EP3564538B1 - Vakuumsystem und verfahren zur herstellung eines solchen - Google Patents

Vakuumsystem und verfahren zur herstellung eines solchen Download PDF

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Publication number
EP3564538B1
EP3564538B1 EP19158341.8A EP19158341A EP3564538B1 EP 3564538 B1 EP3564538 B1 EP 3564538B1 EP 19158341 A EP19158341 A EP 19158341A EP 3564538 B1 EP3564538 B1 EP 3564538B1
Authority
EP
European Patent Office
Prior art keywords
pump
rotor
vacuum
housing
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP19158341.8A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP3564538A1 (de
Inventor
Jan Hoffmann
Michael Schweighöfer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Priority to EP19158341.8A priority Critical patent/EP3564538B1/de
Publication of EP3564538A1 publication Critical patent/EP3564538A1/de
Priority to JP2020021459A priority patent/JP7221891B2/ja
Application granted granted Critical
Publication of EP3564538B1 publication Critical patent/EP3564538B1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/403—Casings; Connections of working fluid especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/02—Selection of particular materials
    • F04D29/023—Selection of particular materials especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/24—Vacuum systems, e.g. maintaining desired pressures
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2230/00—Manufacture
    • F05D2230/20—Manufacture essentially without removing material
    • F05D2230/24—Manufacture essentially without removing material by extrusion

Definitions

  • the present invention relates to a vacuum system, in particular a mass spectrometry system, comprising a vacuum pump, in particular a turbo-molecular and / or split-flow vacuum pump, with a pump rotor which is arranged in a rotor housing, and a vacuum chamber which can be evacuated by means of the vacuum pump and which is surrounded by a chamber housing.
  • a vacuum pump in particular a turbo-molecular and / or split-flow vacuum pump
  • a pump rotor which is arranged in a rotor housing
  • a vacuum chamber which can be evacuated by means of the vacuum pump and which is surrounded by a chamber housing.
  • the invention also relates to a method for producing a vacuum system, in particular a mass spectrometry system, the vacuum system being a vacuum pump, in particular a turbo-molecular and / or split-flow vacuum pump, with a pump rotor which is arranged in a rotor housing, and a vacuum chamber which can be evacuated by means of the vacuum pump, which is surrounded by a chamber housing, includes.
  • a vacuum pump in particular a turbo-molecular and / or split-flow vacuum pump
  • a pump rotor which is arranged in a rotor housing
  • a vacuum chamber which can be evacuated by means of the vacuum pump, which is surrounded by a chamber housing
  • a split-flow pump With current designs of multi-chamber vacuum systems, the question arises as to how a split-flow pump can best be connected to the vacuum chamber or chambers. Installation space, number of components, manufacturing costs, testing effort, dimensions and weight, the latter in particular with regard to transport, represent important decision-making parameters in the course of optimization. It is generally known to equip a split-flow pump with a rotor housing designed as an extruded part, for example in the US 2018/0163732 A1 discloses which has at least one connecting flange for connecting a chamber housing of a vacuum chamber. This is also referred to as a box-type pump. Most systems have a simple structure. For example a box-type pump is screwed to a multi-chamber housing. Numerous connecting surfaces have to be sealed.
  • the US 6,336,356 B1 discloses a vacuum pump with a common housing for two vacuum pumps.
  • the US 6,182,851 B1 discloses a vacuum chamber made by extrusion.
  • the DE 10 2007 027 352 A1 discloses a vacuum system having a one-piece housing body defining a rotor housing and a chamber housing.
  • a vacuum system according to claim 1, and in particular in that the rotor housing and the chamber housing are formed in one piece by a housing body, and the housing body is an extruded part.
  • the housing body according to the invention is particularly simple and inexpensive to manufacture and the rotor and chamber housings do not need to be manufactured separately and then connected and sealed in a complex manner. This not only allows the assembly effort to be reduced. Also, separate leak tests do not have to be carried out for the rotor housing and chamber housing, as in the prior art.
  • the invention allows the pump rotor and the vacuum chamber or functional elements arranged therein to be arranged close to one another.
  • thin wall thicknesses are possible in the connection area, which further reduces the space required.
  • the size of the chamber is now largely independent of the size of the pump rotor and / or of the size of a flange connection.
  • the chamber can thus be designed to be particularly small and close to the pump rotor, for example, so that the volume to be evacuated and the pumping time required for evacuation are correspondingly short.
  • the chamber housing can also be made larger and / or wider are called the rotor housing.
  • the chamber extends around the pump rotor at least in some areas.
  • the invention also offers a high level of process reliability and particularly low material waste and thus, in turn, cost advantages.
  • a vacuum system is hereby also disclosed to solve the problem, in particular a mass spectrometry system, comprising a vacuum pump, in particular turbo-molecular and / or split-flow vacuum pump, with a pump rotor which is arranged in a rotor housing, and a Vacuum chamber which is surrounded by a chamber housing, the rotor housing and the chamber housing being formed in one piece by a housing body, and the housing body being designed as a profile component, cylinder body and / or an extruded part.
  • the term “cylinder” is not restricted to a circular cylinder here.
  • the profile component has a profile axis
  • the cylinder body has a cylinder axis and / or the extruded part has a strand axis which runs parallel to the pump rotor.
  • the housing body can be designed as a double extruded profile and / or have at least two partial strands, one of which forms the rotor housing and another of which forms the chamber housing.
  • at least two chambers can also be arranged offset around the pump rotor.
  • an opening is formed between the pump rotor and the vacuum chamber in the housing body.
  • the vacuum chamber can be pumped out through the opening.
  • This opening can also be referred to as a port, as it establishes the connection between the vacuum chamber and the pump rotor.
  • the port is thus integrated in the housing body.
  • the housing body can in particular have at least two parallel, cylindrical cavities, the pump rotor preferably being arranged in a first of the cavities and the vacuum chamber being formed in a second of the cavities.
  • the cavities can in particular be formed in parallel aligned partial strands and / or partial profiles of the housing body.
  • the housing body can for example also comprise a third cylindrical cavity, in particular a further pump rotor and / or a further vacuum chamber being or are provided in the third cylindrical cavity.
  • two pump rotors can be provided in separate cylindrical cavities, in particular in the first and third cylindrical cavity, by means of which at least one vacuum chamber, in particular in the second cylindrical cavity, can be evacuated together. A particularly high pumping speed can thus be provided for the vacuum chamber.
  • a pump rotor can also evacuate two vacuum chambers provided in separate cylindrical cavities.
  • the housing body can also comprise more than three parallel aligned cylindrical cavities.
  • the pump rotor is arranged inserted in the rotor housing. This enables a particularly simple assembly of the system.
  • the pump can be serviced without influencing the vacuum chamber and the functional elements present therein.
  • the rotor is plugged directly into the rotor housing, ie in particular no intermediate sleeve is provided between the pump rotor and the rotor housing.
  • stator disks and possibly spacers for the stator disks can also be inserted.
  • the pump rotor is separated from an inner wall of the rotor housing by at most stator disks and, if necessary, spacer sleeves.
  • an additional sleeve for the rotor and, if necessary, stator disks can also be provided as an alternative.
  • a bearing element in particular together with a carrier provided for this purpose, in particular a so-called star, can be inserted into the rotor housing.
  • the pump has a pump base element which is fastened to the housing body, in particular by means of at least one fastening element.
  • the pump base element can be screwed to the housing body.
  • the pump base member may be attached to the case body by screws that are screwed into the case body.
  • the pump base element can for example comprise a drive, a control and / or a bearing for the pump rotor.
  • the housing body has at least one projection, in particular a fastening projection, to which any functional part, in particular the pump base element, can be fastened.
  • the projection can be formed on the rotor housing, in particular molded on and / or formed in one piece with it.
  • the projection can be designed to protrude radially and / or transversely to the rotor axis.
  • the projection preferably extends with a substantially constant cross section and / or along the entire axial length of the rotor housing, the chamber housing and / or the housing body.
  • the projection can be designed, for example, as a column of material extending in the axial direction.
  • the pump base element can be screwed into the projection by means of at least one fastening screw.
  • the pump base element preferably has at least one fastening projection that corresponds to the projection on the housing body, for example with through bores.
  • a functional element is arranged in the vacuum chamber, wherein the housing body, in particular the chamber housing, can preferably have a mounting opening for the functional element.
  • the functional element can be introduced into the vacuum chamber in a particularly simple manner.
  • the functional element can, in particular in a mass spectrometry system, be, for example, ion optics, a quadrupole or the like.
  • the assembly opening can in particular be arranged transversely and / or radially, which enables a particularly simple installation of the functional element. In principle, the assembly opening can also be designed as an axial opening.
  • an opening in the axial end of the housing body or extruded profile in particular the opening of a cylindrical cavity defining the vacuum chamber, can also be used as an assembly opening.
  • the functional element can, for example, simply be attached to a carrier, in particular a cover, which is attached to the assembly opening, in particular spans the assembly opening. The fastening of the functional element on the carrier or cover can take place outside the system, in particular in an ergonomic work environment.
  • the cover then only needs to cover the Mounting opening to be attached.
  • the fastening can preferably be done by externally actuatable screws, so that it can be carried out easily for the fitter.
  • the housing body is preferably machined in an area enclosing the assembly opening and, in particular, has a low roughness so that a seal can be carried out effectively.
  • the vacuum system can have at least one second vacuum chamber, which is preferably also formed in the housing body, in particular in the same partial line as the first vacuum chamber and / or as the pump rotor.
  • a multi-chamber system can thus be implemented in a simple manner.
  • the vacuum chambers can, for example, be arranged axially one behind the other and aligned parallel to the pump rotor and / or be formed by the same cylindrical cavity of the extruded part.
  • one or the vacuum chamber can also be arranged in an axial extension of the rotor housing and / or in the same cylindrical cavity as the pump rotor.
  • the vacuum chamber can, for example, be arranged radially and / or axially adjacent to the pump rotor with respect to the latter.
  • both a vacuum chamber can be arranged radially adjacent and a vacuum chamber can be arranged axially adjacent.
  • the vacuum chamber axially adjacent to the pump rotor can be formed at least partially by a cylindrical cavity which also contains the pump rotor.
  • a vacuum chamber can be formed in a continuation of a rotor housing string.
  • the axially adjacent vacuum chamber can, however, preferably also be formed by a strand or cylindrical cavity of the chamber housing, wherein, for example, a through opening can be provided between the continuation of the rotor housing and the chamber housing.
  • the chamber housing and the rotor housing can be axially closed by a common, in particular one-piece, cover.
  • the cover can for example be designed as a plate, for example on a side facing away from a pump base element. However, the cover can also be arranged and / or molded onto the pump base element.
  • the rotor housing and chamber housing can, for example, terminate axially at the same height or not, which applies both to a low-pressure end and to a pressure end, such as a fore-vacuum end, of the system.
  • the rotor housing and the chamber housing and / or the cylindrical cavities provided therein are preferably of significantly different sizes in their cross-sectional areas, for example with at least 20%, in particular at least 40%, in particular at least 60% size difference.
  • the cross-sectional area extends in particular perpendicular to the rotor axis.
  • a relatively large pump rotor with a relatively small vacuum chamber can be used, and vice versa.
  • the vacuum system can be designed in a particularly simple manner as required, without an interposed connecting flange specifying or at least influencing the sizes.
  • the object is also achieved by a method according to the independent method claim, in particular in that the rotor housing and the chamber housing are formed in one piece by a housing body which is produced by extrusion.
  • machining in particular machining, is possible after extrusion, for example to form openings and / or contact and / or sealing surfaces.
  • the housing body can be designed, for example, as a double extruded profile with at least two partial strands, in particular one each for the rotor housing and for the chamber housing.
  • the housing body is preferably extruded with a common die for the partial strands.
  • the pump rotor is inserted into the rotor housing.
  • an opening in particular an assembly opening, is made in the housing body, in particular in the chamber housing, wherein in particular a functional element is introduced through this opening into the vacuum chamber.
  • the opening can, for example, be directed outwards, that is to say, for example, enable a functional element to be assembled from the outside.
  • the assembly of a functional element is basically also conceivable, for example, through an opening between the vacuum chamber and the pump rotor, in particular before the pump rotor is inserted.
  • Another example provides that an opening connecting the interior of the rotor housing, in particular the pump rotor, to the vacuum chamber is made in the housing body.
  • openings can be made in a simple manner, for example by means of a cutting tool that engages behind, in particular a T-slot cutter.
  • the cutting tool is axially inserted into the rotor housing, in particular into a cylindrical cavity for the pump rotor, and / or the Chamber housing, in particular introduced into a cylindrical cavity for the vacuum chamber and, in particular then, advanced in the transverse direction against the material to be machined.
  • FIGS 8-11 different embodiments of a vacuum system.
  • the turbo molecular pump 111 shown comprises a pump inlet 115 which is surrounded by an inlet flange 113 and to which a recipient (not shown) can be connected in a manner known per se.
  • the gas from the recipient can be sucked out of the recipient via the pump inlet 115 and conveyed through the pump to a pump outlet 117 to which a backing pump, such as a rotary vane pump, can be connected.
  • the inlet flange 113 forms according to FIG Fig. 1 the upper end of the housing 119 of the vacuum pump 111.
  • the housing 119 comprises a lower part 121 on which an electronics housing 123 is arranged laterally. Electrical and / or electronic components of the vacuum pump 111 are accommodated in the electronics housing 123, for example for operating an electric motor 125 arranged in the vacuum pump. A plurality of connections 127 for accessories are provided on the electronics housing 123.
  • a data interface 129 for example in accordance with the RS485 standard, and a power supply connection 131 are arranged on the electronics housing 123.
  • a flood inlet 133 in particular in the form of a flood valve, is provided on the housing 119 of the turbo molecular pump 111, via which the vacuum pump 111 can be flooded.
  • a sealing gas connection 135, which is also referred to as a purge gas connection via which purge gas is used to protect the electric motor 125 (see e.g. Fig. 3 ) can be brought into the engine compartment 137, in which the electric motor 125 in the vacuum pump 111 is accommodated, before the gas conveyed by the pump.
  • two coolant connections 139 are arranged in the lower part 121, one of the coolant connections being provided as an inlet and the other coolant connection being provided as an outlet for coolant, which can be passed into the vacuum pump for cooling purposes.
  • the lower side 141 of the vacuum pump can serve as a standing surface, so that the vacuum pump 111 can be operated standing on the lower side 141.
  • the vacuum pump 111 can, however, also be attached to a recipient via the inlet flange 113 and can thus be operated in a suspended manner, as it were.
  • the vacuum pump 111 can be designed in such a way that it can also be put into operation when it is oriented in a different way than in FIG Fig. 1 is shown.
  • Embodiments of the vacuum pump can also be implemented in which the underside 141 cannot be arranged facing downwards, but facing to the side or facing upwards.
  • a bearing cap 145 is attached to the underside 141.
  • Fastening bores 147 are also arranged on the underside 141, via which the pump 111 can be fastened to a support surface, for example.
  • a coolant line 148 is shown, in which the coolant introduced and discharged via the coolant connections 139 can circulate.
  • the vacuum pump comprises several process gas pump stages for conveying the process gas present at the pump inlet 115 to the pump outlet 117.
  • a rotor 149 is arranged in the housing 119 and has a rotor shaft 153 which is rotatable about an axis of rotation 151.
  • the turbo-molecular pump 111 comprises several turbo-molecular pump stages connected in series with one another with several radial rotor disks 155 fastened to the rotor shaft 153 and stator disks 157 arranged between the rotor disks 155 and fixed in the housing 119.
  • a rotor disk 155 and an adjacent stator disk 157 each form a turbomolecular one Pumping stage.
  • the stator disks 157 are held at a desired axial distance from one another by spacer rings 159.
  • the vacuum pump also comprises Holweck pump stages which are arranged one inside the other in the radial direction and are connected in series with one another for effective pumping.
  • the rotor of the Holweck pump stages comprises a rotor hub 161 arranged on the rotor shaft 153 and two cylinder-jacket-shaped Holweck rotor sleeves 163, 165 which are attached to the rotor hub 161 and carried by the latter, are oriented coaxially to the axis of rotation 151 and nested in one another in the radial direction.
  • two cylinder jacket-shaped Holweck stator sleeves 167, 169 are provided, which are also oriented coaxially to the axis of rotation 151 and, viewed in the radial direction, are nested inside one another.
  • the active pumping surfaces of the Holweck pump stages are formed by the jacket surfaces, that is to say by the radial inner and / or outer surfaces, of the Holweck rotor sleeves 163, 165 and the Holweck stator sleeves 167, 169.
  • the radial inner surface of the outer Holweck stator sleeve 167 lies on the radial outer surface of the outer Holweck rotor sleeve 163 with the formation of a radial Holweck gap 171 opposite and with this forms the first Holweck pump stage following the turbo molecular pumps.
  • the radial inner surface of the outer Holweck rotor sleeve 163 faces the radial outer surface of the inner Holweck stator sleeve 169 with the formation of a radial Holweck gap 173 and forms with this a second Holweck pumping stage.
  • the radial inner surface of the inner Holweck stator sleeve 169 lies opposite the radial outer surface of the inner Holweck rotor sleeve 165 with the formation of a radial Holweck gap 175 and with this forms the third Holweck pumping stage.
  • a radially running channel can be provided, via which the radially outer Holweck gap 171 is connected to the central Holweck gap 173.
  • a radially running channel can be provided at the upper end of the inner Holweck stator sleeve 169, via which the middle Holweck gap 173 is connected to the radially inner Holweck gap 175.
  • a connecting channel 179 to the outlet 117 can also be provided at the lower end of the radially inner Holweck rotor sleeve 165.
  • the aforementioned pump-active surfaces of the Holweck stator sleeves 163, 165 each have a plurality of Holweck grooves running spirally around the axis of rotation 151 in the axial direction, while the opposite lateral surfaces of the Holweck rotor sleeves 163, 165 are smooth and the gas for operating the Drive vacuum pump 111 in the Holweck grooves.
  • a roller bearing 181 is provided in the area of the pump outlet 117 and a permanent magnetic bearing 183 in the area of the pump inlet 115.
  • a conical injection-molded nut 185 is provided on the rotor shaft 153 with an outer diameter that increases towards the roller bearing 181.
  • the injection-molded nut 185 is in sliding contact with at least one stripper of an operating medium store.
  • the operating medium reservoir comprises several absorbent disks 187 stacked on top of one another, which are impregnated with an operating medium for the roller bearing 181, e.g. with a lubricant.
  • the operating medium is transferred by capillary action from the operating medium reservoir via the scraper to the rotating injection nut 185 and, as a result of the centrifugal force, is conveyed along the injection nut 185 in the direction of the increasing outer diameter of the injection nut 185 to the roller bearing 181, where it eg fulfills a lubricating function.
  • the roller bearing 181 and the operating medium store are enclosed in the vacuum pump by a trough-shaped insert 189 and the bearing cover 145.
  • the permanent magnetic bearing 183 comprises a rotor-side bearing half 191 and a stator-side bearing half 193, each of which comprises a ring stack of several permanent magnetic rings 195, 197 stacked on top of one another in the axial direction.
  • the ring magnets 195, 197 are opposite one another with the formation of a radial bearing gap 199, the rotor-side ring magnets 195 being arranged radially on the outside and the stator-side ring magnets 197 being arranged radially on the inside.
  • the magnetic field present in the bearing gap 199 causes magnetic repulsive forces between the ring magnets 195, 197, which cause the rotor shaft 153 to be supported radially.
  • the rotor-side ring magnets 195 are carried by a carrier section 201 of the rotor shaft 153 which surrounds the ring magnets 195 radially on the outside.
  • the stator-side ring magnets 197 are carried by a stator-side support section 203 which extends through the ring magnets 197 and is suspended from radial struts 205 of the housing 119.
  • the ring magnets 195 on the rotor side are parallel to the axis of rotation 151 by means of a cover element coupled to the carrier section 203 207 set.
  • the stator-side ring magnets 197 are fixed parallel to the axis of rotation 151 in one direction by a fastening ring 209 connected to the carrier section 203 and a fastening ring 211 connected to the carrier section 203.
  • a plate spring 213 can also be provided between the fastening ring 211 and the ring magnet 197.
  • An emergency or retainer bearing 215 is provided within the magnetic bearing, which runs empty during normal operation of the vacuum pump 111 without contact and only comes into engagement with an excessive radial deflection of the rotor 149 relative to the stator to create a radial stop for the rotor 149 to form, since a collision of the rotor-side structures with the stator-side structures is prevented.
  • the backup bearing 215 is designed as an unlubricated roller bearing and forms a radial gap with the rotor 149 and / or the stator, which has the effect that the backup bearing 215 is disengaged during normal pumping operation.
  • the radial deflection at which the backup bearing 215 engages is dimensioned large enough that the backup bearing 215 does not come into engagement during normal operation of the vacuum pump, and at the same time small enough that a collision of the rotor-side structures with the stator-side structures under all circumstances is prevented.
  • the vacuum pump 111 comprises the electric motor 125 for rotatingly driving the rotor 149.
  • the armature of the electric motor 125 is formed by the rotor 149, the rotor shaft 153 of which extends through the motor stator 217.
  • a permanent magnet arrangement can be arranged radially on the outside or embedded on the section of the rotor shaft 153 extending through the motor stator 217.
  • the motor stator 217 is fixed in the housing within the motor compartment 137 provided for the electric motor 125.
  • a sealing gas which is also referred to as a flushing gas and which can be air or nitrogen, for example, can enter the engine compartment 137 via the sealing gas connection 135.
  • the electric motor 125 can be protected from process gas, e.g. from corrosive components of the process gas, via the sealing gas.
  • the engine compartment 137 can also be evacuated via the pump outlet 117, i.e. the vacuum pressure produced by the backing pump connected to the pump outlet 117 is at least approximately in the engine compartment 137.
  • a so-called and known labyrinth seal 223 can also be provided between the rotor hub 161 and a wall 221 delimiting the engine compartment 137, in particular to achieve better sealing of the motor compartment 217 from the Holweck pump stages located radially outside.
  • the turbo-molecular vacuum pump described above has exactly one inlet for a vacuum chamber, namely on the inlet flange 113.
  • Examples of vacuum pumps with several inlets for several vacuum chambers, so-called split-flow vacuum pumps, are described below. It goes without saying that the general structure of the turbomolecular pump described above and also any detailed features can be used to construct the split-flow vacuum pumps shown only schematically in the other figures.
  • a one-piece housing body 20 is shown, which is designed as an extruded part and has two parallel sub-strands 22 and 24, which form a rotor housing 26 and a chamber housing 28, respectively.
  • the Partial strands 22 and 24 each have a cylindrical cavity 30 and 32, respectively.
  • the cylindrical cavity 30 is provided for receiving a pump rotor, not shown here, whereas the cylindrical cavity 32 forms at least one, preferably a plurality of vacuum chambers.
  • FIG. 7 Another housing body 20 is shown in a side view in such a way that the viewing direction runs through two cylindrical cavities 30 and 32.
  • the cylindrical cavity 30 again forms a receiving space for a pump rotor (not shown), while the cylindrical cavity 32 forms a plurality of vacuum chambers.
  • the housing body 20 of the Fig. 7 likewise has a rotor housing 26 and a chamber housing 28. These are integrally connected to one another and designed as a common extrusion. The pressed strand runs into the image plane.
  • the cylindrical cavity 30 for the pump rotor is designed as a circular cylinder in this exemplary embodiment. Its final shape and surface quality of the inner wall can, for example, also be machined, with a corresponding cylindrical cavity preferably already being provided during extrusion.
  • the housing body 20 has a plurality of projections 34 protruding in the transverse direction, to which, for example, a pump base element, which is not shown here, can be fastened, in particular screwed.
  • three such projections 34 are provided by way of example.
  • the projections 34 regardless of their number, can be arranged, for example, evenly over the circumference of the rotor housing 26 or, as here, in an unevenly distributed manner on the latter.
  • similar projections can be made on the chamber housing 28 be arranged.
  • the projections 34 preferably extend as in FIG Fig. 6 visible over the entire length of the housing body 20.
  • additional functional structures are implemented in the extruded part, that is to say the housing body 20. These can be provided with only a small additional cost.
  • other functional structures can also be provided, such as recesses or grooves, e.g. as cable ducts, or temperature control structures, such as ribs or fluid lines.
  • Mounting openings are preferably provided in the chamber housing 28 so that functional elements (not shown here) can be introduced into the vacuum chambers in a particularly simple manner.
  • a mounting opening can be aligned in the transverse direction, which is shown in FIG Fig. 7 corresponds to a direction along the image plane.
  • a mounting opening can be provided on the upper, right and / or lower wall of the chamber housing 28, for example.
  • two assembly openings 36 are visible, which are arranged here by way of example in a wall of the chamber housing 28 facing away from the rotor housing 26.
  • a plurality of openings are preferably also arranged, which in the axial direction in Fig. 7 that is, in the direction of the image plane, are spaced apart. These openings form several ports between the pump rotor and a respective associated vacuum chamber.
  • a vacuum system 40 which has a plurality of vacuum chambers 42 which are connected to respective ports of a split-flow vacuum pump 44.
  • the ports are implemented through openings 46 between a pump rotor 48 of the split-flow vacuum pump 44 and the vacuum chambers 42.
  • the vacuum chambers 42 are axially separated from one another by walls 50, but in this example they are connected to one another by small openings in the walls 50 such that a small fluid flow is nevertheless possible.
  • a mounting opening 36 for functional elements is provided for each of the vacuum chambers 42, whereby, depending on the application, several mounting openings 36 can be provided for a vacuum chamber and / or a vacuum chamber does not have a separate mounting opening in the transverse direction, but is equipped with a functional element, for example, through an axial opening .
  • the pump rotor 48 comprises two spaced turbo stages 52 and a Holweck stage 54. Apart from the one in FIG Fig. 8 In the upper opening 46, the openings 46 are each arranged between spaced apart pump stages of the pump rotor 48.
  • the pump rotor 48 is arranged inserted into a rotor housing 26.
  • the vacuum chambers 42 are formed in a chamber housing 28.
  • the rotor housing 26 and the chamber housing 28 are formed by a common housing body 20 which is produced by extrusion.
  • the openings 46 are provided in a wall of the housing body 20 between the vacuum chambers 42 and the pump rotor 48.
  • the openings can be made in the extruded profile, for example, by a cutting tool that engages behind, for example a T-slot cutter.
  • the cutting tool can be axially, in Fig. 8 from top to bottom or from bottom to top, moved into the rotor housing 26 and / or the chamber housing 28 and then be delivered towards the wall.
  • a pump base member 56 is on in Fig. 8 arranged lower axial end of the housing body 20 and attached in a manner not shown here on the housing body 20, for example on projections 34, as they are in the Figures 6 and 7 are shown.
  • the pump base element 56 comprises a drive and a bearing for the pump rotor 48.
  • the latter is preferably also supported, for example via a carrier supported in the rotor housing 26, in particular a so-called star, and for example by means of a magnetic bearing.
  • a different functional section 58 which, for example, controls the functional elements introduced into the vacuum chambers 42 or, for example, a control for the Vacuum pump 44 may include.
  • the in Fig. 8 lower vacuum chamber 42 but also protrude into the axial area of the pump base element 56.
  • the pump base element 56 and the functional section 58 are arranged here at a pressure-side end of the vacuum system 40.
  • the chamber housing 28 is made longer than the rotor housing 26.
  • the free axial section in extension of the rotor housing 26 can, for example, be removed by machining after the extrusion of the housing body 20, since it is not used in this embodiment.
  • an axial area not occupied by the vacuum pump 44 and / or the pump rotor 48 can be used for other purposes, for example in order to optimally utilize the entire installation space.
  • a vacuum chamber 42 for example with functional elements arranged therein, is provided in the partial strand 22 forming the rotor housing 26.
  • the vacuum chamber 42 arranged in the partial line 22 is connected by openings to an inlet region of the vacuum pump 44 and to an adjacent vacuum chamber 42 arranged in the other partial line 24.
  • the vacuum pump 44 comprises a turbo stage 52 and a combined pump stage 60 with turbo and Holweck units.
  • the vacuum pump 44 comprises an outlet connection, in particular a forevacuum connection 62.
  • An opening 64 to a further vacuum chamber 42 is provided at the same pressure level.
  • the opening 64 is also made in the extruded profile or the housing body 20.
  • the partial strands 22 and 24 are closed by a common cover 66.
  • the cover 66 axially closes only the vacuum chambers 42.
  • the cover 66 can, however, also close these two when the rotor and chamber housings 26, 28 end axially together.
  • the Fig. 10 shows a vacuum system 40, the internal structure of which, for example, at least partially corresponds to that of Fig. 9 can correspond. While in Fig. 9 the partial strands aligned vertically during operation are generally also a horizontal arrangement, for example according to Fig. 10 , and other arrangements possible.
  • FIG. 11 an exemplary vacuum system 40 designed as a mass spectrometry system with two vacuum chambers 42 is shown.
  • the vacuum chambers 42 is both in the branch 22 and formed in the partial strand 24, an opening 46 connecting the partial regions of the vacuum chamber 42 arranged in the partial strands.
  • a first quadrupole 68 is arranged in a first vacuum chamber 42, the first vacuum chamber 42 being connected to an intermediate inlet of the vacuum pump 44.
  • a second quadrupole 70 is arranged in a second vacuum chamber 42 on the low-pressure side.
  • An ion stream to be analyzed runs first through the first and then through the second quadrupole 68, 70, a deflection device (not shown) being provided for the ion stream between the quadrupoles. After passing through the second quadrupole 70, the ion stream hits a detector 72. The quadrupoles and the detector 72 form functional elements in the vacuum chambers 42.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
EP19158341.8A 2019-02-20 2019-02-20 Vakuumsystem und verfahren zur herstellung eines solchen Active EP3564538B1 (de)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP19158341.8A EP3564538B1 (de) 2019-02-20 2019-02-20 Vakuumsystem und verfahren zur herstellung eines solchen
JP2020021459A JP7221891B2 (ja) 2019-02-20 2020-02-12 真空システム及びこのような真空システムを製造するための方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP19158341.8A EP3564538B1 (de) 2019-02-20 2019-02-20 Vakuumsystem und verfahren zur herstellung eines solchen

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EP3564538A1 EP3564538A1 (de) 2019-11-06
EP3564538B1 true EP3564538B1 (de) 2021-04-07

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Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007027352A1 (de) * 2007-06-11 2008-12-18 Oerlikon Leybold Vacuum Gmbh Massenspektrometer-Anordnung

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19901340B4 (de) 1998-05-26 2016-03-24 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit Chassis, Rotor und Gehäuse sowie Einrichtung, ausgerüstet mit einer Reibungsvakuumpumpe dieser Art
JP4520636B2 (ja) * 1998-05-26 2010-08-11 ライボルト ヴァークウム ゲゼルシャフト ミット ベシュレンクテル ハフツング シャシ、ロータ及びケーシングを有する摩擦真空ポンプ並びにこの形式の摩擦真空ポンプを備えた装置
US6182851B1 (en) * 1998-09-10 2001-02-06 Applied Materials Inc. Vacuum processing chambers and method for producing
FR2784184B1 (fr) * 1998-10-01 2000-12-15 Cit Alcatel Detecteur de fuite compact
DE10055057A1 (de) * 2000-11-07 2002-05-08 Pfeiffer Vacuum Gmbh Leckdetektorpumpe
US20120027583A1 (en) * 2006-05-04 2012-02-02 Bernd Hofmann Vacuum pump
DE102014213942B4 (de) * 2014-07-17 2016-01-28 Christof-Herbert Diener Vakuumanlage, insbesondere Plasmaanlage, mit einem rundum geschlossenen Kammerstrangpressprofil
EP3067565B1 (de) * 2015-03-13 2020-07-22 Pfeiffer Vacuum Gmbh Vakuumpumpe
GB2538962B (en) * 2015-06-01 2019-06-26 Edwards Ltd Vacuum pump
EP3296571B1 (de) * 2017-07-21 2021-11-03 Pfeiffer Vacuum Gmbh Vakuumpumpe

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007027352A1 (de) * 2007-06-11 2008-12-18 Oerlikon Leybold Vacuum Gmbh Massenspektrometer-Anordnung

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JP7221891B2 (ja) 2023-02-14
EP3564538A1 (de) 2019-11-06
JP2020133631A (ja) 2020-08-31

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