DE60234620D1 - Verfahren zum aufbringen von metalllegierungsüberzügen und überzogene komponente - Google Patents
Verfahren zum aufbringen von metalllegierungsüberzügen und überzogene komponenteInfo
- Publication number
- DE60234620D1 DE60234620D1 DE60234620T DE60234620T DE60234620D1 DE 60234620 D1 DE60234620 D1 DE 60234620D1 DE 60234620 T DE60234620 T DE 60234620T DE 60234620 T DE60234620 T DE 60234620T DE 60234620 D1 DE60234620 D1 DE 60234620D1
- Authority
- DE
- Germany
- Prior art keywords
- dvd
- gas
- electron beam
- vapor deposition
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000000034 method Methods 0.000 title abstract 3
- 229910001092 metal group alloy Inorganic materials 0.000 title 1
- 238000010894 electron beam technology Methods 0.000 abstract 2
- 239000007789 gas Substances 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- 238000007740 vapor deposition Methods 0.000 abstract 2
- 239000012159 carrier gas Substances 0.000 abstract 1
- 239000011248 coating agent Substances 0.000 abstract 1
- 238000000576 coating method Methods 0.000 abstract 1
- 238000007796 conventional method Methods 0.000 abstract 1
- 230000004907 flux Effects 0.000 abstract 1
- 239000011261 inert gas Substances 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- 239000012720 thermal barrier coating Substances 0.000 abstract 1
- 239000011364 vaporized material Substances 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/228—Gas flow assisted PVD deposition
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
- C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/548—Controlling the composition
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
- C23C28/32—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer
- C23C28/321—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer with at least one metal alloy layer
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
- C23C28/32—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer
- C23C28/321—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer with at least one metal alloy layer
- C23C28/3215—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer with at least one metal alloy layer at least one MCrAlX layer
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
- C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
- C23C28/345—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one oxide layer
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
- C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
- C23C28/345—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one oxide layer
- C23C28/3455—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one oxide layer with a refractory ceramic layer, e.g. refractory metal oxide, ZrO2, rare earth oxides or a thermal barrier system comprising at least one refractory oxide layer
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45563—Gas nozzles
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/48—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating by irradiation, e.g. photolysis, radiolysis, particle radiation
- C23C16/487—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating by irradiation, e.g. photolysis, radiolysis, particle radiation using electron radiation
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Inorganic Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Ceramic Engineering (AREA)
- Physical Vapour Deposition (AREA)
- Coating Apparatus (AREA)
- Electroplating Methods And Accessories (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US31828601P | 2001-09-10 | 2001-09-10 | |
PCT/US2002/028654 WO2003028428A2 (en) | 2001-09-10 | 2002-09-10 | Method and apparatus application of metallic alloy coatings |
Publications (1)
Publication Number | Publication Date |
---|---|
DE60234620D1 true DE60234620D1 (de) | 2010-01-14 |
Family
ID=23237501
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60234620T Expired - Lifetime DE60234620D1 (de) | 2001-09-10 | 2002-09-10 | Verfahren zum aufbringen von metalllegierungsüberzügen und überzogene komponente |
Country Status (6)
Country | Link |
---|---|
US (2) | US8124178B2 (de) |
EP (1) | EP1436441B2 (de) |
AT (1) | ATE450631T1 (de) |
AU (1) | AU2002356523A1 (de) |
DE (1) | DE60234620D1 (de) |
WO (1) | WO2003028428A2 (de) |
Families Citing this family (39)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
AU2002356523A1 (en) * | 2001-09-10 | 2003-04-14 | University Of Virginia Patent Foundation | Method and apparatus application of metallic alloy coatings |
US7556695B2 (en) * | 2002-05-06 | 2009-07-07 | Honeywell International, Inc. | Apparatus to make nanolaminate thermal barrier coatings |
US20060062912A1 (en) * | 2002-11-21 | 2006-03-23 | Wortman David J | Bond coat for a thermal barrier coating system and related method thereof |
US7509734B2 (en) | 2003-03-03 | 2009-03-31 | United Technologies Corporation | Repairing turbine element |
US7216428B2 (en) | 2003-03-03 | 2007-05-15 | United Technologies Corporation | Method for turbine element repairing |
US8122600B2 (en) * | 2003-03-03 | 2012-02-28 | United Technologies Corporation | Fan and compressor blade dovetail restoration process |
US7128986B2 (en) * | 2003-10-16 | 2006-10-31 | Seagate Technology, Llc | Nanoclustered magnetic materials for high moment write pole applications |
US6979498B2 (en) * | 2003-11-25 | 2005-12-27 | General Electric Company | Strengthened bond coats for thermal barrier coatings |
US20050205415A1 (en) | 2004-03-19 | 2005-09-22 | Belousov Igor V | Multi-component deposition |
US7404986B2 (en) | 2004-05-07 | 2008-07-29 | United Technologies Corporation | Multi-component deposition |
US8084086B2 (en) * | 2005-06-30 | 2011-12-27 | University Of Virginia Patent Foundation | Reliant thermal barrier coating system and related methods and apparatus of making the same |
WO2007095376A2 (en) * | 2006-02-15 | 2007-08-23 | Kennametal Inc. | Method and apparatus for coating particulates utilizing physical vapor deposition |
US20080292903A1 (en) * | 2007-05-25 | 2008-11-27 | United Technologies Corporation | Coated gas turbine engine component repair |
US8709160B2 (en) | 2008-08-22 | 2014-04-29 | United Technologies Corporation | Deposition apparatus having thermal hood |
US8404047B2 (en) | 2008-09-16 | 2013-03-26 | United Technologies Corporation | Electron beam vapor deposition apparatus and method |
US8343591B2 (en) | 2008-10-24 | 2013-01-01 | United Technologies Corporation | Method for use with a coating process |
US20100189929A1 (en) * | 2009-01-28 | 2010-07-29 | Neal James W | Coating device and deposition apparatus |
PL2401232T3 (pl) * | 2009-02-24 | 2016-10-31 | Bezpośrednie napylanie próżniowe wspomagane plazmą z współosiowej drążonej katody i związany z nim sposób | |
US8419857B2 (en) | 2009-03-31 | 2013-04-16 | United Technologies Corporation | Electron beam vapor deposition apparatus and method of coating |
UA92556C2 (uk) * | 2009-06-10 | 2010-11-10 | Астромонт Лимитед | Спосіб одержання наночастинок системи метал-кисень із заданим складом електронно-променевим випаровуванням і конденсацією у вакуумі |
KR101084234B1 (ko) * | 2009-11-30 | 2011-11-16 | 삼성모바일디스플레이주식회사 | 증착원, 이를 구비하는 증착 장치 및 박막 형성 방법 |
US20130129938A1 (en) * | 2010-01-06 | 2013-05-23 | Direct Vapor Technologies International | Method for the co-evaporation and deposition of materials with differing vapor pressures |
DE102010017896A1 (de) * | 2010-04-21 | 2011-10-27 | Ald Vacuum Technologies Gmbh | Vorrichtung und Verfahren zum Beschichten von Substraten nach dem EB/PVD-Verfahren |
WO2012027442A1 (en) * | 2010-08-27 | 2012-03-01 | Rolls-Royce Corporation | Rare earth silicate environmental barrier coatings |
US8642140B2 (en) * | 2011-03-09 | 2014-02-04 | United Technologies Corporation | Ceramic coating deposition |
US8541069B2 (en) | 2011-04-11 | 2013-09-24 | United Technologies Corporation | Method of guided non-line of sight coating |
US9023422B1 (en) * | 2011-08-31 | 2015-05-05 | Maxim Integrated Products, Inc. | High rate deposition method of magnetic nanocomposites |
WO2013085625A2 (en) * | 2011-10-17 | 2013-06-13 | Directed Vapor Technologies International | Impact and erosion resistant thermal and environmental barrier coatings |
US9581042B2 (en) | 2012-10-30 | 2017-02-28 | United Technologies Corporation | Composite article having metal-containing layer with phase-specific seed particles and method therefor |
US9527107B2 (en) | 2013-01-11 | 2016-12-27 | International Business Machines Corporation | Method and apparatus to apply material to a surface |
US9745736B2 (en) | 2013-08-27 | 2017-08-29 | University Of Virginia Patent Foundation | Three-dimensional space frames assembled from component pieces and methods for making the same |
US10233533B2 (en) * | 2014-01-09 | 2019-03-19 | United Technologies Corporation | Coating process using gas screen |
US10378861B2 (en) | 2014-09-04 | 2019-08-13 | University Of Virginia Patent Foundation | Impulse mitigation systems for media impacts and related methods thereof |
NL2013836B1 (en) * | 2014-11-20 | 2016-10-10 | Univ Delft Tech | Production of nanostructured materials. |
US10184759B2 (en) | 2015-11-17 | 2019-01-22 | University Of Virgina Patent Foundation | Lightweight ballistic resistant anti-intrusion systems and related methods thereof |
GB201600645D0 (en) * | 2016-01-13 | 2016-02-24 | Rolls Royce Plc | Improvements in additive layer manufacturing methods |
US11866816B2 (en) * | 2016-07-06 | 2024-01-09 | Rtx Corporation | Apparatus for use in coating process |
US10724133B2 (en) * | 2016-09-14 | 2020-07-28 | Raytheon Technologies Corporation | EBPVD columnated vapor stream |
CN111699276A (zh) * | 2017-12-06 | 2020-09-22 | 亚利桑那薄膜研究有限责任公司 | 用于金属和陶瓷材料沉积的增材制造系统和方法 |
Family Cites Families (55)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3620815A (en) * | 1969-03-13 | 1971-11-16 | United Aircraft Corp | Vapor collimation in vacuum deposition of coatings |
JPS5472954A (en) * | 1977-11-23 | 1979-06-11 | Noboru Tsuya | Semiconductor thin film and method of fabricating same |
US4272612A (en) * | 1979-05-09 | 1981-06-09 | The United States Of America As Represented By The Secretary Of The Army | Erosion lithography to abrade a pattern onto a substrate |
US4439463A (en) * | 1982-02-18 | 1984-03-27 | Atlantic Richfield Company | Plasma assisted deposition system |
JPS591676A (ja) * | 1982-06-29 | 1984-01-07 | Citizen Watch Co Ltd | イオンブレ−テイング装置 |
US4777908A (en) * | 1986-11-26 | 1988-10-18 | Optical Coating Laboratory, Inc. | System and method for vacuum deposition of thin films |
JPS63274762A (ja) † | 1987-05-01 | 1988-11-11 | Ulvac Corp | 反応蒸着膜の形成装置 |
JP2709162B2 (ja) * | 1989-11-15 | 1998-02-04 | 株式会社日立製作所 | マイクロ波プラズマ処理装置 |
US5356673A (en) * | 1991-03-18 | 1994-10-18 | Jet Process Corporation | Evaporation system and method for gas jet deposition of thin film materials |
US5356718A (en) * | 1993-02-16 | 1994-10-18 | Ppg Industries, Inc. | Coating apparatus, method of coating glass, compounds and compositions for coating glasss and coated glass substrates |
DE4304613C1 (de) † | 1993-02-16 | 1994-05-26 | Fraunhofer Ges Forschung | Verfahren zur Stabilisierung der Plasmaerzeugung mittels Elektronenstrahlverdampfer |
US5560779A (en) * | 1993-07-12 | 1996-10-01 | Olin Corporation | Apparatus for synthesizing diamond films utilizing an arc plasma |
DE4412906C1 (de) | 1994-04-14 | 1995-07-13 | Fraunhofer Ges Forschung | Verfahren und Einrichtung für die ionengestützte Vakuumbeschichtung |
JPH10506150A (ja) * | 1994-08-01 | 1998-06-16 | フランツ ヘーマン、 | 非平衡軽量合金及び製品のために選択される処理 |
US5464667A (en) † | 1994-08-16 | 1995-11-07 | Minnesota Mining And Manufacturing Company | Jet plasma process and apparatus |
US5534314A (en) * | 1994-08-31 | 1996-07-09 | University Of Virginia Patent Foundation | Directed vapor deposition of electron beam evaporant |
US5573682A (en) | 1995-04-20 | 1996-11-12 | Plasma Processes | Plasma spray nozzle with low overspray and collimated flow |
DE19544584A1 (de) * | 1995-11-30 | 1997-06-05 | Leybold Ag | Vakuumbeschichtungsanlage mit einem in der Vakuumkammer angeordneten Tiegel zur Aufnahme von zu verdampfendem Material |
US5628464A (en) * | 1995-12-13 | 1997-05-13 | Xerox Corporation | Fluidized bed jet mill nozzle and processes therewith |
US6123997A (en) | 1995-12-22 | 2000-09-26 | General Electric Company | Method for forming a thermal barrier coating |
US5736073A (en) | 1996-07-08 | 1998-04-07 | University Of Virginia Patent Foundation | Production of nanometer particles by directed vapor deposition of electron beam evaporant |
US6258467B1 (en) | 2000-08-17 | 2001-07-10 | Siemens Westinghouse Power Corporation | Thermal barrier coating having high phase stability |
AUPO850597A0 (en) * | 1997-08-11 | 1997-09-04 | Silverbrook Research Pty Ltd | Image processing method and apparatus (art01a) |
SG71151A1 (en) * | 1997-09-17 | 2000-03-21 | Gen Electric | Bond coat for a thermal barrier coating system and method therefor |
US6172331B1 (en) * | 1997-09-17 | 2001-01-09 | General Electric Company | Method and apparatus for laser drilling |
US6096381A (en) | 1997-10-27 | 2000-08-01 | General Electric Company | Process for densifying and promoting inter-particle bonding of a bond coat for a thermal barrier coating |
US6012652A (en) * | 1998-01-30 | 2000-01-11 | Mobil Oil Corporation | Atomizing nozzle and method of use thereof |
US6168874B1 (en) | 1998-02-02 | 2001-01-02 | General Electric Company | Diffusion aluminide bond coat for a thermal barrier coating system and method therefor |
US7136173B2 (en) * | 1998-07-09 | 2006-11-14 | Acm Research, Inc. | Method and apparatus for end-point detection |
DE19841012C1 (de) | 1998-09-08 | 2000-01-13 | Fraunhofer Ges Forschung | Einrichtung zum plasmaaktivierten Bedampfen im Vakuum |
DE19845803C2 (de) | 1998-09-30 | 2002-10-17 | Siemens Ag | Verfahren zum Vakuumbeschichten von Metallbauteilen |
US6153313A (en) | 1998-10-06 | 2000-11-28 | General Electric Company | Nickel aluminide coating and coating systems formed therewith |
US6291084B1 (en) | 1998-10-06 | 2001-09-18 | General Electric Company | Nickel aluminide coating and coating systems formed therewith |
US6306524B1 (en) | 1999-03-24 | 2001-10-23 | General Electric Company | Diffusion barrier layer |
US6478931B1 (en) | 1999-08-06 | 2002-11-12 | University Of Virginia Patent Foundation | Apparatus and method for intra-layer modulation of the material deposition and assist beam and the multilayer structure produced therefrom |
US6273678B1 (en) | 1999-08-11 | 2001-08-14 | General Electric Company | Modified diffusion aluminide coating for internal surfaces of gas turbine components |
AU7993400A (en) * | 1999-10-04 | 2001-05-10 | Textron Inc. | Method and system for high pressure liquid injection of turf seed |
US7194197B1 (en) * | 2000-03-16 | 2007-03-20 | Global Solar Energy, Inc. | Nozzle-based, vapor-phase, plume delivery structure for use in production of thin-film deposition layer |
CA2411174C (en) * | 2000-05-23 | 2008-05-06 | James F. Groves | A process and apparatus for plasma activated deposition in a vacuum |
SG106639A1 (en) * | 2000-10-10 | 2004-10-29 | Gen Electric | Apparatus and method for introducing small amounts of refractory elements into a vapor deposition coating |
US6641673B2 (en) * | 2000-12-20 | 2003-11-04 | General Electric Company | Fluid injector for and method of prolonged delivery and distribution of reagents into plasma |
US7879411B2 (en) * | 2001-04-30 | 2011-02-01 | University Of Virginia Patent Foundation | Method and apparatus for efficient application of substrate coating |
AU2002356523A1 (en) * | 2001-09-10 | 2003-04-14 | University Of Virginia Patent Foundation | Method and apparatus application of metallic alloy coatings |
US7718222B2 (en) * | 2002-04-25 | 2010-05-18 | University Of Virginia Patent Foundation | Apparatus and method for high rate uniform coating, including non-line of sight |
US20050287296A1 (en) * | 2002-07-25 | 2005-12-29 | Wadley Haydn N G | Method and apparatus for dispersion strengthened bond coats for thermal barrier coatings |
WO2004043691A1 (en) * | 2002-11-12 | 2004-05-27 | University Of Virginia Patent Foundation | Extremely strain tolerant thermal protection coating and related method and apparatus thereof |
US20060062912A1 (en) * | 2002-11-21 | 2006-03-23 | Wortman David J | Bond coat for a thermal barrier coating system and related method thereof |
WO2005047202A2 (en) * | 2003-07-29 | 2005-05-26 | University Of Virginia Patent Foundation | Method for application of a thermal barrier coating and resultant structure thereof |
WO2005089107A2 (en) * | 2004-01-08 | 2005-09-29 | University Of Virginia Patent Foundation | Apparatus and method for applying coatings onto the interior surfaces of components and related structures produced therefrom |
US8084086B2 (en) * | 2005-06-30 | 2011-12-27 | University Of Virginia Patent Foundation | Reliant thermal barrier coating system and related methods and apparatus of making the same |
WO2009023744A1 (en) * | 2007-08-13 | 2009-02-19 | University Of Virginia Patent Foundation | Thin film battery synthesis by directed vapor deposition |
PL2401232T3 (pl) * | 2009-02-24 | 2016-10-31 | Bezpośrednie napylanie próżniowe wspomagane plazmą z współosiowej drążonej katody i związany z nim sposób | |
US8153958B2 (en) * | 2009-07-10 | 2012-04-10 | Sphere Renewable Energy Corp. | Method and apparatus for producing hyperthermal beams |
WO2013106006A1 (en) * | 2011-03-15 | 2013-07-18 | Directed Vapor Technologies International | Method for applying aluminum alloy coatings for corrosion protection of steel |
US8541069B2 (en) * | 2011-04-11 | 2013-09-24 | United Technologies Corporation | Method of guided non-line of sight coating |
-
2002
- 2002-09-10 AU AU2002356523A patent/AU2002356523A1/en not_active Abandoned
- 2002-09-10 DE DE60234620T patent/DE60234620D1/de not_active Expired - Lifetime
- 2002-09-10 WO PCT/US2002/028654 patent/WO2003028428A2/en not_active Application Discontinuation
- 2002-09-10 EP EP02800327A patent/EP1436441B2/de not_active Expired - Lifetime
- 2002-09-10 US US10/489,090 patent/US8124178B2/en active Active
- 2002-09-10 AT AT02800327T patent/ATE450631T1/de not_active IP Right Cessation
-
2012
- 2012-02-10 US US13/371,044 patent/US10260143B2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
ATE450631T1 (de) | 2009-12-15 |
AU2002356523A1 (en) | 2003-04-14 |
US20120137974A1 (en) | 2012-06-07 |
EP1436441A4 (de) | 2004-11-24 |
WO2003028428A2 (en) | 2003-04-10 |
EP1436441B1 (de) | 2009-12-02 |
WO2003028428A3 (en) | 2003-07-10 |
EP1436441A2 (de) | 2004-07-14 |
US10260143B2 (en) | 2019-04-16 |
EP1436441B2 (de) | 2012-11-28 |
US20050000444A1 (en) | 2005-01-06 |
US8124178B2 (en) | 2012-02-28 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE60234620D1 (de) | Verfahren zum aufbringen von metalllegierungsüberzügen und überzogene komponente | |
EP2511396B1 (de) | Geleitete Nicht-Sichtverbindungs-Beschichtung | |
EP0705912B1 (de) | Beschichtete Formkörper | |
US9951630B2 (en) | Self-healing environmental barrier coating | |
US7879411B2 (en) | Method and apparatus for efficient application of substrate coating | |
MXPA04004205A (es) | Metodo para aplicar o reparar recubrimientos de barrera termica. | |
JP2012082519A (ja) | 熱遮蔽被覆構造体を製造する方法 | |
US20050287296A1 (en) | Method and apparatus for dispersion strengthened bond coats for thermal barrier coatings | |
CA2482085A1 (en) | A plasma spraying method | |
US20080131611A1 (en) | Method for Application of a Thermal Barrier Coating and Resultant Structure Thereof | |
US7556695B2 (en) | Apparatus to make nanolaminate thermal barrier coatings | |
RU2492276C1 (ru) | Способ многослойного нанесения покрытий на подложку | |
CN106567076A (zh) | 一种钛金属表面合成TiC‑DLC复合涂层制备方法 | |
SMITH | Plasma spray deposition-A review of technology and research opportunities | |
JPH04128366A (ja) | 濃度傾斜合金被膜の形成方法 | |
Meyer et al. | Production Coating Cost Comparison | |
Mason Jr | Introduction to Thin Film Deposition Techniques: Key Topics in Materials Science and Engineering | |
Yumoto et al. | Application of supersonic free-jet PVD to overlay coating | |
JPS61190061A (ja) | 金属のセラミツク溶射方法 | |
JPH01132756A (ja) | 耐摩耗性膜被覆方法 | |
JPS6331549B2 (de) | ||
Berry | Three Firms Using Chromalloy's New Coating Method | |
Barthwal et al. | A Review of Application of Protective Coatings to Avoid Silt Erosion of Underwater Turbine Parts | |
Tucker Jr et al. | On the Surface Engineering Technologies Available to Today’s Engineer | |
RU99100336A (ru) | Изделие с системой защитных покрытий, содержащей улучшенный адгезионный слой, и ее изготовление |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
8363 | Opposition against the patent | ||
R102 | Epo decision maintaining patent in amended form now final |
Ref document number: 1436441 Country of ref document: EP Effective date: 20121128 |