CN106567076A - 一种钛金属表面合成TiC‑DLC复合涂层制备方法 - Google Patents

一种钛金属表面合成TiC‑DLC复合涂层制备方法 Download PDF

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CN106567076A
CN106567076A CN201610906713.3A CN201610906713A CN106567076A CN 106567076 A CN106567076 A CN 106567076A CN 201610906713 A CN201610906713 A CN 201610906713A CN 106567076 A CN106567076 A CN 106567076A
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layer
titanium
tic
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carbon
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梅青松
郭嘉琳
陈燕鸣
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Yangzhou Purui Thailand Coating Technology Co Ltd
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Yangzhou Purui Thailand Coating Technology Co Ltd
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/042—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material including a refractory ceramic layer, e.g. refractory metal oxides, ZrO2, rare earth oxides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/046—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material with at least one amorphous inorganic material layer, e.g. DLC, a-C:H, a-C:Me, the layer being doped or not
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/048—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material with layers graded in composition or physical properties

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  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

本发明涉及一种钛金属表面合成TiC‑DLC复合涂层制备方法。该方法包括步骤一：将未涂层基体固定在支架上，装入镀膜机中，打开烃类气流量阀，镀膜压力0.1～3.5Pa，温度300～500℃条件下，沉积0.2‑10微米厚的碳元素层20～30min；步骤二：打开氩气流量阀，进行辉光溅射清洗10～20min；然后开启纯Ti靶，用带正电的氩气轰击靶材，轰击出的负电离子沉积于阳极，带正电的金属离子沉积于阴极碳元素层上，沉积10‑300纳米厚的钛镀层5～15min；步骤三：打开加热器，升温至900～1200℃，使钛金属表面与碳元素层、碳元素层与钛镀层发生界面反应，生成稳定的TiC层。由于碳元素而言钛具有强的化学活性和扩散能力，钛镀层和碳发生界面反应，形成稳定的化学键合的TiC层。

Description

一种钛金属表面合成TiC-DLC复合涂层制备方法
技术领域
本发明涉及涂层材料技术领域，尤其涉及一种钛金属表面合成TiC-DLC复合涂层制备方法。
背景技术
现有的中国专利数据库中公开了一种钛金属表面原位合成TiC-DLC复合涂层的方法，其专利申请号为：201410276279.6，申请日为：2014.06.19，公告号为：CN 104141109 A，公布日为：2014.11.12，该产品包括有结合层、过渡层、支撑层以及高温强韧耐磨层，其制备方法是：Ti靶置于镀膜室内，通入烃类气体，对镀膜室抽真空并保持100～400℃温度，采用电弧离子镀使Ti离子从Ti靶蒸发出来，同时利用电弧放电离化烃类气体，从而在Ti靶形成TiC掺杂的DLC复合涂层。其不足之处在于：由于该方法未合理且科学的利用碳元素相对钛具有强的化学活性和扩散能力，同时钛原子容易溅射的特性，来合成TiC-DLC复合涂层。
发明内容
本发明的目的是针对现有技术存在的不足，提供一种更加合理、科学的钛金属表面合成TiC-DLC复合涂层制备方法。
为了实现上述发明的目的，本发明所采取的技术方案：
一种钛金属表面合成TiC-DLC复合涂层制备方法，包括步骤如下：
步骤一：将经预处理后的未涂层基体均匀固定在支架上，间距大于等于10mm，装入镀膜机中，调节工件支架转速为5～10rpm，抽至本底真空2.5～3.0×10-3Pa，同时打开加热器，升温至100～500℃；打开烃类气流量阀，镀膜压力0.1～3.5Pa，温度300～500℃条件下，沉积0.2-10微米厚的碳元素层20～30min；
步骤二：打开氩气流量阀，调节真空室为0.05～0.2Pa，基体加负偏电压600～1000V，进行辉光溅射清洗10～20min；然后降低基体负偏电压至60～200V，开启纯Ti靶，用带正电的氩气轰击靶材，轰击出的负电离子沉积于阳极，带正电的金属离子沉积于阴极碳元素层上，沉积10-300纳米厚的钛镀层5～15min；
步骤三：打开加热器，升温至900～1200℃，使钛金属表面与碳元素层、碳元素层与钛镀层发生界面反应用时20～40min，生成稳定的TiC层，制备结束后自然冷却，得到TiC-DLC复合涂层。
与现有技术相比，本发明的有益效果为：由于碳元素而言钛具有强的化学活性和扩散能力，在合适的温度、时间等工艺条件下，钛镀层和碳发生界面反应，形成稳定的化学键合的TiC层；同时钛属于易溅射物质，钛靶受到高速粒子轰击时，其表面钛原子容易溅射出来，所以根据以上特性使用该方法能够科学、合理的合成复合涂层。
具体实施方式
以下通过实施例进一步说明一种钛金属表面合成TiC-DLC复合涂层制备方法，包括步骤如下：
步骤一：将经预处理后的未涂层基体均匀固定在支架上，间距大于等于10mm，装入镀膜机中，调节工件支架转速为5～10rpm，抽至本底真空2.5～3.0×10-3Pa，同时打开加热器，升温至100～500℃；打开烃类气流量阀，镀膜压力0.1～3.5Pa，温度300～500℃条件下，沉积0.2-10微米厚的碳元素层20～30min；
步骤二：打开氩气流量阀，调节真空室为0.05～0.2Pa，基体加负偏电压600～1000V，进行辉光溅射清洗10～20min；然后降低基体负偏电压至60～200V，开启纯Ti靶，用带正电的氩气轰击靶材，轰击出的负电离子沉积于阳极，带正电的金属离子沉积于阴极碳元素层上，沉积10-300纳米厚的钛镀层5～15min；
步骤三：打开加热器，升温至900～1200℃，使钛金属表面与碳元素层、碳元素层与钛镀层发生界面反应用时20～40min，生成稳定的TiC层，制备结束后自然冷却，得到TiC-DLC复合涂层。
本发明并不局限于上述实施例，在本发明公开的技术方案的基础上，本领域的技术人员根据所公开的技术内容，不需要创造性的劳动就可以对其中的一些技术特征作出一些替换和变形，这些替换和变形均在本发明的保护范围内。

Claims (1)

1.一种钛金属表面合成TiC-DLC复合涂层制备方法，其特征在于，包括步骤如下，
步骤一：将经预处理后的未涂层基体均匀固定在支架上，间距大于等于10mm，装入镀膜机中，调节工件支架转速为5～10rpm，抽至本底真空2.5～3.0×10-3Pa，同时打开加热器，升温至100～500℃；打开烃类气流量阀，镀膜压力0.1～3.5Pa，温度300～500℃条件下，沉积0.2-10微米厚的碳元素层20～30min；
步骤二：打开氩气流量阀，调节真空室为0.05～0.2Pa，基体加负偏电压600～1000V，进行辉光溅射清洗10～20min；然后降低基体负偏电压至60～200V，开启纯Ti靶，用带正电的氩气轰击靶材，轰击出的负电离子沉积于阳极，带正电的金属离子沉积于阴极碳元素层上，沉积10-300纳米厚的钛镀层5～15min；
步骤三：打开加热器，升温至900～1200℃，使钛金属表面与碳元素层、碳元素层与钛镀层发生界面反应用时20～40min，生成稳定的TiC层，制备结束后自然冷却，得到TiC-DLC复合涂层。
CN201610906713.3A 2016-10-18 2016-10-18 一种钛金属表面合成TiC‑DLC复合涂层制备方法 Pending CN106567076A (zh)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108330432A (zh) * 2018-03-03 2018-07-27 西北有色金属研究院 一种钢材表面无氢复合改性层的制备方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108330432A (zh) * 2018-03-03 2018-07-27 西北有色金属研究院 一种钢材表面无氢复合改性层的制备方法

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Application publication date: 20170419