ES2038986T3 - Metodo de fabricacion de un dispositivo semiconductor. - Google Patents

Metodo de fabricacion de un dispositivo semiconductor.

Info

Publication number
ES2038986T3
ES2038986T3 ES198787200371T ES87200371T ES2038986T3 ES 2038986 T3 ES2038986 T3 ES 2038986T3 ES 198787200371 T ES198787200371 T ES 198787200371T ES 87200371 T ES87200371 T ES 87200371T ES 2038986 T3 ES2038986 T3 ES 2038986T3
Authority
ES
Spain
Prior art keywords
opening
layer
semiconductive device
zone
manufacture method
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES198787200371T
Other languages
English (en)
Inventor
Wilhelmus J.M.J. Josquin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Application granted granted Critical
Publication of ES2038986T3 publication Critical patent/ES2038986T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
    • H01L27/08—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind
    • H01L27/082—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including bipolar components only
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/66007—Multistep manufacturing processes
    • H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
    • H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
    • H01L29/66234—Bipolar junction transistors [BJT]
    • H01L29/66272—Silicon vertical transistors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • H01L21/033—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Bipolar Transistors (AREA)
  • Junction Field-Effect Transistors (AREA)

Abstract

DISPOSITIVO SEMICONDUCTOR QUE CONSTA DE UN CIRCUITO CON UNA PRIMERA (9) Y UNA SEGUNDA ZONAS (14) DE ELECTRODOS DE CONDUCTIVIDAD OPUESTA. EL ADULTERANTE PARA LA SEGUNDA ZONA DE ELECTRODO (14) VA EN EL CUERPO DEL SEMICONDUCTOR (1) A TRAVES DE UNA ABERTURA (12) EN UNA CAPA DE ENMASCARAMIENTO (11), ABERTURA QUE SE REDUCE MEDIANTE BORDES (17,16) DE MATERIAL DE PASIVACION. LA SEGUNDA ZONA DE ELECTRODO (14) ESTA CONECTADA A UNA CAPA CONDUCTORA (22) QUE SE EXTIENDE A TRAVES DE LA CAPA (11) Y LOS BORDES (17,16) HASTA LA ABERTURA DE TAMAÑO REDUCIDO. ESTA PUEDE DERIVARSE DE LA ABERTURA DE ADULTERACION (12) SIN TOMAR EN CUENTA UNA TOLERANCIA DE ALINEAMIENTO. PREFERIBLEMENTE, LA CAPA (11) COMPRENDERA UN PATRON DE MATERIAL CONDUCTOR ELECTRICO DE GEOMETRIA CERRADA QUE RODEA TOTALMENTE LA ABERTURA (12).
ES198787200371T 1986-03-26 1987-03-02 Metodo de fabricacion de un dispositivo semiconductor. Expired - Lifetime ES2038986T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL8600769A NL8600769A (nl) 1986-03-26 1986-03-26 Werkwijze voor het vervaardigen van een halfgeleiderinrichting.

Publications (1)

Publication Number Publication Date
ES2038986T3 true ES2038986T3 (es) 1993-08-16

Family

ID=19847771

Family Applications (1)

Application Number Title Priority Date Filing Date
ES198787200371T Expired - Lifetime ES2038986T3 (es) 1986-03-26 1987-03-02 Metodo de fabricacion de un dispositivo semiconductor.

Country Status (7)

Country Link
EP (1) EP0242893B1 (es)
JP (1) JPS62232164A (es)
KR (1) KR950010052B1 (es)
CA (1) CA1288527C (es)
DE (1) DE3783799T2 (es)
ES (1) ES2038986T3 (es)
NL (1) NL8600769A (es)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5247197A (en) * 1987-11-05 1993-09-21 Fujitsu Limited Dynamic random access memory device having improved contact hole structures
JPH01120847A (ja) * 1987-11-05 1989-05-12 Fujitsu Ltd 半導体装置
US6091129A (en) * 1996-06-19 2000-07-18 Cypress Semiconductor Corporation Self-aligned trench isolated structure
US5830797A (en) * 1996-06-20 1998-11-03 Cypress Semiconductor Corporation Interconnect methods and apparatus
US6004874A (en) * 1996-06-26 1999-12-21 Cypress Semiconductor Corporation Method for forming an interconnect
US5911887A (en) * 1996-07-19 1999-06-15 Cypress Semiconductor Corporation Method of etching a bond pad

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS567463A (en) * 1979-06-29 1981-01-26 Hitachi Ltd Semiconductor device and its manufacture
JPS5870570A (ja) * 1981-09-28 1983-04-27 Fujitsu Ltd 半導体装置の製造方法
US4507171A (en) * 1982-08-06 1985-03-26 International Business Machines Corporation Method for contacting a narrow width PN junction region
JPS60163446A (ja) * 1984-02-02 1985-08-26 Pioneer Electronic Corp スル−ホ−ルの形成方法
JPS60194570A (ja) * 1984-03-16 1985-10-03 Toshiba Corp 半導体装置の製造方法

Also Published As

Publication number Publication date
DE3783799D1 (de) 1993-03-11
JPS62232164A (ja) 1987-10-12
CA1288527C (en) 1991-09-03
DE3783799T2 (de) 1993-07-01
KR870009475A (ko) 1987-10-27
NL8600769A (nl) 1987-10-16
KR950010052B1 (en) 1995-09-06
EP0242893A1 (en) 1987-10-28
EP0242893B1 (en) 1993-01-27

Similar Documents

Publication Publication Date Title
BR7901763A (pt) Dissipador de tensoes termicamente e eletricamente condutivo para dispositivo semicondutor
KR850005733A (ko) 반도체 기억장치
DE3166074D1 (en) Method of improving the conductivity of a microelectronic conductive tungsten silicide film and semiconductor device comprising said film
GB1129200A (en) High frequency field effect transistor
EP0339962A3 (en) Field effect semiconductor device
ATE37967T1 (de) Halbleiterbauelement mit kontaktloch.
ES2038986T3 (es) Metodo de fabricacion de un dispositivo semiconductor.
JPS5676574A (en) Schottky injection electrode type semiconductor device
ATE86799T1 (de) Integrierte schaltung mit ''latch-up'' schutzschaltung in komplementaerer mos schaltungstechnik.
GB1444823A (en) Semiconductor devices
JPS54109785A (en) Semiconductor device
JPS57162360A (en) Complementary insulated gate field effect semiconductor device
JPS5319766A (en) Preparation of field-effect type semiconductor device
JPS6474737A (en) Master slice type semiconductor device
JPS52151576A (en) Semiconductor device
JPS5291381A (en) Field effect type semiconductor device
JPS56133871A (en) Mos field effect semiconductor device with high breakdown voltage
JPS5376675A (en) High breakdown voltage field effect power transistor
JPS55108773A (en) Insulating gate type field effect transistor
JPS5784180A (en) Semiconductor device
JPS5286779A (en) Semiconductor device
JPS57114287A (en) Semiconductor device
JPS5516456A (en) Semiconductor integrated circuit
JPS53108280A (en) Semiconductor device
JPS548985A (en) Semiconductor device