ES2270877T3 - Sistema de limpieza utilizando un solvente de lavado organico y un solvente fluido presurizado. - Google Patents
Sistema de limpieza utilizando un solvente de lavado organico y un solvente fluido presurizado. Download PDFInfo
- Publication number
- ES2270877T3 ES2270877T3 ES00970901T ES00970901T ES2270877T3 ES 2270877 T3 ES2270877 T3 ES 2270877T3 ES 00970901 T ES00970901 T ES 00970901T ES 00970901 T ES00970901 T ES 00970901T ES 2270877 T3 ES2270877 T3 ES 2270877T3
- Authority
- ES
- Spain
- Prior art keywords
- solvent
- container
- drum
- organic solvent
- substrates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000002904 solvent Substances 0.000 title claims abstract description 250
- 239000012530 fluid Substances 0.000 title claims abstract description 145
- 238000005406 washing Methods 0.000 title claims abstract description 98
- 238000004140 cleaning Methods 0.000 title claims description 50
- 239000003960 organic solvent Substances 0.000 claims abstract description 126
- 239000000758 substrate Substances 0.000 claims abstract description 76
- 238000000034 method Methods 0.000 claims abstract description 63
- 239000007788 liquid Substances 0.000 claims abstract description 27
- 238000013019 agitation Methods 0.000 claims abstract description 4
- 239000004753 textile Substances 0.000 claims description 75
- 238000001035 drying Methods 0.000 claims description 70
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 claims description 64
- 239000001569 carbon dioxide Substances 0.000 claims description 32
- 229910002092 carbon dioxide Inorganic materials 0.000 claims description 32
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 claims description 13
- 238000001914 filtration Methods 0.000 claims description 12
- JDSQBDGCMUXRBM-UHFFFAOYSA-N 2-[2-(2-butoxypropoxy)propoxy]propan-1-ol Chemical compound CCCCOC(C)COC(C)COC(C)CO JDSQBDGCMUXRBM-UHFFFAOYSA-N 0.000 claims description 10
- WAEVWDZKMBQDEJ-UHFFFAOYSA-N 2-[2-(2-methoxypropoxy)propoxy]propan-1-ol Chemical compound COC(C)COC(C)COC(C)CO WAEVWDZKMBQDEJ-UHFFFAOYSA-N 0.000 claims description 10
- 239000000203 mixture Substances 0.000 claims description 10
- WMDZKDKPYCNCDZ-UHFFFAOYSA-N 2-(2-butoxypropoxy)propan-1-ol Chemical compound CCCCOC(C)COC(C)CO WMDZKDKPYCNCDZ-UHFFFAOYSA-N 0.000 claims description 9
- ZNQVEEAIQZEUHB-UHFFFAOYSA-N 2-ethoxyethanol Chemical compound CCOCCO ZNQVEEAIQZEUHB-UHFFFAOYSA-N 0.000 claims description 9
- 229920000151 polyglycol Polymers 0.000 claims description 8
- 239000010695 polyglycol Substances 0.000 claims description 8
- GQCZPFJGIXHZMB-UHFFFAOYSA-N 1-tert-Butoxy-2-propanol Chemical compound CC(O)COC(C)(C)C GQCZPFJGIXHZMB-UHFFFAOYSA-N 0.000 claims description 6
- OAYXUHPQHDHDDZ-UHFFFAOYSA-N 2-(2-butoxyethoxy)ethanol Chemical compound CCCCOCCOCCO OAYXUHPQHDHDDZ-UHFFFAOYSA-N 0.000 claims description 6
- XYVAYAJYLWYJJN-UHFFFAOYSA-N 2-(2-propoxypropoxy)propan-1-ol Chemical compound CCCOC(C)COC(C)CO XYVAYAJYLWYJJN-UHFFFAOYSA-N 0.000 claims description 6
- CUDYYMUUJHLCGZ-UHFFFAOYSA-N 2-(2-methoxypropoxy)propan-1-ol Chemical compound COC(C)COC(C)CO CUDYYMUUJHLCGZ-UHFFFAOYSA-N 0.000 claims description 5
- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical compound OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 claims description 5
- SVONRAPFKPVNKG-UHFFFAOYSA-N 2-ethoxyethyl acetate Chemical compound CCOCCOC(C)=O SVONRAPFKPVNKG-UHFFFAOYSA-N 0.000 claims description 3
- 238000003756 stirring Methods 0.000 claims 1
- 239000000356 contaminant Substances 0.000 description 26
- 230000003213 activating effect Effects 0.000 description 14
- 238000001704 evaporation Methods 0.000 description 13
- 230000008020 evaporation Effects 0.000 description 13
- 230000007613 environmental effect Effects 0.000 description 9
- 239000007789 gas Substances 0.000 description 9
- 239000000126 substance Substances 0.000 description 8
- 239000000654 additive Substances 0.000 description 7
- 238000005108 dry cleaning Methods 0.000 description 7
- 238000012360 testing method Methods 0.000 description 7
- 230000002829 reductive effect Effects 0.000 description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 6
- CYTYCFOTNPOANT-UHFFFAOYSA-N Perchloroethylene Chemical group ClC(Cl)=C(Cl)Cl CYTYCFOTNPOANT-UHFFFAOYSA-N 0.000 description 5
- 230000000704 physical effect Effects 0.000 description 5
- 230000001105 regulatory effect Effects 0.000 description 5
- 229950011008 tetrachloroethylene Drugs 0.000 description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 4
- GQPLMRYTRLFLPF-UHFFFAOYSA-N Nitrous Oxide Chemical compound [O-][N+]#N GQPLMRYTRLFLPF-UHFFFAOYSA-N 0.000 description 4
- DKPFZGUDAPQIHT-UHFFFAOYSA-N butyl acetate Chemical compound CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 description 4
- 229910052799 carbon Inorganic materials 0.000 description 4
- 239000006184 cosolvent Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 229920000742 Cotton Polymers 0.000 description 3
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 3
- 239000003463 adsorbent Substances 0.000 description 3
- 230000033228 biological regulation Effects 0.000 description 3
- 238000009835 boiling Methods 0.000 description 3
- 239000003599 detergent Substances 0.000 description 3
- 239000000975 dye Substances 0.000 description 3
- 150000002170 ethers Chemical class 0.000 description 3
- 239000004744 fabric Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000011084 recovery Methods 0.000 description 3
- 238000012546 transfer Methods 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- 206010061218 Inflammation Diseases 0.000 description 2
- 229910018503 SF6 Inorganic materials 0.000 description 2
- 239000002250 absorbent Substances 0.000 description 2
- 230000002745 absorbent Effects 0.000 description 2
- 238000005119 centrifugation Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 239000003344 environmental pollutant Substances 0.000 description 2
- LYCAIKOWRPUZTN-UHFFFAOYSA-N ethylene glycol Natural products OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 2
- 239000000835 fiber Substances 0.000 description 2
- -1 glycol ethers Chemical class 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- 238000000703 high-speed centrifugation Methods 0.000 description 2
- 229930195733 hydrocarbon Natural products 0.000 description 2
- 150000002430 hydrocarbons Chemical class 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 2
- 230000004054 inflammatory process Effects 0.000 description 2
- 230000000670 limiting effect Effects 0.000 description 2
- DNIAPMSPPWPWGF-UHFFFAOYSA-N monopropylene glycol Natural products CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 2
- 239000001272 nitrous oxide Substances 0.000 description 2
- 231100000719 pollutant Toxicity 0.000 description 2
- 239000013557 residual solvent Substances 0.000 description 2
- 230000003381 solubilizing effect Effects 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- SFZCNBIFKDRMGX-UHFFFAOYSA-N sulfur hexafluoride Chemical compound FS(F)(F)(F)(F)F SFZCNBIFKDRMGX-UHFFFAOYSA-N 0.000 description 2
- 229960000909 sulfur hexafluoride Drugs 0.000 description 2
- 239000004094 surface-active agent Substances 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- 229910052724 xenon Inorganic materials 0.000 description 2
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 2
- QDRMUFJWOJOOKR-UHFFFAOYSA-N 1-(1-hydroxypropan-2-yloxy)butan-2-ol Chemical compound CCC(O)COC(C)CO QDRMUFJWOJOOKR-UHFFFAOYSA-N 0.000 description 1
- RWNUSVWFHDHRCJ-UHFFFAOYSA-N 1-butoxypropan-2-ol Chemical compound CCCCOCC(C)O RWNUSVWFHDHRCJ-UHFFFAOYSA-N 0.000 description 1
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- 239000004264 Petrolatum Substances 0.000 description 1
- 241000700159 Rattus Species 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 238000007605 air drying Methods 0.000 description 1
- 150000001335 aliphatic alkanes Chemical class 0.000 description 1
- 238000005238 degreasing Methods 0.000 description 1
- 238000004821 distillation Methods 0.000 description 1
- 125000001033 ether group Chemical group 0.000 description 1
- 238000004880 explosion Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- 239000002920 hazardous waste Substances 0.000 description 1
- 239000002198 insoluble material Substances 0.000 description 1
- 230000007794 irritation Effects 0.000 description 1
- 239000003350 kerosene Substances 0.000 description 1
- 231100000053 low toxicity Toxicity 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002480 mineral oil Substances 0.000 description 1
- 235000010446 mineral oil Nutrition 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 235000019645 odor Nutrition 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 235000014593 oils and fats Nutrition 0.000 description 1
- 239000012188 paraffin wax Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000008188 pellet Substances 0.000 description 1
- 229940066842 petrolatum Drugs 0.000 description 1
- 235000019271 petrolatum Nutrition 0.000 description 1
- 239000003208 petroleum Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 238000009987 spinning Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 150000003505 terpenes Chemical class 0.000 description 1
- 235000007586 terpenes Nutrition 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/22—Organic compounds
- C11D7/26—Organic compounds containing oxygen
- C11D7/261—Alcohols; Phenols
- C11D7/262—Alcohols; Phenols fatty or with at least 8 carbon atoms in the alkyl or alkenyl chain
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
- B08B7/0021—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by liquid gases or supercritical fluids
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/22—Organic compounds
- C11D7/26—Organic compounds containing oxygen
- C11D7/261—Alcohols; Phenols
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/50—Solvents
- C11D7/5004—Organic solvents
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/50—Solvents
- C11D7/5004—Organic solvents
- C11D7/5022—Organic solvents containing oxygen
-
- D—TEXTILES; PAPER
- D06—TREATMENT OF TEXTILES OR THE LIKE; LAUNDERING; FLEXIBLE MATERIALS NOT OTHERWISE PROVIDED FOR
- D06F—LAUNDERING, DRYING, IRONING, PRESSING OR FOLDING TEXTILE ARTICLES
- D06F43/00—Dry-cleaning apparatus or methods using volatile solvents
- D06F43/007—Dry cleaning methods
-
- D—TEXTILES; PAPER
- D06—TREATMENT OF TEXTILES OR THE LIKE; LAUNDERING; FLEXIBLE MATERIALS NOT OTHERWISE PROVIDED FOR
- D06L—DRY-CLEANING, WASHING OR BLEACHING FIBRES, FILAMENTS, THREADS, YARNS, FABRICS, FEATHERS OR MADE-UP FIBROUS GOODS; BLEACHING LEATHER OR FURS
- D06L1/00—Dry-cleaning or washing fibres, filaments, threads, yarns, fabrics, feathers or made-up fibrous goods
- D06L1/02—Dry-cleaning or washing fibres, filaments, threads, yarns, fabrics, feathers or made-up fibrous goods using organic solvents
-
- D—TEXTILES; PAPER
- D06—TREATMENT OF TEXTILES OR THE LIKE; LAUNDERING; FLEXIBLE MATERIALS NOT OTHERWISE PROVIDED FOR
- D06L—DRY-CLEANING, WASHING OR BLEACHING FIBRES, FILAMENTS, THREADS, YARNS, FABRICS, FEATHERS OR MADE-UP FIBROUS GOODS; BLEACHING LEATHER OR FURS
- D06L1/00—Dry-cleaning or washing fibres, filaments, threads, yarns, fabrics, feathers or made-up fibrous goods
- D06L1/02—Dry-cleaning or washing fibres, filaments, threads, yarns, fabrics, feathers or made-up fibrous goods using organic solvents
- D06L1/08—Multi-step processes
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D2111/00—Cleaning compositions characterised by the objects to be cleaned; Cleaning compositions characterised by non-standard cleaning or washing processes
- C11D2111/40—Specific cleaning or washing processes
- C11D2111/44—Multi-step processes
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/22—Organic compounds
- C11D7/26—Organic compounds containing oxygen
- C11D7/263—Ethers
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/22—Organic compounds
- C11D7/26—Organic compounds containing oxygen
- C11D7/264—Aldehydes; Ketones; Acetals or ketals
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/22—Organic compounds
- C11D7/26—Organic compounds containing oxygen
- C11D7/266—Esters or carbonates
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Wood Science & Technology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Organic Chemistry (AREA)
- Textile Engineering (AREA)
- Health & Medical Sciences (AREA)
- Emergency Medicine (AREA)
- Cleaning By Liquid Or Steam (AREA)
- Accessory Of Washing/Drying Machine, Commercial Washing/Drying Machine, Other Washing/Drying Machine (AREA)
- Detergent Compositions (AREA)
- Physical Water Treatments (AREA)
- Cyclones (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US419345 | 1999-10-15 | ||
| US09/419,345 US6355072B1 (en) | 1999-10-15 | 1999-10-15 | Cleaning system utilizing an organic cleaning solvent and a pressurized fluid solvent |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ES2270877T3 true ES2270877T3 (es) | 2007-04-16 |
Family
ID=23661856
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| ES00970901T Expired - Lifetime ES2270877T3 (es) | 1999-10-15 | 2000-10-13 | Sistema de limpieza utilizando un solvente de lavado organico y un solvente fluido presurizado. |
Country Status (13)
| Country | Link |
|---|---|
| US (3) | US6355072B1 (de) |
| EP (1) | EP1224351B1 (de) |
| JP (1) | JP4563638B2 (de) |
| AT (1) | ATE337427T1 (de) |
| AU (1) | AU778581B2 (de) |
| BR (1) | BR0014772A (de) |
| CA (1) | CA2388500C (de) |
| DE (1) | DE60030304T2 (de) |
| ES (1) | ES2270877T3 (de) |
| MX (1) | MXPA02003817A (de) |
| NO (1) | NO20021764L (de) |
| NZ (2) | NZ526305A (de) |
| WO (1) | WO2001029305A1 (de) |
Families Citing this family (70)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20060207035A1 (en) * | 1997-04-04 | 2006-09-21 | Rynex Holdings, Inc. | Biodegradable ether dry cleaning solvent |
| US20070151312A1 (en) * | 2005-12-30 | 2007-07-05 | Bruce Beihoff C | Modular fabric revitalizing system |
| US6045588A (en) | 1997-04-29 | 2000-04-04 | Whirlpool Corporation | Non-aqueous washing apparatus and method |
| US8844160B2 (en) | 1997-04-29 | 2014-09-30 | Whirlpool Corporation | Modular fabric revitalizing system |
| TW539918B (en) | 1997-05-27 | 2003-07-01 | Tokyo Electron Ltd | Removal of photoresist and photoresist residue from semiconductors using supercritical carbon dioxide process |
| US6314601B1 (en) * | 1999-09-24 | 2001-11-13 | Mcclain James B. | System for the control of a carbon dioxide cleaning apparatus |
| US6755871B2 (en) * | 1999-10-15 | 2004-06-29 | R.R. Street & Co. Inc. | Cleaning system utilizing an organic cleaning solvent and a pressurized fluid solvent |
| US6558432B2 (en) * | 1999-10-15 | 2003-05-06 | R. R. Street & Co., Inc. | Cleaning system utilizing an organic cleaning solvent and a pressurized fluid solvent |
| US7097715B1 (en) * | 2000-10-11 | 2006-08-29 | R. R. Street Co. Inc. | Cleaning system utilizing an organic cleaning solvent and a pressurized fluid solvent |
| US6355072B1 (en) * | 1999-10-15 | 2002-03-12 | R.R. Street & Co. Inc. | Cleaning system utilizing an organic cleaning solvent and a pressurized fluid solvent |
| KR100744888B1 (ko) | 1999-11-02 | 2007-08-01 | 동경 엘렉트론 주식회사 | 소재를 초임계 처리하기 위한 장치 및 방법 |
| US6748960B1 (en) | 1999-11-02 | 2004-06-15 | Tokyo Electron Limited | Apparatus for supercritical processing of multiple workpieces |
| SE515491C2 (sv) * | 1999-12-27 | 2001-08-13 | Electrolux Ab | Förfarande och anordning för rengörning av porösa material medelst koldioxid |
| US6828292B2 (en) * | 2000-06-05 | 2004-12-07 | Procter & Gamble Company | Domestic fabric article refreshment in integrated cleaning and treatment processes |
| EP1303870A2 (de) * | 2000-07-26 | 2003-04-23 | Tokyo Electron Limited | Hochdrucksbehandlungskammer für halbleiterscheiben |
| TW544797B (en) * | 2001-04-17 | 2003-08-01 | Kobe Steel Ltd | High-pressure processing apparatus |
| US6457480B1 (en) * | 2001-06-27 | 2002-10-01 | International Business Machines Corporation | Process and apparatus for cleaning filters |
| US7001468B1 (en) | 2002-02-15 | 2006-02-21 | Tokyo Electron Limited | Pressure energized pressure vessel opening and closing device and method of providing therefor |
| US7387868B2 (en) | 2002-03-04 | 2008-06-17 | Tokyo Electron Limited | Treatment of a dielectric layer using supercritical CO2 |
| US20050144989A1 (en) * | 2002-04-22 | 2005-07-07 | General Electric Company | Method and system for controlling a drying process |
| US7021635B2 (en) | 2003-02-06 | 2006-04-04 | Tokyo Electron Limited | Vacuum chuck utilizing sintered material and method of providing thereof |
| US7225820B2 (en) | 2003-02-10 | 2007-06-05 | Tokyo Electron Limited | High-pressure processing chamber for a semiconductor wafer |
| US7077917B2 (en) | 2003-02-10 | 2006-07-18 | Tokyo Electric Limited | High-pressure processing chamber for a semiconductor wafer |
| US7270137B2 (en) | 2003-04-28 | 2007-09-18 | Tokyo Electron Limited | Apparatus and method of securing a workpiece during high-pressure processing |
| US7163380B2 (en) | 2003-07-29 | 2007-01-16 | Tokyo Electron Limited | Control of fluid flow in the processing of an object with a fluid |
| US7454927B2 (en) * | 2003-10-31 | 2008-11-25 | Whirlpool Corporation | Method and apparatus adapted for recovery and reuse of select rinse fluid in a non-aqueous wash apparatus |
| US7739891B2 (en) | 2003-10-31 | 2010-06-22 | Whirlpool Corporation | Fabric laundering apparatus adapted for using a select rinse fluid |
| US7186093B2 (en) | 2004-10-05 | 2007-03-06 | Tokyo Electron Limited | Method and apparatus for cooling motor bearings of a high pressure pump |
| US7837741B2 (en) | 2004-04-29 | 2010-11-23 | Whirlpool Corporation | Dry cleaning method |
| EP1600547A1 (de) * | 2004-05-27 | 2005-11-30 | Linde Aktiengesellschaft | Verfahren zur Behandlung von Gegenständen in einem kondensierten Gas |
| US7250374B2 (en) * | 2004-06-30 | 2007-07-31 | Tokyo Electron Limited | System and method for processing a substrate using supercritical carbon dioxide processing |
| US7307019B2 (en) * | 2004-09-29 | 2007-12-11 | Tokyo Electron Limited | Method for supercritical carbon dioxide processing of fluoro-carbon films |
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1999
- 1999-10-15 US US09/419,345 patent/US6355072B1/en not_active Expired - Lifetime
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2000
- 2000-10-13 NZ NZ526305A patent/NZ526305A/en unknown
- 2000-10-13 AU AU80217/00A patent/AU778581B2/en not_active Ceased
- 2000-10-13 EP EP00970901A patent/EP1224351B1/de not_active Expired - Lifetime
- 2000-10-13 BR BR0014772-9A patent/BR0014772A/pt not_active Application Discontinuation
- 2000-10-13 AT AT00970901T patent/ATE337427T1/de not_active IP Right Cessation
- 2000-10-13 MX MXPA02003817A patent/MXPA02003817A/es active IP Right Grant
- 2000-10-13 ES ES00970901T patent/ES2270877T3/es not_active Expired - Lifetime
- 2000-10-13 JP JP2001532280A patent/JP4563638B2/ja not_active Expired - Fee Related
- 2000-10-13 CA CA002388500A patent/CA2388500C/en not_active Expired - Fee Related
- 2000-10-13 NZ NZ518788A patent/NZ518788A/en unknown
- 2000-10-13 WO PCT/US2000/028432 patent/WO2001029305A1/en not_active Ceased
- 2000-10-13 DE DE60030304T patent/DE60030304T2/de not_active Expired - Lifetime
-
2002
- 2002-01-25 US US10/057,068 patent/US6736859B2/en not_active Expired - Fee Related
- 2002-04-15 NO NO20021764A patent/NO20021764L/no not_active Application Discontinuation
-
2004
- 2004-03-10 US US10/797,516 patent/US20040168262A1/en not_active Abandoned
Also Published As
| Publication number | Publication date |
|---|---|
| MXPA02003817A (es) | 2004-09-06 |
| EP1224351A1 (de) | 2002-07-24 |
| JP2003512111A (ja) | 2003-04-02 |
| WO2001029305A1 (en) | 2001-04-26 |
| AU778581B2 (en) | 2004-12-09 |
| US6736859B2 (en) | 2004-05-18 |
| BR0014772A (pt) | 2003-06-10 |
| DE60030304T2 (de) | 2007-08-23 |
| NO20021764D0 (no) | 2002-04-15 |
| DE60030304D1 (de) | 2006-10-05 |
| US6355072B1 (en) | 2002-03-12 |
| AU8021700A (en) | 2001-04-30 |
| ATE337427T1 (de) | 2006-09-15 |
| CA2388500C (en) | 2004-03-30 |
| CA2388500A1 (en) | 2001-04-26 |
| US20040168262A1 (en) | 2004-09-02 |
| JP4563638B2 (ja) | 2010-10-13 |
| NO20021764L (no) | 2002-06-14 |
| EP1224351B1 (de) | 2006-08-23 |
| NZ526305A (en) | 2005-03-24 |
| US20020100124A1 (en) | 2002-08-01 |
| NZ518788A (en) | 2003-09-26 |
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