EP3217153B1 - Thermischer luftmassenmesser - Google Patents

Thermischer luftmassenmesser Download PDF

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Publication number
EP3217153B1
EP3217153B1 EP15856909.5A EP15856909A EP3217153B1 EP 3217153 B1 EP3217153 B1 EP 3217153B1 EP 15856909 A EP15856909 A EP 15856909A EP 3217153 B1 EP3217153 B1 EP 3217153B1
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EP
European Patent Office
Prior art keywords
substrate
filling material
young
modulus
air flow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP15856909.5A
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English (en)
French (fr)
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EP3217153A4 (de
EP3217153A1 (de
Inventor
Masatoshi Ogata
Norio Ishitsuka
Takayuki Yogo
Hiroaki Hoshika
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Astemo Ltd
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Hitachi Astemo Ltd
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Publication date
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Publication of EP3217153A1 publication Critical patent/EP3217153A1/de
Publication of EP3217153A4 publication Critical patent/EP3217153A4/de
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696—Circuits therefor, e.g. constant-current flow meters
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02M—SUPPLYING COMBUSTION ENGINES IN GENERAL WITH COMBUSTIBLE MIXTURES OR CONSTITUENTS THEREOF
    • F02M35/00—Combustion-air cleaners, air intakes, intake silencers, or induction systems specially adapted for, or arranged on, internal-combustion engines
    • F02M35/10—Air intakes; Induction systems
    • F02M35/10373—Sensors for intake systems
    • F02M35/10386—Sensors for intake systems for flow rate
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6842—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow with means for influencing the fluid flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
    • G01F15/006—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus characterised by the use of a particular material, e.g. anti-corrosive material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
    • G01F15/02—Compensating or correcting for variations in pressure, density or temperature

Definitions

  • the present invention relates to flow meters for measuring flow rates of gases to be measured and, more particularly, to a thermal air flow meter that measures an intake air amount of an internal combustion engine.
  • a thermal air flow meter for measuring a gas flow rate include a flow rate detection unit that measures the flow rate of gas and is configured to determine the flow rate of gas through heat transfer between the flow rate detection unit and the gas to be measured.
  • the flow rate measured by the thermal air flow meter is widely used as an important control parameter in various types of devices.
  • the thermal air flow meter is characterized by being capable of measuring the gas flow rate, e.g., mass flow rate, with relatively high accuracy compared with flow meters operating on other systems.
  • a thermal air flow meter that measures an amount of intake air introduced into an internal combustion engine includes a sub-passage through which part of the intake air is drawn and a flow rate detection unit disposed in the sub-passage.
  • the flow rate detection unit performs heat transfer with the gas to be measured to thereby determine a state of the gas to be measured flowing through the sub-passage and outputs an electric signal that represents the amount of intake air introduced into the internal combustion engine.
  • Such a technique is disclosed in, for example, JP 2011-252796 A (PTL 1) .
  • a metal plate is supported by a base, and is disposed inside a main passage so as to be generally parallel to a direction of flow of a fluid being measured through the main passage, and a circuit board and a flow rate detecting element are disposed so as to be positioned generally in a common plane with a front surface of the metal plate.
  • a circuit housing portion formed integrally on the base is disposed on the front surface of the metal plate so as to surround the circuit board, an electrical connection portion between the circuit board and the flow rate detecting element, and an electrical connection portion between the circuit board and a connector portion.
  • a thermal flow sensor includes: a sensing section including a heater formed on one side; the sensor chip having a pad electrically connected to the sensing section; the rectifying section which is provided on the upstream and downstream of the sensor chip adjacent thereto in the normal flow direction of fluid and has a flush part which is flush with the heater's-side surface of the sensor chip in a direction departing from the sensor chip's-side end with respect to the sensor chip.
  • JP 2010 204005 A a sensor for measuring the amount of air intake is integrally composed as a sensor subassembly where a sensor chip and a circuit section are mounted to a common sensor base material, and fixed by making the sensor base material adhere to a sensor housing with an adhesive.
  • a housing that includes a sub-passage having therein a hole in which the flow rate detection unit is to be fitted is manufactured in advance using a resin
  • a sensor assembly that includes the flow rate detection unit is manufactured separately from the housing, and, under a condition in which the flow rate detection unit is inserted in the hole in the sub-passage, the sensor assembly is fixed to the housing.
  • An elastic adhesive is applied to fill a gap between the hole in the sub-passage and the flow rate detection unit and a gap in a portion in which the sensor assembly is fitted in the housing.
  • a difference in coefficient of linear expansion involved between the adjoining parts is absorbed by an elastic force of the adhesive.
  • the foregoing structure entails greater variations in position when the sensor assembly including the flow rate detection unit is fixed to the housing including the sub-passage.
  • a state of the adhesive for example, can readily affect to vary a position and an angle of the sensor assembly with respect to the sub-passage included in the housing.
  • the known thermal air flow meter finds difficulty in further improving accuracy in detecting the flow rate.
  • Fixing the sensor assembly including the flow rate detection unit simultaneously with the molding of the housing is effective in accurately positioning the flow rate detection unit with respect to the sub-passage.
  • the foregoing approach poses a problem of reduced measurement accuracy because of the following reason: specifically, thermal stress that occurs in a resistor in an LSI and that arises from the difference in the coefficient of linear expansion between parts is higher than that when the adhesive is used; additionally, heat generated in electronic components reduces accuracy in temperature correction.
  • An object of the invention is to provide a thermal air flow meter that offers high measurement accuracy.
  • thermo air flow meter that offers high measurement accuracy
  • a thermal air flow meter will first be described.
  • a sensor assembly 10 includes an electronic component 3 and a sensor chip 2 mounted on a substrate 1. It is noted that a ceramic substrate or a printed substrate may be used for the substrate 1.
  • the electronic component 3 may, for example, be an LSI.
  • a resistor 7 is disposed inside the electronic component 3 and is used, for example, as a reference oscillator (clock) or an A/D converter.
  • the substrate 1 and the sensor chip 2, and the substrate 1 and the electronic component 3, are each electrically wired using a solder or a bonding wire.
  • air 26 flows from a direction of the arrow in FIG. 1 or a direction opposite thereto to pass through a flow rate detection part in the sensor chip 2, so that the flow rate is measured.
  • FIG. 2 is a plan view of the sensor assembly 10 mounted on a housing 5 that includes a sub-passage 12.
  • the housing 5 includes the sub-passage 12 for introducing air that flows through a main passage to the sensor chip 2.
  • the housing 5 formed of a first resin is integrally molded with the sensor assembly 10.
  • the sensor assembly 10 is fixed to the housing 5 via a fixing zone 4 hatched in FIG. 1 .
  • the first resin used for the housing 5 is, for example, a thermoplastic resin.
  • the sensor chip 2 including the flow rate detection part, being intended to measure the air flow rate is disposed in the sub-passage 12.
  • FIG. 3 is a plan view of the thermal air flow meter that has been sealed by a filling material 6.
  • FIG. 4 is a cross-sectional view taken along line C-C in FIG. 3 .
  • the filling material 6 is applied to a space formed by the sensor assembly 10 and the housing 5 so as to cover the electronic component 3.
  • An epoxy resin for example, is used as the filling material.
  • the thermal air flow meter is applied to flow rate measurement in, for example, a vehicle in which an internal combustion engine is mounted, so that the thermal air flow meter is exposed to an environment containing, for example, exhaust gases, gasoline, and salt water.
  • the covering of the electronic component 3 mounted on the sensor assembly 10 with the filling material 6 prevents the electronic component 3 from being exposed to the above environment, so that variations in characteristics of the electronic component 3 can be prevented and a thermal air flow meter offering even higher accuracy can be provided.
  • FIG. 5 is a cross-sectional view of a thermal air flow meter that is subjected to a change in temperature.
  • a thermal air flow meter that is subjected to a change in temperature.
  • bending deformation as shown in FIG. 5 occurs in the thermal air flow meter and a substrate 1, as caused by a difference in coefficient of linear expansion or in resin contraction between the substrate 1 and the filling material 6. This results in stress (distortion) occurring also in a resistor 7 inside the electronic component 3.
  • FIG. 6 represents calculations, performed through stress analysis, of variations in a flow rate characteristic caused by thermal stress encountered by the resistor 7 in the electronic component 3 with respect to a ratio of Young's modulus of the filling material 6 to Young's modulus of the substrate 1 and a ratio of a coefficient of linear expansion of the filling material 6 to a coefficient of linear expansion of the substrate 1.
  • FIG. 6 plots the relations, as calculated using stress analysis, between the ratio of the Young's modulus of the filling material 6 to the Young's modulus of the substrate 1 and the ratio of the coefficient of linear expansion of the filling material 6 to the coefficient of linear expansion of the substrate 1 when the variations in the flow rate characteristic as caused by the thermal stress encountered by the resistor 7 are ⁇ 1.0%, ⁇ 1.5%, and ⁇ 2.0%.
  • the ratios of the Young's modulus and the coefficient of linear expansion of the substrate 1 to the Young's modulus and the coefficient of linear expansion of the filling material 6 are arranged to fall within a predetermined range indicated by a hatched portion in FIG. 6 .
  • x be the ratio of the coefficient of linear expansion of the substrate 1 to the coefficient of linear expansion of the filling material 6
  • y the ratio of the Young's modulus of the substrate 1 to the Young's modulus of the filling material 6; then, a relation of y ⁇ 0.4x -0.9 holds.
  • FIG. 7 is a plan view of a thermal air flow meter in which a sensor assembly 10 is fixed to a housing 5.
  • FIG. 8 is a bottom view.
  • a configuration of the second embodiment differs from the preceding embodiments in that, as shown in FIGS. 7 and 8 , a plurality of electronic components 13 to 16 are disposed on a substrate. Examples of the electronic components include, but are not limited to, a thermistor, a microprocessor, a pressure sensor, and a humidity sensor.
  • a bonding wire 20 is used to electrically connect the sensor assembly 10 with a connector 21 disposed in the housing.
  • FIG. 9 is a plan view of the thermal air flow meter that has been sealed by a filling material 6. Understandably, the configuration shown in FIG. 9 achieves equivalent effects. Furthermore, protection provided for the bonding wire 20 by the filling material 6 can prevent the bonding wire 20 from being deformed from vibration, so that a highly reliable flow meter can be provided.
  • a third embodiment of the present invention will be described below with reference to FIG. 10 .
  • a configuration of the third embodiment differs from the preceding embodiments in that a cover 8 is disposed on a housing 5 for forming a sub-passage and the cover 8 has a hole formed in at least part thereof.
  • a cover 8 is disposed on a housing 5 for forming a sub-passage and the cover 8 has a hole formed in at least part thereof.
  • a fourth embodiment of the present invention will be described below with reference to FIG. 11 .
  • the fourth embodiment differs from the preceding embodiments in that, as shown in FIG. 11 , the relation between the ratios of the Young's modulus and the coefficient of linear expansion of the substrate 1 included in the thermal air flow meter to the Young's modulus and the coefficient of linear expansion of the filling material 6 included in the thermal air flow meter falls within a range indicated by the hatched portion in FIG. 11 .
  • y be the ratio of the Young's modulus of the filling material 6 to the Young's modulus of the substrate 1; then, a relation of y ⁇ 0.1 holds.
  • the electronic components 3, and 13 to 16 shown in FIGS. 7 and 8 are electrically connected with a substrate 1 using a solder or a bonding wire.
  • the substrate 1 and a connector 21 disposed in a housing are electrically connected with each other using the bonding wire 20.
  • the difference in coefficient of linear expansion between these bonding materials and the filling material 6 is minimized. Having the relation within the range indicated by the hatched portion in FIG. 11 enables variations in the resistance value to be held within ⁇ 1% regardless of the ratio of the coefficient of linear expansion of the substrate 1 to the coefficient of linear expansion of the filling material 6. The difference in the coefficient of linear expansion between the solder or bonding wire and the filling material can thus be minimized and variations in the resistance value can be held within ⁇ 1%, so that a highly reliable flow meter offering high accuracy can be provided.

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  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Measuring Volume Flow (AREA)

Claims (9)

  1. Thermischer Luftdurchflussmesser, der Folgendes umfasst:
    ein Gehäuse (5), das einen Nebendurchlass (12) enthält, durch den ein Teil eines zu messenden Fluids (26) gesaugt wird;
    einen Sensorchip (2), der im Nebendurchlass (12) angeordnet ist, wobei der Sensorchip (2) eine Durchflussmenge des zu messenden Fluids (26) misst;
    ein elektronisches Bauteil (3), das einen Widerstand (7) enthält und das eine Fluiddurchflussmenge, die durch den Sensorchip (2) detektiert wird, zu einem entsprechenden elektrischen Signal umsetzt; und
    ein Substrat (1), an dem der Sensorchip (2) und das elektronische Bauteil (3) angeordnet sind, wobei
    das Substrat (1) eine Oberfläche, an der das elektronische Bauteil (3) angeordnet ist besitzt, die mit einem Füllmaterial (6) abgedeckt ist,
    das Substrat (1) und das Füllmaterial (6) Elastizitätsmodule und Längenausdehnungskoeffizienten besitzen, die in einen vorgegebenen Bereich, der durch ein Verhältnis eines Elastizitätsmoduls des Substrats (1) zum Elastizitätsmodul des Füllmaterials (6) und eines Verhältnisses eines Längenausdehnungskoeffizienten des Substrats (1) zu einem Längenausdehnungskoeffizienten des Füllmaterials (6) bestimmt ist, fallen, und
    der vorgegebene Bereich derart ausgelegt ist, dass Schwankungen eines Widerstandswerts des Widerstands (7) in einen vorgegebenen Bereich charakteristischer Durchflussmengenschwankungen fallen;
    dadurch gekennzeichnet, dass der vorgegebene Bereich charakteristischer Durchflussmengenschwankungen ±1 % ist, und
    dann, wenn Y das Verhältnis des Elastizitätsmoduls des Substrats (1) zum Elastizitätsmodul des Füllmaterials (6) ist und X das Verhältnis des Längenausdehnungskoeffizienten des Substrats (1) zum Längenausdehnungskoeffizienten des Füllmaterials (6) ist, die Beziehung Y < 0,4X-0,9 gilt.
  2. Thermischer Luftdurchflussmesser nach Anspruch 1, wobei mindestens ein Teil des Füllmaterials (6) zum zu messenden Fluid (26) freigelegt ist.
  3. Thermischer Luftdurchflussmesser nach einem der Ansprüche 1 bis 2, wobei
    das Gehäuse (5) einen Verbinder (21) zur externen Ausgabe enthält und
    der Verbinder (21) und das Substrat (1) durch Drahtbonden elektrisch miteinander verbunden sind.
  4. Thermischer Luftdurchflussmesser nach einem der Ansprüche 1 bis 3, wobei das mindestens eine elektronische Bauteil (3) mit dem Substrat (1) durch Drahtbonden oder Löten elektrisch verbunden ist.
  5. Thermischer Luftdurchflussmesser nach Anspruch 4, wobei das Füllmaterial (6) und das Substrat (1) Elastizitätsmodule besitzen, die in einen vorgegebenen Bereich, der durch ein Verhältnis des Elastizitätsmoduls des Füllmaterials (6) zum Elastizitätsmodul des Substrats (1) bestimmt ist, fallen.
  6. Thermischer Luftdurchflussmesser nach Anspruch 1, wobei die Beziehung E1/E2 < 0,1 für den vorgegebenen Bereich, der durch das Verhältnis des Elastizitätsmoduls des Füllmaterials (6) zum Elastizitätsmodul des Substrats (1) bestimmt ist, gilt, wobei E1 den Elastizitätsmodul des Füllmaterials (6) bezeichnet und E2 den Elastizitätsmodul des Substrats (1) bezeichnet.
  7. Thermischer Luftdurchflussmesser nach einem der Ansprüche 1 bis 6, wobei das Füllmaterial (6) ein Epoxidharz ist.
  8. Thermischer Luftdurchflussmesser nach einem der Ansprüche 1 bis 7, wobei das Substrat (1) ein gedrucktes Substrat ist.
  9. Thermischer Luftdurchflussmesser nach einem der Ansprüche 1 bis 8, wobei das Gehäuse (5) aus einem thermoplastischen Harz besteht.
EP15856909.5A 2014-11-06 2015-09-24 Thermischer luftmassenmesser Active EP3217153B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2014225706A JP2016090413A (ja) 2014-11-06 2014-11-06 熱式空気流量計
PCT/JP2015/076833 WO2016072166A1 (ja) 2014-11-06 2015-09-24 熱式空気流量計

Publications (3)

Publication Number Publication Date
EP3217153A1 EP3217153A1 (de) 2017-09-13
EP3217153A4 EP3217153A4 (de) 2018-08-29
EP3217153B1 true EP3217153B1 (de) 2022-03-23

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US (1) US10928232B2 (de)
EP (1) EP3217153B1 (de)
JP (1) JP2016090413A (de)
CN (1) CN107076593A (de)
WO (1) WO2016072166A1 (de)

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JP5492834B2 (ja) 2011-07-26 2014-05-14 日立オートモティブシステムズ株式会社 熱式流量計
JP5870748B2 (ja) 2012-02-22 2016-03-01 株式会社デンソー 流量センサ
CN104364615B (zh) 2012-06-15 2017-04-05 日立汽车系统株式会社 热式流量计
JP2014001976A (ja) 2012-06-15 2014-01-09 Hitachi Automotive Systems Ltd 熱式流量計
JP2014102219A (ja) 2012-11-22 2014-06-05 Denso Corp 流量センサ
JP5904959B2 (ja) 2013-03-08 2016-04-20 日立オートモティブシステムズ株式会社 熱式空気流量計
JP6013983B2 (ja) 2013-06-20 2016-10-25 日立オートモティブシステムズ株式会社 物理量測定装置
JP6043248B2 (ja) 2013-07-24 2016-12-14 日立オートモティブシステムズ株式会社 熱式空気流量計
EP3203195B1 (de) 2014-09-30 2021-12-08 Hitachi Astemo, Ltd. Wärmedurchflussmesser

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JP2016090413A (ja) 2016-05-23
WO2016072166A1 (ja) 2016-05-12
EP3217153A4 (de) 2018-08-29
EP3217153A1 (de) 2017-09-13
CN107076593A (zh) 2017-08-18
US10928232B2 (en) 2021-02-23

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