EP3988474A4 - Véhicule de transport - Google Patents

Véhicule de transport Download PDF

Info

Publication number
EP3988474A4
EP3988474A4 EP20827173.4A EP20827173A EP3988474A4 EP 3988474 A4 EP3988474 A4 EP 3988474A4 EP 20827173 A EP20827173 A EP 20827173A EP 3988474 A4 EP3988474 A4 EP 3988474A4
Authority
EP
European Patent Office
Prior art keywords
conveyance vehicle
conveyance
vehicle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP20827173.4A
Other languages
German (de)
English (en)
Other versions
EP3988474A1 (fr
Inventor
Wataru Kitamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Machinery Ltd
Original Assignee
Murata Machinery Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Machinery Ltd filed Critical Murata Machinery Ltd
Publication of EP3988474A1 publication Critical patent/EP3988474A1/fr
Publication of EP3988474A4 publication Critical patent/EP3988474A4/fr
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67733—Overhead conveying
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/0457—Storage devices mechanical with suspended load carriers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67276—Production flow monitoring, e.g. for increasing throughput
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67294—Apparatus for monitoring, sorting or marking using identification means, e.g. labels on substrates or labels on containers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67727—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using a general scheme of a conveying path within a factory
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67736—Loading to or unloading from a conveyor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0297—Wafer cassette

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Automation & Control Theory (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Control Of Position, Course, Altitude, Or Attitude Of Moving Bodies (AREA)
EP20827173.4A 2019-06-20 2020-05-08 Véhicule de transport Pending EP3988474A4 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2019114535 2019-06-20
PCT/JP2020/018612 WO2020255577A1 (fr) 2019-06-20 2020-05-08 Véhicule de transport

Publications (2)

Publication Number Publication Date
EP3988474A1 EP3988474A1 (fr) 2022-04-27
EP3988474A4 true EP3988474A4 (fr) 2023-06-21

Family

ID=74037229

Family Applications (1)

Application Number Title Priority Date Filing Date
EP20827173.4A Pending EP3988474A4 (fr) 2019-06-20 2020-05-08 Véhicule de transport

Country Status (8)

Country Link
US (1) US20220359251A1 (fr)
EP (1) EP3988474A4 (fr)
JP (1) JP7435605B2 (fr)
KR (1) KR20220008331A (fr)
CN (1) CN114126988B (fr)
IL (1) IL289059A (fr)
TW (1) TWI830922B (fr)
WO (1) WO2020255577A1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2024509221A (ja) 2022-01-20 2024-02-29 エルジー エナジー ソリューション リミテッド リチウム二次電池の正極製造用バインダー組成物、及びこれによって製造されたリチウム二次電池の正極

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005001804A (ja) * 2003-06-11 2005-01-06 Hitachi Ltd 自動クレーンシステム及びクレーン制御方法
US20090035104A1 (en) * 2007-08-03 2009-02-05 Asyst Technologies Japan, Inc. Transporting system, and teaching method in the transporting system
US9758308B1 (en) * 2016-04-11 2017-09-12 Daifuku Co., Ltd. Article transport facility

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6041234B2 (ja) * 1976-08-20 1985-09-14 株式会社 山口機械研究所 水流利用の発電装置
JPS58152235A (ja) * 1982-03-08 1983-09-09 Fuji Photo Film Co Ltd ハロゲン化銀写真感光材料
JPS6013801A (ja) 1983-07-01 1985-01-24 Seiko Instr & Electronics Ltd 高分子物質精製濃縮装置
JP2715130B2 (ja) 1989-01-12 1998-02-18 株式会社ダイフク 荷搬送設備
JPH09289708A (ja) * 1996-04-19 1997-11-04 Toyota Autom Loom Works Ltd 移動体運行システムの通信方法
JPH09295707A (ja) * 1996-05-07 1997-11-18 Shinko Electric Co Ltd 搬送ロボットを用いたクリーンルームの物品搬送管理方法
JP2002068481A (ja) * 2000-08-28 2002-03-08 Ishikawajima Harima Heavy Ind Co Ltd コンテナの段積貯蔵装置
JP4651835B2 (ja) * 2001-03-08 2011-03-16 株式会社シンク・ラボラトリー ロール立体倉庫における被製版ロールの収納・取り出し方法
JP2003150247A (ja) * 2001-11-19 2003-05-23 Murata Mach Ltd 有軌道台車システム
JP2004010204A (ja) * 2002-06-04 2004-01-15 Matsushita Electric Ind Co Ltd マーカシステム
JP4131706B2 (ja) * 2004-02-12 2008-08-13 日本輸送機株式会社 無人搬送車の走行停止制御装置
CN101183431A (zh) * 2006-06-09 2008-05-21 日本电气株式会社 无线通信系统和无线通信方法
JP5450334B2 (ja) * 2010-09-28 2014-03-26 株式会社椿本チエイン 物品管理システム
DE202013008718U1 (de) * 2013-09-30 2013-12-19 Grenzebach Maschinenbau Gmbh Transportfahrzeug zum störungsfreien Transport von Lastregalen in Werkshallen mit Funkabschattungen und mit teilweise autonomem Fahrbetrieb
DE102013019368A1 (de) * 2013-11-18 2015-05-21 Grenzebach Maschinenbau Gmbh Verfahren und Vorrichtung zur weitgehend maschinellen Zusammenstellung von Warenlieferungen in Lagerhallen
JP6365136B2 (ja) * 2014-09-02 2018-08-01 村田機械株式会社 走行車システム
JP6168476B2 (ja) 2015-03-19 2017-07-26 村田機械株式会社 搬送台車と搬送台車システム
JP2017154840A (ja) * 2016-02-29 2017-09-07 株式会社ダイフク 物品搬送設備
JP6693428B2 (ja) 2017-01-23 2020-05-13 株式会社ダイフク 物品搬送車
JP7066160B2 (ja) * 2017-08-23 2022-05-13 学校法人千葉工業大学 自走型鉄筋作業用ロボット、自走型鉄筋結束ロボット
JP6946965B2 (ja) 2017-11-22 2021-10-13 村田機械株式会社 搬送システム
DE102017222883A1 (de) 2017-12-15 2019-06-19 Te Connectivity Germany Gmbh Kontaktierungseinheit zum elektrischen Kontaktieren zumindest eines Elektroniksegments eines Elektronikmoduls und Verfahren

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005001804A (ja) * 2003-06-11 2005-01-06 Hitachi Ltd 自動クレーンシステム及びクレーン制御方法
US20090035104A1 (en) * 2007-08-03 2009-02-05 Asyst Technologies Japan, Inc. Transporting system, and teaching method in the transporting system
US9758308B1 (en) * 2016-04-11 2017-09-12 Daifuku Co., Ltd. Article transport facility

Also Published As

Publication number Publication date
CN114126988B (zh) 2023-11-10
TW202105111A (zh) 2021-02-01
US20220359251A1 (en) 2022-11-10
IL289059A (en) 2022-02-01
JP7435605B2 (ja) 2024-02-21
CN114126988A (zh) 2022-03-01
WO2020255577A1 (fr) 2020-12-24
JPWO2020255577A1 (fr) 2020-12-24
KR20220008331A (ko) 2022-01-20
TWI830922B (zh) 2024-02-01
EP3988474A1 (fr) 2022-04-27

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A4 Supplementary search report drawn up and despatched

Effective date: 20230524

RIC1 Information provided on ipc code assigned before grant

Ipc: H01L 21/677 20060101ALI20230517BHEP

Ipc: H01L 21/67 20060101ALI20230517BHEP

Ipc: B65G 1/04 20060101ALI20230517BHEP

Ipc: B65G 1/00 20060101AFI20230517BHEP