EP3685420A1 - Tube mbfex - Google Patents

Tube mbfex

Info

Publication number
EP3685420A1
EP3685420A1 EP18779196.7A EP18779196A EP3685420A1 EP 3685420 A1 EP3685420 A1 EP 3685420A1 EP 18779196 A EP18779196 A EP 18779196A EP 3685420 A1 EP3685420 A1 EP 3685420A1
Authority
EP
European Patent Office
Prior art keywords
tube
anode
mbfex
cathodes
mbfex tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP18779196.7A
Other languages
German (de)
English (en)
Other versions
EP3685420C0 (fr
EP3685420B1 (fr
Inventor
Johannes Ringel
Bo Gao
Houman Jafari
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Cetteen GmbH
Original Assignee
Cetteen GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cetteen GmbH filed Critical Cetteen GmbH
Publication of EP3685420A1 publication Critical patent/EP3685420A1/fr
Application granted granted Critical
Publication of EP3685420C0 publication Critical patent/EP3685420C0/fr
Publication of EP3685420B1 publication Critical patent/EP3685420B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/06—Cathodes
    • H01J35/064—Details of the emitter, e.g. material or structure
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/06—Cathodes
    • H01J35/065—Field emission, photo emission or secondary emission cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H01J35/12—Cooling non-rotary anodes
    • H01J35/13—Active cooling, e.g. fluid flow, heat pipes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/02—Electrical arrangements
    • H01J2235/023—Connecting of signals or tensions to or through the vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/06—Cathode assembly
    • H01J2235/062—Cold cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/06—Cathode assembly
    • H01J2235/068—Multi-cathode assembly
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/12—Cooling
    • H01J2235/1204—Cooling of the anode
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/12—Cooling
    • H01J2235/1225—Cooling characterised by method
    • H01J2235/1262—Circulating fluids
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/12—Cooling
    • H01J2235/1225—Cooling characterised by method
    • H01J2235/1262—Circulating fluids
    • H01J2235/1275—Circulating fluids characterised by the fluid
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H01J35/10—Rotary anodes; Arrangements for rotating anodes; Cooling rotary anodes
    • H01J35/105—Cooling of rotating anodes, e.g. heat emitting layers or structures
    • H01J35/106—Active cooling, e.g. fluid flow, heat pipes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/14—Arrangements for concentrating, focusing, or directing the cathode ray
    • H01J35/147—Spot size control

Definitions

  • M BFEX Multibeam Field Emission X-Ray
  • Such X-ray tubes are known, for example, from the paper: Yang Lu, Hengyong Yu, Guohua Cao, Jun Zhao, Ge Wang, Otto Zhou, Medical Physics 2010, Volume 37, pp. 3773-3781 and US Pat. No. 7,751,528 B2, the cathodes Carbon nanotubes for
  • the MBFEX tubes described therein are intended for use in computer tomographs in which instead of a rotation of an X-ray emitter sequential electrical circuits of individual fixed X-ray emitter are made.
  • the invention has for its object to provide a manufacturing technology in comparison to the prior art easily realizable and structurally compact MBFEX tube available.
  • This object is achieved by the proposed MBFEX tube with the features of claim 1. Further, the object is achieved by an arrangement of several MBFEX tubes according to claim 27.
  • the MBFEX tube can be produced according to claim 28 and operated according to claim 30.
  • the proposed MBFEX tube is provided for an X-ray machine and has in a vacuum tube a fixedly arranged therein and designed as a cold finger anode and a plurality of rows arranged fixed cathodes.
  • the vacuum tube again has a plurality of cathode leads and not more than two
  • a coolant pipe is arranged, in which a further pipe, that is to say coolant inner pipe, is arranged.
  • a further pipe that is to say coolant inner pipe
  • either the outer or the inner tube can act as a coolant supply pipe, wherein the respective other tube is provided as a coolant discharge pipe.
  • the coolant supply pipe and the coolant discharge pipe are provided for cooling the anode with a liquid coolant.
  • the cathodes are provided for the field emission of electrons and in each case aligned with respect to their electron main emission direction to the common anode for generating X-ray sources.
  • the X-ray sources on the anode emit X-ray beams each having an X-ray main emission direction.
  • the x-ray sources are preferably arranged in rows on the anode.
  • the invention is based on the first inventive concept, to solve the
  • Cooling problem of the anode which is given in MBFEX tubes according to the prior art, to form the anode of the proposed MBFEX tube itself as a cooling device in the form of a cold finger.
  • the anode in the proposed MBFEX tube, is hollow, with the cavity being clamshell shaped to accommodate both the
  • the anode including the coolant tubes is closed at one end. At this end of the elongate anode, the transition between the coolant supply pipe and the coolant discharge pipe is formed.
  • Low-viscosity silicone oils in particular having a boiling point of more than 450 ° C., are suitable as liquid coolants, inter alia. Also
  • Insulating oils marketed under the trademark "Shell Diala” can be used as a coolant to cool the anode.
  • the design of the anode as a cold finger not only corresponds to a particular
  • Coolant discharge pipe and the coolant supply pipe at one of the two ends of the anode by a passage through the vacuum tube with a coolant circulating device is connectable.
  • the anode contains, for example, molybdenum and / or tungsten and optionally has a coating suitable for the emission of X-rays on the outer surface. According to an advantageous development are compared to the elongated basic shape inclined surface sections of the anode formed by attachments of the anode.
  • the individual articles have different skew angles relative to the elongated base body of the anode.
  • This result can also be achieved by making said surface sections by grinding in the anode.
  • a coating of the anode can be located either on its entire surface or only on portions of the surface, namely on the attachments or in the grinding.
  • the anode of the x-ray tube is preferably designed as a non-rotating anode. In principle, a rotation of the anode about its own axis can also be provided for the purpose of further improved cooling.
  • the production of small feedthroughs by means of a vacuum tube for X-ray machines is easy to manufacture with regard to sealing against the outside atmosphere.
  • the cathode leads of the proposed MBFEX tube are provided as terminals of the cathodes to an electrical voltage, typically in the amount of less kV, in particular up to 4 kV, and are formed for example as wire leads. If, for example, the vacuum tube is made of glass, then cathode leads in the form of wires can be easily fused into the vacuum tube, such feedthroughs having a high and long-lasting seal.
  • High voltage is preferably at each end of this.
  • Vacuum tube arranged, which can be connected for example via electrical leads in the cathode leads to an electrical voltage.
  • Focusing electrodes are located in the space between extraction grids that are slightly spaced from the cathodes and the anode.
  • Structures of the extraction grids can be produced particularly precisely by laser processing.
  • a picosecond or femtosecond laser for structuring the Extraction grid suitable.
  • the precise production of the extraction grid is an essential prerequisite for the fact that electronically emitted from the cathode with a high degree of transmission reach the anode.
  • the electron source including the extraction grid is exposed to thermal stresses. To allow deformation of the extraction grid by these loads
  • the extraction grid basically has one of the shape of the associated electron source, that is, cathode, adapted basic shape, in particular a rectangular basic shape.
  • the long sides of this rectangle are formed by so-called edge strips of the extraction grid.
  • the two edge strips are integrally connected to each other by transverse to these grid strips.
  • the transition areas between the grid strip and the edge strips are of particular importance.
  • Particularly advantageous is a curved transition between the grid strip and edge strips has been found. In this case, the curvatures at the two ends of the grid strip are preferably aligned in opposite directions.
  • each grid strip in plan view of the extraction grid, one end of the lattice strip curved upward at its transition to the edge strip, the other end of the lattice strip at the transition to the opposite edge strip is curved downwards.
  • the grating strips thus each have an elongated S-shape, wherein the distance between the individual grating strips over the entire length thereof is at least approximately constant.
  • Each grid strip in this case connects at a non-right angle to the edge strip.
  • this can also have another suitable shape for a length compensation.
  • in each grid strip in particular near the
  • Transition regions to the edge strips arcuate, for example, semicircular, curved sections to be integrated. It is also possible to make sections of the grid strip with simple or Z-shaped angled portions, preferably in a rounded shape. In all cases, the spacing between adjacent grid strips is preferably constant over the entire length of the grid strips. The distance between each point of the extraction grid and the electron emitter is not only in the cold state of the MB FEX tube, but at any point in time
  • Extraction gratings are also components of the focusing device precisely machinable with pulsed laser radiation.
  • the extraction grid can as well as
  • Focusing components for example, made of steel, especially stainless steel.
  • the x-ray beams that can be generated at the x-ray sources on the anode each have a direction with the maximum intensity of the emitted x-ray radiation, which corresponds to the respective x-ray main emission direction.
  • Such an X-ray main emission direction is given in all X-ray sources, which of a
  • Shot blasting source are different.
  • the X-ray beam geometry detected by the X-ray detector also depends on the collimation of the X-ray radiation, apart from the focusing of the electron beam.
  • Vacuum tube formed as a collimator device and / or attached to a collimator device in front of an X-ray window on the vacuum tube.
  • Fan-shaped x-ray beams (fan beam) and / or cone-shaped x-ray beams (cone beam) can be generated with the MBFEX tube, for example.
  • Each of the x-ray sources formed on the anode may, for example, be approximately punctiform, flat or line-shaped.
  • the cross-sectional profile of the X-ray radiation in the isocenter of the X-ray system, in particular the tomography system, depends, apart from the shape of the X-ray source, above all on the collimation of the X-radiation.
  • the cathodes are preferably arranged in a row in such a manner that, in cooperation with the focusing electrodes on the anode, a likewise row-shaped arrangement of X-ray sources is produced.
  • the cathodes are intended for sequential electrical control.
  • Computed tomography is the proposed MBFEX tube instead of a rotating X-ray source used. Below will be discussed on individual advantageous developments of the proposed MBFEX tube.
  • the high voltage feedthroughs and the cathode leads are arranged in a row and the anode opposite one another on the vacuum tube. This means that viewed in cross-section of the MBFEX tube, the cathode leads and high-voltage feedthroughs on the one hand and the anode on the other hand are diametrically opposed. With such an arrangement, the high voltage feedthroughs and the cathode leads are exposed to only a minimum of secondary electron or ion radiation. Particularly advantageously, such an arrangement also allows easy installation of the proposed MBFEX tube in an X-ray machine, for example in the gantry of a computer tomograph.
  • their cathodes have carbon nanotubes.
  • the very high electrical and thermal conductivity of carbon nanotubes allows a high current carrying capacity without significant heat development on the individual carbon nanotubes themselves.
  • Carbon nanotubes have a low field strength threshold of less than 2 V / m for the
  • the field strength threshold for cathodes for emitting electrons comprising carbon nanotubes can be further reduced by arranging the carbon nanotubes in a perpendicularly preferred direction on the cathode surface. Since single-walled carbon nanotubes are semiconductors and multi-walled carbon nanotubes metallic conductors, are multi-walled
  • Carbon nanotubes are particularly suitable for use as electron emitters on the cathodes of the proposed MBFEX tube. Therefore, the operation of the proposed MBFEX tube, which has cathodes containing carbon nanotubes, can be accomplished particularly advantageously with a power supply of relatively low power.
  • nanorods of a different kind commonly referred to as nanosticks, are also suitable for the emission of electrons within the MBFEX tube.
  • field emission cathodes are formed from such nanosticks as cathodes of the x-ray tube.
  • the nanosticks have a uniform or non-uniform composition and are either in the form of hollow bodies, ie tubes, or solid.
  • the cathodes can have nanosticks of the same kind or a mixture of different types of nanosticks, whereby the type of nanosticks is based on their composition and composition
  • Suitable materials in pure or doped form for the field emission of electrons are, in addition to single or multiwalled carbon nanotubes, also single or multiwalled hetero-nitrogen carbon nanotubes, borides of rare earths, in particular
  • rod-shaped, optionally hollow, elements made of polymeric materials are also suitable.
  • the nanosticks of the cathodes are optional
  • the X-ray emitter and with sufficient distance between them are on the At the tips of the nanoticks very strong electric fields can be generated, whereby the emission of electrons is considerably simplified.
  • Vacuum tube arranged more than one type of cathode wherein the term "variety" can refer both to the geometry and other properties of the cathode, for example, on the materials.Cathodes of the same and different types are fundamentally in any way electrically driven sequentially. In addition to the cathodes themselves, there may also be differences in focusing, which together with properties such as the surface geometry of the individual cathodes
  • the nanorods of the cathode have, for example, a length of less than 20 ⁇ m and a diameter of less than 10 nm, whereby a density of at least 10 6 nanorods per cm 2 , based on the area of the cathode, is given.
  • a screen printing process is suitable for producing the nanorod-containing cathode.
  • a particularly uniform layer thickness and a relatively smooth surface of the emitter can be achieved.
  • at least one type of cathode forms a layer formed for emission of electrons having a thickness of less than 20 ⁇ m and a mean roughness (Ra) of less than 2.5 ⁇ m.
  • the high quality of the emitter layer, together with a constant distance to the extraction grid, contributes to a high transmission rate of the X-ray tube electron source of up to 90% and more.
  • the high transmission rate is also favored by the main orientation of the nanorods in the vertical direction, effected by the screen printing method, relative to the substrate surface on which the emitter layer is located. It is also possible within the same MBFEX tube both cathodes with carbon nanotubes as well as completely different cathodes, for example, cathodes with tips of tungsten, which work in other, basically known way to
  • dispenser cathodes can be used within the MBFEX tube.
  • the complete emitter arrangement preferably has the following layer structure:
  • a planar carrier element in particular in the form of a ceramic plate
  • the ceramic board is made of corundum, for example.
  • the emitter layer is located on the ceramic board.
  • the ceramic plate is covered by a metal intermediate plate, which is also referred to as a spacer.
  • a grid plate including the extraction grids assigned to the individual emitters.
  • the grid plate in turn is covered by a plate of electrically insulating material, in particular ceramic, which generally referred to as the upper insulating layer.
  • the term "upper" layer has no relation to the orientation of the electron emitter in space, but simply means that said layer is located closest to the anode of the x-ray tube.
  • the anode encloses an intended examination area at least partially.
  • the X-ray sources and the main X-ray emission directions also at least partially surround the examination area.
  • the examination area is provided for the positioning of an examination subject in an X-ray machine.
  • the MBFEX tube as a whole is curved, with which it already partially encloses the examination area as a single X-ray tube.
  • Enclosing the examination area can be realized in different ways:
  • the MBFEX tube can extend over a very large angle, in extreme cases up to approximately 360 °, that is to say have an approximately closed ring shape.
  • the individual MBFEX tubes can either be curved or straight. In the latter case, a polygon shape of the arrangement results from all MBFEX tubes.
  • incomplete polygon shapes or ring shapes, such as L-shapes, U-shapes or semicircles, can be produced by combining several MBFEX tubes, whereby not necessarily all MBFEX tubes of such arrangements are similarly shaped.
  • anode of the MBFEX tube is in a computed tomography compared to
  • the object to be examined can be transilluminated practically from all circumferential positions by means of a single MBFEX tube.
  • the vacuum tube in which the X-radiation is generated is preferably made of metal.
  • MBFEX tubes in an X-ray system is fundamentally not limited, as is the shape of the individual MBFEX tubes and the geometrical arrangement of the MBFEX tubes in relation to each other.
  • the MBFEX tube or a plurality of MBFEX tubes within a X-ray system can be combined with other types of X-ray tubes.
  • X-rays of different wavelengths, as provided for multi-energy or dual-energy recordings can be generated by various settings of the anode voltage.
  • successive X-ray pulses of different wavelengths can be generated by the MBFEX tube in a preferred process control. This is particularly high reliability and at the same time shorter
  • the grounding of the extraction grid is independent of said housing, for example via a separate grounding line, which may be associated with a unit for driving the electron emitter.
  • Fig. 1 shows a first embodiment of a MBFEX tube 1 in a schematic
  • Fig. 2 shows the first embodiment of a MBFEX tube 1 in a schematic
  • FIG. 3 shows a second embodiment of a MBFEX tube 1 with a straight, line-shaped anode 30,
  • Fig. 4 shows the second embodiment of a MBFEX tube 1 with cut
  • FIG. 5 shows a high-voltage feedthrough 52 of the MBFEX tube 1 according to FIG. 3
  • FIG. 6, 7 are partial views of a grating device 43 of the MBFEX tube 1 of the first embodiment of a computer tomograph,
  • Fig. 8, 9 are partial views of the grating device 43 of the MBFEX tube 1 of the second
  • FIG. 13 shows an upper insulating layer 48 of the emitter arrangement 44 according to FIG. 12,
  • FIG. 15 shows an extraction grid electrode 71 of the grid plate 47 according to FIG. 14, FIG.
  • FIG. 16 shows a metal intermediate plate 46 of the emitter arrangement 44 according to FIG. 12, FIG.
  • Fig. 17, 18 the front of a ceramic board 45 of the emitter assembly 44 after
  • 19 shows the back of the ceramic plate 45 of the emitter assembly 44 of FIG. 12, 20 is a detail of the ceramic board 45,
  • All embodiments of the proposed MBFEX tube 1 explained below are provided for a computer tomograph and have a vacuum tube 20 with an X-ray window 21.
  • a vacuum tube 20 of all embodiments designed as a cold finger anode 30 is fixed.
  • the anode 30 contains tungsten.
  • the first two embodiments of the proposed MBFEX tube have in the vacuum tube 20 a plurality of uniformly arranged in rows fixed cathodes 40 and the embodiment of FIG. 21 such cathodes 41, 42 of two different types, wherein the cathodes 40, 41, 42 for the field emission of
  • Electrons are provided.
  • the cathodes 40, 41, 42 are respectively aligned with the electron main emission direction e of the producible electron beam E on the common anode 30 for generating X-ray sources Q.
  • the cathodes 40, 41, 42 are fixedly arranged in a row in such a way that a likewise row-shaped arrangement of X-ray sources Q can be produced on the anode 30.
  • the cathodes 40, 41, 42 are provided for a sequential electrical drive.
  • the X-ray beams X each have an X-ray main emission direction x.
  • each grating device 43 is aligned with each X-ray source Q.
  • the grating devices 43 are fixedly disposed in the vacuum tube 20 between the cathodes 40, 41, 42 and the anode 30.
  • Each grating device 43 has an extraction grid.
  • the extraction gratings are arranged at a short distance in front of the cathodes 40, 41, 42 and are provided for the extraction of electrons in the form of an electron beam E from the cathodes 40, 41, 42.
  • the extraction grids are not shown in FIGS. 1 to 4.
  • the vacuum tube 20 of all embodiments in turn has a plurality of
  • Cathode leads 50 are provided as terminals of the cathodes and the grating devices 43 to an electrical voltage of a few kV and formed as wire leads.
  • the high-voltage bushings 51, 52 are provided for the respective end-side connection of the anode to a high electrical voltage of several 10 kV.
  • the high voltage is in the range of 10 kV to 420 kV. Values in the upper range of this interval are used, for example, in X-ray systems
  • a coolant discharge pipe 31 is passed with an internal coolant supply pipe 32.
  • the coolant discharge pipe 31 and the coolant supply pipe 32 are provided for cooling the anode 30 with a liquid, electrically non-conductive coolant by means of a circulating device.
  • FIG. 29 shows the time profile of an emitter current EC, an anode current AC, and the grating-emitter voltage GEV.
  • the diagram of FIG. 29 shows actual measurement data.
  • the high transmittance of about 90% indicates the ratio of anode current AC to emitter current EC.
  • the anode current AC 52.2 mA determined from the measured voltage values and the emitter current EC 58.2 mA. This extremely favorable ratio between anode current AC and emitter current EC results primarily from the high quality of the hereinafter described in more detail
  • the anode 30 is formed as a circular arc.
  • Fig. 1 shows a schematic plan view of the anode 30, wherein the vacuum tube 20, the grating devices 43 and the high-voltage bushings 51, 52 are not visible. Fig. 1 is not to scale.
  • Grating devices 43 are disposed within the vacuum tube 20.
  • the cathodes 40 are located on a carrier 6 made of metallized ceramic.
  • the anode 30 is fixed in the vacuum tube 20 independently of the cathodes 40.
  • the X-ray sources Q are arranged so that the generated X-ray beams X in their respective
  • X-ray main emission directions x are aligned on an examination area U.
  • the examination area U is provided for the positioning of an examination subject, in particular a patient.
  • Fig. 2 shows the proposed MBFEX tube 1 in its first embodiment in a side view in cross section.
  • the coolant supply pipe 32, the cathode leads 50 and the high voltage bushings 51, 52 are not visible.
  • the cathodes 40 have on their surface multi-walled carbon nanotubes in a vertical preferred direction.
  • perpendicular in this context is meant to be directed to the anode 30 orientation.
  • the second embodiment of the proposed MBFEX tube 1 will be explained in more detail with reference to FIG. 3 and FIG. 4.
  • Fig. 3 shows a partially sectional view of the MBFEX tube 1 of the second embodiment.
  • the coolant supply pipe 32, the cathodes 40 and the grating devices 43 are not visible.
  • cathode leads 50 and the high voltage feedthroughs 51, 52 are arranged in a row and the anode 30 is disposed opposite to the vacuum tube 20.
  • FIG. 4 shows the proposed MBFEX tube 1 in its second exemplary embodiment with a sectional view of the anode 30.
  • the cathodes 40 and the grating devices 43 are likewise not visible. Individual features of the high voltage bushing 52 will be apparent from FIG.
  • grating device 43 which is shown in detail in different variants in Figures 5 to 11, is aligned with the anode 6, that is, between the cathodes 40, 41, 42 and the anode 6 in the
  • Vacuum tube 20 is arranged.
  • the grating device 43 includes by definition at least one extraction grid electrode 71, 73, 74 and at least one form of focus electrodes 72, 75, 76.
  • the extraction grid electrodes 71, 73, 74 are fixedly disposed directly over the cathodes 40, 41, 42 and provided for field extraction of electrons from the cathodes 40, 41, 42.
  • the focusing electrodes 72, 75, 76 are also fixedly disposed directly over each extraction grid electrode 71, 73, 74, facing the anode 6 and provided for focusing the extracted electrons as an electron beam E onto the respective X-ray source Q to be generated.
  • the extraction grid electrodes 71, 73, 74 are grounded independently of focusing electrodes 72, 75, 76.
  • the focusing electrodes 72, 75, 76 may be operated as passive or active focusing electrodes.
  • the grating device 43 has an extraction grid electrode 71 which is common to all the cathodes 40, wherein each individual cathode 40 is assigned separately to a single focusing electrode 72.
  • the grating device 43 has a cathode 41 of the first kind common
  • the extraction grid electrodes 71, 73, 74 and the focusing electrodes 72, 75, 76 are not shown in FIGS. 1 to 4.
  • a time-constant potential of typically 40 kV is applied to anode 6, with a uniformly pulsed direct electrical current of 30 mA flowing between anode 6 and respectively connected cathode 40, 41.
  • a time-constant potential of typically 120 kV is on the anode in question, between the anode 6 and the respective connected cathode 40, 42 flows a uniformly pulsed DC electrical current in the order of 0.5 mA.
  • the proposed computed tomography system includes a current controller, a device controller, an electronic control system (ECS), a cathode high voltage (CPS) source, an anode power supply (APS), and a device controller on.
  • ECS electronice control system
  • CPS cathode high voltage
  • APS an anode power supply
  • the current controller, the device controller, the electronic control system, the cathode high voltage source, the anode high voltage source and the device control are part of an electronic control device.
  • the current controller, the device controller and the electronic control system constitute an electronic control system.
  • the electronic control device has a main electrical circuit and a control circuit, wherein the main circuit and the control circuit are integrated in a DC circuit.
  • the main circuit are the anode high voltage source with the anode 6 and the current controller, the current controller with the device controller, the electronic control system with the electronic control system, the electronic control system with the cathode high voltage source and the cathode high voltage source in parallel with the cathodes 40, 41, 42 and electrically connected to the respective grating device 43.
  • the anode high-voltage source is electrically connected to the control system via a feedback loop.
  • the control system for both the sequential circuits of the cathodes 40, 41, 42, for the regulation of
  • cathodes 41, 42 of the MBFEX tube 1 are outlined by way of example. Both the first type cathodes 41 and the second type cathodes 42 have Carbon nanotubes, however, differ in terms of their geometry.
  • the cathodes 41, 42 are arranged in rows in the vacuum tube 20 and alternately staggered, the number of cathodes 41 of the first type being equal to the number of cathodes 42 of the second type.
  • X-ray source Q may each be associated with a cathode 41 of the first form and a respective cathode 42 of the second form.
  • the cathodes 41 of the first type or the cathodes 42 of the second type can be activated sequentially in any desired manner. In this way, dual-dose X-ray images with the MBFEX tube 1 can be realized.
  • a plurality of MBFEX tubes 1 can be combined into a rigid, annular or polygonal arrangement which replaces a rotating arrangement in a computer tomograph. This applies to any embodiment of MBFEX tubes 1 already described and explained below.
  • FIGS. 12 to 20 A layer structure of an emitter arrangement 44 of a MBFEX tube 1 is illustrated in FIGS. 12 to 20.
  • the emitter assembly 44 comprises as the lowest layer a ceramic plate 45 made of corundum.
  • the cathodes 40 are on a conductive coating of the ceramic board 45 and are manufactured by screen printing with high geometric precision.
  • conductor structures 66 can be seen on the back of the ceramic board 45.
  • a metal intermediate plate 46 is placed on the ceramic board 45.
  • This metal intermediate plate 46 has rectangular openings 61 for the cathodes 40.
  • 46 are in the metal intermediate plate strip-shaped, compared to the
  • Openings 61 narrower and longer openings 62 on the longitudinal sides of the openings 61.
  • the strip-shaped openings 62 have a function in the degassing of the vacuum tube 20. This applies both to the preparation of the operation and for the ongoing operation of the X-ray tube 1, respectively in cooperation with the Ceramic plate 45.
  • strip-shaped openings 64 in total an H-shape This applies to all cathodes 40 on the ceramic board 45 with the exception of the two outermost cathodes 40, which are flanked only on one side by strip-shaped openings 65 of the longer type.
  • the internal openings 64 which are very close to the cathodes 40, contribute to the fact that during the emission of electrons gas can be discharged even in extremely low concentrations down to individual particles to the back of the emitter assembly 44. This is a major contribution to the prevention of flashovers within the vacuum tube 20 is made.
  • the relatively large strip-shaped openings 65 are required to a greater extent.
  • the metal intermediate plate 46 has as an integral part of a connection strip 63 as from the emitter assembly 44 led to the outside electrical connection.
  • a grid plate 47 which comprises the extraction grid electrodes 71, each having a cathode with a precisely defined distance of
  • 0.224 mm (in the example of FIG. 12) are preset.
  • the extraction grid electrode 71 has a rectangular shape whose longitudinal sides are formed by completely straight edge strips 78.
  • the two edge strips are connected to one another by a multiplicity of grid strips 77, so that overall the grid structure results.
  • the grid strips 77 are not completely straight. Rather, at the two ends of each grid strip 77, that is, at the transition to the edge strip 78, a rounded transition region 79 is formed.
  • the rounded transition regions 79 significantly ensure that thermally induced deformations do not a change in the distance between the cathode 40 and the extraction grid 71, but within the in-plane extraction grating 71 are recorded without affecting the emission properties of the emitter array 44.
  • the grid plate 47 is covered by an upper insulating layer 48 in the form of a plate made of a ceramic material, whereby the emitter assembly 44 is completed.
  • the upper insulating layer 48 as shown in Fig. 12, has openings 49 adapted to the shape of the cathodes 40 to allow the passage of electrons.
  • Geometric features of the cathode 40, as contained multiple times in the emitter array 44, are shown in FIG. With good approximation, the cathode 40 is cuboid. Over the entire electron-emitting surface of the cathode 40, there are thus hardly any fluctuations in the distance between the cathode 40 and the extraction grid electrode 71 not shown in FIG. For comparison, the surface structure of a conventional cathode produced in the process of electrophoretic deposition (EPD) is indicated by dashed lines in FIG. A smooth surface can not be mentioned in this comparative example. Rather, pronounced peaks are present within the surface of the emission cathode, especially at the edges of the cathode produced in the EPD process.
  • EPD electrophoretic deposition
  • the electrons are emitted mainly at these tips. This limits on the one hand the lifetime and on the other hand the transmission rate at electrons.
  • the cathode 40 used in the X-ray tube 1 of the present invention emits electrons in each surface portion of its surface at a nearly constant release rate.
  • FIGS. 26 and 27 An exemplary embodiment of an anode 30 cooperating with the emitter arrangement 44 is illustrated in FIGS. 26 and 27.
  • On the cylindrical base body of the anode 30 are several top pieces 33, which are also referred to as anode tops or short essays. Each of these essays 33 has a relation to the
  • Base obliquely coated, with tungsten or other suitable for X-ray sources material coated surface 34.
  • the inclinations of the different surfaces 34 are different from each other, that - as indicated in Fig. 27 - the emitted X-ray X is focused in the direction of lying in the examination area U isocenter of the X-ray array 10.

Abstract

L'invention concerne un tube MBFEX (1) destiné à un appareil à rayons X, qui comporte, dans un tube à vide (20), une anode (30) qui est disposée de manière fixe dans le tube à vide et conçue comme un doigt de refroidissement, et une pluralité de cathodes (40, 41, 42) disposées de manière fixe. Le tube à vide (20) comporte une pluralité de conduits d'amenée cathodiques (50) et pas plus de deux traversées à haute tension (51, 52), dans une traversée haute tension (52). Un tube de fluide de refroidissement (31) comporte un tube de fluide de refroidissement intérieur (32) disposé à l'intérieur dans une traversée à haute tension (52). Le tube de fluide de refroidissement (31) et le tube de fluide de refroidissement intérieur (32) sont prévus pour refroidir l'anode (30) avec un fluide de refroidissement. Les cathodes (40, 41, 42) sont prévues pour émettre un champ d'électrons et sont alignées chacune sur l'anode (30) pour générer des sources de rayons X (Q).
EP18779196.7A 2017-09-20 2018-09-20 Tube mbfex Active EP3685420B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102017008810.1A DE102017008810A1 (de) 2017-09-20 2017-09-20 MBFEX-Röhre
PCT/EP2018/025239 WO2019057338A1 (fr) 2017-09-20 2018-09-20 Tube mbfex

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EP3685420A1 true EP3685420A1 (fr) 2020-07-29
EP3685420C0 EP3685420C0 (fr) 2023-06-28
EP3685420B1 EP3685420B1 (fr) 2023-06-28

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JP (1) JP7015383B2 (fr)
CN (1) CN111448637B (fr)
DE (1) DE102017008810A1 (fr)
ES (1) ES2957611T3 (fr)
WO (1) WO2019057338A1 (fr)

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CN111448637B (zh) 2023-07-04
JP7015383B2 (ja) 2022-02-02
WO2019057338A1 (fr) 2019-03-28
CN111448637A (zh) 2020-07-24
JP2020533767A (ja) 2020-11-19
DE102017008810A1 (de) 2019-03-21
EP3685420C0 (fr) 2023-06-28
ES2957611T3 (es) 2024-01-23
EP3685420B1 (fr) 2023-06-28
US11183357B2 (en) 2021-11-23
US20200312601A1 (en) 2020-10-01

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