ES2131898T3 - Instalacion de recubrimiento por vacio con un crisol situado en la camara de vacio para el alojamiento de material a vaporizar. - Google Patents
Instalacion de recubrimiento por vacio con un crisol situado en la camara de vacio para el alojamiento de material a vaporizar.Info
- Publication number
- ES2131898T3 ES2131898T3 ES96113894T ES96113894T ES2131898T3 ES 2131898 T3 ES2131898 T3 ES 2131898T3 ES 96113894 T ES96113894 T ES 96113894T ES 96113894 T ES96113894 T ES 96113894T ES 2131898 T3 ES2131898 T3 ES 2131898T3
- Authority
- ES
- Spain
- Prior art keywords
- pot
- vacuum
- installation
- vacuum chamber
- lodging
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields
- H01J37/3405—Magnetron sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching
- H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching for evaporating or etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/30—Electron or ion beam tubes for processing objects
- H01J2237/31—Processing objects on a macro-scale
- H01J2237/3132—Evaporating
- H01J2237/3137—Plasma-assisted co-operation
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
EN UNA INSTALACION DE RECUBRIMIENTO POR VACIO CON UN CRISOL (4) COLOCADO EN LA CAMARA DE VACIO (3) PARA EL MATERIAL QUE SE EVAPORA, POR EJEMPLO SIO{SUB,2}, Y CON UNA FUENTE DE RADIACION ELECTRONICA (5) QUE EVAPORA EL MATERIAL Y CON UNOS SUSTRATOS (7, 7{SUP,''}, ...) MANTENIDOS A DISTANCIA DEL CRISOL (4), POR EJEMPLO LENTES OPTICAS, SE DISPONE A AMBOS LADOS DE UNA LINEA DE UNION (L) ENTRE EL CRISOL (4) Y EL SOPORTE DE SUSTRATO (6) UNA UNIDAD (9, 10), EN LAS QUE SE DISPONE EN CADA UNO UN CATODO MAGNETRONICO (11, 12) UNIDO CON UNA FUENTE DE FRECUENCIA MEDIA (16), ESTANDO UNIDA CADA UNA DE LAS UNIDADES (9, 10) MEDIANTE UNA HENDIDURA, ORIFICIO O CANAL (21, 22 O 27, 28) CON LA ZONA O LUGAR DEL PROCESO (30) QUE ESTA ENTRE EL SUSTRATO (7, 7{SUP,''}, ...) Y EL CRISOL, ESTANDO AMBAS PIEZAS UNIDAS (9, 10) ENTRE SI (4), MEDIANTE CONDUCCIONES DE PRESION (19, 20) A UNA FUENTE (15) DEL GAS DEL PROCESO.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19544584A DE19544584A1 (de) | 1995-11-30 | 1995-11-30 | Vakuumbeschichtungsanlage mit einem in der Vakuumkammer angeordneten Tiegel zur Aufnahme von zu verdampfendem Material |
Publications (1)
Publication Number | Publication Date |
---|---|
ES2131898T3 true ES2131898T3 (es) | 1999-08-01 |
Family
ID=7778762
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ES96113894T Expired - Lifetime ES2131898T3 (es) | 1995-11-30 | 1996-08-30 | Instalacion de recubrimiento por vacio con un crisol situado en la camara de vacio para el alojamiento de material a vaporizar. |
Country Status (5)
Country | Link |
---|---|
US (1) | US5888305A (es) |
EP (1) | EP0776987B1 (es) |
JP (1) | JPH09176840A (es) |
DE (2) | DE19544584A1 (es) |
ES (1) | ES2131898T3 (es) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0783174B1 (de) * | 1995-10-27 | 2006-12-13 | Applied Materials GmbH & Co. KG | Vorrichtung zum Beschichten eines Substrats |
SE520716C2 (sv) * | 1999-05-06 | 2003-08-12 | Sandvik Ab | En process för tillverkning av ett skärverktyg belagt med aluminiumoxid |
DE60234620D1 (de) * | 2001-09-10 | 2010-01-14 | Univ Virginia | Verfahren zum aufbringen von metalllegierungsüberzügen und überzogene komponente |
US20050092253A1 (en) * | 2003-11-04 | 2005-05-05 | Venkat Selvamanickam | Tape-manufacturing system having extended operational capabilites |
TWI486469B (zh) * | 2010-04-22 | 2015-06-01 | Hon Hai Prec Ind Co Ltd | 鍍膜系統 |
TW201200614A (en) * | 2010-06-29 | 2012-01-01 | Hon Hai Prec Ind Co Ltd | Coating device |
CN102312200B (zh) * | 2010-06-30 | 2014-04-23 | 鸿富锦精密工业(深圳)有限公司 | 蒸镀机 |
EP4379087A2 (en) | 2013-03-15 | 2024-06-05 | RTX Corporation | Deposition apparatus and methods |
EP3366804B1 (en) * | 2017-02-22 | 2022-05-11 | Satisloh AG | Box coating apparatus for vacuum coating of substrates, in particular spectacle lenses |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4885070A (en) * | 1988-02-12 | 1989-12-05 | Leybold Aktiengesellschaft | Method and apparatus for the application of materials |
JPH01268869A (ja) * | 1988-04-20 | 1989-10-26 | Fuji Photo Film Co Ltd | スパッタリング装置 |
DE4026367A1 (de) * | 1990-06-25 | 1992-03-12 | Leybold Ag | Vorrichtung zum beschichten von substraten |
DE4128547A1 (de) * | 1991-08-28 | 1993-03-04 | Leybold Ag | Verfahren und vorrichtung fuer die herstellung einer entspiegelungsschicht auf linsen |
US5415757A (en) * | 1991-11-26 | 1995-05-16 | Leybold Aktiengesellschaft | Apparatus for coating a substrate with electrically nonconductive coatings |
DE4203632C2 (de) * | 1992-02-08 | 2003-01-23 | Applied Films Gmbh & Co Kg | Vakuumbeschichtungsanlage |
EP0570618B1 (en) * | 1992-05-21 | 1996-11-06 | Nissin Electric Company, Limited | Film forming method and apparatus |
DE4237517A1 (de) * | 1992-11-06 | 1994-05-11 | Leybold Ag | Vorrichtung zum Beschichten eines Substrats, insbesondere mit elektrisch nichtleitenden Schichten |
DE4416525B4 (de) * | 1993-05-27 | 2008-06-05 | Oerlikon Trading Ag, Trübbach | Verfahren zur Herstellung einer Beschichtung erhöhter Verschleißfestigkeit auf Werkstückoberflächen, und dessen Verwendung |
DE4343042C1 (de) * | 1993-12-16 | 1995-03-09 | Fraunhofer Ges Forschung | Verfahren und Einrichtung zum plasmaaktivierten Bedampfen |
-
1995
- 1995-11-30 DE DE19544584A patent/DE19544584A1/de not_active Withdrawn
-
1996
- 1996-08-30 EP EP96113894A patent/EP0776987B1/de not_active Expired - Lifetime
- 1996-08-30 ES ES96113894T patent/ES2131898T3/es not_active Expired - Lifetime
- 1996-08-30 DE DE59601991T patent/DE59601991D1/de not_active Expired - Fee Related
- 1996-10-31 US US08/741,669 patent/US5888305A/en not_active Expired - Fee Related
- 1996-11-29 JP JP8320307A patent/JPH09176840A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
EP0776987A1 (de) | 1997-06-04 |
DE59601991D1 (de) | 1999-07-01 |
US5888305A (en) | 1999-03-30 |
DE19544584A1 (de) | 1997-06-05 |
JPH09176840A (ja) | 1997-07-08 |
EP0776987B1 (de) | 1999-05-26 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
FG2A | Definitive protection |
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