EP3869054B1 - Roulement à billes angulaire - Google Patents

Roulement à billes angulaire Download PDF

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Publication number
EP3869054B1
EP3869054B1 EP19872288.6A EP19872288A EP3869054B1 EP 3869054 B1 EP3869054 B1 EP 3869054B1 EP 19872288 A EP19872288 A EP 19872288A EP 3869054 B1 EP3869054 B1 EP 3869054B1
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EP
European Patent Office
Prior art keywords
cage
pocket
diameter
ball bearing
pcd
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Application number
EP19872288.6A
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German (de)
English (en)
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EP3869054A1 (fr
EP3869054A4 (fr
Inventor
Kazumi Iwasaki
Yoshiaki Katsuno
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NSK Ltd
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NSK Ltd
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Publication of EP3869054A4 publication Critical patent/EP3869054A4/fr
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/30—Parts of ball or roller bearings
    • F16C33/38—Ball cages
    • F16C33/3806—Details of interaction of cage and race, e.g. retention, centring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C19/00—Bearings with rolling contact, for exclusively rotary movement
    • F16C19/02—Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows
    • F16C19/14—Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows for both radial and axial load
    • F16C19/16—Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows for both radial and axial load with a single row of balls
    • F16C19/163—Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows for both radial and axial load with a single row of balls with angular contact
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/30—Parts of ball or roller bearings
    • F16C33/38—Ball cages
    • F16C33/3887—Details of individual pockets, e.g. shape or ball retaining means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2240/00—Specified values or numerical ranges of parameters; Relations between them
    • F16C2240/40—Linear dimensions, e.g. length, radius, thickness, gap
    • F16C2240/46—Gap sizes or clearances
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2240/00—Specified values or numerical ranges of parameters; Relations between them
    • F16C2240/40—Linear dimensions, e.g. length, radius, thickness, gap
    • F16C2240/70—Diameters; Radii
    • F16C2240/80—Pitch circle diameters [PCD]
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2322/00—Apparatus used in shaping articles
    • F16C2322/39—General build up of machine tools, e.g. spindles, slides, actuators

Definitions

  • the present invention relates to an angular contact ball bearing, and more specifically, to an angular contact ball bearing including an outer ring guide cage and applicable to a spindle device or a motor of a machine tool.
  • An angular contact ball bearing is widely used for a spindle of a machine tool.
  • Known cages used for the angular contact ball bearing include an outer ring guide cage, an inner ring guide cage, and a ball guide cage.
  • the outer ring guide cage having good lubricity by a lubricant flowing to a radially outer side by a centrifugal force is often used for an angular contact ball bearing used for high-speed rotation (for example, see Patent Document 1).
  • EP 3 255 293 A1 discloses an angular contact ball bearing according to the preamble of claim 1.
  • Patent Document 1 JP-A-2017-57956
  • balls come into contact with inner surfaces of cage pockets with a slight delay or advance on a ball basis due to a shape error of an inner ring raceway surface and an outer ring raceway surface between which the balls roll, a shape error of the balls, or misalignment or inclination of central axes of an inner ring and an outer ring of the bearing.
  • Fig. 6B is a schematic view of a so-called machined cage of an outer ring guide type when a pocket inner surface comes into contact with a ball.
  • a frictional force Fr is generated in the cage 14.
  • the cage may self-vibrate in a radial direction, which is a direction of the frictional force Fr, and noise called cage noise may be generated.
  • the present invention has been made in view of the above-described problem and an object thereof is to provide an angular contact ball bearing including an outer ring guide cage that can reduce cage noise caused by self-vibration of the cage due to contact between a pocket inner surface of the cage and a ball.
  • An angular contact ball bearing includes: an outer ring having an outer ring raceway surface on an inner circumferential surface; an inner ring having an inner ring raceway surface on an outer circumferential surface; a plurality of balls rollably arranged between the outer ring raceway surface and the inner ring raceway surface at a predetermined contact angle; and an outer ring guide cage having pockets that rollably hold the plurality of balls.
  • the cage includes a pair of annular portions and a plurality of pillar portions arranged at a predetermined interval in a circumferential direction, the plurality of pillar portions coupling the pair of annular portions in an axial direction.
  • a cage inner diameter is the same over an entire circumference of the pocket at a radially inner opening of the pocket.
  • the angular contact ball bearing of the present invention it is possible to rotationally drive the outer ring guide cage stably and reduce cage noise generated from the cage.
  • an angular contact ball bearing 10 includes an outer ring 11 having an outer ring raceway surface 11a on an inner circumferential surface, an inner ring 12 having an inner ring raceway surface 12a on an outer circumferential surface, a plurality of balls 13 rollably arranged between the outer ring raceway surface 11a and the inner ring raceway surface 12a at a predetermined contact angle ⁇ , and a cage 14 that rollably holds the plurality of balls 13.
  • the outer ring 11 is formed with a counter bore 11b on one side (bearing front surface side) of the outer ring raceway surface 11a in an axial direction.
  • the inner ring 12 is formed with a counter bore 12b on the other side (axially back surface side) of the inner ring raceway surface 12a in the axial direction.
  • the cage 14 includes a pair of annular portions 15, 16 and a plurality of pillar portions 17 coupling the pair of annular portions 15, 16 in the axial direction.
  • the plurality of pillar portions 17 are arranged at a predetermined interval in a circumferential direction.
  • the cage 14 is an outer ring guide cage in which the annular portion 15 is guided by an inner circumferential surface 11c of a shoulder portion of the outer ring 11 on the other side in the axial direction.
  • the pair of annular portions 15, 16 and two adjacent pillar portions 17 define a pocket 20 that holds the ball 13.
  • the pocket 20 has a cylindrical shape with its central axis extending in a radial direction.
  • the cage 14, which includes the pair of annular portions 15, 16 and the plurality of pillar portions 17, has an inner circumferential surface having the same inner diameter over the entire cage 14 and an outer circumferential surface having the same outer diameter over the entire cage 14. For this reason, a cage inner diameter is the same over an entire circumference of the pocket 20 at a radially inner opening 21 of the pocket 20.
  • the cage 14 may be made of a synthetic resin, metal, or the like.
  • a method for processing the cage 14 may be either cutting or injection molding.
  • the cage 14 made of a synthetic resin may be a phenol resin containing a base material.
  • the base material paper, cotton cloth, asbestos cloth, glass fiber cloth, and nylon fabric may be used for a laminated plate, and wood powder, cotton, pulp, asbestos, mica, glass fiber, or the like may be used for a molded product.
  • the cage 14 may also be a resin such as polyamide, polyacetal, polyether ether ketone, polyimide, and polyphenylene sulfide, and a reinforcing material such as glass fiber, carbon fiber, and aramid fiber may be added to the resin if necessary.
  • the cage 14 may also be made of iron plated with a copper alloy, silver, or the like.
  • a diameter clearance of a radial guide clearance of the cage 14 is ⁇ L (see Fig. 1 )
  • a pitch circle diameter of the ball 13 is PCD
  • a diameter of the radially inner opening 21 of the pocket 20 (hereinafter, also referred to as "pocket diameter")
  • Dp 1/2 of the cage inner diameter at the radially inner opening 21
  • A Bcos ⁇
  • ⁇ sin -1 ⁇ (Dp/2)/B ⁇
  • ⁇ is an angle between a shortest line L1, which connects a center X of a rotation axis of the angular contact ball bearing 10 and a center O of the ball 13, and a straight line L2, which connects the center X of the rotation axis of the angular contact ball bearing 10 and a farthest portion R of the radially inner opening 21 of the pocket 20 in the circumferential direction.
  • a contact position between the ball 13 and the cage 14 in the circumferential (rotation) direction is an equator portion 13a of the ball 13 and the inner surface of the pocket 20 of the cage 14.
  • the contact position remains to be the equator portion 13a of the ball 13 and the inner surface of the pocket 20 and the cage 14 is stably rotationally driven.
  • the equator portion 13a of the ball 13 is a line where a plane perpendicular to the shortest line L1, which connects the center X of the rotation axis of the angular contact ball bearing 10 and the center O of the ball 13, passes through a surface of the ball 13 in a position representing a ball diameter.
  • Figs. 6A and 6B illustrate a state in which the cage 14 moves to the radially outer side and comes into contact with the inner circumferential surface 11c of the shoulder portion of the outer ring 11.
  • B which is 1/2 of the cage inner diameter at the radially inner opening 21, satisfies B + ⁇ L/2 > PCD/2, more preferably satisfies B > PCD/2, and still more preferably satisfies B - ⁇ L/2 > PCD/2.
  • the cage 14 moves in the axial direction only when the cage 14 is in a circumferential phase where the cage 14 moves to the radially outer side and the radially inner opening 21 of the pocket 20 is on the radially outer side relative to PCD, and thereby the radially inner opening 21 of the pocket 20 can come into contact with the ball 13 and the radial movement of the cage 14 is restricted.
  • the cage 14 moves in the axial direction when the cage 14 is in the circumferential phase where the radially inner opening 21 is on the radially outer side relative to PCD, and thereby the radially inner opening 21 of the pocket 20 can come into contact with the ball 13 and the radial movement of the cage 14 is restricted.
  • the present invention is further desirably designed to satisfy the following expressions.
  • the contact position of the ball 13 and the cage 14 in the circumferential (rotation) direction is the equator portion 13a of the ball 13 and the inner surface of the pocket 20 of the cage 14, and the contact position of the ball 13 and the cage 14 in the axial direction is the radially outer side of the equator portion 13a of the ball 13 and the radially inner opening 21 of the pocket 20 of the cage 14.
  • B > PCD/2 may be satisfied even when the allowable diameter error ⁇ d of the cage inner diameter 2B is taken into consideration as described above.
  • B which is 1/2 of the cage inner diameter at the radially inner opening 21, is more preferably set to satisfy B - ⁇ L/2 - ⁇ d/2 > PCD/2 so that the radially inner opening 21 of the pocket 20 reduces the cage noise.
  • a pocket clearance ⁇ P between the cage 14 and the ball 13 is different between a pocket clearance ⁇ P1 in the rotation direction (circumferential direction of the bearing) and a pocket clearance ⁇ P2 in a rotation axis direction (axial direction of the bearing).
  • the diameter clearance ⁇ L of the radial guide clearance of the cage 14 is designed to satisfy 0 ⁇ ⁇ L ⁇ 0.030D3.
  • the diameter clearance ⁇ L of the radial guide clearance preferably satisfies 0 ⁇ ⁇ L ⁇ 0.020D3, and more preferably satisfies 0.0002D3 ⁇ ⁇ L ⁇ 0.020D3.
  • the diameter clearance of the radial guide clearance of the cage 14 is restricted to ⁇ L ⁇ 0.030D3 (preferably ⁇ L ⁇ 0.020D3) to limit an amount of radial movement of the cage 14, thereby reducing abnormal vibration of the cage 14 in the radial direction. Further, the diameter clearance of the radial guide clearance of the cage 14 is restricted to 0 ⁇ ⁇ L (preferably 0.0002D3 ⁇ L) to prevent the cage 14 from sticking to the inner circumferential surface (guide surface) of the outer ring 11, and thereby the cage 14 is more stably guided on the inner circumferential surface of the outer ring 11.
  • the cage 14 according to the present embodiment further has an effect that, even if the cage 14 shakes in the axial direction during rotation, an axially wall surface of the pocket 20 hardly comes into contact with the ball 13, making it less likely to induce the cage noise. Even when the axially wall surface of the pocket 20 comes into contact with the ball 13, the cage noise can be reduced by the frictional force generated between the ball 13 and the cage 14 as described above.
  • the radially inner opening 21 of the pocket 20 that comes into contact with the ball 13 is preferably C-chamfered or R-chamfered to prevent wear due to the contact with the ball 13.
  • the C chamfering may be C0.1 or more (that is, points that are 0.1 mm or more apart from an intersection of the inner circumferential surface of the cage 14 with an axially end surface of the pocket 20 are connected to intersect the surfaces at 45°) and more preferably C0.1 to C1.
  • the R chamfering may be R0.1 (that is, a quadrant obtained by connecting points that are 0.1 mm or more apart from the intersection of the inner circumferential surface of the cage 14 and the axially end surface of the pocket 20) or more and more preferably R0.1 to Rl.
  • the cage 14 can be easily formed since the cage inner diameter is the same over the entire circumference of the pocket 20 at the radially inner opening 21 of the pocket 20.
  • a thick portion 18 is formed on an inner circumferential surface of each of the pair of annular portions 15, 16 of the cage 14.
  • the thick portion 18 protrudes from an axially outer end edge 22 of the radially inner opening 21 of the pocket 20 toward the radially inner side.
  • An axially inner surface of the thick portion 18 has an inclined surface 18a extending axially outward at an angle ⁇ toward the radially inner side, and a cylindrical surface 18b provided on an axially outer side of the inclined surface 18a.
  • a shape of the pillar portion 17 is the same as that of the first embodiment, and the cage inner diameter is the same over the entire circumference of the pocket 20 at the radially inner opening 21 of the pocket 20. This configuration is also the same in the following embodiments.
  • a radial thickness of the pair of annular portions 15, 16 is large due to the thick portion 18 and the strength of the cage 14 is improved. Further, lubricating oil adhering to the inclined surface 18a is supplied to between the ball 13 and the pocket 20 by a centrifugal force and the lubricity is improved. Further, by providing the thick portion 18 having the inclined surface 18a, the edge contact between the axially outer end edge 22 of the pocket 20 and the ball 13 is reduced and the durability of the cage 14 is improved.
  • the radial thickness of the thick portion 18 may be smaller than that in Fig. 7A by making the angle ⁇ of the inclined surface 18a smaller.
  • the angle ⁇ of the inclined surface 18a is 30° or more, more preferably 45° or more.
  • the thick portion 18 is formed on an inner circumferential surface of each of the pair of annular portions 15, 16 of the cage 14.
  • the thick portion 18 protrudes from the axially outer end edge 22 of the radially inner opening 21 of the pocket 20 toward the radially inner side.
  • the cage inner diameter is the same over the entire circumference of the pocket 20 at the radially inner opening 21 of the pocket 20.
  • the thick portion 18 according to the present embodiment does not have the cylindrical surface 18b, and the inclined surface 18a is formed up to an axially outer surface of the cage 14.
  • the radial thickness of the pair of annular portions 15, 16 is larger due to the thick portion 18 and the strength of the cage 14 is improved. Further, lubricating oil adhering to the longer inclined surface 18a is supplied to between the ball 13 and the pocket 20 by the centrifugal force and the lubricity is improved.
  • the radial thickness of the thick portion 18 may be smaller than that of Fig. 8A by making the angle ⁇ of the inclined surface 18a smaller.
  • Fig. 9 is a cross-sectional view of an angular contact ball bearing according to the fourth embodiment of the present invention.
  • the thick portion 18 is formed between an axially outer surface of the cage 14 and an axially outer position of the axially outer end edge 22 of the radially inner opening 21 of the pocket 20.
  • the thick portion 18 protrudes from an inner circumferential surface of each of the pair of annular portions 15, 16 of the cage 14.
  • the cage inner diameter is the same over the entire circumference of the pocket 20 at the radially inner opening 21 of the pocket 20.
  • a lubricating oil reservoir 19 is formed between the inner circumferential surface of each of the annular portions 15, 16 on the axially outer side of the axially outer end edge 22 of the radially inner opening 21 of the pocket 20 and an axially inner surface of the thick portion 18. Accordingly, lubricating oil can be supplied from the lubricating oil reservoir 19 to between the ball 13 and the pocket 20.
  • the axially inner surface of the thick portion 18 is a surface perpendicular to a central axis of the angular contact ball bearing 10e.
  • the thick portion 18 may have a shape including the inclined surface 18a and the cylindrical surface 18b.
  • the thick portion 18 may have a shape in which the inclined surface 18a is continuous to the axially outer surface of the cage 14.
  • Fig. 11 is a cross-sectional view of an angular contact ball bearing according to the fifth embodiment of the present invention.
  • a tapered surface 23 is formed on the inner surface of the pocket 20.
  • the tapered surface 23 gradually increases in diameter toward the radially inner side.
  • a taper angle ⁇ of the tapered surface 23 is appropriately set in a range of 1° to 45°.
  • the taper angle ⁇ is more preferably 3° to 30° from a viewpoint of appropriately ensuring the contact position between the ball 13 and the pocket 20.
  • the ball 13 is prevented from coming into edge contact with the radially inner opening 21 of the pocket 20 and the durability of the cage 14 is improved.
  • a contact position of the ball and the cage in a circumferential direction is an equator portion of the ball and an inner surface of the pocket, and a surface of the ball on a radially outer side of the equator portion can come into contact with the radially inner opening of the pocket in a position in the axial direction.
  • the cage according to the present embodiment can be formed relatively easily.
  • the radial thickness of the pair of annular portions can be increased and the strength of the cage is improved.
  • the ball is prevented from coming into edge contact with the radially inner opening of the pocket and the durability of the cage is improved.

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Rolling Contact Bearings (AREA)

Claims (4)

  1. Roulement à billes à contact angulaire comprenant :
    une bague extérieure présentant une surface de piste de bague extérieure sur une surface circonférentielle intérieure ; une bague intérieure présentant une surface de piste de bague intérieure sur une surface circonférentielle extérieure ; une pluralité de billes disposées en roulement entre la surface de piste de bague extérieure et la surface de piste de bague intérieure selon un angle de contact prédéterminé ; et une cage guide de bague extérieure présentant des poches qui maintiennent en roulement la pluralité de billes,
    dans lequel la cage inclut une paire de parties annulaires et une pluralité de parties de colonne disposées à un intervalle prédéterminé dans une direction circonférentielle, la pluralité de parties de colonne couplant la paire de parties annulaires dans une direction axiale,
    dans lequel un diamètre intérieur de cage est le même sur une circonférence entière de la poche au niveau d'une ouverture radialement intérieure de la poche, et
    caractérisé en ce que
    lorsque 1/2 du diamètre intérieur de cage au niveau de l'ouverture radialement intérieure est B, une garde de diamètre d'une garde de guide radial de la cage est ΔL, un diamètre de cercle primitif de la bille est PCD, un diamètre de l'ouverture radialement intérieure de la poche est Dp, A = Bcosθ, et θ = sin-1{(Dp/2)/B}, B + Δ L / 2 > PCD / 2 et PCD / 2 > A + Δ L / 2
    Figure imgb0010
    sont satisfaits.
  2. Le roulement à billes à contact angulaire selon la revendication 1, dans lequel lorsque Δd est une erreur de diamètre tolérable du diamètre intérieur de cage, B + Δ L / 2 + Δ d / 2 > PCD / 2 et PCD / 2 > A + Δ L / 2 + Δ d / 2
    Figure imgb0011
     sont satisfaits.
  3. Le roulement à billes à contact angulaire selon la revendication 1 ou 2, dans lequel une partie épaisse est formée sur une surface circonférentielle intérieure de chacune de la paire de parties annulaires, la partie épaisse débordant d'une arête d'extrémité axialement extérieure de l'ouverture radialement intérieure de la poche ou d'une position axialement extérieure de l'arête d'extrémité axialement extérieure vers un côté radialement intérieur.
  4. Le roulement à billes à contact angulaire selon l'une quelconque des revendications 1 à 3, dans lequel une surface intérieure de la poche est formée dans une forme effilée qui augmente graduellement en diamètre vers le côté radialement intérieur.
EP19872288.6A 2018-10-15 2019-09-26 Roulement à billes angulaire Active EP3869054B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2018194424 2018-10-15
PCT/JP2019/038049 WO2020080061A1 (fr) 2018-10-15 2019-09-26 Roulement à billes angulaire

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EP3869054A4 EP3869054A4 (fr) 2021-11-24
EP3869054B1 true EP3869054B1 (fr) 2022-08-24

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EP (1) EP3869054B1 (fr)
JP (1) JP6935856B2 (fr)
CN (1) CN112867874B (fr)
TW (1) TWI708020B (fr)
WO (1) WO2020080061A1 (fr)

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IT202100017096A1 (it) * 2021-06-30 2022-12-30 Skf Ab Cuscinetto di rotolamento per alte velocità equipaggiato con una gabbia ottimizzata per ridurre la rumorosità a basse velocità
DE102021125537A1 (de) 2021-10-01 2023-04-06 Schaeffler Technologies AG & Co. KG Wälzlagerkäfig

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EP3255293B1 (fr) * 2015-02-04 2019-10-02 NSK Ltd. Dispositif de retenue de roulement à billes, roulement à billes, et procédé de fabrication de dispositif de retenue de roulement à billes
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JP6879050B2 (ja) 2017-05-17 2021-06-02 株式会社ジェイテクト 測定装置及び測定方法

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JPWO2020080061A1 (ja) 2021-09-02
CN112867874B (zh) 2023-01-10
EP3869054A1 (fr) 2021-08-25
EP3869054A4 (fr) 2021-11-24
TW202020330A (zh) 2020-06-01
WO2020080061A1 (fr) 2020-04-23
TWI708020B (zh) 2020-10-21
JP6935856B2 (ja) 2021-09-15
CN112867874A (zh) 2021-05-28

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