GB863596A - Improvements in or relating to methods of making capacitors - Google Patents
Improvements in or relating to methods of making capacitorsInfo
- Publication number
- GB863596A GB863596A GB18919/59A GB1891959A GB863596A GB 863596 A GB863596 A GB 863596A GB 18919/59 A GB18919/59 A GB 18919/59A GB 1891959 A GB1891959 A GB 1891959A GB 863596 A GB863596 A GB 863596A
- Authority
- GB
- United Kingdom
- Prior art keywords
- metal
- glass
- substrate
- june
- microns
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000003990 capacitor Substances 0.000 title 1
- 229910052751 metal Inorganic materials 0.000 abstract 5
- 239000002184 metal Substances 0.000 abstract 5
- 239000011521 glass Substances 0.000 abstract 3
- 239000000758 substrate Substances 0.000 abstract 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 abstract 2
- 238000004544 sputter deposition Methods 0.000 abstract 2
- 238000007738 vacuum evaporation Methods 0.000 abstract 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 abstract 1
- 239000004411 aluminium Substances 0.000 abstract 1
- 229910052782 aluminium Inorganic materials 0.000 abstract 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract 1
- 229910052786 argon Inorganic materials 0.000 abstract 1
- 239000000919 ceramic Substances 0.000 abstract 1
- 239000011248 coating agent Substances 0.000 abstract 1
- 238000000576 coating method Methods 0.000 abstract 1
- 238000000151 deposition Methods 0.000 abstract 1
- 230000008021 deposition Effects 0.000 abstract 1
- 239000007789 gas Substances 0.000 abstract 1
- 239000001307 helium Substances 0.000 abstract 1
- 229910052734 helium Inorganic materials 0.000 abstract 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 238000001465 metallisation Methods 0.000 abstract 1
- 150000002739 metals Chemical class 0.000 abstract 1
- 229910052754 neon Inorganic materials 0.000 abstract 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 abstract 1
- 229910052758 niobium Inorganic materials 0.000 abstract 1
- 239000010955 niobium Substances 0.000 abstract 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 abstract 1
- 229910052715 tantalum Inorganic materials 0.000 abstract 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 abstract 1
- 239000010936 titanium Substances 0.000 abstract 1
- 229910052719 titanium Inorganic materials 0.000 abstract 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 abstract 1
- 229910052721 tungsten Inorganic materials 0.000 abstract 1
- 239000010937 tungsten Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/018—Dielectrics
- H01G4/06—Solid dielectrics
- H01G4/08—Inorganic dielectrics
- H01G4/10—Metal-oxide dielectrics
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N97/00—Electric solid-state thin-film or thick-film devices, not otherwise provided for
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Physical Vapour Deposition (AREA)
- Surface Treatment Of Glass (AREA)
Abstract
863,596. Coating by vapour deposition. WESTERN ELECTRIC CO. Inc. June 3, 1959 [June 16, 1958], No. 18919/59. Class 82(2) [Also in Group XXXVI] A method of making a condenser (see Group XXXVI) includes condensing a layer of film-forming metal on to a substrate by cathodic sputtering or vacuum evaporation. Metals referred to are tantalum, niobium, aluminium and titanium. The substrate may be of glass, glazed ceramic or oxidized or otherwise insulated metal. Cathodic sputtering apparatus is shown in Fig. 1 and comprises a vacuum chamber 10 containing a cathode 11 of, or carrying, the film forming metal and an anode 12. A rare gas such as helium, argon or neon is employed in the chamber at a pressure of from 20 to 150 microns Hg. and the igniting voltage used is between 4,500 and 5,000v. and applied for about an hour. Vacuum evaporation apparatus is shown in Fig. 2 and comprises a vacuum chamber 31 containing a tungsten filament 32 within which is placed the metal to be evaporated. A pressure of about .01 microns Hg and a time of current flow through the filament of less than three minutes is referred to, and in the case of a glass substrate, the glass is kept at a temperature of 200C during the metal deposition.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US863596XA | 1958-06-16 | 1958-06-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB863596A true GB863596A (en) | 1961-03-22 |
Family
ID=22198073
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB18919/59A Expired GB863596A (en) | 1958-06-16 | 1959-06-03 | Improvements in or relating to methods of making capacitors |
Country Status (1)
| Country | Link |
|---|---|
| GB (1) | GB863596A (en) |
-
1959
- 1959-06-03 GB GB18919/59A patent/GB863596A/en not_active Expired
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