JP (1) JPS5271985A (fr)
DE (1) DE2555636A1 (fr)
FR (1) FR2335036A1 (fr)
NL (1) NL7613154A (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3017365C2 (de) * 1980-05-07 1985-05-09 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V., 8000 München Korpuskularstrahlgerät zur Erzeugung eines Bestrahlungsmusters auf einem Werkstück und Verfahren zum Betrieb
JPS60201626A (ja) * 1984-03-27 1985-10-12 Canon Inc 位置合わせ装置
JPS60208829A (ja) * 1984-04-02 1985-10-21 Canon Inc 位置検出装置
JPS62115164A (ja) * 1985-11-14 1987-05-26 Hitachi Ltd パタン形成方法およびその装置

Also Published As

Publication number Publication date
NL7613154A (nl) 1977-06-10
JPS5271985A (en) 1977-06-15
DE2555636A1 (de) 1977-06-23

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Legal Events

Date Code Title Description
ST Notification of lapse