ES2030693T3 - Sensor y procedimiento para su fabricacion. - Google Patents

Sensor y procedimiento para su fabricacion.

Info

Publication number
ES2030693T3
ES2030693T3 ES198787115446T ES87115446T ES2030693T3 ES 2030693 T3 ES2030693 T3 ES 2030693T3 ES 198787115446 T ES198787115446 T ES 198787115446T ES 87115446 T ES87115446 T ES 87115446T ES 2030693 T3 ES2030693 T3 ES 2030693T3
Authority
ES
Spain
Prior art keywords
support
cord
load
sensitive
sno2
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES198787115446T
Other languages
English (en)
Inventor
Koda Hiroshi
Shimabukuro Muneharu
Ono Kiyonori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Figaro Engineering Inc
Original Assignee
Figaro Engineering Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP61256082A external-priority patent/JPH07104308B2/ja
Priority claimed from JP62016844A external-priority patent/JPS63184049A/ja
Application filed by Figaro Engineering Inc filed Critical Figaro Engineering Inc
Application granted granted Critical
Publication of ES2030693T3 publication Critical patent/ES2030693T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)

Abstract

UN SENSOR COMPRIMIENDO UNA CARGA DE METAL GENERANDO UN CORDON FORMADO CON UNA CARGA REVESTIDA DE AL2O3 O IGUAL SOBRE SU SUPERFICIE, Y UNA ATMOSFERA SENSITIVA DE APOYO SNO2 O IGUAL SOSTENIDA EN EL REVESTIMIENTO. EL REVESTIMIENTO AISLANTE ES FORMADO, POR EJEMPLO, POR COLOIDE LIQUIDO DE ALUMINIO Y DESCOMPOSICION TERMICA, O PLASMA CVD DE UN COMPUESTO ALUMINICO. EL APOYO SENSITIVO ES DEFORMADO, POR EJEMPLO, POR LA DESCOMPOSCION TERMICA DE UN COMPUESTO ORGANICO DE ESTAÑO, VACIO DE EVAPORACION O PETERREANDO ESTAÑO O IMPRESION DE SNO2 EN EL CORDON DE CARGA GENERADA CUANDO EL CORDON ES EN FORMA DE PLACA DE METAL LLANA. EN LINEA DE MINIMA RESISTENCIA UN ELECTRODO ES CONECTADO AL APOYO SENSITIVO DERIVANDO UN CAUDAL DE SALIDA DESDE EL APOYO EN RESPUESTA A UN GAS COMBUSTIBLE, HUMEDO O IGUAL.
ES198787115446T 1986-10-28 1987-10-21 Sensor y procedimiento para su fabricacion. Expired - Lifetime ES2030693T3 (es)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP61256082A JPH07104308B2 (ja) 1986-10-28 1986-10-28 センサおよびその製造方法
JP62016844A JPS63184049A (ja) 1987-01-27 1987-01-27 ガスセンサの製造方法

Publications (1)

Publication Number Publication Date
ES2030693T3 true ES2030693T3 (es) 1992-11-16

Family

ID=26353275

Family Applications (1)

Application Number Title Priority Date Filing Date
ES198787115446T Expired - Lifetime ES2030693T3 (es) 1986-10-28 1987-10-21 Sensor y procedimiento para su fabricacion.

Country Status (5)

Country Link
US (1) US4938928A (es)
EP (1) EP0265834B1 (es)
KR (1) KR900005617B1 (es)
DE (1) DE3780560T2 (es)
ES (1) ES2030693T3 (es)

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JPH01299452A (ja) * 1988-05-27 1989-12-04 Ricoh Co Ltd ４端子検出型ガス検出装置
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CN1019331B (zh) * 1989-08-11 1992-12-02 法国煤矿公司 薄膜细丝型传感器及其制造方法和应用
EP0448681B1 (de) * 1989-10-17 1997-02-26 I.T.V.I. International Techno Venture Invest Ag Gas-sensor-anordnung
US5405584A (en) * 1992-04-03 1995-04-11 Zito; Richard R. Device for detecting adsorbed molecules
US5326429A (en) * 1992-07-21 1994-07-05 Seagate Technology, Inc. Process for making studless thin film magnetic head
US5820770A (en) * 1992-07-21 1998-10-13 Seagate Technology, Inc. Thin film magnetic head including vias formed in alumina layer and process for making the same
DE4302721A1 (de) * 1993-02-01 1994-08-04 Claussen Nils Verfahren zur Herstellung von feinkörnigen Al¶2¶ O¶3¶ enthaltenden keramischen Formkörpern unter Verwendung von pulverförmigem Aluminiummetall
US5466605A (en) * 1993-03-15 1995-11-14 Arizona Board Of Regents Method for detection of chemical components
US5540892A (en) * 1993-04-22 1996-07-30 Kidd; Marvin L. Urinalysis collection and testing kit and method
US5672258A (en) * 1993-06-17 1997-09-30 Rutgers, The State University Of New Jersey Impedance type humidity sensor with proton-conducting electrolyte
US5871633A (en) * 1993-06-17 1999-02-16 Rutgers, The State University Impedance type humidity sensor with protonconducting electrolyte and method of using same
US5643369A (en) * 1993-06-24 1997-07-01 Fuji Xerox Co., Ltd. Photoelectric conversion element having an infrared transmissive indium-tin oxide film
US5863503A (en) * 1993-06-30 1999-01-26 Osaka Gas Co., Ltd. Nitrogen oxide detecting sensor and method of manufacturing the same
GB9501461D0 (en) * 1994-06-20 1995-03-15 Capteur Sensors & Analysers Detection of ozone
US5985673A (en) * 1994-12-22 1999-11-16 Arizona Baord Of Regents Method for regeneration of a sensor
US5578753A (en) * 1995-05-23 1996-11-26 Micro Weiss Electronics, Inc. Humidity and/or temperature control device
KR100426939B1 (ko) * 1995-06-19 2004-07-19 피가로 기켄 가부시키가이샤 가스센서
US6709635B1 (en) * 1996-03-21 2004-03-23 California Institute Of Technology Gas sensor test chip
US5945069A (en) * 1996-03-21 1999-08-31 California Institute Of Technology Gas sensor test chip
US5918260A (en) * 1997-06-11 1999-06-29 Cts Corporation Gas sensor with multi-level sensitivity circuitry
DE19805549C1 (de) * 1998-02-11 1999-08-12 Siemens Ag Verfahren zum Bond-Kontaktieren von elektronischen Bauelementchips, insbesondere Metalloxid-Gassensorchips
CA2390261C (en) * 1999-11-08 2014-04-22 University Of Florida Research Foundation, Inc. Marker detection method and apparatus to monitor drug compliance
US20050037374A1 (en) * 1999-11-08 2005-02-17 Melker Richard J. Combined nanotechnology and sensor technologies for simultaneous diagnosis and treatment
US6468682B1 (en) 2000-05-17 2002-10-22 Avista Laboratories, Inc. Ion exchange membrane fuel cell
US6981947B2 (en) 2002-01-22 2006-01-03 University Of Florida Research Foundation, Inc. Method and apparatus for monitoring respiratory gases during anesthesia
US20050054942A1 (en) 2002-01-22 2005-03-10 Melker Richard J. System and method for therapeutic drug monitoring
US7104963B2 (en) 2002-01-22 2006-09-12 University Of Florida Research Foundation, Inc. Method and apparatus for monitoring intravenous (IV) drug concentration using exhaled breath
US7052854B2 (en) * 2001-05-23 2006-05-30 University Of Florida Research Foundation, Inc. Application of nanotechnology and sensor technologies for ex-vivo diagnostics
WO2002095398A1 (en) * 2001-05-24 2002-11-28 University Of Florida Method and apparatus for detecting environmental smoke exposure
US6532792B2 (en) 2001-07-26 2003-03-18 Avista Laboratories, Inc. Method of compensating a MOS gas sensor, method of manufacturing a MOS gas sensor, MOS gas sensor, and fuel cell system
US20070167853A1 (en) * 2002-01-22 2007-07-19 Melker Richard J System and method for monitoring health using exhaled breath
US20030180445A1 (en) * 2002-03-21 2003-09-25 Industrial Scientific Corporation Method for forming a catalytic bead sensor
US20060160134A1 (en) * 2002-10-21 2006-07-20 Melker Richard J Novel application of biosensors for diagnosis and treatment of disease
US20040084308A1 (en) * 2002-11-01 2004-05-06 Cole Barrett E. Gas sensor
EP2055233B1 (en) 2003-01-23 2012-10-10 University of Florida Research Foundation, Incorporated Method and apparatus for monitoring intravenous (IV) drug concentration using exhaled breath
US6987459B2 (en) 2003-01-24 2006-01-17 Honeywell International, Inc. Portable combustible gas detector
ITTO20030318A1 (it) * 2003-04-24 2004-10-25 Sacmi Dispositivo sensore di gas a film sottile semiconduttore.
US7210333B2 (en) * 2003-05-30 2007-05-01 Ngk Spark Plug Co., Ltd. Humidity sensor and method of using the humidity sensor
US20050191757A1 (en) * 2004-01-20 2005-09-01 Melker Richard J. Method and apparatus for detecting humans and human remains
US20060062734A1 (en) * 2004-09-20 2006-03-23 Melker Richard J Methods and systems for preventing diversion of prescription drugs
US20060257883A1 (en) * 2005-05-10 2006-11-16 Bjoraker David G Detection and measurement of hematological parameters characterizing cellular blood components
US7914460B2 (en) * 2006-08-15 2011-03-29 University Of Florida Research Foundation, Inc. Condensate glucose analyzer
US8279063B2 (en) * 2008-11-12 2012-10-02 Xhale, Inc. Personnel location and monitoring system and method for enclosed facilities
US7816681B2 (en) * 2008-12-03 2010-10-19 Electronics And Telecommunications Research Institute Capacitive gas sensor and method of fabricating the same
DE102011010799A1 (de) * 2011-02-09 2012-08-09 Krohne Messtechnik Gmbh Explosionsgeschütztes Gerät
US8555701B1 (en) * 2011-08-05 2013-10-15 Cps Products, Inc. Enhanced metal oxide gas sensor
HUE060558T2 (hu) 2018-06-11 2023-03-28 Poet Res Inc Eljárások gabonaolaj-készítmény nyersanyag finomítására és ezzel kapcsolatos rendszerek készítmények és alkalmazások
CN110590339B (zh) * 2019-09-30 2022-04-01 哈尔滨理工大学 一种氧化铝陶瓷部件的制备方法
TWI751863B (zh) * 2020-12-28 2022-01-01 新唐科技股份有限公司 半導體結構

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US3564474A (en) * 1968-06-04 1971-02-16 Nat Res Dev Electrically heatable elements
FR2087004A5 (en) * 1970-04-16 1971-12-31 Naoyoshi Taguchi Gas detector using semi-conductor with gasre
US4007435A (en) * 1973-07-30 1977-02-08 Tien Tseng Ying Sensor device and method of manufacturing same
US3959764A (en) * 1974-10-09 1976-05-25 Dictaphone Corporation Gas analyzing element
GB1549640A (en) * 1976-07-06 1979-08-08 English Electric Valve Co Ltd Combustible-gas detectors
JPS5618750A (en) * 1979-07-25 1981-02-21 Ricoh Co Ltd Gas detector
DE3019387C2 (de) * 1980-05-21 1986-01-23 Siemens AG, 1000 Berlin und 8000 München Dünnschicht-Halbleiter-Gassensor mit einem in den Sensoraufbau integrierten Heizelement
GB2077437A (en) * 1980-06-07 1981-12-16 Emi Ltd Ammonia gas sensors
US4407778A (en) * 1980-09-25 1983-10-04 Tokyo Shibaura Denki Kabushiki Kaisha Freon gas detecting element
US4423407A (en) * 1981-02-27 1983-12-27 Dart Industries Inc. Apparatus and method for measuring the concentration of gases
JPS58124943A (ja) * 1982-01-21 1983-07-25 Toyota Central Res & Dev Lab Inc マイクロヒ−タ付き限界電流式酸素センサとそれを用いた限界電流式酸素濃度検出装置
JPS59188549A (ja) * 1983-04-11 1984-10-25 Shinkosumosu Denki Kk ２端子形半導体ガス検知素子
US4587104A (en) * 1983-12-21 1986-05-06 Westinghouse Electric Corp. Semiconductor oxide gas combustibles sensor
US4706493A (en) * 1985-12-13 1987-11-17 General Motors Corporation Semiconductor gas sensor having thermally isolated site

Also Published As

Publication number Publication date
KR900005617B1 (ko) 1990-07-31
KR880005451A (ko) 1988-06-29
DE3780560T2 (de) 1992-12-10
US4938928A (en) 1990-07-03
EP0265834A3 (en) 1990-03-07
EP0265834B1 (en) 1992-07-22
DE3780560D1 (de) 1992-08-27
EP0265834A2 (en) 1988-05-04

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