DE3114467A1 - Evaporator boat, and method for its manufacture - Google Patents

Evaporator boat, and method for its manufacture

Info

Publication number
DE3114467A1
DE3114467A1 DE19813114467 DE3114467A DE3114467A1 DE 3114467 A1 DE3114467 A1 DE 3114467A1 DE 19813114467 DE19813114467 DE 19813114467 DE 3114467 A DE3114467 A DE 3114467A DE 3114467 A1 DE3114467 A1 DE 3114467A1
Authority
DE
Germany
Prior art keywords
boat
molybdenum
metals
coating
tungsten
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE19813114467
Other languages
German (de)
Inventor
Roland Dipl.-Ing. 8000 München Haft
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Priority to DE19813114467 priority Critical patent/DE3114467A1/en
Publication of DE3114467A1 publication Critical patent/DE3114467A1/en
Withdrawn legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/009—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
    • C04B41/51—Metallising, e.g. infiltration of sintered ceramic preforms with molten metal
    • C04B41/5133—Metallising, e.g. infiltration of sintered ceramic preforms with molten metal with a composition mainly composed of one or more of the refractory metals
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
    • C04B41/81—Coating or impregnation
    • C04B41/85—Coating or impregnation with inorganic materials
    • C04B41/88—Metals
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Structural Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

A boat for evaporating metals at high rates, which consists of from 40% to 70% of ZrO2 and from 30% to 60% of Mo, has a coating, on its inside, made of tungsten and/or molybdenum. Thus metals such as copper, iron, nickel or alloys of these metals can be vapour-deposited at high rates onto strip-shaped foils.

Description

VerdamDferschiffohen und Verfahren zu seiner HerstellungVerdamDferschiffohen and process for its manufacture

Die Erfindung betrifft ein Schiffchen zum Verdampfen von Metallen in hohen Raten aus feuerfesten Oxidkeramiken und ein Verfahren zu seiner Herstellung.The invention relates to a boat for vaporizing metals in high rates from refractory oxide ceramics and a process for its manufacture.

In zunehmendem Maße werden heute Folien, beispielsweise aus Kunststoff oder Papier als Träger oder Dielektrika für elektronische Bauteile verwendet. Beispielsweise seien hier Wickelkondensatoren, Schichtschaltungen, Sensorelemente auf Folienbasis, Abschirmfolien und ähnliche passive Bauelemente angeführt. Bei der Herstellung dieser Bauelemente ist es erforderlich, die Folienoberflächen mit gut leitenden Metallbelägen zu versehen, die als Widerstände, Kondensator -Elektroden, Leiterbahnen oder Lötstützpunkte benötigt werden.Films, for example made of plastic, are increasingly being used today or paper is used as a carrier or dielectric for electronic components. For example be wound capacitors, layer circuits, film-based sensor elements, Shielding foils and similar passive components listed. In making this It is necessary for structural elements to cover the foil surfaces with highly conductive metal coatings to be provided as resistors, capacitor electrodes, conductor tracks or soldering terminals are needed.

Es ist deswegen erforderlich, auf große Flächen bandförmigen Folienmaterials ausreichend dicke metallische, für bestimmte Anwendungszwecke auch lötfähige Schichten aufzubringen, was besonders rationell durch ein Aufdampfen dieser Metalle im Vakuum geschehen kann. Für große Schichtdicken und Foliendurchsätze war es bisher nur möglich niedrig schmelzende Metalle, wie Zink und Alumimium, mit ausreichender Abdampfrate und Gleichmäßigkeit mit Hilfe von Verdampferschiffchen auf die Folien aufzubringen.It is therefore necessary to use tape-shaped film material on large areas sufficiently thick metallic layers that can also be soldered for certain purposes to apply, which is particularly efficient by vapor deposition of these metals in a vacuum can happen. Up to now it was only possible for large layer thicknesses and film throughputs low-melting metals, such as zinc and aluminum, with a sufficient evaporation rate and to apply uniformity to the foils with the aid of evaporation boats.

Andere Metalle, wie beispielsweise Kupfer, Nickel oder Chromnickellegierungen, welche zur Herstellung der genannten Bauelemente benötigt werden, konnten bisher nur in kleinen Mengen aus direkt beheizten Wolfram- oder Molybdän-Blechschiffchen verdampft werden. Die für die Aufdampfung von größeren Mengen erforderlichen Nachschubvorrichtungen und Leistungserhöhungsn führten zu raschem Durchlegieren oder Durchbrennen dieser Bleche.Other metals, such as copper, nickel or chromium-nickel alloys, which are used to produce the said Components are required, Until now, they could only use small quantities of directly heated tungsten or molybdenum sheet metal boats be vaporized. The supply devices required for the vapor deposition of larger quantities and power increases led to rapid alloying or burning through of these Sheets.

Die Verdampfung der genannten Metalle mit größeren Schiffchen aus Kohle, intermetallischen Verbindungen (z. B. --Barnitrid / Titandiborid), oxidkeramischem feuerfesten Materialien und feuerfesten Karbiden führte zu keinen befriedigenden Ergebnissen, da die meisten Metalle dazu neigen, diese Stoffe nicht zu benetzen. Als Folgen davon sind anzuführen, daß sich kein zusammenhängender See des geschmolzenen Verdampfermaterials bildet, daß die Abdampfung selbst sehr unruhig ist und daß Teile der Schmelze herausgeschleudert werden können.The evaporation of the metals mentioned with larger boats Carbon, intermetallic compounds (e.g. --baronitride / titanium diboride), oxide ceramic refractory materials and refractory carbides did not give satisfactory results Results because most metals tend not to wet these fabrics. The consequence of this is that there is no continuous lake of the melted Evaporator material forms that the evaporation itself is very restless and that parts the melt can be thrown out.

Es ist zwar möglich Drähte, Bügel, Stäbe, Netze bzw.It is possible to use wires, brackets, rods, nets or

Blecheinsätze aus hochschmelzenden Metallen, wie beispielsweise Wolfram oder Molybdän, die von den aufzudampfenden Metallen gut benetzt werden, in irgendeiner Form im Schiffchenbett zu fixieren, jedoch ist auch hierbei der Wärmeübergang vom direkt beheizten Schiffchen zur Schmelze bzw. der Übergang Schiffchen-Benetzungshilfe-Schmelze nicht überall gleichmäßig, da die Schmelze praktisch.nur mit der Benetzungshilfe eine gute Verbindung eingeht. Dies führt wieder zu ungleichmäßiger Seeverteilung, überhitzten Stellen und Weglegieren der Benetzungshilfe.Sheet metal inserts made of refractory metals such as tungsten or molybdenum, which are well wetted by the metals to be vapor deposited, in either To fix the shape in the shuttle bed, but here too the heat transfer from the directly heated boat to the melt or the transition from boat to wetting aid to melt not evenly everywhere, since the melt practically only with the wetting aid enters into a good connection. This again leads to an uneven distribution of the sea, overheated areas and alloying away of the wetting aid.

Aufgabe der Erfindung ist es daher, ein Verdampferschiffchen aus feuerfesten oxidkeramischen Materialien anzuge- ben, mit dem Metalle, wie Kupfer, Eisen, Nickel oder Legierungen dieser Metalle auf bandförmiges Folienmaterial aufgebracht werden können.The object of the invention is therefore to provide an evaporation boat made of refractory oxide ceramic materials. ben, with which metals, such as copper, Iron, nickel or alloys of these metals applied to tape-shaped foil material can be.

Diese Aufgabe wird erfindungsgemäß dadurch gelöst, daß auf der Innenseite des Verdampferschiffchens ein Überzug aus Wolfram und/oder Molybdän angeordnet ist.This object is achieved according to the invention in that on the inside a coating of tungsten and / or molybdenum is arranged on the evaporator boat.

Vorteilhafte Weiterbildungen der Erfindung sehen vor, daß das Schiffchen aus Zirkondioxid besteht und als weitere Komponente Molybdän enthält und vorzugsweise aus 40 96 bis 70 % ZrO2 und 30 % bis 60 % Mo besteht und daß der Überzug O,1 mm bis 2 mm dick ist.Advantageous developments of the invention provide that the shuttle consists of zirconium dioxide and contains molybdenum as a further component and preferably consists of 40 96 to 70% ZrO2 and 30% to 60% Mo and that the coating 0.1 mm up to 2 mm thick.

Aus den erfindungsgemäßen Verdampferschiffchen können die genannten Metalle, wie Kupfer, Eisen, Nickel bzw.From the evaporation boats according to the invention, the mentioned Metals such as copper, iron, nickel or

deren Legierungen (z. B. CrNi), bei denen die Verdampfung größerer Raten aus Blechschiffchen problematisch ist, gleichmäßig und in hohen Raten unter Verwendung von Drahtnachschüben verdampft werden. Selbst wenn an kritischen Stellen, z. B. der Drahteinlaufzone die Beschichtung auf der Innenseite des Verdampferschiffchens lokal zerstört oder durchlegiert wird, sind diese Schiffchen noch lange einsatzfähig.their alloys (e.g. CrNi), in which the evaporation is greater Taking out sheet metal boats is problematic, evenly and at high rates Use of wire supplies to be vaporized. Even if at critical points, z. B. the wire inlet zone the coating on the inside of the evaporation boat is locally destroyed or alloyed, these boats can be used for a long time.

Bei einem Ausführungsbeispiel wurde ein Schiffchen mit einer 1 mm dicken Molybdän-Beschichtung versehen. Aus diesem Schiffchen konnte Kupfer mit einer Verdampfungsrate von ca. 1 kg/h abgedampft werden, und das Schiffchen wies eine Lebensdauer von ca. 30 Stunden auf. Danach konnte das Schiffchen neu beschichtet und bei gleicher Verdampfungsrate ähnlich lang verwendet werden.In one embodiment, a shuttle with a 1 mm thick molybdenum coating. From this boat, copper could use a Evaporation rate of about 1 kg / h can be evaporated, and the boat had a Lifespan of about 30 hours. Then the boat could be re-coated and can be used for a similar length of time with the same evaporation rate.

Das erfindungsgemäße Verfahren zum Herstellen des angeführten Verdampferschiffchens sieht vor, daß die Wolfram- und/oder Molybdänbeschichtung im Flammspritz- oder Plasmaspritzverfahren aufgebracht wird.The method according to the invention for producing the stated evaporation boat provides that the tungsten and / or molybdenum coating in the flame spray or plasma spray process is applied.

Damit wird der Vorteil erzielt, daß besonders gut haftende Schichten der genannten Materialien erhalten werden.This has the advantage that layers that adhere particularly well of the materials mentioned can be obtained.

Unter ungünstigen Voraussetzungen können nämlich Schichten, die aus aufgesinterten Wolfram- und/oder Molybdän-Pulver hergestellt worden sind, örtlich abplatzen.Under unfavorable conditions, layers that consist of sintered-on tungsten and / or molybdenum powder have been produced locally flake off.

6 Patentansprüche6 claims

Claims (6)

Patentansprüche Ql Schiffchen zum Verdampfen von Metallen in hohen Raten aus feuerfesten Oxidkeramiken, d a d u r c h g e -k e n n z e i c h n e t , daß auf der Innenseite des Verdampferschiffchens ein Uberzug aus Wolfram und/oder Molybdän angeordnet ist.Claims Ql boat for vaporizing metals in high Installments from refractory oxide ceramics, d u r c h e -k e n n z e i n e t that on the inside of the evaporation boat a coating made of tungsten and / or Molybdenum is arranged. 2. Schiffchen nach Anspruch 1, d a d u r c h g e -k e n n z e i c h n e t , daß der Überzug 0,1 mm bis 2 mm dick ist.2. boat according to claim 1, d a d u r c h g e -k e n n z e i c Note that the coating is 0.1 mm to 2 mm thick. 3. Schiffchen nach Anspruch 1 oder 2, d a d u r c h g e k e n n z e i c h n e t , daß es aus Zirkondioxid (zur02) besteht.3. boat according to claim 1 or 2, d a d u r c h g e k e n n z it is clear that it consists of zirconium dioxide (zur02). 4. Schiffchen nach Anspruch 3, d a d u r c h g e -k e n n z e i c h n e t , daß es als weitere Komponente Molybdän enthält.4. boat according to claim 3, d a d u r c h g e -k e n n z e i c Not that it contains molybdenum as a further component. 5. Schiffchen nach Anspruch 4, d a d u r c h g e -k e n n z e i c h n e t , daß es aus 40 96 bis 70 96 Zirkondioxid (ZrO2) und 30 bis 60 % Molybdän besteht 5. boat according to claim 4, d a d u r c h g e -k e n n z e i c Note that it consists of 40 96 to 70 96 zirconia (ZrO2) and 30 to 60% molybdenum consists 6. Verfahren zum Herstellen eines Schiffchens nach einem der Ansprüche 1 bis 5, d a d u r c h g e k e n n -z e i c h n e t , daß die Wolfram- und/oder Molybdänbeschichtung im Flammspritz- oder Plasmaspritzverfahren aufgebracht wird.6. A method for producing a shuttle according to any one of claims 1 to 5, d a d u r c h e k e n n -z e i c h n e t that the tungsten and / or molybdenum coating is applied by flame spraying or plasma spraying.
DE19813114467 1981-04-09 1981-04-09 Evaporator boat, and method for its manufacture Withdrawn DE3114467A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE19813114467 DE3114467A1 (en) 1981-04-09 1981-04-09 Evaporator boat, and method for its manufacture

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19813114467 DE3114467A1 (en) 1981-04-09 1981-04-09 Evaporator boat, and method for its manufacture

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DE3114467A1 true DE3114467A1 (en) 1982-10-28

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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19516233C1 (en) * 1995-05-03 1996-06-13 Fraunhofer Ges Forschung Vaporiser boat used in PVD techniques
WO1999039022A2 (en) * 1998-01-29 1999-08-05 Siced Electronics Development Gmbh & Co. Kg SUBSTRATE SUPPORT FOR SiC EPITAXY AND METHOD FOR PRODUCING AN INSERT FOR A SUSCEPTOR
EP0960956A1 (en) * 1998-05-14 1999-12-01 Elektroschmelzwerk Kempten GmbH Ceramic evaporation boats
US6645572B2 (en) 1998-05-14 2003-11-11 Wacker-Chemie Gmbh Process for producing a ceramic evaporation boat having an improved initial wetting performance
DE102005020946A1 (en) * 2005-05-04 2006-11-09 Esk Ceramics Gmbh & Co. Kg Process for coating substrates with copper or silver
DE102005020945A1 (en) * 2005-05-04 2006-11-09 Esk Ceramics Gmbh & Co. Kg Ceramic evaporator boats, process for their preparation and their use

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19516233C1 (en) * 1995-05-03 1996-06-13 Fraunhofer Ges Forschung Vaporiser boat used in PVD techniques
WO1999039022A2 (en) * 1998-01-29 1999-08-05 Siced Electronics Development Gmbh & Co. Kg SUBSTRATE SUPPORT FOR SiC EPITAXY AND METHOD FOR PRODUCING AN INSERT FOR A SUSCEPTOR
WO1999039022A3 (en) * 1998-01-29 1999-09-23 Siemens Ag SUBSTRATE SUPPORT FOR SiC EPITAXY AND METHOD FOR PRODUCING AN INSERT FOR A SUSCEPTOR
US6740167B1 (en) 1998-01-29 2004-05-25 Siced Electronics Development Gmbh & Co., Kg Device for mounting a substrate and method for producing an insert for a susceptor
EP0960956A1 (en) * 1998-05-14 1999-12-01 Elektroschmelzwerk Kempten GmbH Ceramic evaporation boats
US6645572B2 (en) 1998-05-14 2003-11-11 Wacker-Chemie Gmbh Process for producing a ceramic evaporation boat having an improved initial wetting performance
DE102005020946A1 (en) * 2005-05-04 2006-11-09 Esk Ceramics Gmbh & Co. Kg Process for coating substrates with copper or silver
WO2006117118A1 (en) * 2005-05-04 2006-11-09 Esk Ceramics Gmbh & Co. Kg Method for coating substrates with copper or silver
DE102005020945A1 (en) * 2005-05-04 2006-11-09 Esk Ceramics Gmbh & Co. Kg Ceramic evaporator boats, process for their preparation and their use
DE102005020945B4 (en) * 2005-05-04 2007-07-12 Esk Ceramics Gmbh & Co. Kg Ceramic evaporator boats, process for their preparation and their use
DE102005020946B4 (en) * 2005-05-04 2007-08-02 Esk Ceramics Gmbh & Co. Kg Method and evaporator boat for coating substrates with copper or silver

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