ES2161080T3 - Lanzadera de evaporacion de ceramica - Google Patents

Lanzadera de evaporacion de ceramica

Info

Publication number
ES2161080T3
ES2161080T3 ES99107481T ES99107481T ES2161080T3 ES 2161080 T3 ES2161080 T3 ES 2161080T3 ES 99107481 T ES99107481 T ES 99107481T ES 99107481 T ES99107481 T ES 99107481T ES 2161080 T3 ES2161080 T3 ES 2161080T3
Authority
ES
Spain
Prior art keywords
shuttle
ceramic evaporation
evaporator
conducting component
ceramic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES99107481T
Other languages
English (en)
Inventor
Martin Seifert
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Wacker Chemie AG
Original Assignee
Wacker Chemie AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wacker Chemie AG filed Critical Wacker Chemie AG
Application granted granted Critical
Publication of ES2161080T3 publication Critical patent/ES2161080T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Ceramic Products (AREA)

Abstract

LA INVENCION TRATA DE LANZADERAS DE EVAPORACION DE CERAMICA PARA EVAPORAR METAL QUE COMPRENDE COMPONENTE CONDUCTOR Y COMPONENTE NO CONDUCTOR, CARACTERIZADO PORQUE EL COMPONENTE CONDUCTOR DEL MATERIAL CERAMICO ESTA ENRIQUECIDO EN LA SUPERFICIE DE LA LANZADERA DE EVAPORACION, EN LA CUAL SE REALIZA LA EVAPORACION DEL METAL. LAS LANZADERAS DE EVAPORACION TIENEN UN COMPORTAMIENTO MEJORADO DE IMPREGNACION INICIAL.
ES99107481T 1998-05-14 1999-04-29 Lanzadera de evaporacion de ceramica Expired - Lifetime ES2161080T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19821772A DE19821772A1 (de) 1998-05-14 1998-05-14 Keramische Verdampferschiffchen mit verbessertem Erstbenetzungsverhalten

Publications (1)

Publication Number Publication Date
ES2161080T3 true ES2161080T3 (es) 2001-11-16

Family

ID=7867838

Family Applications (1)

Application Number Title Priority Date Filing Date
ES99107481T Expired - Lifetime ES2161080T3 (es) 1998-05-14 1999-04-29 Lanzadera de evaporacion de ceramica

Country Status (7)

Country Link
EP (1) EP0960956B1 (es)
JP (1) JP3355148B2 (es)
CN (1) CN1179065C (es)
AT (1) ATE202804T1 (es)
CA (1) CA2271933C (es)
DE (2) DE19821772A1 (es)
ES (1) ES2161080T3 (es)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1688514B1 (en) * 2003-11-20 2010-08-25 Denki Kagaku Kogyo Kabushiki Kaisha Metal vaporizing heating element and metal vaporizing method
DE102005020946B4 (de) * 2005-05-04 2007-08-02 Esk Ceramics Gmbh & Co. Kg Verfahren und Verdampferschiffchen zum Beschichten von Substraten mit Kupfer oder Silber
DE102005020945B4 (de) * 2005-05-04 2007-07-12 Esk Ceramics Gmbh & Co. Kg Keramische Verdampferschiffchen, Verfahren zu ihrer Herstellung und ihre Verwendung
DE102005030862B4 (de) * 2005-07-01 2009-12-24 Sintec Keramik Gmbh Erstbenetzungshilfsmaterial für einen Verdampferkörper, seine Verwendung zum Herrichten der Verdampferfläche eines Verdampferkörpers und ein elektrisch beheizbarer keramischer Verdampferkörper
KR100786840B1 (ko) 2006-07-31 2007-12-20 삼성에스디아이 주식회사 증발원 및 이를 구비하는 유기물 증착장치
DE102006041048A1 (de) * 2006-09-01 2008-03-20 Esk Ceramics Gmbh & Co. Kg Keramische Verdampferschiffchen, Verfahren zu ihrer Herstellung und ihre Verwendung

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2693521A (en) * 1951-12-26 1954-11-02 Alexander Vacuum Res Inc Heater for vacuum metalizing apparatus
DE1085743B (de) * 1956-12-19 1960-07-21 Heraeus Gmbh W C Verdampfungstiegel aus elektrisch leitenden chemischen Verbindungen
US2996412A (en) * 1958-10-10 1961-08-15 Continental Can Co Art of depositing metals
DE1907099C3 (de) * 1968-07-03 1974-08-15 Union Carbide Corp., New York, N.Y. (V.St.A.) Verwendung eines Verbundwerkstoffes für ein Gefäß zur Handhabung, insbesondere zum Verdampfen von Aluminium oder Aluminium-Legierungen
JPS5118941A (ja) * 1974-08-08 1976-02-14 Denki Kagaku Kogyo Kk Kinzokujohatsuyoyoki
DE3114467A1 (de) * 1981-04-09 1982-10-28 Siemens AG, 1000 Berlin und 8000 München Verdampferschiffchen und verfahren zu seiner herstellung
US4514355A (en) * 1982-12-22 1985-04-30 Union Carbide Corporation Process for improving the high temperature flexural strength of titanium diboride-boron nitride
US4884788A (en) * 1988-04-12 1989-12-05 Union Carbide Corporation Boron nitride containing vessel having a surface coating of titanium iron-silicon thereon
DE19516233C1 (de) * 1995-05-03 1996-06-13 Fraunhofer Ges Forschung Verdampferschiffchen für den Einsatz in der PVD-Beschichtungstechnik

Also Published As

Publication number Publication date
CN1179065C (zh) 2004-12-08
DE19821772A1 (de) 1999-11-18
DE59900143D1 (de) 2001-08-09
EP0960956A1 (de) 1999-12-01
JP2000093788A (ja) 2000-04-04
EP0960956B1 (de) 2001-07-04
JP3355148B2 (ja) 2002-12-09
CA2271933A1 (en) 1999-11-14
CA2271933C (en) 2003-07-15
ATE202804T1 (de) 2001-07-15
CN1236021A (zh) 1999-11-24

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