FR2261347A1 - Coating bores of small tubes by cathodic sputtering - esp for mfr of fused silica tubes coated with platinum - Google Patents

Coating bores of small tubes by cathodic sputtering - esp for mfr of fused silica tubes coated with platinum

Info

Publication number
FR2261347A1
FR2261347A1 FR7405593A FR7405593A FR2261347A1 FR 2261347 A1 FR2261347 A1 FR 2261347A1 FR 7405593 A FR7405593 A FR 7405593A FR 7405593 A FR7405593 A FR 7405593A FR 2261347 A1 FR2261347 A1 FR 2261347A1
Authority
FR
France
Prior art keywords
target
tubes
esp
cathodic sputtering
fused silica
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7405593A
Other languages
French (fr)
Other versions
FR2261347B1 (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thales SA
Original Assignee
Thomson CSF SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thomson CSF SA filed Critical Thomson CSF SA
Priority to FR7405593A priority Critical patent/FR2261347A1/en
Publication of FR2261347A1 publication Critical patent/FR2261347A1/en
Application granted granted Critical
Publication of FR2261347B1 publication Critical patent/FR2261347B1/fr
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/06—Surface treatment of glass, not in the form of fibres or filaments, by coating with metals
    • C03C17/09—Surface treatment of glass, not in the form of fibres or filaments, by coating with metals by deposition from the vapour phase
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/25—Metals
    • C03C2217/251—Al, Cu, Mg or noble metals
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/10—Deposition methods
    • C03C2218/15—Deposition methods from the vapour phase

Abstract

A thin film is produced on a cylindrical structure, possessing axis of symmetry (I), by cathodic sputtering of a target possessing a cylindrical structure and >=1 axis of symmetry coaxial with axis (I). The target is pref. coupled to one electrode in a cathodic sputtering appts. while the substrate surrounds the target and is coupled with the other electrode; alternatively, the target may surround the substrate. The substrate may be an insulant and the target coated with a metal to be sputtered or vice versa, and a pref. target is Pt sputtered onto fused siica, esp. to make a crucible coated internally with a thin film of Pt. Method is for internal coating of small dia. tubes and external coating of tubes and cylinders. A disposable ignition tube for use at =1250 degrees C is esp. mfd. from fused silica coated internally with Pt.
FR7405593A 1974-02-19 1974-02-19 Coating bores of small tubes by cathodic sputtering - esp for mfr of fused silica tubes coated with platinum Granted FR2261347A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR7405593A FR2261347A1 (en) 1974-02-19 1974-02-19 Coating bores of small tubes by cathodic sputtering - esp for mfr of fused silica tubes coated with platinum

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7405593A FR2261347A1 (en) 1974-02-19 1974-02-19 Coating bores of small tubes by cathodic sputtering - esp for mfr of fused silica tubes coated with platinum

Publications (2)

Publication Number Publication Date
FR2261347A1 true FR2261347A1 (en) 1975-09-12
FR2261347B1 FR2261347B1 (en) 1976-12-03

Family

ID=9135114

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7405593A Granted FR2261347A1 (en) 1974-02-19 1974-02-19 Coating bores of small tubes by cathodic sputtering - esp for mfr of fused silica tubes coated with platinum

Country Status (1)

Country Link
FR (1) FR2261347A1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103938266A (en) * 2013-01-18 2014-07-23 广东先导稀材股份有限公司 Composite crucible, preparation method thereof and method for bismuth germanate crystal growth using the crucible
CN105921192A (en) * 2016-07-19 2016-09-07 苏州普京真空技术有限公司 Anti-skid crucible

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103938266A (en) * 2013-01-18 2014-07-23 广东先导稀材股份有限公司 Composite crucible, preparation method thereof and method for bismuth germanate crystal growth using the crucible
CN105921192A (en) * 2016-07-19 2016-09-07 苏州普京真空技术有限公司 Anti-skid crucible

Also Published As

Publication number Publication date
FR2261347B1 (en) 1976-12-03

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Legal Events

Date Code Title Description
ST Notification of lapse