ES2080981T3 - Procedimiento y conjunto de medicion, para la medicion en linea, sin contacto, de la estructura de una superficie o del grosor de una capa. - Google Patents

Procedimiento y conjunto de medicion, para la medicion en linea, sin contacto, de la estructura de una superficie o del grosor de una capa.

Info

Publication number
ES2080981T3
ES2080981T3 ES92106787T ES92106787T ES2080981T3 ES 2080981 T3 ES2080981 T3 ES 2080981T3 ES 92106787 T ES92106787 T ES 92106787T ES 92106787 T ES92106787 T ES 92106787T ES 2080981 T3 ES2080981 T3 ES 2080981T3
Authority
ES
Spain
Prior art keywords
field
temperature
measurement
infrared
reflected radiation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES92106787T
Other languages
English (en)
Inventor
Hugo Dr Dipl Phys Schmidt
Manfred Ruckszio
Raimund Dr Dipl Ing Haas
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hoechst AG
Original Assignee
Hoechst AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hoechst AG filed Critical Hoechst AG
Application granted granted Critical
Publication of ES2080981T3 publication Critical patent/ES2080981T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0658—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of emissivity or reradiation

Abstract

CON UN RADIADOR 2 DE INFRARROJOS, CUYA TEMPERATURA SUPERFICIAL PERMANECE CONSTANTE DURANTE LA MEDICION, SE RADIA UN CAMPO DE MEDICION 4 SOBRE UNA SUPERFICIE DE MATERIAL BAJO UNA INCIDENCIA DE RADIACION INCLINADA. LA TEMPERATURA DE LA RADIACION REFLEJADA SE MIDE CON UN TERMOMETRO 3 DE INFRARROJOS, QUE SE ENCUENTRA DISPUESTO POR ENCIMA DEL CAMPO DE MEDIDA DE FORMA QUE LA RADIACION REFLEJADA INCIDE EN EL CAMPO DE MIRA DEL TERMOMETRO DE INFRARROJOS. LA TOTALIDAD DEL CAMPO DE MEDIDA DE LA SUPERFICIE DEL MATERIAL, QUE SE ENCUENTRA EN EL CAMPO DE MIRA DEL TERMOMETRO DE INFRARROJOS, DEBE SER RADIADA. SE ALMACENA EL CIRCUITO DE TEMPERATURA DE LA RADIACION REFLEJADA CON DEPENDENCIA DE EL ESTADO O CONDUCCION DE LA SUPERFICIE DEL MATERIAL EN UN EQUIPO DE COMPARACION 7. ESTE EQUIPO DE COMPARACION 7 DISPONE EN SU MEMORIA DE UN VALOR TEORICO PARA LA CONDICION DE LA SUPERFICIE DESEADA. SE MIDE LA TEMPERATURA DE INFRARROJOS DE LA SUPERFICIE DESCONOCIDA DEL MATERIAL EN UNA ZONA PROXIMA RELATIVA A LA CONDICION O ESTADO DE LA SUPERFICIE Y SE COMPARA CON EL CICLO DE TEMPERATURA ALMACENADO PARA LA DETERMINACION DEL TAMAÑO DE LOS PARAMETROS DE LA SUPERFICIE. CON EL VALOR OBTENIDO DE ESTA FORMA Y EL VALOR TEORICO ALMACENADO SE GENERA UNA SEÑAL DIFERENCIAL, QUE SE CONDUCE A TRAVES DE LA SALIDA 8 DEL EQUIPO DE COMPARACION 7 A UN CONTROLADOR 9 DEL EQUIPO DE MECANIZADO DEL MATERIAL.
ES92106787T 1991-05-06 1992-04-21 Procedimiento y conjunto de medicion, para la medicion en linea, sin contacto, de la estructura de una superficie o del grosor de una capa. Expired - Lifetime ES2080981T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE4114672A DE4114672A1 (de) 1991-05-06 1991-05-06 Verfahren und messanordnung zur beruehrungslosen on-line messung

Publications (1)

Publication Number Publication Date
ES2080981T3 true ES2080981T3 (es) 1996-02-16

Family

ID=6431036

Family Applications (1)

Application Number Title Priority Date Filing Date
ES92106787T Expired - Lifetime ES2080981T3 (es) 1991-05-06 1992-04-21 Procedimiento y conjunto de medicion, para la medicion en linea, sin contacto, de la estructura de una superficie o del grosor de una capa.

Country Status (8)

Country Link
US (1) US5358333A (es)
EP (1) EP0512313B1 (es)
JP (1) JPH06201358A (es)
KR (1) KR100239839B1 (es)
BR (1) BR9201682A (es)
CA (1) CA2067999A1 (es)
DE (2) DE4114672A1 (es)
ES (1) ES2080981T3 (es)

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US7220966B2 (en) * 2003-07-29 2007-05-22 Toyota Motor Manufacturing North America, Inc. Systems and methods for inspecting coatings, surfaces and interfaces
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US7075086B2 (en) * 2003-08-28 2006-07-11 The Boeing Company Measurement of metal polish quality
EP1591750B1 (de) * 2004-04-26 2016-04-13 Applied Materials GmbH & Co. KG Verfahren und Vorrichtung zur Regelung der Dicke einer Beschichtung auf einem in seiner Längsrichtung bewegten Band
DE102004060235B4 (de) * 2004-12-15 2006-12-21 Jrw Technology + Engineering Gmbh Verfahren und Vorrichtung zur Qualitätsprüfung von Werkstücken
US8204294B2 (en) * 2009-11-25 2012-06-19 Toyota Motor Engineering & Manufacturing North America, Inc. Systems and methods for detecting defects in coatings utilizing color-based thermal mismatch
KR101249168B1 (ko) * 2009-12-18 2013-03-29 주식회사 포스코 냉간압연에서의 품질이상 예지 시스템과 그 방법
CN104007071A (zh) * 2014-06-05 2014-08-27 常州艾瑞特电子有限公司 一种红外金属检测仪
FR3022621B1 (fr) * 2014-06-19 2022-04-29 Poncot Jean Claude Dispositif de mesure d'un ensemble de donnees spatiales d'epaisseur d(x,y) d'une couche mince et procede de mesure utilisant ledit dispositif
CN104931426A (zh) * 2015-06-24 2015-09-23 常州博美新材料科技有限公司 一种水下切粒机堵料检测装置
CN104949736A (zh) * 2015-06-24 2015-09-30 常州博美新材料科技有限公司 水下切粒机堵料检测装置
WO2018017032A1 (en) * 2016-07-21 2018-01-25 Assan Alümi̇nyum San. Ve Ti̇c. A. Ş. Measurement of oxide thickness on aluminum surface by ftir spectroscopy and chemometrics method
US20180292313A1 (en) * 2017-04-11 2018-10-11 Novelis Inc. Systems and methods of detecting coatings on metal substrates
US10899089B2 (en) * 2018-03-30 2021-01-26 The Boeing Company Automated fiber placement end effector with laminar gas cooling jet and infrared image processor for in-situ inspection
CN111322933B (zh) * 2020-03-18 2021-05-18 唐山学院 一种自动化平面度检测装置
CN112432582B (zh) * 2020-11-06 2022-05-27 山东诚信工程建设监理有限公司 一种基于互联网的建筑工程用检测装置及其检测方法
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Also Published As

Publication number Publication date
DE59204228D1 (de) 1995-12-14
EP0512313B1 (de) 1995-11-08
EP0512313A2 (de) 1992-11-11
BR9201682A (pt) 1992-12-15
KR920021969A (ko) 1992-12-19
JPH06201358A (ja) 1994-07-19
US5358333A (en) 1994-10-25
CA2067999A1 (en) 1992-11-07
KR100239839B1 (ko) 2000-01-15
EP0512313A3 (en) 1993-04-07
DE4114672A1 (de) 1992-11-12

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