ES2038986T3 - Metodo de fabricacion de un dispositivo semiconductor. - Google Patents
Metodo de fabricacion de un dispositivo semiconductor.Info
- Publication number
- ES2038986T3 ES2038986T3 ES198787200371T ES87200371T ES2038986T3 ES 2038986 T3 ES2038986 T3 ES 2038986T3 ES 198787200371 T ES198787200371 T ES 198787200371T ES 87200371 T ES87200371 T ES 87200371T ES 2038986 T3 ES2038986 T3 ES 2038986T3
- Authority
- ES
- Spain
- Prior art keywords
- opening
- layer
- semiconductive device
- zone
- manufacture method
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
- 239000004020 conductor Substances 0.000 abstract 1
- 230000000873 masking effect Effects 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- 238000002161 passivation Methods 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/08—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind
- H01L27/082—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including bipolar components only
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66234—Bipolar junction transistors [BJT]
- H01L29/66272—Silicon vertical transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/033—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Inorganic Chemistry (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Electrodes Of Semiconductors (AREA)
- Bipolar Transistors (AREA)
- Junction Field-Effect Transistors (AREA)
Abstract
DISPOSITIVO SEMICONDUCTOR QUE CONSTA DE UN CIRCUITO CON UNA PRIMERA (9) Y UNA SEGUNDA ZONAS (14) DE ELECTRODOS DE CONDUCTIVIDAD OPUESTA. EL ADULTERANTE PARA LA SEGUNDA ZONA DE ELECTRODO (14) VA EN EL CUERPO DEL SEMICONDUCTOR (1) A TRAVES DE UNA ABERTURA (12) EN UNA CAPA DE ENMASCARAMIENTO (11), ABERTURA QUE SE REDUCE MEDIANTE BORDES (17,16) DE MATERIAL DE PASIVACION. LA SEGUNDA ZONA DE ELECTRODO (14) ESTA CONECTADA A UNA CAPA CONDUCTORA (22) QUE SE EXTIENDE A TRAVES DE LA CAPA (11) Y LOS BORDES (17,16) HASTA LA ABERTURA DE TAMAÑO REDUCIDO. ESTA PUEDE DERIVARSE DE LA ABERTURA DE ADULTERACION (12) SIN TOMAR EN CUENTA UNA TOLERANCIA DE ALINEAMIENTO. PREFERIBLEMENTE, LA CAPA (11) COMPRENDERA UN PATRON DE MATERIAL CONDUCTOR ELECTRICO DE GEOMETRIA CERRADA QUE RODEA TOTALMENTE LA ABERTURA (12).
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL8600769A NL8600769A (nl) | 1986-03-26 | 1986-03-26 | Werkwijze voor het vervaardigen van een halfgeleiderinrichting. |
Publications (1)
Publication Number | Publication Date |
---|---|
ES2038986T3 true ES2038986T3 (es) | 1993-08-16 |
Family
ID=19847771
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ES198787200371T Expired - Lifetime ES2038986T3 (es) | 1986-03-26 | 1987-03-02 | Metodo de fabricacion de un dispositivo semiconductor. |
Country Status (7)
Country | Link |
---|---|
EP (1) | EP0242893B1 (es) |
JP (1) | JPS62232164A (es) |
KR (1) | KR950010052B1 (es) |
CA (1) | CA1288527C (es) |
DE (1) | DE3783799T2 (es) |
ES (1) | ES2038986T3 (es) |
NL (1) | NL8600769A (es) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01120847A (ja) * | 1987-11-05 | 1989-05-12 | Fujitsu Ltd | 半導体装置 |
US5247197A (en) * | 1987-11-05 | 1993-09-21 | Fujitsu Limited | Dynamic random access memory device having improved contact hole structures |
US6091129A (en) * | 1996-06-19 | 2000-07-18 | Cypress Semiconductor Corporation | Self-aligned trench isolated structure |
US5830797A (en) * | 1996-06-20 | 1998-11-03 | Cypress Semiconductor Corporation | Interconnect methods and apparatus |
US6004874A (en) * | 1996-06-26 | 1999-12-21 | Cypress Semiconductor Corporation | Method for forming an interconnect |
US5911887A (en) * | 1996-07-19 | 1999-06-15 | Cypress Semiconductor Corporation | Method of etching a bond pad |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS567463A (en) * | 1979-06-29 | 1981-01-26 | Hitachi Ltd | Semiconductor device and its manufacture |
JPS5870570A (ja) * | 1981-09-28 | 1983-04-27 | Fujitsu Ltd | 半導体装置の製造方法 |
US4507171A (en) * | 1982-08-06 | 1985-03-26 | International Business Machines Corporation | Method for contacting a narrow width PN junction region |
JPS60163446A (ja) * | 1984-02-02 | 1985-08-26 | Pioneer Electronic Corp | スル−ホ−ルの形成方法 |
JPS60194570A (ja) * | 1984-03-16 | 1985-10-03 | Toshiba Corp | 半導体装置の製造方法 |
-
1986
- 1986-03-26 NL NL8600769A patent/NL8600769A/nl not_active Application Discontinuation
-
1987
- 1987-03-02 EP EP87200371A patent/EP0242893B1/en not_active Expired - Lifetime
- 1987-03-02 ES ES198787200371T patent/ES2038986T3/es not_active Expired - Lifetime
- 1987-03-02 DE DE8787200371T patent/DE3783799T2/de not_active Expired - Fee Related
- 1987-03-18 CA CA000532339A patent/CA1288527C/en not_active Expired - Lifetime
- 1987-03-23 KR KR87002631A patent/KR950010052B1/ko not_active IP Right Cessation
- 1987-03-24 JP JP62068126A patent/JPS62232164A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
KR870009475A (ko) | 1987-10-27 |
DE3783799T2 (de) | 1993-07-01 |
KR950010052B1 (en) | 1995-09-06 |
CA1288527C (en) | 1991-09-03 |
EP0242893A1 (en) | 1987-10-28 |
DE3783799D1 (de) | 1993-03-11 |
JPS62232164A (ja) | 1987-10-12 |
NL8600769A (nl) | 1987-10-16 |
EP0242893B1 (en) | 1993-01-27 |
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