CA2271933A1 - Ceramic evaporation boats having improved initial wetting performance and properties - Google Patents

Ceramic evaporation boats having improved initial wetting performance and properties Download PDF

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Publication number
CA2271933A1
CA2271933A1 CA002271933A CA2271933A CA2271933A1 CA 2271933 A1 CA2271933 A1 CA 2271933A1 CA 002271933 A CA002271933 A CA 002271933A CA 2271933 A CA2271933 A CA 2271933A CA 2271933 A1 CA2271933 A1 CA 2271933A1
Authority
CA
Canada
Prior art keywords
properties
improved initial
initial wetting
wetting performance
evaporation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CA002271933A
Other languages
French (fr)
Other versions
CA2271933C (en
Inventor
Martin Seifert
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
3M Innovative Properties Co
Original Assignee
Elektroschmelzwerk Kempten GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Elektroschmelzwerk Kempten GmbH filed Critical Elektroschmelzwerk Kempten GmbH
Publication of CA2271933A1 publication Critical patent/CA2271933A1/en
Application granted granted Critical
Publication of CA2271933C publication Critical patent/CA2271933C/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
  • Ceramic Products (AREA)

Abstract

The invention relates to ceramic evaporation boats for the evaporation of metal comprising a conductive component and a nonconductive component, wherein the conductive component of the ceramic material is concentrated at the surface of the evaporation boat from which the evaporation of the metal occurs. The evaporation boats have an improved initial wetting performance.
CA002271933A 1998-05-14 1999-05-14 Ceramic evaporation boats having improved initial wetting performance and properties Expired - Lifetime CA2271933C (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19821772A DE19821772A1 (en) 1998-05-14 1998-05-14 Ceramic evaporator boats with improved initial wetting behavior
DE19821772.2 1998-05-14

Publications (2)

Publication Number Publication Date
CA2271933A1 true CA2271933A1 (en) 1999-11-14
CA2271933C CA2271933C (en) 2003-07-15

Family

ID=7867838

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002271933A Expired - Lifetime CA2271933C (en) 1998-05-14 1999-05-14 Ceramic evaporation boats having improved initial wetting performance and properties

Country Status (7)

Country Link
EP (1) EP0960956B1 (en)
JP (1) JP3355148B2 (en)
CN (1) CN1179065C (en)
AT (1) ATE202804T1 (en)
CA (1) CA2271933C (en)
DE (2) DE19821772A1 (en)
ES (1) ES2161080T3 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4425860B2 (en) * 2003-11-20 2010-03-03 電気化学工業株式会社 Metal evaporation heating element and metal evaporation method
DE102005020945B4 (en) * 2005-05-04 2007-07-12 Esk Ceramics Gmbh & Co. Kg Ceramic evaporator boats, process for their preparation and their use
DE102005020946B4 (en) * 2005-05-04 2007-08-02 Esk Ceramics Gmbh & Co. Kg Method and evaporator boat for coating substrates with copper or silver
DE102005030862B4 (en) * 2005-07-01 2009-12-24 Sintec Keramik Gmbh First wetting auxiliary material for an evaporator body, its use for preparing the evaporator surface of an evaporator body and an electrically heatable ceramic evaporator body
KR100786840B1 (en) 2006-07-31 2007-12-20 삼성에스디아이 주식회사 Evaporation source and organic matter sputtering apparatus with the same
DE102006041048A1 (en) * 2006-09-01 2008-03-20 Esk Ceramics Gmbh & Co. Kg Ceramic evaporator boats, process for their preparation and their use

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2693521A (en) * 1951-12-26 1954-11-02 Alexander Vacuum Res Inc Heater for vacuum metalizing apparatus
DE1085743B (en) * 1956-12-19 1960-07-21 Heraeus Gmbh W C Evaporation crucible made of electrically conductive chemical compounds
US2996412A (en) * 1958-10-10 1961-08-15 Continental Can Co Art of depositing metals
DE1907099C3 (en) * 1968-07-03 1974-08-15 Union Carbide Corp., New York, N.Y. (V.St.A.) Use of a composite material for a vessel for handling, in particular for evaporating aluminum or aluminum alloys
JPS5118941A (en) * 1974-08-08 1976-02-14 Denki Kagaku Kogyo Kk KINZOKUJOHATSUYOYOKI
DE3114467A1 (en) * 1981-04-09 1982-10-28 Siemens AG, 1000 Berlin und 8000 München Evaporator boat, and method for its manufacture
US4514355A (en) * 1982-12-22 1985-04-30 Union Carbide Corporation Process for improving the high temperature flexural strength of titanium diboride-boron nitride
US4884788A (en) * 1988-04-12 1989-12-05 Union Carbide Corporation Boron nitride containing vessel having a surface coating of titanium iron-silicon thereon
DE19516233C1 (en) * 1995-05-03 1996-06-13 Fraunhofer Ges Forschung Vaporiser boat used in PVD techniques

Also Published As

Publication number Publication date
DE19821772A1 (en) 1999-11-18
ATE202804T1 (en) 2001-07-15
JP2000093788A (en) 2000-04-04
EP0960956B1 (en) 2001-07-04
JP3355148B2 (en) 2002-12-09
CA2271933C (en) 2003-07-15
CN1236021A (en) 1999-11-24
CN1179065C (en) 2004-12-08
DE59900143D1 (en) 2001-08-09
EP0960956A1 (en) 1999-12-01
ES2161080T3 (en) 2001-11-16

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EEER Examination request
MKEX Expiry

Effective date: 20190514