ES2046209T3 - Estructura de contacto a tope de area reducida. - Google Patents

Estructura de contacto a tope de area reducida.

Info

Publication number
ES2046209T3
ES2046209T3 ES87310857T ES87310857T ES2046209T3 ES 2046209 T3 ES2046209 T3 ES 2046209T3 ES 87310857 T ES87310857 T ES 87310857T ES 87310857 T ES87310857 T ES 87310857T ES 2046209 T3 ES2046209 T3 ES 2046209T3
Authority
ES
Spain
Prior art keywords
polysilicone
silicone
region
attack
layers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES87310857T
Other languages
English (en)
Spanish (es)
Inventor
Craig S Sander
Richard K Klein
Tat C Choi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advanced Micro Devices Inc
Original Assignee
Advanced Micro Devices Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advanced Micro Devices Inc filed Critical Advanced Micro Devices Inc
Application granted granted Critical
Publication of ES2046209T3 publication Critical patent/ES2046209T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H10W20/0698—
    • H10W20/056—
    • H10W20/062—

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Semiconductor Memories (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Air Bags (AREA)
  • Coupling Device And Connection With Printed Circuit (AREA)
  • Multi-Conductor Connections (AREA)
  • Connector Housings Or Holding Contact Members (AREA)
  • Installation Of Indoor Wiring (AREA)
ES87310857T 1986-12-17 1987-12-10 Estructura de contacto a tope de area reducida. Expired - Lifetime ES2046209T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US94415086A 1986-12-17 1986-12-17

Publications (1)

Publication Number Publication Date
ES2046209T3 true ES2046209T3 (es) 1995-04-01

Family

ID=25480890

Family Applications (1)

Application Number Title Priority Date Filing Date
ES87310857T Expired - Lifetime ES2046209T3 (es) 1986-12-17 1987-12-10 Estructura de contacto a tope de area reducida.

Country Status (6)

Country Link
EP (1) EP0272051B1 (enExample)
JP (1) JPH0752751B2 (enExample)
AT (1) ATE80750T1 (enExample)
DE (1) DE3781778T2 (enExample)
ES (1) ES2046209T3 (enExample)
GR (1) GR3005727T3 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02202054A (ja) * 1989-01-31 1990-08-10 Texas Instr Japan Ltd 半導体装置及びその製造方法
NL9100094A (nl) * 1991-01-21 1992-08-17 Koninkl Philips Electronics Nv Halfgeleiderinrichting en werkwijze ter vervaardiging van een dergelijke halfgeleiderinrichting.
GB9219268D0 (en) * 1992-09-11 1992-10-28 Inmos Ltd Semiconductor device incorporating a contact and manufacture thereof
WO2003023847A2 (en) * 2001-09-13 2003-03-20 Koninklijke Philips Electronics N.V. Integrated circuit, portable device and method for manufacturing an integrated circuit
DE102008045037B4 (de) * 2008-08-29 2010-12-30 Advanced Micro Devices, Inc., Sunnyvale Statischer RAM-Zellenaufbau und Mehrfachkontaktschema zum Anschluss von Doppelkanaltransistoren

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5842257A (ja) * 1981-09-07 1983-03-11 Toshiba Corp 半導体装置
JPS59171140A (ja) * 1983-03-17 1984-09-27 Nec Corp 半導体装置
US4663831A (en) * 1985-10-08 1987-05-12 Motorola, Inc. Method of forming transistors with poly-sidewall contacts utilizing deposition of polycrystalline and insulating layers combined with selective etching and oxidation of said layers

Also Published As

Publication number Publication date
EP0272051B1 (en) 1992-09-16
DE3781778D1 (de) 1992-10-22
EP0272051A2 (en) 1988-06-22
DE3781778T2 (de) 1993-01-28
GR3005727T3 (enExample) 1993-06-07
EP0272051A3 (en) 1989-02-01
ATE80750T1 (de) 1992-10-15
JPH0752751B2 (ja) 1995-06-05
JPS63164359A (ja) 1988-07-07

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