ES8102418A1 - Un transistor de efecto de campo de union - Google Patents
Un transistor de efecto de campo de unionInfo
- Publication number
- ES8102418A1 ES8102418A1 ES491862A ES491862A ES8102418A1 ES 8102418 A1 ES8102418 A1 ES 8102418A1 ES 491862 A ES491862 A ES 491862A ES 491862 A ES491862 A ES 491862A ES 8102418 A1 ES8102418 A1 ES 8102418A1
- Authority
- ES
- Spain
- Prior art keywords
- field effect
- effect transistor
- junction field
- region
- substantially quadratic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000005669 field effect Effects 0.000 title abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/80—Field effect transistors with field effect produced by a PN or other rectifying junction gate, i.e. potential-jump barrier
- H01L29/808—Field effect transistors with field effect produced by a PN or other rectifying junction gate, i.e. potential-jump barrier with a PN junction gate, e.g. PN homojunction gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/10—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/107—Substrate region of field-effect devices
- H01L29/1075—Substrate region of field-effect devices of field-effect transistors
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Junction Field-Effect Transistors (AREA)
- Amplifiers (AREA)
Abstract
METODO DE ELABORACION Y DISEÑO DE UN TRANSISTOR DE EFECTO DE CAMPO. SOBRE UN SUBSTRATO (18) DE SILICIO SE DEPOSITA UNA CAPA (17) DE IMPUREZAS TIPO P EPITAXIALMENTE; SOBRE ESTA SE DEPOSITA OTRA CAPA (4) DE IMPUREZAS TIPO N. LA SUPERFICIE (3) ES DOTADA DE UNA CAPA DE OXIDO, Y ATACADA ESTA QUIMICAMENTE SE FORMAN UNAS VENTANILLAS EN LAS QUE SE DIFUNDE MATERIAL TIPO P, OBTENIENDOSE LAS REGIONES QUE CONSTITUYEN LA CONEXION ENTRE LA ZONA DE ALIMENTACION Y EL SUSTRATO. LA REGION DE PUERTA (7) SE OBTIENE POR DIFUSION DE BORO EN UNA VENTANILLA ABIERTA EN LA CAPA DE OXIDO. ESTA ULTIMA ES ELIMINADA Y SUSTITUIDA POR OTRA CAPA DE OXIDO (9) LIMPIA, Y SOBRE UNAS ABERTURAS (10, 11) SE REALIZAN POR DIFUSION LA REGION DE ALIMENTACION (5) Y LA DE SALIDA (6). OTRAS ABERTURAS (12) SON EFECTUADAS EN LA CAPA DE OXIDO (9) SOBRE LA REGION DE PUERTA (7), Y SE RETIRA EL OXIDO DE LAS REGIONES P (8). SE DEPOSITA UNA CAPA DE METALIZACION Y POR ATAQUE QUIMICO ENMASCARADO, SE FORMAN LAS ZONAS METALICAS DE CONEXION (13, 14,15). UNA METALIZACION (16) DEL LADO INFERIOR FINALIZA EL PROCESO. EL TRANSISTOR ASI OBTENIDO TIENE UNA RELACION CUADRATICA ENTRE LA CORRIENTE DE CANAL Y LA TENSION DE PUERTA.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL7904200A NL7904200A (nl) | 1979-05-29 | 1979-05-29 | Lagenveldeffecttransistor. |
Publications (2)
Publication Number | Publication Date |
---|---|
ES491862A0 ES491862A0 (es) | 1980-12-16 |
ES8102418A1 true ES8102418A1 (es) | 1980-12-16 |
Family
ID=19833263
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ES491862A Expired ES8102418A1 (es) | 1979-05-29 | 1980-05-27 | Un transistor de efecto de campo de union |
Country Status (11)
Country | Link |
---|---|
US (1) | US4498094A (es) |
JP (1) | JPS6044834B2 (es) |
AU (1) | AU537860B2 (es) |
CA (1) | CA1150854A (es) |
DE (1) | DE3019927A1 (es) |
ES (1) | ES8102418A1 (es) |
FR (1) | FR2458147B1 (es) |
GB (1) | GB2052860B (es) |
IT (1) | IT1130764B (es) |
NL (1) | NL7904200A (es) |
SE (1) | SE8003898L (es) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5957477A (ja) * | 1982-09-27 | 1984-04-03 | Fujitsu Ltd | 半導体装置 |
US4622568A (en) * | 1984-05-09 | 1986-11-11 | Eaton Corporation | Planar field-shaped bidirectional power FET |
JPH01123417A (ja) * | 1987-11-07 | 1989-05-16 | Mitsubishi Electric Corp | 半導体装置の製造方法 |
AU643781B2 (en) * | 1989-09-26 | 1993-11-25 | Sumitomo Electric Industries, Ltd. | A semiconductor device |
DE19644821C1 (de) * | 1996-10-29 | 1998-02-12 | Daimler Benz Ag | Steuerbare Halbleiterstruktur mit verbesserten Schalteigenschaften |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
BE638316A (es) * | 1962-10-15 | |||
US3316131A (en) * | 1963-08-15 | 1967-04-25 | Texas Instruments Inc | Method of producing a field-effect transistor |
US3222810A (en) * | 1964-06-23 | 1965-12-14 | Daniel D Musgrave | Magazine loading clip |
US3440500A (en) * | 1966-09-26 | 1969-04-22 | Itt | High frequency field effect transistor |
US3656031A (en) * | 1970-12-14 | 1972-04-11 | Tektronix Inc | Low noise field effect transistor with channel having subsurface portion of high conductivity |
US4112455A (en) * | 1977-01-27 | 1978-09-05 | The United States Of America As Represented By The Secretary Of The Navy | Field-effect transistor with extended linear logarithmic transconductance |
US4119996A (en) * | 1977-07-20 | 1978-10-10 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Complementary DMOS-VMOS integrated circuit structure |
JPS5846863B2 (ja) * | 1977-08-25 | 1983-10-19 | 松下電器産業株式会社 | 半導体集積回路装置 |
US4176368A (en) * | 1978-10-10 | 1979-11-27 | National Semiconductor Corporation | Junction field effect transistor for use in integrated circuits |
-
1979
- 1979-05-29 NL NL7904200A patent/NL7904200A/nl not_active Application Discontinuation
-
1980
- 1980-05-22 CA CA000352541A patent/CA1150854A/en not_active Expired
- 1980-05-23 GB GB8017183A patent/GB2052860B/en not_active Expired
- 1980-05-23 FR FR8011593A patent/FR2458147B1/fr not_active Expired
- 1980-05-24 DE DE19803019927 patent/DE3019927A1/de not_active Ceased
- 1980-05-26 IT IT22325/80A patent/IT1130764B/it active
- 1980-05-27 SE SE8003898A patent/SE8003898L/ not_active Application Discontinuation
- 1980-05-27 ES ES491862A patent/ES8102418A1/es not_active Expired
- 1980-05-27 AU AU58811/80A patent/AU537860B2/en not_active Ceased
- 1980-05-27 JP JP55069715A patent/JPS6044834B2/ja not_active Expired
-
1982
- 1982-06-16 US US06/388,827 patent/US4498094A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US4498094A (en) | 1985-02-05 |
AU537860B2 (en) | 1984-07-19 |
ES491862A0 (es) | 1980-12-16 |
JPS55158676A (en) | 1980-12-10 |
IT8022325A0 (it) | 1980-05-26 |
FR2458147B1 (fr) | 1985-10-31 |
DE3019927A1 (de) | 1980-12-04 |
JPS6044834B2 (ja) | 1985-10-05 |
GB2052860B (en) | 1983-06-29 |
FR2458147A1 (fr) | 1980-12-26 |
GB2052860A (en) | 1981-01-28 |
AU5881180A (en) | 1980-12-04 |
CA1150854A (en) | 1983-07-26 |
NL7904200A (nl) | 1980-12-02 |
SE8003898L (sv) | 1980-11-30 |
IT1130764B (it) | 1986-06-18 |
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