DE69031161D1 - Elektronenbeschleuniger - Google Patents
ElektronenbeschleunigerInfo
- Publication number
- DE69031161D1 DE69031161D1 DE69031161T DE69031161T DE69031161D1 DE 69031161 D1 DE69031161 D1 DE 69031161D1 DE 69031161 T DE69031161 T DE 69031161T DE 69031161 T DE69031161 T DE 69031161T DE 69031161 D1 DE69031161 D1 DE 69031161D1
- Authority
- DE
- Germany
- Prior art keywords
- electron accelerator
- accelerator
- electron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H9/00—Linear accelerators
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
- H01J37/243—Beam current control or regulation circuits
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Particle Accelerators (AREA)
- Electron Sources, Ion Sources (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1328878A JPH03190044A (ja) | 1989-12-19 | 1989-12-19 | 電子線加速器 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69031161D1 true DE69031161D1 (de) | 1997-09-04 |
DE69031161T2 DE69031161T2 (de) | 1998-03-05 |
Family
ID=18215107
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69031161T Expired - Fee Related DE69031161T2 (de) | 1989-12-19 | 1990-12-19 | Elektronenbeschleuniger |
Country Status (4)
Country | Link |
---|---|
US (1) | US5227700A (de) |
EP (1) | EP0434018B1 (de) |
JP (1) | JPH03190044A (de) |
DE (1) | DE69031161T2 (de) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1761524B (zh) * | 2002-07-22 | 2012-03-21 | Mba聚合物公司 | 介质调节静电分离 |
US6847164B2 (en) | 2002-12-10 | 2005-01-25 | Applied Matrials, Inc. | Current-stabilizing illumination of photocathode electron beam source |
US6919570B2 (en) * | 2002-12-19 | 2005-07-19 | Advanced Electron Beams, Inc. | Electron beam sensor |
US20060184843A1 (en) * | 2003-02-14 | 2006-08-17 | Oakley William S | Data recording using carbon nanotube electron sources |
US20060187802A1 (en) * | 2003-07-03 | 2006-08-24 | Oakley William S | Array of cnt heads |
US8305861B2 (en) * | 2003-07-03 | 2012-11-06 | Oakley William S | Adaptive read and read-after-write for carbon nanotube recorders |
US7250618B2 (en) * | 2005-02-02 | 2007-07-31 | Nikon Corporation | Radiantly heated cathode for an electron gun and heating assembly |
JP4713242B2 (ja) * | 2005-06-24 | 2011-06-29 | 独立行政法人理化学研究所 | 荷電粒子ビームの偏向・収束方法および荷電粒子ビームの偏向・収束器具 |
US11417492B2 (en) * | 2019-09-26 | 2022-08-16 | Kla Corporation | Light modulated electron source |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3388280A (en) * | 1966-04-19 | 1968-06-11 | Victor E. De Lucia | Laser energized hot cathode type of electron discharge device |
NL7213355A (de) * | 1972-10-03 | 1974-04-05 | ||
JPS51127671A (en) * | 1975-04-30 | 1976-11-06 | Hitachi Ltd | Power supply for electron gun |
US4167690A (en) * | 1977-05-02 | 1979-09-11 | Rca Corporation | Cathode and method of operating the same |
JPS6014462B2 (ja) * | 1979-06-26 | 1985-04-13 | 日本電子株式会社 | 電子ビ−ム装置 |
JPS58223247A (ja) * | 1982-06-22 | 1983-12-24 | Toshiba Corp | 電子銃の輝度設定方法 |
JPS5960952A (ja) * | 1982-09-30 | 1984-04-07 | Fujitsu Ltd | 電子ビ−ム露光装置用電子銃 |
JPS61214341A (ja) * | 1985-03-19 | 1986-09-24 | Agency Of Ind Science & Technol | 荷電ビームの集束方法 |
US4705992A (en) * | 1985-11-21 | 1987-11-10 | Conrac Corporation | System for stabilizing cathode emissions with an in-line gun cathode ray tube |
-
1989
- 1989-12-19 JP JP1328878A patent/JPH03190044A/ja active Pending
-
1990
- 1990-12-19 DE DE69031161T patent/DE69031161T2/de not_active Expired - Fee Related
- 1990-12-19 US US07/630,323 patent/US5227700A/en not_active Expired - Fee Related
- 1990-12-19 EP EP90124729A patent/EP0434018B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0434018A3 (en) | 1992-01-02 |
EP0434018B1 (de) | 1997-07-30 |
JPH03190044A (ja) | 1991-08-20 |
US5227700A (en) | 1993-07-13 |
EP0434018A2 (de) | 1991-06-26 |
DE69031161T2 (de) | 1998-03-05 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |