ES2882114T3 - Disposición del detector de marca de referencia - Google Patents

Disposición del detector de marca de referencia Download PDF

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Publication number
ES2882114T3
ES2882114T3 ES14776653T ES14776653T ES2882114T3 ES 2882114 T3 ES2882114 T3 ES 2882114T3 ES 14776653 T ES14776653 T ES 14776653T ES 14776653 T ES14776653 T ES 14776653T ES 2882114 T3 ES2882114 T3 ES 2882114T3
Authority
ES
Spain
Prior art keywords
scale
reference mark
incremental
photodetector
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
ES14776653T
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English (en)
Spanish (es)
Inventor
Jason Kempton Slack
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Renishaw PLC
Original Assignee
Renishaw PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Renishaw PLC filed Critical Renishaw PLC
Application granted granted Critical
Publication of ES2882114T3 publication Critical patent/ES2882114T3/es
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36Forming the light into pulses
    • G01D5/38Forming the light into pulses by diffraction gratings
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707Scales; Discs, e.g. fixation, fabrication, compensation
    • G01D5/34715Scale reading or illumination devices
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34746Linear encoders
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36Forming the light into pulses
    • G01D5/366Particular pulse shapes

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
ES14776653T 2013-10-01 2014-09-26 Disposición del detector de marca de referencia Active ES2882114T3 (es)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP13275237 2013-10-01
PCT/EP2014/070614 WO2015049173A1 (en) 2013-10-01 2014-09-26 Reference mark detector arrangement

Publications (1)

Publication Number Publication Date
ES2882114T3 true ES2882114T3 (es) 2021-12-01

Family

ID=49301402

Family Applications (1)

Application Number Title Priority Date Filing Date
ES14776653T Active ES2882114T3 (es) 2013-10-01 2014-09-26 Disposición del detector de marca de referencia

Country Status (6)

Country Link
US (1) US10281301B2 (enExample)
EP (1) EP3052898B1 (enExample)
JP (1) JP7153997B2 (enExample)
CN (1) CN106104216B (enExample)
ES (1) ES2882114T3 (enExample)
WO (1) WO2015049173A1 (enExample)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017203210A1 (en) * 2016-05-25 2017-11-30 Renishaw Plc Adaptive reference mark detection process
US10295378B2 (en) * 2017-06-29 2019-05-21 Mitutoyo Corporation Contamination and defect resistant optical encoder configuration outputting structured illumination to a scale plane for providing displacement signals
DE102018202556A1 (de) * 2018-02-20 2019-08-22 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
EP3623769A1 (en) * 2018-09-12 2020-03-18 Renishaw PLC Measurement device
EP3663723A1 (en) 2018-12-04 2020-06-10 Renishaw PLC Encoder apparatus
CN209570108U (zh) * 2018-12-05 2019-11-01 惠科股份有限公司 一种用于显示面板的刻度尺和测量装置
JP7039642B2 (ja) * 2020-04-01 2022-03-22 株式会社東京精密 リニア・スケールを有するエンコーダ
JP7475973B2 (ja) * 2020-06-08 2024-04-30 キヤノン株式会社 光学式エンコーダ及び制御装置
CN112344859A (zh) * 2020-09-14 2021-02-09 桂林电子科技大学 一种基于光栅读头组合的位移测量方法
DE102020134604B4 (de) 2020-12-22 2022-07-14 Smaract Gmbh Vorrichtung und Verfahren zur Positionsbestimmung
EP4390327A1 (en) 2022-12-20 2024-06-26 Renishaw PLC Encoder apparatus
WO2024134155A1 (en) 2022-12-20 2024-06-27 Renishaw Plc Encoder apparatus

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JPS62172219A (ja) * 1986-03-14 1987-07-29 Ishikawajima Harima Heavy Ind Co Ltd 回転検出器
JP2586121B2 (ja) 1988-09-30 1997-02-26 キヤノン株式会社 ロータリーエンコーダの原点検出系
JP2670457B2 (ja) 1989-09-29 1997-10-29 キヤノン株式会社 零点位置検出装置
JP3530573B2 (ja) 1994-04-27 2004-05-24 キヤノン株式会社 光学式変位センサ
DE4428590C2 (de) 1994-08-12 1996-06-20 Heidenhain Gmbh Dr Johannes Positionsmeßeinrichtung
GB9424969D0 (en) 1994-12-10 1995-02-08 Renishaw Plc Opto-electronic scale reading apparatus
DE69622297T2 (de) 1995-02-21 2002-11-21 Canon K.K., Tokio/Tokyo Vorrichtung zur Bestimmung einer Verschiebung und deren Verwendung in einer Einrichtung zur Antriebsregelung
JPH08226804A (ja) * 1995-02-21 1996-09-03 Canon Inc 変位情報検出装置及びこれを用いたドライブ制御装置
JP3471971B2 (ja) 1995-05-10 2003-12-02 キヤノン株式会社 複合型のロータリーエンコーダ
JP3591942B2 (ja) * 1995-10-27 2004-11-24 キヤノン株式会社 変位情報検出装置
JP3722949B2 (ja) * 1997-05-27 2005-11-30 株式会社ミツトヨ 光電式エンコーダ
DE19754595B4 (de) * 1997-12-10 2011-06-01 Dr. Johannes Heidenhain Gmbh Lichtelektrische Positionsmeßeinrichtung
DE19854733A1 (de) 1998-11-27 2000-05-31 Heidenhain Gmbh Dr Johannes Abtasteinheit einer Positionsmeßeinrichtung
DE60033075T3 (de) 1999-04-16 2012-08-30 Canon K.K. Kodierer
DE19941318A1 (de) * 1999-08-31 2001-03-15 Heidenhain Gmbh Dr Johannes Optische Positionsmeßeinrichtung
JP2001356028A (ja) 2000-06-14 2001-12-26 Olympus Optical Co Ltd 光学式エンコーダ
GB0103582D0 (en) 2001-02-14 2001-03-28 Renishaw Plc Position determination system
WO2003021194A2 (en) 2001-08-30 2003-03-13 Microe Systems Corporation Reference point talbot encoder
JP4266105B2 (ja) * 2002-08-28 2009-05-20 サムタク株式会社 原点設定型リニヤスケール
GB0316921D0 (en) 2003-07-19 2003-08-27 Renishaw Plc Reader for a scale marking
DE112004002244B4 (de) 2003-11-20 2013-11-28 Mitsubishi Denki K.K. Optischer Codierer
JP2005326266A (ja) 2004-05-14 2005-11-24 Sharp Corp 反射型位置エンコーダ
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JP2006071535A (ja) * 2004-09-03 2006-03-16 Mitsutoyo Corp 変位検出装置
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GB0522651D0 (en) 2005-11-07 2005-12-14 Renishaw Plc Scale and readhead system
JP5308059B2 (ja) 2008-04-25 2013-10-09 株式会社ミツトヨ 光電式エンコーダ用スケール
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DE102011076055A1 (de) * 2011-05-18 2012-11-22 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung

Also Published As

Publication number Publication date
JP2016536576A (ja) 2016-11-24
WO2015049173A1 (en) 2015-04-09
CN106104216A (zh) 2016-11-09
CN106104216B (zh) 2018-11-02
US20160231144A1 (en) 2016-08-11
EP3052898B1 (en) 2021-06-02
JP7153997B2 (ja) 2022-10-17
EP3052898A1 (en) 2016-08-10
US10281301B2 (en) 2019-05-07

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