CN106104216B - 编码器设备 - Google Patents

编码器设备 Download PDF

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Publication number
CN106104216B
CN106104216B CN201480065636.2A CN201480065636A CN106104216B CN 106104216 B CN106104216 B CN 106104216B CN 201480065636 A CN201480065636 A CN 201480065636A CN 106104216 B CN106104216 B CN 106104216B
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CN
China
Prior art keywords
scale
encoder device
incremental
light
detector
Prior art date
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Application number
CN201480065636.2A
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English (en)
Chinese (zh)
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CN106104216A (zh
Inventor
贾森·肯普顿·斯拉克
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Renishaw PLC
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Renishaw PLC
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Publication of CN106104216A publication Critical patent/CN106104216A/zh
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
    • G01D5/34715—Scale reading or illumination devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34746—Linear encoders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/366—Particular pulse shapes

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
CN201480065636.2A 2013-10-01 2014-09-26 编码器设备 Active CN106104216B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP13275237 2013-10-01
EP13275237.9 2013-10-01
PCT/EP2014/070614 WO2015049173A1 (en) 2013-10-01 2014-09-26 Reference mark detector arrangement

Publications (2)

Publication Number Publication Date
CN106104216A CN106104216A (zh) 2016-11-09
CN106104216B true CN106104216B (zh) 2018-11-02

Family

ID=49301402

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201480065636.2A Active CN106104216B (zh) 2013-10-01 2014-09-26 编码器设备

Country Status (6)

Country Link
US (1) US10281301B2 (enExample)
EP (1) EP3052898B1 (enExample)
JP (1) JP7153997B2 (enExample)
CN (1) CN106104216B (enExample)
ES (1) ES2882114T3 (enExample)
WO (1) WO2015049173A1 (enExample)

Families Citing this family (12)

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EP3465099A1 (en) * 2016-05-25 2019-04-10 Renishaw plc Adaptive reference mark detection process
US10295378B2 (en) * 2017-06-29 2019-05-21 Mitutoyo Corporation Contamination and defect resistant optical encoder configuration outputting structured illumination to a scale plane for providing displacement signals
DE102018202556A1 (de) * 2018-02-20 2019-08-22 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
EP3623769A1 (en) * 2018-09-12 2020-03-18 Renishaw PLC Measurement device
EP3663723A1 (en) 2018-12-04 2020-06-10 Renishaw PLC Encoder apparatus
CN209570108U (zh) * 2018-12-05 2019-11-01 惠科股份有限公司 一种用于显示面板的刻度尺和测量装置
JP7039642B2 (ja) * 2020-04-01 2022-03-22 株式会社東京精密 リニア・スケールを有するエンコーダ
JP7475973B2 (ja) * 2020-06-08 2024-04-30 キヤノン株式会社 光学式エンコーダ及び制御装置
CN112344859A (zh) * 2020-09-14 2021-02-09 桂林电子科技大学 一种基于光栅读头组合的位移测量方法
DE102020134604B4 (de) 2020-12-22 2022-07-14 Smaract Gmbh Vorrichtung und Verfahren zur Positionsbestimmung
CN120641722A (zh) 2022-12-20 2025-09-12 瑞尼斯豪公司 编码器设备
EP4390327A1 (en) 2022-12-20 2024-06-26 Renishaw PLC Encoder apparatus

Citations (5)

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US20020011559A1 (en) * 1997-12-10 2002-01-31 Dr. Johannes Heidenahin GmbH Photoelectric position measuring system that optimizes modulation of a scanning device and the intensity of a reference mark signal
US6541761B1 (en) * 1999-08-31 2003-04-01 Dr. Johannas Heidenhain Gmbh Optical position measuring system with a graduation that causes essentially only first orders of diffraction
US20060267822A1 (en) * 2005-05-26 2006-11-30 Olympus Corporation Optical encoder
CN1882823A (zh) * 2003-11-20 2006-12-20 三菱电机株式会社 光学式编码器
JP2010223636A (ja) * 2009-03-19 2010-10-07 Olympus Corp 光学式エンコーダ

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JP2586121B2 (ja) 1988-09-30 1997-02-26 キヤノン株式会社 ロータリーエンコーダの原点検出系
JP2670457B2 (ja) 1989-09-29 1997-10-29 キヤノン株式会社 零点位置検出装置
JP3530573B2 (ja) 1994-04-27 2004-05-24 キヤノン株式会社 光学式変位センサ
DE4428590C2 (de) * 1994-08-12 1996-06-20 Heidenhain Gmbh Dr Johannes Positionsmeßeinrichtung
GB9424969D0 (en) 1994-12-10 1995-02-08 Renishaw Plc Opto-electronic scale reading apparatus
JPH08226804A (ja) * 1995-02-21 1996-09-03 Canon Inc 変位情報検出装置及びこれを用いたドライブ制御装置
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JP3471971B2 (ja) 1995-05-10 2003-12-02 キヤノン株式会社 複合型のロータリーエンコーダ
JP3591942B2 (ja) * 1995-10-27 2004-11-24 キヤノン株式会社 変位情報検出装置
JP3722949B2 (ja) 1997-05-27 2005-11-30 株式会社ミツトヨ 光電式エンコーダ
DE19854733A1 (de) 1998-11-27 2000-05-31 Heidenhain Gmbh Dr Johannes Abtasteinheit einer Positionsmeßeinrichtung
US6674066B1 (en) 1999-04-16 2004-01-06 Canon Kabushiki Kaisha Encoder
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GB0103582D0 (en) * 2001-02-14 2001-03-28 Renishaw Plc Position determination system
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GB0316921D0 (en) 2003-07-19 2003-08-27 Renishaw Plc Reader for a scale marking
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GB0413710D0 (en) 2004-06-21 2004-07-21 Renishaw Plc Scale reading apparatus
JP2006071535A (ja) 2004-09-03 2006-03-16 Mitsutoyo Corp 変位検出装置
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JP5308059B2 (ja) 2008-04-25 2013-10-09 株式会社ミツトヨ 光電式エンコーダ用スケール
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Patent Citations (5)

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Publication number Priority date Publication date Assignee Title
US20020011559A1 (en) * 1997-12-10 2002-01-31 Dr. Johannes Heidenahin GmbH Photoelectric position measuring system that optimizes modulation of a scanning device and the intensity of a reference mark signal
US6541761B1 (en) * 1999-08-31 2003-04-01 Dr. Johannas Heidenhain Gmbh Optical position measuring system with a graduation that causes essentially only first orders of diffraction
CN1882823A (zh) * 2003-11-20 2006-12-20 三菱电机株式会社 光学式编码器
US20060267822A1 (en) * 2005-05-26 2006-11-30 Olympus Corporation Optical encoder
JP2010223636A (ja) * 2009-03-19 2010-10-07 Olympus Corp 光学式エンコーダ

Also Published As

Publication number Publication date
US10281301B2 (en) 2019-05-07
WO2015049173A1 (en) 2015-04-09
US20160231144A1 (en) 2016-08-11
EP3052898A1 (en) 2016-08-10
EP3052898B1 (en) 2021-06-02
JP2016536576A (ja) 2016-11-24
JP7153997B2 (ja) 2022-10-17
CN106104216A (zh) 2016-11-09
ES2882114T3 (es) 2021-12-01

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