KR880005451A - 센서 및 그의 제조방법 - Google Patents

센서 및 그의 제조방법 Download PDF

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Publication number
KR880005451A
KR880005451A KR870011786A KR870011786A KR880005451A KR 880005451 A KR880005451 A KR 880005451A KR 870011786 A KR870011786 A KR 870011786A KR 870011786 A KR870011786 A KR 870011786A KR 880005451 A KR880005451 A KR 880005451A
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KR
South Korea
Prior art keywords
sensitive material
atmosphere
material layer
heat
metal
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KR870011786A
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English (en)
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KR900005617B1 (ko
Inventor
히로시 고오다
무네하루 시마부구로오
기요노리 오노
Original Assignee
니시다 젠다로오
후이가로 기겐 가부시기가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP61256082A external-priority patent/JPH07104308B2/ja
Priority claimed from JP62016844A external-priority patent/JPS63184049A/ja
Application filed by 니시다 젠다로오, 후이가로 기겐 가부시기가이샤 filed Critical 니시다 젠다로오
Publication of KR880005451A publication Critical patent/KR880005451A/ko
Application granted granted Critical
Publication of KR900005617B1 publication Critical patent/KR900005617B1/ko

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid

Abstract

내용 없음

Description

센서 및 그의 제조방법
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음

Claims (12)

  1. 내열절연성피복을 적어도 표면의 일부에 실시한 금속발연체와, 적어도 그 일부를 이 피복상에 설치한 분위기감응물질과 이 분위기감응물질에 접속한 적어도 한 개의 전극을 갖는 센서.
  2. 제1항에 있어서, 금속발연체를 비금속발연체로 하고, 내열절연성피복에 의하여 분위기감응물질층과 금속발연체를 분리함과 동시에 분위기감응물질층에는 적어도 두 개의 전극을 접속한 것을 특징으로 하는 센서.
  3. 제1항에 있어서, 금속발연체를 귀금속발연체로 함과 동시에 금속발연체에는 내열절연성피복을 실시하지 않는 영역을 설치하고, 이 영역까지 분위기감응물질층을 연장하여 분위기감응물질층을 금속발연체로 접촉시켜 금속발연체를 분위기감응물질층의 전극으로 사용함과 동시에 분위기감응물질층에 접속한 다른전극을 설치한 것을 특징으로 하는 센서.
  4. 제2항에 있어서, 금속발연체의 일부에 도전성피복을 실시한 것을 특징으로 하는 센서.
  5. 제1항에 있어서, 적어도 3개의 외부전극을 설치한 내열절연성기판을 설치함과 동시에 전기금속발열체를 이 기판상에 배치하고, 전기한 금속발연체와 전기한 분위기감응물질층에 접속한 전극을 적어도 3개의 외부전극에 결합한 것을 특징으로 하는 센서.
  6. 금속발연체의 표면의 적어도 일부에 내열절연성피복을 실시하는 공정, 분위기감응물질층을 적어도 그 일부가 이 피복상에 배치되도록 설치하는 공정 및 분위기감응물질층에 접속한 적어도 1개의 전극을 설치하는 공정을 갖는 센서의 제조방법.
  7. 제6항에 있어서, 전기한 전극을 분위기감응물질층의 형성후에 설치하는 것을 특징으로 하는 센서의 제조방법.
  8. 제6항에 있어서, 전기한 전극을 내열절연성피복의 형성후 분위기감응물질층의 형성전에 설치하는 것을 특징으로 하는 센서의 제조방법.
  9. 제6항에 있어서, 전기한 내열절연성피복을 플라즈마 CVD에 의하여 설치하는 것을 특징으로 하는 센서의 제조방법.
  10. 제6항에 있어서, 전기한 내열절연성피복을 열분해로 인하여 내열절연성피복재료로 전화하는 물질의 열분해에 의하여 설치되는 것을 특징으로 하는 센서의 제조방법.
  11. 제6항에 있어서, 이미 내열절연성피복을 실시함과 동시에 분위기감응물질층을 설치한 복수의 금속발연체를 결합한 프레임을 설치하는 공정, 이 프레임을 외부리이드에 대하여 위치맞추는 공정 및 위치맞춤후에 금속발연체를 외부리이드에 결합하고 다음에 금속발연체를 프레임으로부터 분리하는 공정을 설치한 것을 특징으로 하는 센서의 제조방법.
  12. 제11항에 있어서, 전기한 외부리이드를 복수개 일련으로 결합하여 리이드프레임으로 하고, 이 리이드프레임에 대하여 금속발연체의 프레임을 위치맞춤하는 것을 특징으로 하는 센서의 제조방법.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019870011786A 1986-10-28 1987-10-23 센서 및 그의 제조방법 KR900005617B1 (ko)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP256082 1986-10-28
JP61256082A JPH07104308B2 (ja) 1986-10-28 1986-10-28 センサおよびその製造方法
JP???61-256082 1986-10-28
JP62016844A JPS63184049A (ja) 1987-01-27 1987-01-27 ガスセンサの製造方法
JP16844 1987-01-27
JP???62-16844 1987-01-27

Publications (2)

Publication Number Publication Date
KR880005451A true KR880005451A (ko) 1988-06-29
KR900005617B1 KR900005617B1 (ko) 1990-07-31

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019870011786A KR900005617B1 (ko) 1986-10-28 1987-10-23 센서 및 그의 제조방법

Country Status (5)

Country Link
US (1) US4938928A (ko)
EP (1) EP0265834B1 (ko)
KR (1) KR900005617B1 (ko)
DE (1) DE3780560T2 (ko)
ES (1) ES2030693T3 (ko)

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Also Published As

Publication number Publication date
US4938928A (en) 1990-07-03
DE3780560D1 (de) 1992-08-27
EP0265834A2 (en) 1988-05-04
ES2030693T3 (es) 1992-11-16
DE3780560T2 (de) 1992-12-10
KR900005617B1 (ko) 1990-07-31
EP0265834A3 (en) 1990-03-07
EP0265834B1 (en) 1992-07-22

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