DE602004028857D1 - Metallverdampfungsheizelement und metallverdampfungsverfahren - Google Patents
Metallverdampfungsheizelement und metallverdampfungsverfahrenInfo
- Publication number
- DE602004028857D1 DE602004028857D1 DE602004028857T DE602004028857T DE602004028857D1 DE 602004028857 D1 DE602004028857 D1 DE 602004028857D1 DE 602004028857 T DE602004028857 T DE 602004028857T DE 602004028857 T DE602004028857 T DE 602004028857T DE 602004028857 D1 DE602004028857 D1 DE 602004028857D1
- Authority
- DE
- Germany
- Prior art keywords
- metal
- heating element
- evaporation method
- evaporative heating
- metal evaporation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000010438 heat treatment Methods 0.000 title 1
- 239000002184 metal Substances 0.000 title 1
- 238000001883 metal evaporation Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
- C23C14/0647—Boron nitride
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/10—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
- H05B3/12—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material
- H05B3/14—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material the material being non-metallic
- H05B3/141—Conductive ceramics, e.g. metal oxides, metal carbides, barium titanate, ferrites, zirconia, vitrous compounds
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Ceramic Engineering (AREA)
- Physical Vapour Deposition (AREA)
- Ceramic Products (AREA)
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003390344 | 2003-11-20 | ||
JP2004008217 | 2004-01-15 | ||
JP2004010568 | 2004-07-16 | ||
PCT/JP2004/017023 WO2005049881A1 (ja) | 2003-11-20 | 2004-11-16 | 金属蒸発発熱体及び金属の蒸発方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
DE602004028857D1 true DE602004028857D1 (de) | 2010-10-07 |
Family
ID=36642713
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE602004028857T Active DE602004028857D1 (de) | 2003-11-20 | 2004-11-16 | Metallverdampfungsheizelement und metallverdampfungsverfahren |
Country Status (7)
Country | Link |
---|---|
US (1) | US20080245305A1 (de) |
EP (1) | EP1688514B1 (de) |
JP (1) | JP4425860B2 (de) |
KR (1) | KR100981904B1 (de) |
BR (1) | BRPI0416831A (de) |
DE (1) | DE602004028857D1 (de) |
WO (1) | WO2005049881A1 (de) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4739773B2 (ja) * | 2005-02-17 | 2011-08-03 | スタンレー電気株式会社 | 蒸着用るつぼ |
JP2007046106A (ja) * | 2005-08-10 | 2007-02-22 | Ulvac Japan Ltd | 蒸着用ボートおよびこれを備えた真空蒸着装置 |
US7494616B2 (en) | 2005-11-04 | 2009-02-24 | Momentive Performance Materials Inc. | Container for evaporation of metal and method to manufacture thereof |
DE102006041048A1 (de) * | 2006-09-01 | 2008-03-20 | Esk Ceramics Gmbh & Co. Kg | Keramische Verdampferschiffchen, Verfahren zu ihrer Herstellung und ihre Verwendung |
DE102008016619B3 (de) * | 2008-04-01 | 2009-11-05 | Kennametal Sintec Keramik Gmbh | Verdampferkörper |
GB0811980D0 (en) * | 2008-07-07 | 2008-07-30 | Ceramaspeed Ltd | Radiant electric heater |
EP2262346A1 (de) * | 2009-06-10 | 2010-12-15 | Nexans | Verwendung von keramischen Oxidmaterialien oder metallkeramische Verbindungen für elektrische Anwendungen wie Heizelement |
CN104470002B (zh) * | 2014-11-15 | 2016-08-17 | 北京星航机电装备有限公司 | 一种陶瓷加热装置 |
DE102015211746B4 (de) | 2015-06-24 | 2023-08-24 | Kennametal Inc. | Verdampferkörper sowie Betrieb eines solchen Verdampferkörpers |
GB2561867B (en) | 2017-04-25 | 2021-04-07 | Nerudia Ltd | Aerosol delivery system |
AU2018275364A1 (en) * | 2017-06-02 | 2019-12-19 | Fontem Holdings 1 B.V. | Electronic cigarette wick |
EP3470545A1 (de) * | 2017-10-10 | 2019-04-17 | 3M Innovative Properties Company | Verdampferschiffchen zum verdampfen von metallen |
DE102018113528B4 (de) * | 2018-06-06 | 2022-07-28 | Cvt Gmbh & Co. Kg | Verdampferkörper |
WO2022038548A1 (en) | 2020-08-19 | 2022-02-24 | 3M Innovative Properties Company | Evaporation boat for evaporation of metals |
DE102021115602A1 (de) | 2021-06-16 | 2022-12-22 | Kennametal Inc. | Verdampferschiffchen |
CN115110036A (zh) * | 2022-06-09 | 2022-09-27 | 南通新江海动力电子有限公司 | 蒸发舟及导液结构加工模具和加工方法 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2962538A (en) * | 1958-01-30 | 1960-11-29 | Continental Can Co | Vaporizing heater for vacuum deposition and method of employing the same |
US3181968A (en) * | 1960-07-25 | 1965-05-04 | Union Carbide Corp | Methods for metal vaporization |
JPS472762U (de) * | 1971-01-29 | 1972-08-31 | ||
US3803707A (en) | 1972-03-21 | 1974-04-16 | Gte Sylvania Inc | Method of making an improved refractory boat for metal vaporization |
JPS50161505A (de) * | 1974-06-21 | 1975-12-27 | ||
US4264803A (en) * | 1978-01-10 | 1981-04-28 | Union Carbide Corporation | Resistance-heated pyrolytic boron nitride coated graphite boat for metal vaporization |
JPS6086270A (ja) * | 1984-06-01 | 1985-05-15 | Denki Kagaku Kogyo Kk | 抵抗加熱器の製法 |
DE4128382C1 (de) * | 1991-08-27 | 1992-07-02 | Leybold Ag, 6450 Hanau, De | |
JPH06298566A (ja) * | 1993-04-15 | 1994-10-25 | Denki Kagaku Kogyo Kk | 導電性セラミックス焼結体及びその用途 |
US6120286A (en) * | 1996-12-05 | 2000-09-19 | Sintec Keramik Gmbh & Co. Kg | Vaporizer boat for metal vaporizing |
DE19821772A1 (de) * | 1998-05-14 | 1999-11-18 | Kempten Elektroschmelz Gmbh | Keramische Verdampferschiffchen mit verbessertem Erstbenetzungsverhalten |
JP4565722B2 (ja) * | 2000-09-20 | 2010-10-20 | 大日本印刷株式会社 | 真空蒸着用るつぼ |
-
2004
- 2004-11-16 DE DE602004028857T patent/DE602004028857D1/de active Active
- 2004-11-16 WO PCT/JP2004/017023 patent/WO2005049881A1/ja active Application Filing
- 2004-11-16 EP EP04818907A patent/EP1688514B1/de not_active Expired - Fee Related
- 2004-11-16 JP JP2005515613A patent/JP4425860B2/ja not_active Expired - Fee Related
- 2004-11-16 KR KR1020067006017A patent/KR100981904B1/ko not_active IP Right Cessation
- 2004-11-16 BR BRPI0416831-3A patent/BRPI0416831A/pt not_active Application Discontinuation
- 2004-11-16 US US10/579,717 patent/US20080245305A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
EP1688514B1 (de) | 2010-08-25 |
US20080245305A1 (en) | 2008-10-09 |
KR20070017956A (ko) | 2007-02-13 |
WO2005049881A1 (ja) | 2005-06-02 |
JP4425860B2 (ja) | 2010-03-03 |
JPWO2005049881A1 (ja) | 2007-06-07 |
EP1688514A1 (de) | 2006-08-09 |
KR100981904B1 (ko) | 2010-09-13 |
BRPI0416831A (pt) | 2007-02-13 |
EP1688514A4 (de) | 2008-09-10 |
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