ES2931307T3 - Conjunto de pruebas que incluye una mesa con múltiples grados de libertad - Google Patents
Conjunto de pruebas que incluye una mesa con múltiples grados de libertad Download PDFInfo
- Publication number
- ES2931307T3 ES2931307T3 ES12835945T ES12835945T ES2931307T3 ES 2931307 T3 ES2931307 T3 ES 2931307T3 ES 12835945 T ES12835945 T ES 12835945T ES 12835945 T ES12835945 T ES 12835945T ES 2931307 T3 ES2931307 T3 ES 2931307T3
- Authority
- ES
- Spain
- Prior art keywords
- sample
- tilt
- instrument
- rotation
- assembly
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000012360 testing method Methods 0.000 title claims abstract description 316
- 230000033001 locomotion Effects 0.000 claims abstract description 84
- 230000020347 spindle assembly Effects 0.000 claims description 63
- 238000000034 method Methods 0.000 claims description 40
- 238000000429 assembly Methods 0.000 abstract description 93
- 230000000712 assembly Effects 0.000 abstract description 93
- 238000013519 translation Methods 0.000 abstract description 19
- 238000005070 sampling Methods 0.000 abstract 1
- 239000000523 sample Substances 0.000 description 351
- 230000003068 static effect Effects 0.000 description 17
- 230000003993 interaction Effects 0.000 description 14
- 238000006073 displacement reaction Methods 0.000 description 13
- 230000013011 mating Effects 0.000 description 13
- 230000005484 gravity Effects 0.000 description 12
- 238000007373 indentation Methods 0.000 description 10
- 238000005096 rolling process Methods 0.000 description 10
- 230000008878 coupling Effects 0.000 description 9
- 238000010168 coupling process Methods 0.000 description 9
- 238000005859 coupling reaction Methods 0.000 description 9
- 238000005259 measurement Methods 0.000 description 8
- 230000000694 effects Effects 0.000 description 7
- 230000006870 function Effects 0.000 description 7
- 239000000463 material Substances 0.000 description 5
- 230000000295 complement effect Effects 0.000 description 4
- 239000002131 composite material Substances 0.000 description 4
- 230000015654 memory Effects 0.000 description 4
- 238000006748 scratching Methods 0.000 description 4
- 230000002393 scratching effect Effects 0.000 description 4
- 239000007787 solid Substances 0.000 description 4
- 239000013598 vector Substances 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000003116 impacting effect Effects 0.000 description 3
- 238000011065 in-situ storage Methods 0.000 description 3
- 230000002040 relaxant effect Effects 0.000 description 3
- 101100117236 Drosophila melanogaster speck gene Proteins 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 230000004308 accommodation Effects 0.000 description 2
- 229910010293 ceramic material Inorganic materials 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 230000014509 gene expression Effects 0.000 description 2
- 238000010884 ion-beam technique Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 238000009864 tensile test Methods 0.000 description 2
- 238000012956 testing procedure Methods 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- WYTGDNHDOZPMIW-RCBQFDQVSA-N alstonine Natural products C1=CC2=C3C=CC=CC3=NC2=C2N1C[C@H]1[C@H](C)OC=C(C(=O)OC)[C@H]1C2 WYTGDNHDOZPMIW-RCBQFDQVSA-N 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000004590 computer program Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000026058 directional locomotion Effects 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 238000009472 formulation Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000011326 mechanical measurement Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 238000009738 saturating Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 230000000153 supplemental effect Effects 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 230000001052 transient effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N3/02—Details
- G01N3/04—Chucks
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N3/40—Investigating hardness or rebound hardness
- G01N3/42—Investigating hardness or rebound hardness by performing impressions under a steady load by indentors, e.g. sphere, pyramid
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/24—Base structure
- G02B21/26—Stages; Adjusting means therefor
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/32—Micromanipulators structurally combined with microscopes
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K5/00—Irradiation devices
- G21K5/10—Irradiation devices with provision for relative movement of beam source and object to be irradiated
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N2203/0014—Type of force applied
- G01N2203/0026—Combination of several types of applied forces
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N2203/02—Details not specific for a particular testing method
- G01N2203/0202—Control of the test
- G01N2203/0206—Means for supplying or positioning specimens or exchangeable parts of the machine such as indenters...
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/202—Movement
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/206—Modifying objects while observing
- H01J2237/2062—Mechanical constraints
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/26—Electron or ion microscopes
- H01J2237/28—Scanning microscopes
Landscapes
- Physics & Mathematics (AREA)
- Analytical Chemistry (AREA)
- Chemical & Material Sciences (AREA)
- General Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Immunology (AREA)
- Health & Medical Sciences (AREA)
- Pathology (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- High Energy & Nuclear Physics (AREA)
- Microscoopes, Condenser (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)
- Details Of Measuring And Other Instruments (AREA)
- Bedding Items (AREA)
- Apparatus For Radiation Diagnosis (AREA)
- Accommodation For Nursing Or Treatment Tables (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201161540317P | 2011-09-28 | 2011-09-28 | |
| PCT/US2012/058019 WO2013049641A1 (en) | 2011-09-28 | 2012-09-28 | Testing assembly including a multiple degree of freedom stage |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ES2931307T3 true ES2931307T3 (es) | 2022-12-28 |
Family
ID=47996455
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| ES12835945T Active ES2931307T3 (es) | 2011-09-28 | 2012-09-28 | Conjunto de pruebas que incluye una mesa con múltiples grados de libertad |
Country Status (6)
| Country | Link |
|---|---|
| US (5) | US9472374B2 (enExample) |
| EP (2) | EP4155799A3 (enExample) |
| JP (2) | JP5789055B2 (enExample) |
| DE (1) | DE202012013742U1 (enExample) |
| ES (1) | ES2931307T3 (enExample) |
| WO (1) | WO2013049641A1 (enExample) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2013049641A1 (en) | 2011-09-28 | 2013-04-04 | Hysitron, Inc. | Testing assembly including a multiple degree of freedom stage |
| WO2017216941A1 (ja) * | 2016-06-17 | 2017-12-21 | 株式会社 日立ハイテクノロジーズ | 荷電粒子線装置 |
| US10127649B2 (en) * | 2017-01-24 | 2018-11-13 | International Business Machines Corporation | Electron channeling pattern acquisition from small crystalline areas |
| US11075055B2 (en) * | 2017-05-11 | 2021-07-27 | Richard J. Pickreign | Automated multi-grid handling apparatus |
| FR3075983B1 (fr) * | 2017-12-22 | 2021-07-23 | Univ Des Antilles | Dispositif de nano-manipulation et procede de caracterisation utilisant un tel dispositif |
| US11549872B2 (en) * | 2018-08-14 | 2023-01-10 | Corning Incorporated | Methods and apparatus for determining a crush strength of an edge |
| US11557456B2 (en) * | 2018-09-14 | 2023-01-17 | University Of Connecticut | Real-time direct measurement of mechanical properties in-situ of scanning beam microscope |
| CN109872768B (zh) * | 2019-01-18 | 2021-02-05 | 宁波大学 | 基于仿生扑翼的多自由度柔顺微操作器 |
| CN112213635B (zh) * | 2019-07-09 | 2024-07-30 | 致茂电子(苏州)有限公司 | 马达测试平台的自动装卸装置及系统 |
| CN111929153B (zh) * | 2020-07-20 | 2024-07-19 | 浙江顺林家具有限公司 | 一种木质家具生产用抗压检测设备 |
| CZ309523B6 (cs) * | 2020-08-27 | 2023-03-22 | Tescan Brno, S.R.O. | Naklápěcí prvek manipulačního stolku |
| CN112178375B (zh) * | 2020-09-17 | 2021-05-18 | 汕头市摩根冶金实业有限公司 | 一种高线轧机性能检测多功能试车台 |
| CN115475014B (zh) * | 2022-10-21 | 2024-10-29 | 苏州心锐医疗科技有限公司 | 一种用于多自由度外科手术器械的锁定机构 |
| GB2626604A (en) * | 2023-01-30 | 2024-07-31 | Lig Nanowise Ltd | Sample support system |
Family Cites Families (36)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3191424A (en) * | 1961-10-24 | 1965-06-29 | Nippon Rogaku K K | Device for measuring microhardness of materials |
| IT1206164B (it) | 1983-05-12 | 1989-04-14 | Omi Int Corp | Elettrolita di cromo trivalente eprocedimento per la sua applicazione e rigenerazione |
| JPH0619966B2 (ja) * | 1983-12-26 | 1994-03-16 | 株式会社島津製作所 | 試料回転傾斜装置 |
| JPH01311550A (ja) * | 1988-06-09 | 1989-12-15 | Nec Corp | 線状電子ビーム装置および熱処理方法 |
| JP2623123B2 (ja) | 1988-08-17 | 1997-06-25 | キヤノン株式会社 | 微動ステージ装置 |
| US5103095A (en) | 1990-05-23 | 1992-04-07 | Digital Instruments, Inc. | Scanning probe microscope employing adjustable tilt and unitary head |
| EP0487003B1 (en) | 1990-11-20 | 1997-07-09 | Canon Kabushiki Kaisha | Slope detection method, and information detection/writing apparatus using the method |
| JPH04355914A (ja) | 1991-02-06 | 1992-12-09 | Olympus Optical Co Ltd | リソグラフィー装置 |
| JP3257048B2 (ja) | 1992-06-30 | 2002-02-18 | 株式会社島津製作所 | 医療用寝台 |
| US5559329A (en) | 1994-08-31 | 1996-09-24 | Touchstone Research Laboratory, Ltd. | Scanning electron microscope fiber push-out apparatus and method |
| US5873566A (en) | 1997-04-17 | 1999-02-23 | International Business Machines Corporation | Locator actuation apparatus |
| EP0927880A4 (en) * | 1997-07-22 | 2010-11-17 | Hitachi Ltd | METHOD AND DEVICE FOR PREPARING SAMPLES |
| JP2000021345A (ja) | 1998-07-06 | 2000-01-21 | Hitachi Ltd | 走査型電子顕微鏡 |
| JP2000097836A (ja) * | 1998-09-27 | 2000-04-07 | Sanyuu Denshi Kk | 界面力学特性試験装置 |
| JP4436942B2 (ja) | 1999-02-02 | 2010-03-24 | 株式会社三友製作所 | 微細作業用マイクロマニピュレーション装置及び微細作業用マイクロプローブ |
| JP2001272324A (ja) * | 2000-03-24 | 2001-10-05 | Jeol Ltd | 試料ホルダ |
| US6583411B1 (en) * | 2000-09-13 | 2003-06-24 | Europaisches Laboratorium Für Molekularbiologie (Embl) | Multiple local probe measuring device and method |
| US6590212B1 (en) * | 2001-07-02 | 2003-07-08 | Brian E. Joseph | Microelectromechanical system assembly and testing device |
| KR100407579B1 (ko) | 2001-11-22 | 2003-11-28 | 삼성전자주식회사 | 이온 주입 시스템의 웨이퍼 홀딩 장치 |
| JP2004104001A (ja) | 2002-09-12 | 2004-04-02 | Hitachi Ltd | 試料移動機構 |
| JP4297736B2 (ja) * | 2003-06-11 | 2009-07-15 | 株式会社日立ハイテクノロジーズ | 集束イオンビーム装置 |
| US7297945B2 (en) * | 2003-12-05 | 2007-11-20 | Hitachi High-Technologies Corporation | Defective product inspection apparatus, probe positioning method and probe moving method |
| JP4442756B2 (ja) | 2004-03-30 | 2010-03-31 | 国立大学法人 熊本大学 | 送り機構の駆動方式 |
| WO2006135939A2 (en) * | 2005-06-16 | 2006-12-21 | Touchstone Research Laboratory, Ltd. | Microsystem manipulation apparatus |
| US7298495B2 (en) * | 2005-06-23 | 2007-11-20 | Lewis George C | System and method for positioning an object through use of a rotating laser metrology system |
| JP4991206B2 (ja) | 2006-08-15 | 2012-08-01 | 株式会社三友製作所 | 顕微鏡微細作業用マイクロマニピュレーション装置 |
| JP5103672B2 (ja) | 2007-03-30 | 2012-12-19 | 日本電子株式会社 | 荷電粒子線装置の試料ステージ移動装置 |
| JP5062405B2 (ja) * | 2007-06-07 | 2012-10-31 | サンユー電子株式会社 | 電子顕微鏡用の引張装置 |
| US20100017920A1 (en) * | 2008-07-21 | 2010-01-21 | Park San-Il | Scanning probe microscope with tilted sample stage |
| US8058613B2 (en) * | 2008-10-28 | 2011-11-15 | William Marsh Rice University | Micromechanical devices for materials characterization |
| JP5189471B2 (ja) | 2008-11-28 | 2013-04-24 | 花王株式会社 | 顕微鏡用観察装置 |
| JP2010181339A (ja) | 2009-02-06 | 2010-08-19 | Sii Nanotechnology Inc | 微小マニピュレータ装置 |
| JP2010185736A (ja) * | 2009-02-12 | 2010-08-26 | Mitsutoyo Corp | 硬さ試験機 |
| JP2011064461A (ja) * | 2009-09-15 | 2011-03-31 | Kohzu Precision Co Ltd | 位置決めステージ |
| WO2013049641A1 (en) | 2011-09-28 | 2013-04-04 | Hysitron, Inc. | Testing assembly including a multiple degree of freedom stage |
| WO2016153330A1 (es) * | 2015-03-26 | 2016-09-29 | García Amezcua Luis Fernando | Dispositivo organizador y de almacenamiento múltiple |
-
2012
- 2012-09-28 WO PCT/US2012/058019 patent/WO2013049641A1/en not_active Ceased
- 2012-09-28 EP EP22189255.7A patent/EP4155799A3/en active Pending
- 2012-09-28 EP EP12835945.2A patent/EP2761357B1/en active Active
- 2012-09-28 US US14/347,173 patent/US9472374B2/en active Active
- 2012-09-28 ES ES12835945T patent/ES2931307T3/es active Active
- 2012-09-28 JP JP2014533420A patent/JP5789055B2/ja active Active
- 2012-09-28 DE DE202012013742.5U patent/DE202012013742U1/de not_active Expired - Lifetime
-
2015
- 2015-07-30 JP JP2015150364A patent/JP6141918B2/ja active Active
-
2016
- 2016-10-17 US US15/295,196 patent/US10663380B2/en active Active
-
2020
- 2020-04-10 US US16/845,258 patent/US11237087B2/en active Active
-
2021
- 2021-12-16 US US17/552,665 patent/US12140571B2/en active Active
-
2024
- 2024-10-24 US US18/925,991 patent/US20250123192A1/en active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| EP2761357A1 (en) | 2014-08-06 |
| US20250123192A1 (en) | 2025-04-17 |
| EP4155799A2 (en) | 2023-03-29 |
| US20170030812A1 (en) | 2017-02-02 |
| US11237087B2 (en) | 2022-02-01 |
| JP2016027567A (ja) | 2016-02-18 |
| DE202012013742U1 (de) | 2020-10-19 |
| US20220357251A1 (en) | 2022-11-10 |
| US20200408655A1 (en) | 2020-12-31 |
| EP2761357A4 (en) | 2016-04-20 |
| WO2013049641A1 (en) | 2013-04-04 |
| EP4155799A3 (en) | 2023-06-28 |
| US9472374B2 (en) | 2016-10-18 |
| JP5789055B2 (ja) | 2015-10-07 |
| JP6141918B2 (ja) | 2017-06-07 |
| EP2761357B1 (en) | 2022-09-07 |
| JP2015503112A (ja) | 2015-01-29 |
| US20140231670A1 (en) | 2014-08-21 |
| US10663380B2 (en) | 2020-05-26 |
| US12140571B2 (en) | 2024-11-12 |
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