ES368134A1 - Un procedimiento de fabricacion de dispositivos semiconduc-tores. - Google Patents

Un procedimiento de fabricacion de dispositivos semiconduc-tores.

Info

Publication number
ES368134A1
ES368134A1 ES368134A ES368134A ES368134A1 ES 368134 A1 ES368134 A1 ES 368134A1 ES 368134 A ES368134 A ES 368134A ES 368134 A ES368134 A ES 368134A ES 368134 A1 ES368134 A1 ES 368134A1
Authority
ES
Spain
Prior art keywords
layer
semi
conductor
sio
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
ES368134A
Other languages
English (en)
Spanish (es)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RCA Corp
Original Assignee
RCA Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RCA Corp filed Critical RCA Corp
Publication of ES368134A1 publication Critical patent/ES368134A1/es
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3105—After-treatment
    • H01L21/311—Etching the insulating layers by chemical or physical means
    • H01L21/31105—Etching inorganic layers
    • H01L21/31111—Etching inorganic layers by chemical means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Ceramic Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Weting (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Electrodes Of Semiconductors (AREA)
ES368134A 1968-06-10 1969-06-07 Un procedimiento de fabricacion de dispositivos semiconduc-tores. Expired ES368134A1 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US73571968A 1968-06-10 1968-06-10

Publications (1)

Publication Number Publication Date
ES368134A1 true ES368134A1 (es) 1971-06-16

Family

ID=24956905

Family Applications (1)

Application Number Title Priority Date Filing Date
ES368134A Expired ES368134A1 (es) 1968-06-10 1969-06-07 Un procedimiento de fabricacion de dispositivos semiconduc-tores.

Country Status (8)

Country Link
BR (1) BR6909609D0 (ja)
DE (1) DE1929084C3 (ja)
ES (1) ES368134A1 (ja)
FR (1) FR2011513B1 (ja)
GB (1) GB1228083A (ja)
MY (1) MY7400057A (ja)
NL (1) NL6908748A (ja)
SE (1) SE355692B (ja)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2288138A1 (fr) * 1974-10-18 1976-05-14 Radiotechnique Compelec Procede d'attaque de l'alumine
US4230523A (en) * 1978-12-29 1980-10-28 International Business Machines Corporation Etchant for silicon dioxide films disposed atop silicon or metallic silicides
US4620934A (en) * 1984-04-26 1986-11-04 Allied Corporation Soluble fluorinated cycloalkane sulfonate surfactant additives for NH4
US4517106A (en) * 1984-04-26 1985-05-14 Allied Corporation Soluble surfactant additives for ammonium fluoride/hydrofluoric acid oxide etchant solutions
DE19935446A1 (de) 1999-07-28 2001-02-01 Merck Patent Gmbh Ätzlösung, Flußsäure enthaltend
US7192860B2 (en) * 2002-06-20 2007-03-20 Honeywell International Inc. Highly selective silicon oxide etching compositions
CN112099311B (zh) * 2020-09-22 2024-05-21 桂林电子科技大学 一种基于aao纳米结构光刻掩膜版的制备方法

Also Published As

Publication number Publication date
FR2011513B1 (ja) 1973-10-19
DE1929084A1 (de) 1969-12-11
MY7400057A (en) 1974-12-31
DE1929084B2 (de) 1975-01-09
BR6909609D0 (pt) 1973-01-02
GB1228083A (ja) 1971-04-15
FR2011513A1 (ja) 1970-03-06
DE1929084C3 (de) 1980-05-08
SE355692B (ja) 1973-04-30
NL6908748A (ja) 1969-12-12

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