ES2101596T3 - Sensor capacitivo de aceleracion. - Google Patents

Sensor capacitivo de aceleracion.

Info

Publication number
ES2101596T3
ES2101596T3 ES95116081T ES95116081T ES2101596T3 ES 2101596 T3 ES2101596 T3 ES 2101596T3 ES 95116081 T ES95116081 T ES 95116081T ES 95116081 T ES95116081 T ES 95116081T ES 2101596 T3 ES2101596 T3 ES 2101596T3
Authority
ES
Spain
Prior art keywords
acceleration sensor
capacitive acceleration
support structure
free
modification
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES95116081T
Other languages
English (en)
Inventor
Gunther Dr Schuster
Udo Nothelfer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Conti Temic Microelectronic GmbH
Original Assignee
Temic Telefunken Microelectronic GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Temic Telefunken Microelectronic GmbH filed Critical Temic Telefunken Microelectronic GmbH
Application granted granted Critical
Publication of ES2101596T3 publication Critical patent/ES2101596T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)

Abstract

LA INVENCION SE REFIERE A UN SENSOR (10) DE ACELERACION CAPACITIVO CON MONTAJE PLANO, EN PARTICULAR PARA UTILIZACION COMO PARTE DE UN EQUIPO DE PROTECCION DE OCUPANTES EN UN AUTOMOVIL. PARA ELLO SE DISPONE DE UNA ESTRUCTURA (2) DE SOPORTE LIBRE EN UN ESPACIO (13) HUECO ENTRE DOS CUERPOS (1A, 1B) SEMICONDUCTORES AISLADOS ELECTRICAMENTE UNO DE OTRO Y UNIDOS DE FORMA MECANICA UNO CON OTRO, SIENDO LA DISPOSICION DE FORMA MOVIL. UNA FUERZA DE ACELERACION QUE ACTUA SOBRE LA MASA SOPORTADA DE LA ESTRUCTURA (2) DE SOPORTE LIBRE PREDOMINA CON UNA MODIFICACION DE DISTANCIA ENTRE LA ESTRUCTURA (2) DE SOPORTE LIBRE Y EL CUERPO SEMICONDUCTOR. ESTO EFECTUA UNA MODIFICACION DE CAPACIDAD QUE PUEDE SER VALORADA POR MEDIO DE UNA DISPOSICION DE CIRCUITO APROPIADO.
ES95116081T 1994-11-03 1995-10-12 Sensor capacitivo de aceleracion. Expired - Lifetime ES2101596T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE4439238A DE4439238A1 (de) 1994-11-03 1994-11-03 Kapazitiver Beschleunigungssensor

Publications (1)

Publication Number Publication Date
ES2101596T3 true ES2101596T3 (es) 1997-07-01

Family

ID=6532378

Family Applications (1)

Application Number Title Priority Date Filing Date
ES95116081T Expired - Lifetime ES2101596T3 (es) 1994-11-03 1995-10-12 Sensor capacitivo de aceleracion.

Country Status (6)

Country Link
US (1) US5623099A (es)
EP (1) EP0710843B1 (es)
JP (1) JP2931892B2 (es)
KR (1) KR100236486B1 (es)
DE (2) DE4439238A1 (es)
ES (1) ES2101596T3 (es)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6222525B1 (en) 1992-03-05 2001-04-24 Brad A. Armstrong Image controllers with sheet connected sensors
DE19541388A1 (de) * 1995-11-07 1997-05-15 Telefunken Microelectron Mikromechanischer Beschleunigungssensor
US20040160414A1 (en) * 1996-07-05 2004-08-19 Armstrong Brad A. Image controller
US8674932B2 (en) * 1996-07-05 2014-03-18 Anascape, Ltd. Image controller
EP0937985B1 (en) * 1997-09-10 2007-11-14 Matsushita Electric Industrial Co., Ltd. A method of producing an acceleration sensor
JP3063742B2 (ja) 1998-01-30 2000-07-12 ダイキン工業株式会社 冷凍装置
WO1999051991A1 (en) * 1998-04-03 1999-10-14 Alliedsignal Inc. Clamshell cover accelerometer
US6105427A (en) * 1998-07-31 2000-08-22 Litton Systems, Inc. Micro-mechanical semiconductor accelerometer
CA2254535C (en) 1998-11-26 2003-10-28 Canpolar East Inc. Sensor for detection of acceleration and attitude within a vehicle
FR2810976B1 (fr) * 2000-06-29 2003-08-29 Planhead Silmag P H S Microcomposant electronique, capteur et actionneur incorporant un tel microcomposant
DE10053309B4 (de) * 2000-10-27 2005-02-24 Eads Deutschland Gmbh Mikromechanischer Beschleunigungssensor
DE10060091B4 (de) 2000-12-02 2004-02-05 Eads Deutschland Gmbh Mikromechanischer Inertialsensor
JP4444004B2 (ja) 2004-06-01 2010-03-31 株式会社デンソー 半導体力学量センサ
JP4957414B2 (ja) * 2007-07-04 2012-06-20 株式会社デンソー 容量式半導体加速度センサ
JP5527015B2 (ja) 2010-05-26 2014-06-18 セイコーエプソン株式会社 素子構造体、慣性センサー、電子機器
JP5527017B2 (ja) * 2010-05-27 2014-06-18 セイコーエプソン株式会社 素子構造体、慣性センサーおよび電子機器
EP2514713B1 (en) 2011-04-20 2013-10-02 Tronics Microsystems S.A. A micro-electromechanical system (MEMS) device
FR3076292B1 (fr) * 2017-12-28 2020-01-03 Commissariat A L'energie Atomique Et Aux Energies Alternatives Procede de transfert d'une couche utile sur un substrat support

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH642461A5 (fr) * 1981-07-02 1984-04-13 Centre Electron Horloger Accelerometre.
DE3611360A1 (de) * 1986-04-04 1987-10-08 Bosch Gmbh Robert Sensor zur selbsttaetigen ausloesung von insassenschutzvorrichtungen
US5008774A (en) * 1989-02-28 1991-04-16 United Technologies Corporation Capacitive accelerometer with mid-plane proof mass
US5228341A (en) * 1989-10-18 1993-07-20 Hitachi, Ltd. Capacitive acceleration detector having reduced mass portion
JPH03210478A (ja) * 1990-01-12 1991-09-13 Nissan Motor Co Ltd 半導体加速度センサ
DE4000903C1 (es) * 1990-01-15 1990-08-09 Robert Bosch Gmbh, 7000 Stuttgart, De
DE4006108A1 (de) * 1990-02-27 1991-08-29 Bosch Gmbh Robert Verfahren zum aufbau von mikromechanischen bauelementen in dickschichttechnik
EP0455070B1 (de) * 1990-05-02 1994-06-22 Siemens Aktiengesellschaft Kapazitiver Sensor mit Frequenzausgang
JP3063209B2 (ja) * 1991-03-27 2000-07-12 豊田工機株式会社 容量型加速度センサ
JP2728807B2 (ja) * 1991-07-24 1998-03-18 株式会社日立製作所 静電容量式加速度センサ
JP2804196B2 (ja) * 1991-10-18 1998-09-24 株式会社日立製作所 マイクロセンサ及びそれを用いた制御システム
JP2765316B2 (ja) * 1991-11-21 1998-06-11 日本電気株式会社 容量型三軸加速度センサ
JPH05180868A (ja) * 1992-01-08 1993-07-23 Omron Corp 静電容量変化型の半導体加速度センサ
GB9205711D0 (en) * 1992-03-16 1992-04-29 Lynxvale Ltd Micromechanical sensor
JP3367113B2 (ja) * 1992-04-27 2003-01-14 株式会社デンソー 加速度センサ
JP2639308B2 (ja) * 1992-11-19 1997-08-13 富士電機株式会社 力センサ，温度センサおよび温度・力センサ装置
FR2700014B1 (fr) * 1992-12-08 1995-04-28 Commissariat Energie Atomique Capteur capacitif sensible aux accélérations orientées dans toutes les directions d'un plan.
FR2700065B1 (fr) * 1992-12-28 1995-02-10 Commissariat Energie Atomique Procédé de fabrication d'accéléromètres utilisant la technologie silicium sur isolant.
JPH06213925A (ja) * 1993-01-18 1994-08-05 Toyota Motor Corp 静電容量型加速度センサ及び圧力センサ
FR2701561B1 (fr) * 1993-02-10 1995-05-05 Sextant Avionique Micro-capteur capacitif et procédé de découpe.
FR2701562B1 (fr) * 1993-02-10 1995-05-05 Sextant Avionique Micro-capteur capacitif à faible capcité parasite et procédé de fabrication.
EP0618450A1 (de) * 1993-03-30 1994-10-05 Siemens Aktiengesellschaft Beschleunigungssensor
DE4421337A1 (de) 1994-06-17 1995-12-21 Telefunken Microelectron Ätzverfahren zur Herstellung von quasiplanaren, freitragenden Strukturen in Silizium

Also Published As

Publication number Publication date
JP2931892B2 (ja) 1999-08-09
JPH08211094A (ja) 1996-08-20
DE59500186D1 (de) 1997-05-22
KR960018587A (ko) 1996-06-17
KR100236486B1 (ko) 1999-12-15
DE4439238A1 (de) 1996-05-09
EP0710843A1 (de) 1996-05-08
US5623099A (en) 1997-04-22
EP0710843B1 (de) 1997-04-16

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