DE102005020945B4 - Ceramic evaporator boats, process for their preparation and their use - Google Patents

Ceramic evaporator boats, process for their preparation and their use

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Publication number
DE102005020945B4
DE102005020945B4 DE200510020945 DE102005020945A DE102005020945B4 DE 102005020945 B4 DE102005020945 B4 DE 102005020945B4 DE 200510020945 DE200510020945 DE 200510020945 DE 102005020945 A DE102005020945 A DE 102005020945A DE 102005020945 B4 DE102005020945 B4 DE 102005020945B4
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Prior art keywords
coating
metals
evaporator
evaporator boat
characterized
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Expired - Fee Related
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DE200510020945
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German (de)
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DE102005020945A1 (en
Inventor
Dietrich Dr.-Ing. Lange
Christoph Dr. Lesniak
Martin Dipl.-Phys. Seifert
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ESK Ceramics GmbH and Co KG
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ESK Ceramics GmbH and Co KG
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Publication of DE102005020945A1 publication Critical patent/DE102005020945A1/en
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    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/009After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/50Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
    • C04B41/5053Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials non-oxide ceramics
    • C04B41/5062Borides, Nitrides or Silicides
    • C04B41/507Borides
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/50Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
    • C04B41/51Metallising, e.g. infiltration of sintered ceramic preforms with molten metal
    • C04B41/5133Metallising, e.g. infiltration of sintered ceramic preforms with molten metal with a composition mainly composed of one or more of the refractory metals
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/52Multiple coating or impregnating multiple coating or impregnating with the same composition or with compositions only differing in the concentration of the constituents, is classified as single coating or impregnation
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/80After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
    • C04B41/81Coating or impregnation
    • C04B41/85Coating or impregnation with inorganic materials
    • C04B41/87Ceramics
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/80After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
    • C04B41/81Coating or impregnation
    • C04B41/89Coating or impregnation for obtaining at least two superposed coatings having different compositions
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/80After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
    • C04B41/81Coating or impregnation
    • C04B41/89Coating or impregnation for obtaining at least two superposed coatings having different compositions
    • C04B41/90Coating or impregnation for obtaining at least two superposed coatings having different compositions at least one coating being a metal
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • C23C14/243Crucibles for source material
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2111/00Mortars, concrete or artificial stone or mixtures to prepare them, characterised by specific function, property or use
    • C04B2111/90Electrical properties
    • C04B2111/94Electrically conducting materials

Abstract

Evaporator boat made of an electrically conductive ceramic substrate for the vapor deposition of substrates with metals, characterized in that on the surface of the evaporator boat from which the evaporation of the metals, one of the following coatings is provided:
a) a coating of at least one borane of a transition metal of the 4th to 6th subgroups of the periodic table,
b) a coating of a mixture of the metal to be evaporated, selected from aluminum, copper and silver, and at least one transition metal of the 4th to 6th subgroup of the Periodic Table and / or their borides,
c) a first coating of at least one transition metal of the 4th to 6th subgroup of the Periodic Table and / or their borides and a coating applied thereon from the metal to be evaporated.

Description

  • Territory of invention
  • The The invention relates to evaporator boats made of an electrically conductive ceramic Support material Process for their preparation and their use for steaming of substrates with metals.
  • was standing of the technique
  • The common Method of coating flexible substrates with metals, especially with aluminum, is the so-called high vacuum band vapor deposition. in this connection is the substrate to be coated on a cooled roller guided while exposed to the aluminum vapor, which is on the substrate surface as thin metal layer reflected.
  • To produce the required constant steam flow ceramic evaporators, so-called evaporator boats, heated in the direct current passage to about 1450 ° C. Aluminum wire is fed continuously, liquefied on the ceramic surface and evaporated at a vacuum of about 10 -4 mbar. In metallization a number of evaporator boats are arranged so that over the entire width of the substrate, a uniformly thick aluminum layer deposited.
  • The chemical composition of the evaporator boats made of electrically conductive ceramic material usually consists of titanium diboride (TiB 2 ), boron nitride (BN) and optionally aluminum nitride (AlN). Here, TiB 2 is the electrically conductive component that allows the evaporator to heat up as an ohmic resistance.
  • One the main problem when operating Bandbedampfungsanlagen is the initial wetting of the evaporator boats with the metal to be vaporized. For large layer thicknesses and substrate throughputs until now it was only possible low-melting metals, such as aluminum and zinc, with sufficient evaporation rate and uniformity to be applied to flexible substrates by means of evaporator boats. Other metals, such as copper or silver, have so far only in small quantities from directly heated tungsten or molybdenum sheet metal boats be evaporated. The tungsten sheet metal boats have a completely different shape than the usual used in Bandbedampfungsanlagen ceramic evaporator boat, which has the consequence that the restraints for the W-sheet metal boats are completely different must be designed as the restraints for Ceramic evaporator and a complicated conversion of the clamping required is when the strip evaporator from Al evaporation to Cu evaporation to be converted. Another disadvantage of W-sheet metal boats is its deflection during of the operation, since tungsten and copper have different thermal Have expansion coefficients. This leads to tensions and deformations in the W-Blechschiffchen. This deformation is known by the term "bimetallic effect".
  • The DE 25 35 569 A1 describes an evaporator boat made of an electrically conductive ceramic material with a coating containing as main component one or more carbides or alternatively metallic tungsten, tantalum or molybdenum. As metals to be evaporated, only Al, Sb, Ni and nichrome wire are mentioned. However, the boats described there have not prevailed on the market.
  • The DE 31 14 467 A1 describes a boat for evaporating metals from refractory oxide ceramics, such as ZrO 2 , wherein on the inside of the boat, a coating of tungsten and / or molybdenum is arranged. With this boat to metals, such as copper, iron, nickel or alloys of these metals can be applied to tape-shaped film materials. However boat made of ZrO 2 -Oxidkeramiken are brittle and sensitive to thermal shock and therefore unsuitable for the evaporation of metals. They are also not introduced to the market and have not prevailed in practice.
  • The DE 39 35 163 C1 describes evaporator boats made of hot-pressed, electrically conductive mixed materials of boron nitride, optionally aluminum nitride and titanium boride and one or more metals from the group tungsten, molybdenum and chromium for the evaporation of aluminum, copper or silver. However, these boats have the disadvantage that they have a poor wetting for the metals to be evaporated, in particular for copper and silver and have a poor Einfahrcharakteristik, whereby a user-intensive readjustment in the run-in phase is required.
  • task the invention
  • Of the Invention is therefore the object of an evaporator boat from an electrically conductive ceramic carrier material for the steaming of substrates with metals, which in particular a show good initial wetting by the metals to be evaporated, so that a good Einfahrcharakteristik can be achieved. Further to provide methods for producing such evaporator boats become.
  • Summary the invention
  • The The above object is achieved by an evaporator boat for the steaming of substrates with metals according to claim 1 and by methods according to claims 6 and 7th
  • preferred or particularly expedient embodiments of the subject of the application are specified in the subclaims.
  • The Evaporator boats according to the invention show an excellent first wetting by the to be evaporated Metals aluminum, copper and silver and therefore have a good run-in characteristics. They are in usual without further modification Vacuum Bandbedampfungsanlagen used. Due to the good wetting can be a maximum bath size of the respective Metal bath reached and thus achieves the highest possible Abdampfleistungen become. The evaporation by means of the evaporator boats according to the invention is low-spatter and even, so that a high layer uniformity of the metallized substrate is achieved.
  • detailed Description of the invention
  • The invention thus relates to an evaporator boat made of an electrically conductive ceramic carrier material for the vapor deposition of substrates with metals, characterized in that one of the following coatings is provided on the surface of the evaporator boat, from which the evaporation of the metals takes place:
    • a) a coating of at least one borane of a transition metal of the 4th to 6th subgroups of the periodic table,
    • b) a coating of a mixture of the metal to be evaporated, selected from aluminum, copper and silver, and at least one transition metal of the 4th to 6th subgroup of the Periodic Table and / or their borides,
    • c) a first coating of at least one transition metal of the 4th to 6th subgroup of the Periodic Table and / or their borides and a coating applied thereon from the metal to be evaporated.
  • object The invention further provides a method for producing a such evaporator boat, in which one on the ceramic substrate Apply a suspension of the coating material and then dried.
  • According to one alternative method of making such a vaporizer boat is the coating by a known per se plasma spraying generated.
  • The evaporator boat according to the invention preferably comprises an electrically conductive ceramic material which contains titanium diboride and boron nitride and optionally aluminum nitride as main components and which is produced by hot pressing of these components. Preferably, the evaporator boat from 45-60 wt .-% TiB 2 , 20-55 wt .-% BN and 0-20 wt .-% AlN, wherein further conventional additives and auxiliaries may be included.
  • The Coating of the evaporator boat according to the invention preferably has an average thickness of 1-750 microns, on preferably 15-500 μm, even more preferably 50-150 μm, on.
  • The evaporator boat according to the invention has a shape known in the art, for example a rectangular cross-section or a cross-section in the form of a bisected ellipse, as for example EP 0 962 546 B1 is known.
  • The surface of the evaporator boat according to the invention, from which the evaporation of the metal takes place, is provided with one of the following coatings:
    • a) a coating of at least one boride of a transition metal of the 4th to 6th subgroups of the periodic table,
    • b) a coating of a mixture of the metal to be evaporated, selected from aluminum, copper and silver, and at least one transition metal of the 4th to 6th subgroup of the Periodic Table and / or their borides,
    • c) a first coating of at least one transition metal of the 4th to 6th subgroup of the Periodic Table and / or their borides and a coating applied thereon from the metal to be evaporated.
  • Titanium, zirconium, vanadium, molybdenum and tungsten are preferred as transition metals of the 4th to 6th subgroup of the Periodic Table, in particular tungsten, and as borides in particular tungsten borides, such as WB and W 2 B 5 . Particularly suitable for the evaporation of aluminum, copper or silver, a coating of tungsten borides has been found, as this occurs from the beginning of use of a good and uniform wetting, which leads to a temporally and spatially low-spatter constant evaporation rate of the metal. In the case of a coating of a mixture of copper and tungsten and / or tungsten boride for the evaporation of copper, the copper content in the coating is preferably at most 50% by volume, more preferably 20% by volume or less to achieve a preferred initial wetting behavior. For the evaporation of silver, according to another embodiment, the coating of a Mi consist of silver and tungsten and / or tungsten borides. For the evaporation of aluminum, according to another embodiment, the coating may consist of a mixture of aluminum and tungsten and / or tungsten borides. In these embodiments, the silver content or the aluminum content in the respective coating is preferably at most 50% by volume, more preferably 20% by volume or less, in order to achieve a preferred initial wetting behavior.
  • The Evaporator boats according to the invention are not only suitable for high-vacuum strip evaporation of flexible Substrates, such as paper and plastic films with the metals aluminum, Copper or silver, but also for unit load, for example from TV screens.
  • The Metal evaporation takes place analogously to those known in the art Aluminum evaporation by using metal wire. The used For example, metal wire may have a thickness of about 1.0-2.0 mm.
  • The Preparation of a coating for an inventive evaporator boat takes place, for example, by applying a suspension of the coating material, such as tungsten boride in acetone, on the surface of the evaporator boat, from which the evaporation of the metal takes place, for example the cavity, and subsequent drying for evaporation of the solvent. The coating can also be achieved by a melt or plasma spraying.
  • in the In the simplest case, a coating can be achieved by that on the surface the evaporator boat granules, such as WB granules scattered becomes. However, the application of a coating is preferred the plasma spraying process, since this is a uniform coating which also provides a more even wetting for the vaporizing metals shows.
  • The The following examples serve to further explain the invention.
  • Example 1 (plasma-sprayed WB coating for Cu evaporation)
  • Evaporation boats of size 10 × 20 × 120 mm 3 of an electrically conductive TiB 2 -BN mixed ceramic are coated after appropriate pretreatment on the functional surface with tungsten boride. The composition of the tungsten boride is nominally WB; The X-ray phase analysis of the tungsten boride used revealed that it consists essentially of WB with about 5% by volume of W 2 B 5 . The layer thickness was measured on a co-coated comparative piece by placing a polished cut through the cross-section of the reference piece. The layer thickness was 120 μm on average.
  • The so coated evaporator boats were installed in a Bandbedampfungsanlage and each occupied about 5 grams of copper wire pieces (wire diameter 2 mm). After closing the system and reaching the necessary vacuum of <10 -4 mbar, the heating power was set to 4.68 KW.
  • at approx. 60% of the final output begins to melt the laid copper, on further increase the temperature begins the copper to wet the coated area of the evaporator.
  • If the fed-in power has reached about 85%, the copper wire feed the Bandbedampfungsanlage be started. For the present example a copper wire with a diameter of 2.0 mm was used.
  • The with Wolframborid coated evaporator boats show already at low power (equivalent to low temperature) a very good and even wetting the coated functional surface.
  • With this evaporator boat according to the invention was able to maintain a constant evaporative power of 15 grams for 6 hours Copper can be kept per minute without affecting the performance of the evaporator has subsided.
  • Example 2: (plasma sprayed W-Cu coating for Cu evaporation)
  • 10 × 20 × 120 mm 3 evaporator boats made of an electrically conductive TiB 2 -BN-AlN mixed ceramic are plasma-spray-coated after appropriate preparation of the surface with a layer consisting of a mixture of metallic tungsten and 15% by volume copper. For this purpose, a W metal powder with an average particle size of 25 microns was used (manufacturer eg HC Starck in Goslar) and an electrolytic copper powder with the average particle size of 75 microns. The two powder components were homogenized for 12 hours dry on a roller block using hard metal balls before processing in the plasma spraying system. After homogenizing the powders, care was taken to ensure that the powders, which tend to segregate due to the large difference in specific gravity, do not become inhomogeneous due to vibrations or vibrations.
  • The Layer thickness was determined on a co-coated comparator to 132 microns, by putting a polished cut through the cross section of the comparison piece has been.
  • The Layer made in this example is easily apparent reddish Hue of copper from the others, containing only W metal or tungsten boride Layers distinguishable.
  • The so coated evaporators were installed in a Bandbedampfungsanlage and each occupied about 4 grams of copper wire pieces (wire diameter 2 mm). After closing the system and reaching the necessary vacuum of <10 -4 mbar, the heating power was set to 4.68 KW.
  • at approx. 60% of the final output begins to melt the applied copper, with further increase of Temperature begins the copper to wet the coated area of the evaporator very evenly. The copper powder embedded in the layer melts earlier than the applied powder, as the heat transfer is better than the laid copper wire pieces, which are heated only by thermal radiation become. Due to the very early in the layer melting copper components causes the applied copper wire pieces at Melt relatively low temperature or power. By the Homogeneously distributed in the layer copper is an even more uniform initial wetting of the functional area causes, as by the applied copper pieces locally forming melt must not be uniformed by surface forces. The effect of the copper contained in the coating is temporary because the copper from the layer, the copper of the applied wire pieces and the Combine copper from the permanent wire feed.
  • If the fed-in power has reached about 85%, the copper wire feed of the Bandbedampfungsanlage be started. For the present example a copper wire with a diameter of 2.0 mm was used.
  • The Evaporator boats according to the invention showed 91% electrical power a constant evaporation performance of 18 grams of Cu per minute. The relatively high evaporation rate of the Evaporator boats according to the invention is probably because that produced by powder mixing Coating a larger specific surface has as a layer composed only of W-metal or tungsten boride is.
  • The uniform and Constant wetting acts as a very even coating on the surface steaming foil off.
  • Example 3: (plasma-sprayed WB coating for Al evaporation)
  • Evaporation boats of size 10 × 20 × 120 mm 3 of an electrically conductive TiB 2 -BN mixed ceramic are plasma spray coated after appropriate preparation of the surface with a layer of tungsten boride (WB + about 5Vol.% W 2 B 5 ). For this purpose, a tungsten boride powder with an average particle size of 25 microns was used (manufacturer eg AEE Atlantic Equipment Engineers, 13 Forster Street, PO Box 181, Bergenfield, NJ 07621, USA). The layer thickness was determined on a co-coated comparator to 125 microns by a polished cut was placed through the cross section of the comparison piece.
  • The so coated evaporators were installed in a Bandbedampfungsanlage and each occupied about 2 grams of aluminum wire pieces (wire diameter 1.8 mm). After closing the system and reaching the necessary vacuum of <10 -4 mbar, the heating power was set to 4.68 KW.
  • at approx. 45% of the final output begins to melt the applied aluminum, on further increase the temperature begins the aluminum on, the evaporator coated area very much evenly moisten.
  • In comparison to uncoated BN + TiB 2 evaporators, the initial wetting process in the evaporator boats according to the invention is faster and more uniform. This behavior is attributed to the fact that common BN-TiB 2 boats on the TiB 2 particles have an oxide layer that opposes the good wetting by the aluminum. The strongly reducing aluminum melt must first reduce the oxide skins of the TiB 2 before a good wetting takes place. Obviously, the layers according to the invention have no wetting-inhibiting property. The initial wetting is greatly homogenized and accelerated.
  • If the fed power has reached about 85%, the aluminum wire feed the Bandbedampfungsanlage be started. For the present example An aluminum wire with a diameter of 1.8 mm was used.
  • The Evaporator boats according to the invention showed a constant evaporation performance at 85% electrical power from 2 to 6 grams of aluminum per minute. The uniform and Constant wetting acts as a very even coating on the surface steaming foil off.
  • It is known that the life of a Evaporator is increased by a good utilization of the functional area, ie if possible, the entire functional surface is evenly wetted by the melt. The evaporator boats according to the invention show a more uniform wetting than the usual boats, which can result in an increase in the service life.
  • Example 4: (plasma-sprayed WB coating + additional plasma sprayed Al layer on top for Al evaporation)
  • A set evaporator boat made of TiB 2 -BN ceramic size 10 × 35 × 140 mm 3 was plasma spray-coated after appropriate pretreatment with an average of 136 microns thick layer of tungsten boride (= WB with about 5% by volume of W 2 B 5 ). In addition, a layer of metallic aluminum was applied to this layer, likewise by thermal spraying. The thickness of the aluminum layer was determined to be 200 μm.
  • The so coated evaporators were installed in a Bandbedampfungsanlage and each occupied about 2 grams of aluminum wire pieces (wire diameter 1.8 mm). After closing the system and reaching the necessary vacuum of <10 -4 mbar, the heating power was set to 8.20 KW.
  • At the subsequent Use in the band evaporation plant, these evaporators show an excellent Initial wetting behavior by the aluminum.
  • By the optimal utilization of the evaporator functional surface was an 18% longer life reached the evaporator boat, compared with uncoated Evaporator boats of the same composition.
  • Comparative Example (4-Component Evaporator)
  • Evaporator boats, as in the DE 39 35 163 C1 described are used in a Bandbedampfungsanlage. After analogous steps as in Example 1, the copper wire feed is turned on.
  • The However, Schiffchen shows a bad, uneven and time-varying wetting for copper. As a result of this There is no stable evaporation rate, resulting in an uneven layer thickness on the film to be vaporized.

Claims (9)

  1. Evaporator boat from an electrically conductive ceramic substrate for the vapor deposition of substrates with metals, characterized in that on the surface of the evaporator boat from which the evaporation of the metals, one of the following coatings is provided: a) a coating of at least one boride of a transition metal of B) a coating of a mixture of the metal to be evaporated, selected from aluminum, copper and silver, and at least one transition metal of the 4th to 6th transition group of the Periodic Table and / or their borides, c) a first coating of at least one transition metal of the 4th to 6th subgroup of the Periodic Table and / or their borides and a coating applied thereon from the metal to be vaporized.
  2. Evaporator boat according to claim 1, characterized in that that the ceramic carrier material from hot pressed Titanium diboride and boron nitride and optionally aluminum nitride consists.
  3. Evaporator boat according to claim 1 and / or 2, characterized in that the coating has an average thickness from 1-750 μm, preferably 15-500 μm, more preferably 50-150 μm, having.
  4. Evaporator boat according to at least one of the preceding Claims, characterized in that the transition metals of the 4th to 6. Subgroup of the periodic table of titanium, zirconium, vanadium, molybdenum and tungsten chosen are.
  5. Evaporator boat according to at least one of the preceding Claims, characterized in that it is coated with a tungsten boride coating is provided.
  6. Method of making an evaporator boat according to at least one of claims 1-5, characterized in that one on the ceramic carrier material Apply a suspension of the coating material and then dried.
  7. Method of making an evaporator boat according to at least one of claims 1-5, characterized in that the coating by a plasma spraying process generated.
  8. Use of a vaporizer boat after at least one of the claims 1-5 for the vapor deposition of substrates with metals.
  9. Use of an evaporator boat according to claim 8 for the vacuum strip evaporation of flexible substrates with metals.
DE200510020945 2005-05-04 2005-05-04 Ceramic evaporator boats, process for their preparation and their use Expired - Fee Related DE102005020945B4 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE200510020945 DE102005020945B4 (en) 2005-05-04 2005-05-04 Ceramic evaporator boats, process for their preparation and their use

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE200510020945 DE102005020945B4 (en) 2005-05-04 2005-05-04 Ceramic evaporator boats, process for their preparation and their use
CNA2006800150977A CN101171361A (en) 2005-05-04 2006-04-26 Ceramic evaporator crucibles, method for the production thereof, and use thereof
PCT/EP2006/003886 WO2006117119A1 (en) 2005-05-04 2006-04-26 Ceramic evaporator crucibles, method for the production thereof, and use thereof

Publications (2)

Publication Number Publication Date
DE102005020945A1 DE102005020945A1 (en) 2006-11-09
DE102005020945B4 true DE102005020945B4 (en) 2007-07-12

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US10184168B2 (en) 2015-01-20 2019-01-22 Kennametal Inc. IMC evaporator boat-thermal insulation cartridge assembly
US20160208373A1 (en) 2015-01-20 2016-07-21 Kennametal Inc. Imc evaporator boat assembly
DE102015112135A1 (en) 2015-07-24 2017-01-26 Kennametal Inc. Titan hydride coating evaporator body, process for its preparation and use
CN107904559B (en) * 2017-12-21 2019-11-12 福州大学 A kind of interior heating evaporation boat and preparation method thereof with composite ceramic coat

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