EP4043733A2 - Pompe à vide avec ventilateur commandable séparément - Google Patents

Pompe à vide avec ventilateur commandable séparément Download PDF

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Publication number
EP4043733A2
EP4043733A2 EP22179625.3A EP22179625A EP4043733A2 EP 4043733 A2 EP4043733 A2 EP 4043733A2 EP 22179625 A EP22179625 A EP 22179625A EP 4043733 A2 EP4043733 A2 EP 4043733A2
Authority
EP
European Patent Office
Prior art keywords
electric motor
pump
fan
vacuum pump
motor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP22179625.3A
Other languages
German (de)
English (en)
Other versions
EP4043733A3 (fr
EP4043733B1 (fr
Inventor
Erfindernennung liegt noch nicht vor Die
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum Technology AG
Original Assignee
Pfeiffer Vacuum Technology AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum Technology AG filed Critical Pfeiffer Vacuum Technology AG
Priority to EP22179625.3A priority Critical patent/EP4043733B1/fr
Publication of EP4043733A2 publication Critical patent/EP4043733A2/fr
Priority to JP2022211122A priority patent/JP7450015B2/ja
Publication of EP4043733A3 publication Critical patent/EP4043733A3/fr
Priority to KR1020230010929A priority patent/KR20230173574A/ko
Application granted granted Critical
Publication of EP4043733B1 publication Critical patent/EP4043733B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C21/00—Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
    • F01C21/007—General arrangements of parts; Frames and supporting elements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C11/00—Combinations of two or more machines or pumps, each being of rotary-piston or oscillating-piston type; Pumping installations
    • F04C11/005—Combinations of two or more machines or pumps, each being of rotary-piston or oscillating-piston type; Pumping installations of dissimilar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/02—Pumps characterised by combination with, or adaptation to, specific driving engines or motors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0042—Driving elements, brakes, couplings, transmissions specially adapted for pumps
    • F04C29/005—Means for transmitting movement from the prime mover to driven parts of the pump, e.g. clutches, couplings, transmissions
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0042—Driving elements, brakes, couplings, transmissions specially adapted for pumps
    • F04C29/0085—Prime movers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/06—Silencing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/16—Combinations of two or more pumps ; Producing two or more separate gas flows
    • F04D25/166—Combinations of two or more pumps ; Producing two or more separate gas flows using fans
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/053—Shafts
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/30—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members
    • F04C18/34—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members
    • F04C18/344—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/40—Electric motor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/40—Electric motor
    • F04C2240/402—Plurality of electronically synchronised motors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/60—Shafts
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/80—Other components
    • F04C2240/808—Electronic circuits (e.g. inverters) installed inside the machine
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/86—Detection

Definitions

  • the present invention relates to a vacuum pump, in particular a rotary vane vacuum pump, having at least one pump stage and a first electric motor which is connected to the pump stage in a drivingly effective manner.
  • the pump shaft of the pump stage is usually detachably connected to the motor shaft of the electric motor in order to be able to be driven by it.
  • a fan is mounted on the free end of the motor shaft, by means of which the electric motor can be cooled during operation of the pump.
  • a fan can also be mounted on the free end of the pump shaft, so that the pump stage can also be cooled by it during operation of the pump.
  • the invention is therefore based on the object of specifying a fan concept for a vacuum pump, in particular a rotary vane vacuum pump, with which the maintenance effort of a vacuum pump of the type described above can be reduced, with cooling of the vacuum pump that is independent of pump operation also being ensured.
  • a vacuum pump having the features of claim 1 and in particular in that, in addition to the first electric motor that drives the pump stage, the vacuum pump has at least one second electric motor that drives a fan for cooling the vacuum pump.
  • the second electric motor thus has a second motor shaft which is connected neither to the first motor shaft nor to the pump shaft. In other words, the second electric motor is electrically and mechanically decoupled from the first electric motor driving the pump stage.
  • the at least one fan and in particular the second electric motor driving it can thus be controlled independently of the first electric motor, which makes it possible, for example, to continue cooling the vacuum pump after it has been switched off.
  • the vacuum pump can be cooled during operation of the same independently of the speed of the first electric motor. For example, if the temperature of the vacuum pump rises excessively during operation, the second electric motor can be operated at a higher speed than the first electric motor, which makes it possible to cool the vacuum pump more than if a corresponding fan were fixed in a conventional manner the motor and/or the pump shaft is mounted.
  • the efficiency of the vacuum pump can be improved compared to a conventional vacuum pump in which the fan(s) are fixed on the Pump shaft and / or the motor shaft of the first electric motor is mounted / are.
  • the pump shaft is designed in one piece with the motor shaft.
  • no shaft bushings are required according to the invention.
  • the at least one pump stage is contained in a pump housing and the first electric motor that drives the pump stage is contained in a motor housing that extends axially as a continuation of the pump housing.
  • Both the pump housing and the motor housing each have a first end and a second end opposite the first end in the axial direction, the first end of the pump housing being connected at least indirectly to the first end of the motor housing.
  • the pump housing and the motor housing are thus arranged essentially coaxially in an axial continuation of one another, so that a fan can be provided at the second end of the pump housing and can be fastened there.
  • a (different) fan is provided at the second end of the motor housing and is fastened there. The fan or fans can thus be attached to the respective housing of the vacuum pump after the pump housing has been installed on the motor housing as part of the final assembly.
  • each fan of the at least one fan can be contained in a respective fan cover serving as a type of housing, which is fastened to the respective second end of the pump housing or motor housing during final assembly of the vacuum pump.
  • the second electric motor of the at least one fan can be controlled by means of a control module provided specifically for this purpose, such as a frequency converter.
  • a control module provided specifically for this purpose, such as a frequency converter.
  • the second electric motor of the at least one fan is also energized, in particular independently of the first electric motor.
  • the frequency converter also controls the second electric motor of a fan independently of the second electric motor of another fan.
  • the two fans can thus be supplied with current not only independently of the first electric motor, but also independently of one another.
  • the frequency converter can thus have only a single current input and several current outputs that can be controlled independently of one another within the framework of a closed control loop, the first electric motor being connected to one of the several current outputs, whereas each of the second electric motors of the respective fans is connected to another of the several current outputs.
  • a control unit which controls the frequency converter and in particular its current outputs, the control unit being set up in such a way that it controls the current output of the frequency converter, to which the respective second electric motor of the at least one fan is connected, depending on the power consumption of the first electric motor, the temperature of the frequency converter, in particular its power electronics, the temperature of the electric motor and/or the temperature of the at least one pump stage.
  • the power consumption of the first electric motor can be monitored and reported back to the control unit, so that it can, for example, operate the respective fan or its second electric motor at a maximum speed as soon as the power consumption of the first electric motor exceeds a predetermined level exceeds the upper threshold.
  • the control unit can operate the respective fan or its second electric motor at a minimum speed.
  • the control unit can regulate the respective second electric motor or the respective current output of the frequency converter, to which the respective second electric motor of the at least one fan is connected, depending on the size of the power consumption of the first electric motor, for example on the basis of a linear relationship between the power consumption of the first electric motor and the respective engine speed.
  • the temperature of the frequency converter in particular its power electronics, the temperature of the first electric motor and/or the temperature of the at least one pump stage can be monitored by means of a respective temperature sensor, with the temperatures monitored in this way being able to be reported back to the control unit so that it can respective second electric motor or the respective current output of the frequency converter, with which the respective second electric motor of the at least one fan is connected, can regulate depending on the monitored temperature.
  • the respective temperature can be reported back to the control unit, so that it can, for example, operate the respective fan or its second electric motor at a maximum speed as soon as the respective monitored temperature exceeds a predetermined upper temperature threshold value.
  • the control unit can operate the respective fan or its second electric motor at a minimum speed. Between these two temperature threshold values, the control unit can regulate the respective second electric motor or the respective current output of the frequency converter, to which the respective second electric motor of the at least one fan is connected, depending on the size of the respective monitored temperature, for example Basis of a linear relationship between the respective monitored temperature and the respective engine speed. As soon as only one of the respective monitored temperatures exceeds the upper temperature threshold value, the respective fan or its second electric motor is operated at maximum speed.
  • the vacuum pump figures 1 and 2 is designed in the manner of a rotary vane vacuum pump and includes a stator 11 in which a working chamber 13 is formed.
  • An eccentrically installed rotor 15 is arranged in the working space 13 and can be driven in a direction of rotation D about its axis of rotation running perpendicular to the plane of the drawing by means of a first electric motor 50, see FIG Fig.3 .
  • a plurality of slides 17 are arranged in the rotor 15 so as to be movable in the radial direction.
  • the slides 17 are prestressed by means of springs 19 which urge the slides 17 outwards in radial directions.
  • the slides 17 are not prestressed by means of springs, but only move outwards as a result of centrifugal force.
  • the slides 17 slide along the inner wall 20 of the stator 11 that delimits the working space 13 .
  • the slides 17 divide the working space 13 into several chambers in a manner known per se.
  • the stator 11 and the rotor 15 form a pumping stage 56 for pumping fluid, eg air, from a recipient (not shown) connected to an inlet 21 to an outlet 23.
  • fluid eg air
  • the underlying pumping mechanism corresponds to that known per se Rotary vane vacuum pumps used pumping mechanism, which is explained below.
  • an enlarging scoop chamber forms behind this slide 17 .
  • the enlargement of the suction chamber when the rotor 15 rotates creates a suction effect through which fluid is sucked out of the recipient into the suction chamber until the slide 17 that follows has also passed the inlet 21 and separates the suction chamber from the inlet 21 .
  • the volume of the scoop chamber then decreases again as the rotor 15 continues to turn, so that the fluid enclosed therein is compressed.
  • the scoop chamber thus becomes a compression chamber which opens towards the outlet 23 when the front slide 17 has passed the outlet 23.
  • the compressed gas is expelled via the outlet 23, with the outlet valve 25 provided in the outlet 23 opening due to the pressure of the compressed fluid.
  • the pumping stage 56 with the stator 11 and the rotor 15 normally stands to a certain level in a working fluid contained in a sump surrounding the stator 11 (not shown).
  • the operating medium is in particular an oil, by means of which all moving parts of the pump are lubricated and the space under the outlet valve 25 and the gap between the inlet 21 and the outlet 23 are sealed.
  • the equipment seals the gaps between the slides 17 and the inner wall 20 .
  • the operating medium ensures an optimal temperature balance in the vacuum pump through heat transport.
  • a downstream oil mist separator 29 separates the pumped gas from the oil and prevents operating oil from escaping at the exhaust.
  • an HV safety valve 27 e.g. a non-return valve, is arranged in the inlet 21, which is designed in a manner known per se in such a way that in the event of an intentional or unintentional standstill of the pump, the inlet 21 is opened to the recipient connected to the inlet 21 (not shown) seals. This means that no operating fluid can get into the recipient when the pump is at a standstill.
  • the HV safety valve 27 opens with a slight delay, for example after the pressure in the pump has reached the pressure in the recipient, in order to prevent operating medium from being drawn from the pump into the recipient due to a negative pressure in the recipient.
  • the motor housing 52 is arranged in the axial continuation of a pump housing 54 forming the stator 11 and is connected to it.
  • the pump housing takes the previously with reference to the 1 and 2 pump stage 56 described.
  • the pump stage 56 and in particular its rotor 15 is thus driven by the first electric motor 50, for which purpose its motor shaft 60 (see the figure 5 ) in one piece with the pump shaft 58 (see the 2 and 5 ) on which the rotor 15 is mounted.
  • the two interconnected housings 52, 54 (motor housing 52, pump housing 54) are in the 3 illustrated embodiment is mounted in a concave recess of a bearing housing 62, which contains the drive electronics for the vacuum pump and in particular a frequency converter 64 (see for this the figure 5 ) accommodates, which is used, among other things, to control the first electric motor 50.
  • the rotary vane vacuum pump shown has two fans 66, which are each driven by a second electric motor 68, for which purpose the respective fan 66 is mounted on the motor shaft 70 of the respective second electric motor 68.
  • the respective fan 66, including the second electric motor 68 driving it, is mounted in a fan cover 72, which has an opening 88 closed by a grid 86 for the intake of fresh air, see also FIG 3 .
  • the motor shaft 70 of the respective second electric motor is neither connected to the first motor shaft 60 of the first electric motor 50, which drives the pump stage 56, nor to the pump shaft 58 of the pump stage 56.
  • the two fans 66 and the respective fan hoods 72 are attached to the two opposite ends of the motor housing 52 and the pump housing 54 in the axial direction. There is thus no effective drive connection between the respective second motor shaft 70 and the drive of the pump stage 26 . Rather, the two second electric motors 68 are activated independently of the first electric motor 50 driving the pump stage 56 .
  • the frequency converter 64 has a plurality of power outputs 74, 76, 78 that can be controlled independently of one another, with the first electric motor 50 being connected to the first power output 74 and the two second electric motors 68 being connected to the second and third power output 76, 78 of the frequency converter 64.
  • the frequency converter 64 can thus energize the two second electric motors 68 of the two fans 66 independently of one another. Alternatively, it can be provided that the frequency converter 64 has only one output for the fan control, so that both fans are controlled in the same way.
  • the frequency converter 64 can also energize the first electric motor 50 independently of the two second electric motors 68 . If, for example, the power consumption of the first electric motor 50 exceeds an upper threshold value, the two second electric motors 68 of the two fans 66 can be supplied with current via the second or third current output 76, 78 of the frequency converter 64 in such a way that they run at a maximum speed.
  • the respective fan 66 or its second electric motor 68 can be operated at a minimum speed. Between these two threshold values, the respective second electric motor 68 or the respective current output 76, 78 can be controlled depending on the size of the power consumption of the first electric motor 50, for example on the basis of a linear relationship between the power consumption of the first electric motor 50 and the respective engine speed.
  • the power consumption of the first electric motor 50 can be monitored by means of a power monitoring unit 80, in which case the power consumption monitored in this way can be reported back to a control unit 90 controlling the frequency converter 64, which can also be a component of the frequency converter 64 itself, in order to regulate the two current outputs 76, 78.
  • the control unit 90 can thus regulate the two current outputs 76, 78 depending on the power consumption of the first electric motor 50.
  • the temperatures of the frequency converter 64, in particular its power electronics, the first electric motor 50 and the pump stage 56 can be monitored in a corresponding manner by means of temperature sensors 82, 84, 85, with the temperatures monitored in this way being sent to the frequency converter 64 or the same controlling Control unit 90 reported back so that they can regulate the two current outputs 76, 78 depending on the monitored temperatures of the frequency converter 64, in particular its power electronics, the first electric motor 50 and/or the pump stage 56.
  • the rotary vane vacuum pump according to the invention has at least one fan 66 driven by a second electric motor 68 for cooling the vacuum pump, the vacuum pump can be cooled as required and in particular independently of the speed of the pump stage 56. Due to the fact that unlike the one in the figure 5 illustrated conventional rotary vane vacuum pump, in which the fans 66 are arranged on the motor or pump shaft 60, 58 leading out of the pump housing 54 or the motor housing 52, in the rotary vane vacuum pump according to the invention the fans 66 are arranged on the motor or the pump shaft 60, 58 are decoupled and are instead driven by their own electric motor 68, the fans 66 can thus be controlled completely independently of the current power consumption of the first electric motor 50 driving the pump stage 56, which makes it possible, for example, to switch off the fans 66 after the pump stage has been switched off Let 56 continue to run in order to be able to cool down the pump.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
EP22179625.3A 2022-06-17 2022-06-17 Pompe à vide avec ventilateurs commandables séparément Active EP4043733B1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP22179625.3A EP4043733B1 (fr) 2022-06-17 2022-06-17 Pompe à vide avec ventilateurs commandables séparément
JP2022211122A JP7450015B2 (ja) 2022-06-17 2022-12-28 個別に制御可能なファンを備える真空ポンプ
KR1020230010929A KR20230173574A (ko) 2022-06-17 2023-01-27 별도로 제어되는 팬을 구비한 진공 펌프

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP22179625.3A EP4043733B1 (fr) 2022-06-17 2022-06-17 Pompe à vide avec ventilateurs commandables séparément

Publications (3)

Publication Number Publication Date
EP4043733A2 true EP4043733A2 (fr) 2022-08-17
EP4043733A3 EP4043733A3 (fr) 2023-01-04
EP4043733B1 EP4043733B1 (fr) 2024-03-27

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
EP22179625.3A Active EP4043733B1 (fr) 2022-06-17 2022-06-17 Pompe à vide avec ventilateurs commandables séparément

Country Status (3)

Country Link
EP (1) EP4043733B1 (fr)
JP (1) JP7450015B2 (fr)
KR (1) KR20230173574A (fr)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006058842A1 (de) * 2006-12-13 2008-06-19 Pfeiffer Vacuum Gmbh Vakuumpumpe mit Lüfter
DE102006058843A1 (de) * 2006-12-13 2008-06-19 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE102006058840B4 (de) 2006-12-13 2021-01-14 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE102007059938A1 (de) * 2007-12-12 2009-06-18 Pfeiffer Vacuum Gmbh Vakuumpumpe und Verfahren zum Betrieb

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JP2023184405A (ja) 2023-12-28
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JP7450015B2 (ja) 2024-03-14
EP4043733B1 (fr) 2024-03-27

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