JPS5271985A - Apparatus for making iluminating pattern for specimen - Google Patents

Apparatus for making iluminating pattern for specimen

Info

Publication number
JPS5271985A
JPS5271985A JP51147626A JP14762676A JPS5271985A JP S5271985 A JPS5271985 A JP S5271985A JP 51147626 A JP51147626 A JP 51147626A JP 14762676 A JP14762676 A JP 14762676A JP S5271985 A JPS5271985 A JP S5271985A
Authority
JP
Japan
Prior art keywords
iluminating
specimen
pattern
making
making iluminating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP51147626A
Other languages
Japanese (ja)
Inventor
Angaa Kurausu
Rishiyuke Burukuharuto
Eeruman Andoreasu
Reshiyuke Herumuuto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of JPS5271985A publication Critical patent/JPS5271985A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
    • H01J37/3045—Object or beam position registration

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
JP51147626A 1975-12-08 1976-12-08 Apparatus for making iluminating pattern for specimen Pending JPS5271985A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19752555636 DE2555636A1 (en) 1975-12-08 1975-12-08 DEVICE FOR GENERATING A RADIATION PATTERN ON A PREPARATION

Publications (1)

Publication Number Publication Date
JPS5271985A true JPS5271985A (en) 1977-06-15

Family

ID=5964020

Family Applications (1)

Application Number Title Priority Date Filing Date
JP51147626A Pending JPS5271985A (en) 1975-12-08 1976-12-08 Apparatus for making iluminating pattern for specimen

Country Status (4)

Country Link
JP (1) JPS5271985A (en)
DE (1) DE2555636A1 (en)
FR (1) FR2335036A1 (en)
NL (1) NL7613154A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60201626A (en) * 1984-03-27 1985-10-12 Canon Inc Alignment equipment
JPS60208829A (en) * 1984-04-02 1985-10-21 Canon Inc Position detecting unit
JPS62115164A (en) * 1985-11-14 1987-05-26 Hitachi Ltd Method and device for forming pattern

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3017365C2 (en) * 1980-05-07 1985-05-09 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V., 8000 München Corpuscular beam device for generating a radiation pattern on a workpiece and method for operation

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60201626A (en) * 1984-03-27 1985-10-12 Canon Inc Alignment equipment
JPS60208829A (en) * 1984-04-02 1985-10-21 Canon Inc Position detecting unit
JPH0582731B2 (en) * 1984-04-02 1993-11-22 Canon Kk
JPS62115164A (en) * 1985-11-14 1987-05-26 Hitachi Ltd Method and device for forming pattern

Also Published As

Publication number Publication date
FR2335036A1 (en) 1977-07-08
NL7613154A (en) 1977-06-10
DE2555636A1 (en) 1977-06-23

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