CA2271933A1 - Ceramic evaporation boats having improved initial wetting performance and properties - Google Patents
Ceramic evaporation boats having improved initial wetting performance and properties Download PDFInfo
- Publication number
- CA2271933A1 CA2271933A1 CA002271933A CA2271933A CA2271933A1 CA 2271933 A1 CA2271933 A1 CA 2271933A1 CA 002271933 A CA002271933 A CA 002271933A CA 2271933 A CA2271933 A CA 2271933A CA 2271933 A1 CA2271933 A1 CA 2271933A1
- Authority
- CA
- Canada
- Prior art keywords
- properties
- improved initial
- initial wetting
- wetting performance
- evaporation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Compositions Of Oxide Ceramics (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
- Ceramic Products (AREA)
Abstract
The invention relates to ceramic evaporation boats for the evaporation of metal comprising a conductive component and a nonconductive component, wherein the conductive component of the ceramic material is concentrated at the surface of the evaporation boat from which the evaporation of the metal occurs. The evaporation boats have an improved initial wetting performance.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19821772A DE19821772A1 (en) | 1998-05-14 | 1998-05-14 | Ceramic evaporator boats with improved initial wetting behavior |
DE19821772.2 | 1998-05-14 |
Publications (2)
Publication Number | Publication Date |
---|---|
CA2271933A1 true CA2271933A1 (en) | 1999-11-14 |
CA2271933C CA2271933C (en) | 2003-07-15 |
Family
ID=7867838
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA002271933A Expired - Lifetime CA2271933C (en) | 1998-05-14 | 1999-05-14 | Ceramic evaporation boats having improved initial wetting performance and properties |
Country Status (7)
Country | Link |
---|---|
EP (1) | EP0960956B1 (en) |
JP (1) | JP3355148B2 (en) |
CN (1) | CN1179065C (en) |
AT (1) | ATE202804T1 (en) |
CA (1) | CA2271933C (en) |
DE (2) | DE19821772A1 (en) |
ES (1) | ES2161080T3 (en) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4425860B2 (en) * | 2003-11-20 | 2010-03-03 | 電気化学工業株式会社 | Metal evaporation heating element and metal evaporation method |
DE102005020945B4 (en) * | 2005-05-04 | 2007-07-12 | Esk Ceramics Gmbh & Co. Kg | Ceramic evaporator boats, process for their preparation and their use |
DE102005020946B4 (en) * | 2005-05-04 | 2007-08-02 | Esk Ceramics Gmbh & Co. Kg | Method and evaporator boat for coating substrates with copper or silver |
DE102005030862B4 (en) * | 2005-07-01 | 2009-12-24 | Sintec Keramik Gmbh | First wetting auxiliary material for an evaporator body, its use for preparing the evaporator surface of an evaporator body and an electrically heatable ceramic evaporator body |
KR100786840B1 (en) | 2006-07-31 | 2007-12-20 | 삼성에스디아이 주식회사 | Evaporation source and organic matter sputtering apparatus with the same |
DE102006041048A1 (en) * | 2006-09-01 | 2008-03-20 | Esk Ceramics Gmbh & Co. Kg | Ceramic evaporator boats, process for their preparation and their use |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2693521A (en) * | 1951-12-26 | 1954-11-02 | Alexander Vacuum Res Inc | Heater for vacuum metalizing apparatus |
DE1085743B (en) * | 1956-12-19 | 1960-07-21 | Heraeus Gmbh W C | Evaporation crucible made of electrically conductive chemical compounds |
US2996412A (en) * | 1958-10-10 | 1961-08-15 | Continental Can Co | Art of depositing metals |
DE1907099C3 (en) * | 1968-07-03 | 1974-08-15 | Union Carbide Corp., New York, N.Y. (V.St.A.) | Use of a composite material for a vessel for handling, in particular for evaporating aluminum or aluminum alloys |
JPS5118941A (en) * | 1974-08-08 | 1976-02-14 | Denki Kagaku Kogyo Kk | KINZOKUJOHATSUYOYOKI |
DE3114467A1 (en) * | 1981-04-09 | 1982-10-28 | Siemens AG, 1000 Berlin und 8000 München | Evaporator boat, and method for its manufacture |
US4514355A (en) * | 1982-12-22 | 1985-04-30 | Union Carbide Corporation | Process for improving the high temperature flexural strength of titanium diboride-boron nitride |
US4884788A (en) * | 1988-04-12 | 1989-12-05 | Union Carbide Corporation | Boron nitride containing vessel having a surface coating of titanium iron-silicon thereon |
DE19516233C1 (en) * | 1995-05-03 | 1996-06-13 | Fraunhofer Ges Forschung | Vaporiser boat used in PVD techniques |
-
1998
- 1998-05-14 DE DE19821772A patent/DE19821772A1/en not_active Withdrawn
-
1999
- 1999-04-29 AT AT99107481T patent/ATE202804T1/en not_active IP Right Cessation
- 1999-04-29 DE DE59900143T patent/DE59900143D1/en not_active Expired - Lifetime
- 1999-04-29 ES ES99107481T patent/ES2161080T3/en not_active Expired - Lifetime
- 1999-04-29 EP EP99107481A patent/EP0960956B1/en not_active Expired - Lifetime
- 1999-05-11 JP JP13011499A patent/JP3355148B2/en not_active Expired - Fee Related
- 1999-05-14 CA CA002271933A patent/CA2271933C/en not_active Expired - Lifetime
- 1999-05-14 CN CNB991073525A patent/CN1179065C/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
DE19821772A1 (en) | 1999-11-18 |
ATE202804T1 (en) | 2001-07-15 |
JP2000093788A (en) | 2000-04-04 |
EP0960956B1 (en) | 2001-07-04 |
JP3355148B2 (en) | 2002-12-09 |
CA2271933C (en) | 2003-07-15 |
CN1236021A (en) | 1999-11-24 |
CN1179065C (en) | 2004-12-08 |
DE59900143D1 (en) | 2001-08-09 |
EP0960956A1 (en) | 1999-12-01 |
ES2161080T3 (en) | 2001-11-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
EEER | Examination request | ||
MKEX | Expiry |
Effective date: 20190514 |