EP3198148B1 - Système de pompage pour générer un vide et procédé de pompage au moyen de ce système de pompage - Google Patents

Système de pompage pour générer un vide et procédé de pompage au moyen de ce système de pompage Download PDF

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Publication number
EP3198148B1
EP3198148B1 EP14777077.0A EP14777077A EP3198148B1 EP 3198148 B1 EP3198148 B1 EP 3198148B1 EP 14777077 A EP14777077 A EP 14777077A EP 3198148 B1 EP3198148 B1 EP 3198148B1
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EP
European Patent Office
Prior art keywords
pump
vacuum pump
pumping system
auxiliary
main
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Revoked
Application number
EP14777077.0A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP3198148A1 (fr
Inventor
Didier MÜLLER
Jean-Eric Larcher
Théodore ILTCHEV
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ateliers Busch SA
Original Assignee
Ateliers Busch SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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Application filed by Ateliers Busch SA filed Critical Ateliers Busch SA
Priority to PL14777077T priority Critical patent/PL3198148T3/pl
Priority to PT147770770T priority patent/PT3198148T/pt
Publication of EP3198148A1 publication Critical patent/EP3198148A1/fr
Application granted granted Critical
Publication of EP3198148B1 publication Critical patent/EP3198148B1/fr
Revoked legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C11/00—Combinations of two or more machines or pumps, each being of rotary-piston or oscillating-piston type; Pumping installations
    • F04C11/001—Combinations of two or more machines or pumps, each being of rotary-piston or oscillating-piston type; Pumping installations of similar working principle
    • F04C11/003—Combinations of two or more machines or pumps, each being of rotary-piston or oscillating-piston type; Pumping installations of similar working principle having complementary function
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C15/00—Component parts, details or accessories of machines, pumps or pumping installations, not provided for in groups F04C2/00 - F04C14/00
    • F04C15/06—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2/00—Rotary-piston machines or pumps
    • F04C2/08—Rotary-piston machines or pumps of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C2/12—Rotary-piston machines or pumps of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C2/14—Rotary-piston machines or pumps of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C2/16—Rotary-piston machines or pumps of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/02—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/06—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for stopping, starting, idling or no-load operation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running

Definitions

  • the present invention relates to the field of vacuum techniques. More specifically, it relates to a pumping system comprising a dry screw pump, as well as a pumping method by means of this pumping system.
  • the speed of rotation of the pump plays a very important role, by defining the operation of the pump during the various successive phases during the emptying of the vacuum chamber.
  • the electrical power required in the first pumping phases when the suction pressure is between atmospheric pressure and around 100 mbar, that is to say during operation at high mass flow, would be very high if the rotation speed of the pump could not be reduced.
  • the trivial solution is to use a dimmer speed which allows the speed or consequently the power to be reduced or increased according to different criteria such as pressure, maximum current, torque limit, temperature, etc. But during periods of operation at reduced rotational speed there are drops in flow at high pressure, the flow being proportional to the rotational speed.
  • Roots-type “booster” pumps arranged upstream of the main dry pumps.
  • This type of system is bulky, works either with bypass valves presenting reliability problems, or by using means of measurement, control, adjustment or control.
  • these means of control, adjustment or slaving must be actively controlled, which necessarily results in an increase in the number of system components, its complexity and its cost.
  • the patent application JP 2007 100562 A offers a vacuum pumping system that includes a main pump.
  • This main pump is a screw pump, the discharge of which is connected to an exhaust duct provided with a non-return valve.
  • An auxiliary pump is also provided, downstream of the main pump. This auxiliary pump is connected in parallel with the non-return valve.
  • Vacuum pumping systems comprising a main pump and an auxiliary pump connected in parallel with a non-return valve are also known from the documents.
  • the present invention aims to allow obtaining a better vacuum than that (of the order of 0.0001 mbar) that a single screw type dry vacuum pump can generate in a vacuum enclosure.
  • the present invention also aims to allow obtaining a drain rate which is higher at low pressure than that which can be obtained using a single screw type dry vacuum pump during a pumping to create a vacuum in a vacuum enclosure.
  • the present invention also aims to allow a reduction in the electrical energy necessary for emptying a vacuum enclosure and maintaining the vacuum, as well as a drop in the temperature of the outlet gases.
  • a pumping system to generate a vacuum, comprising a main vacuum pump which is a dry screw pump having a gas inlet suction connected to a vacuum enclosure and a gas outlet discharge leading into a gas exhaust duct to a gas exhaust outlet outside the pumping system.
  • the pumping system also comprises a non-return valve positioned between the gas outlet discharge and the gas exhaust outlet, as well as an auxiliary vacuum pump which has its motor and which is connected in parallel with the non-return valve. -return.
  • the auxiliary vacuum pump is arranged to start at the same time as the main vacuum pump and to pump all the time that the main vacuum pump pumps the gases contained in the vacuum enclosure and all the time that the main vacuum pump maintains a defined pressure in the vacuum enclosure.
  • the auxiliary vacuum pump can be of the screw dry, lug, multi-stage Roots, diaphragm, paddle dryer, and lubricated paddle type.
  • the auxiliary pump is operated continuously all the time that the main vacuum pump of the screw dry type empties the vacuum enclosure, but also all the time that the main vacuum pump dries at screw maintains a defined pressure (eg final vacuum) in the enclosure by evacuating the gases by its discharge.
  • a defined pressure eg final vacuum
  • the coupling of the main vacuum pump of the dry screw type and of the auxiliary pump can be done without requiring measurements or specific devices (e.g. pressure, temperature sensors , current, etc.), no servos, no data management and no calculation. Consequently, the pumping system suitable for implementing the pumping method according to the present invention may comprise only a minimum number of components, be very simple and cost considerably less, compared with existing systems.
  • the main vacuum pump of the screw dry type can operate at a single constant speed, that of the electrical network, or turn at variable speeds according to its own operating mode. Consequently, the complexity and the cost of the pumping system suitable for implementing the pumping method according to the present invention can be further reduced.
  • the auxiliary pump integrated in the pumping system can always operate according to the pumping method according to the invention without being damaged. Its dimensioning is conditioned by a minimum energy consumption for the operation of the device. Its nominal flow rate is chosen according to the volume of the evacuation duct between the main screw dry vacuum pump and the non-return valve. This flow rate can advantageously be from 1/500 to 1/20 of the nominal flow rate of the main screw dry vacuum pump, but can also be lower or higher than these values, in particular from 1/500 to 1/10 or from 1/500 to 1 / 5u nominal flow rate of the main vacuum pump.
  • the non-return valve placed in the duct downstream of the main screw dry vacuum pump, can be a standard element available commercially. It is sized according to the nominal flow rate of the main screw dry vacuum pump. In particular, it is intended that the non-return valve closes when the suction pressure of the main screw dry vacuum pump is between 500 mbar absolute and the final vacuum (eg 100 mbar).
  • the auxiliary pump can be of high chemical resistance to the substances and gases commonly used in the semiconductor industry.
  • the auxiliary pump is preferably small.
  • the auxiliary vacuum pump always pumps in the volume between the gas outlet discharge from the main vacuum pump and the non-return valve.
  • the sizing of the auxiliary vacuum pump aims for a minimum energy consumption of its motor. Its nominal flow rate is chosen according to the flow rate of the main screw-dry vacuum pump, but also taking into account the volume that the gas evacuation pipe delimits between the main vacuum pump and the non-return valve. This flow rate can be from 1/500 to 1/20 of the nominal flow rate of the main screw dry vacuum pump, but can also be lower or higher than these values.
  • the pressure is high, for example equal to atmospheric pressure. Due to the compression in the main screw dry vacuum pump, the pressure of the gases discharged at its outlet is higher than atmospheric pressure (if the gases at the outlet of the main pump are discharged directly into the atmosphere) or higher than the pressure at the inlet of another device connected downstream. This causes the non-return valve to open.
  • the figure 1 shows a pumping system SP for generating a vacuum, which is suitable for implementing a pumping method according to an embodiment of the present invention.
  • This pumping system SP comprises an enclosure 1, which is connected to the suction 2 of a main vacuum pump constituted by a dry screw pump 3.
  • the gas outlet discharge from the main screw dry vacuum pump 3 is connected to an exhaust duct 5.
  • a discharge check valve 6 is placed in the exhaust duct 5, which after this non-return valve continues in the gas outlet duct 8.
  • the non-return valve 6 when closed, allows the formation of a volume 4, comprised between the gas outlet discharge from the main vacuum pump 3 and itself.
  • the pumping system SP also includes the auxiliary vacuum pump 7, connected in parallel to the non-return valve 6.
  • the suction of the auxiliary vacuum pump is connected to the volume 4 of the evacuation duct 5 and its discharge is connected to the conduit 8.
  • the auxiliary vacuum pump 7 is also started.
  • the main screw-dry vacuum pump 3 draws the gases into the enclosure 1 through the conduit 2 connected to its inlet and compresses them to then discharge them on its outlet into the exhaust conduit 5 by the non-return valve 6.
  • the closing pressure of the non-return valve 6 is reached, it closes.
  • the pumping of the auxiliary vacuum pump 7 gradually lowers the pressure in the volume 4 to the value of its limit pressure.
  • the power consumed by the main screw dryer vacuum pump 3 gradually decreases. This happens in a short time, for example for a certain cycle in 5-10 seconds.
  • the auxiliary vacuum pump 7 is itself a dry screw pump.
  • the main pump and the auxiliary pump can be of the same type, which simplifies operation and handling.
  • this combination of pumps allows the SP pumping system to be used for all applications where a single screw dryer pump can be used.
  • the auxiliary vacuum pump 7 is a lug pump, a multi-stage Roots pump, a membrane pump, a dry vane pump or a lubricated vane pump. All these combinations of pumps have advantages linked to the particular properties of each type of individual pump.
  • the figure 2 shows an SPP pumping system suitable for implementing a pumping process not in accordance with the present invention.
  • the system shown in figure 2 represents the SPP piloted pumping system, further comprising suitable sensors 11, 12, 13 which control either the motor current (sensor 11) of the main dry vacuum main screw pump 3, or the pressure (sensor 13) of the gas in the volume of the outlet duct of the main screw dry vacuum pump, limited by the non-return valve 6, i.e. the temperature (sensor 12) of the gases in the volume of the duct at the outlet of the dry main vacuum pump screw, limited by the non-return valve 6, or a combination of these parameters.
  • suitable sensors 11, 12, 13 which control either the motor current (sensor 11) of the main dry vacuum main screw pump 3, or the pressure (sensor 13) of the gas in the volume of the outlet duct of the main screw dry vacuum pump, limited by the non-return valve 6, i.e. the temperature (sensor 12) of the gases in the volume of the duct at the outlet of the dry main vacuum pump screw, limited by the non-return valve 6, or a combination of these parameters.
  • the main screw dry vacuum pump 3 begins to pump the gases from the vacuum enclosure 1, parameters such as the current of its motor, the temperature and the pressure of the gases in the volume of the outlet duct 4 begin to change and reach threshold values detected by the sensors. After a delay, this causes the auxiliary vacuum pump to start. When these parameters return to the initial ranges (outside the setpoints) with a delay, the auxiliary vacuum pump is stopped.
  • the auxiliary vacuum pump may be of the screw dry type, with pins, multi-stage Roots, with membrane, with paddle dryer or with lubricated paddles, as in the embodiment of the invention of the figure 1 .
EP14777077.0A 2014-09-26 2014-09-26 Système de pompage pour générer un vide et procédé de pompage au moyen de ce système de pompage Revoked EP3198148B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
PL14777077T PL3198148T3 (pl) 2014-09-26 2014-09-26 Układ pompowania do wytwarzania próżni oraz sposób pompowania za pomocą tego układu pompowania
PT147770770T PT3198148T (pt) 2014-09-26 2014-09-26 Sistema de bombagem para gerar um vácuo e processo de bombagem por meio deste sistema de bombagem

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/EP2014/070691 WO2016045753A1 (fr) 2014-09-26 2014-09-26 Système de pompage pour générer un vide et procédé de pompage au moyen de ce système de pompage

Publications (2)

Publication Number Publication Date
EP3198148A1 EP3198148A1 (fr) 2017-08-02
EP3198148B1 true EP3198148B1 (fr) 2020-02-26

Family

ID=51627293

Family Applications (1)

Application Number Title Priority Date Filing Date
EP14777077.0A Revoked EP3198148B1 (fr) 2014-09-26 2014-09-26 Système de pompage pour générer un vide et procédé de pompage au moyen de ce système de pompage

Country Status (15)

Country Link
US (1) US20170298935A1 (da)
EP (1) EP3198148B1 (da)
JP (1) JP2017531125A (da)
KR (2) KR20170063839A (da)
CN (1) CN107002680A (da)
AU (1) AU2014406724B2 (da)
BR (1) BR112017005927B1 (da)
CA (1) CA2961977A1 (da)
DK (1) DK3198148T3 (da)
ES (1) ES2780873T3 (da)
PL (1) PL3198148T3 (da)
PT (1) PT3198148T (da)
RU (1) RU2670640C9 (da)
TW (1) TWI725943B (da)
WO (1) WO2016045753A1 (da)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT201800021148A1 (it) * 2018-12-27 2020-06-27 D V P Vacuum Tech S P A Pompa ausiliaria volumetrica per la generazione del vuoto.
BE1027005B9 (nl) 2019-01-30 2020-10-19 Atlas Copco Airpower Nv Werkwijze voor de sturing van een compressor naar een onbelaste toestand
FR3094762B1 (fr) 2019-04-05 2021-04-09 Pfeiffer Vacuum Pompe à vide de type sèche et installation de pompage
GB2592573A (en) * 2019-12-19 2021-09-08 Leybold France S A S Lubricant-sealed vacuum pump, lubricant filter and method.

Citations (6)

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Publication number Priority date Publication date Assignee Title
EP0401741A1 (fr) * 1989-06-05 1990-12-12 Alcatel Cit Pompe primaire sèche à deux étages
US20030068233A1 (en) 2001-10-09 2003-04-10 Applied Materials, Inc. Device and method for reducing vacuum pump energy consumption
JP2003129957A (ja) 2001-10-26 2003-05-08 Ulvac Japan Ltd 真空排気方法および真空排気装置
JP2003139055A (ja) 2001-10-31 2003-05-14 Ulvac Japan Ltd 真空排気装置
JP2003155988A (ja) 2001-09-06 2003-05-30 Ulvac Japan Ltd ドライ真空ポンプおよびドライ真空ポンプの省エネ方法
US20040173312A1 (en) 2001-09-06 2004-09-09 Kouji Shibayama Vacuum exhaust apparatus and drive method of vacuum apparatus

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DE3842886A1 (de) * 1987-12-21 1989-07-06 Rietschle Masch App Vakuumpumpstand
DE8816875U1 (da) * 1987-12-21 1991-04-11 Werner Rietschle Maschinen- Und Apparatebau Gmbh, 7860 Schopfheim, De
JP3723987B2 (ja) * 1992-09-03 2005-12-07 松下電器産業株式会社 真空排気装置及び方法
FR2822200B1 (fr) * 2001-03-19 2003-09-26 Cit Alcatel Systeme de pompage pour gaz a faible conductivite thermique
DE10131516B4 (de) * 2001-07-02 2004-05-06 Boehringer Ingelheim Pharma Gmbh & Co. Kg Steuereinheit zur Flussregulierung
JP4745779B2 (ja) * 2005-10-03 2011-08-10 神港精機株式会社 真空装置
JP5438279B2 (ja) * 2008-03-24 2014-03-12 アネスト岩田株式会社 多段真空ポンプ及びその運転方法
TWI467092B (zh) * 2008-09-10 2015-01-01 Ulvac Inc 真空排氣裝置
FR2952683B1 (fr) * 2009-11-18 2011-11-04 Alcatel Lucent Procede et dispositif de pompage a consommation d'energie reduite
GB201007814D0 (en) * 2010-05-11 2010-06-23 Edwards Ltd Vacuum pumping system
FR2993614B1 (fr) * 2012-07-19 2018-06-15 Pfeiffer Vacuum Procede et dispositif de pompage d'une chambre de procedes
GB2509182A (en) * 2012-12-21 2014-06-25 Xerex Ab Vacuum ejector with multi-nozzle drive stage and booster

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0401741A1 (fr) * 1989-06-05 1990-12-12 Alcatel Cit Pompe primaire sèche à deux étages
JP2003155988A (ja) 2001-09-06 2003-05-30 Ulvac Japan Ltd ドライ真空ポンプおよびドライ真空ポンプの省エネ方法
US20040173312A1 (en) 2001-09-06 2004-09-09 Kouji Shibayama Vacuum exhaust apparatus and drive method of vacuum apparatus
US20030068233A1 (en) 2001-10-09 2003-04-10 Applied Materials, Inc. Device and method for reducing vacuum pump energy consumption
JP2003129957A (ja) 2001-10-26 2003-05-08 Ulvac Japan Ltd 真空排気方法および真空排気装置
JP2003139055A (ja) 2001-10-31 2003-05-14 Ulvac Japan Ltd 真空排気装置

Also Published As

Publication number Publication date
AU2014406724B2 (en) 2019-09-19
RU2670640C1 (ru) 2018-10-24
US20170298935A1 (en) 2017-10-19
AU2014406724A1 (en) 2017-04-13
ES2780873T3 (es) 2020-08-27
PT3198148T (pt) 2020-04-02
CA2961977A1 (fr) 2016-03-31
KR20170063839A (ko) 2017-06-08
DK3198148T3 (da) 2020-04-06
WO2016045753A1 (fr) 2016-03-31
JP2017531125A (ja) 2017-10-19
RU2670640C9 (ru) 2018-12-04
TW201623801A (zh) 2016-07-01
TWI725943B (zh) 2021-05-01
BR112017005927A2 (pt) 2017-12-19
BR112017005927B1 (pt) 2022-07-12
KR20210102478A (ko) 2021-08-19
PL3198148T3 (pl) 2020-08-10
CN107002680A (zh) 2017-08-01
EP3198148A1 (fr) 2017-08-02

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