JP2017531125A - 真空を生成するための圧送システムおよびこの圧送システムによる圧送方法 - Google Patents
真空を生成するための圧送システムおよびこの圧送システムによる圧送方法 Download PDFInfo
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- 238000005086 pumping Methods 0.000 title claims abstract description 65
- 238000000034 method Methods 0.000 title claims abstract description 23
- 239000007789 gas Substances 0.000 claims abstract description 50
- 210000000078 claw Anatomy 0.000 claims description 5
- 239000000126 substance Substances 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 2
- 230000001050 lubricating effect Effects 0.000 claims 2
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C11/00—Combinations of two or more machines or pumps, each being of rotary-piston or oscillating-piston type; Pumping installations
- F04C11/001—Combinations of two or more machines or pumps, each being of rotary-piston or oscillating-piston type; Pumping installations of similar working principle
- F04C11/003—Combinations of two or more machines or pumps, each being of rotary-piston or oscillating-piston type; Pumping installations of similar working principle having complementary function
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C15/00—Component parts, details or accessories of machines, pumps or pumping installations, not provided for in groups F04C2/00 - F04C14/00
- F04C15/06—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
- F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2/00—Rotary-piston machines or pumps
- F04C2/08—Rotary-piston machines or pumps of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C2/12—Rotary-piston machines or pumps of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C2/14—Rotary-piston machines or pumps of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
- F04C2/16—Rotary-piston machines or pumps of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
- F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
- F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
- F04C28/02—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2220/00—Application
- F04C2220/10—Vacuum
- F04C2220/12—Dry running
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
- F04C28/06—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for stopping, starting, idling or no-load operation
Abstract
Description
本発明は、低圧において、真空チャンバ内で真空を達成する圧送中にスクリュー形の単一の乾式真空ポンプの助けにより得ることのできる排出または真空排気速度より大きな排出または真空排気速度を得ることをも目的とする。
本発明は、同様に、真空チャンバを真空排気し、真空を維持するために必要な電気エネルギーの低減を可能にするとともに流出ガスの温度低下を達成することをも目的とする。
補助ポンプは、好ましくは小形である。
好ましくは、本発明の圧送システムを使用する圧送方法によれば、補助真空ポンプは、主真空ポンプのガスディスチャージ出口と逆止め弁との間のボリュームにおいて常時圧送する。
Claims (18)
- 真空チャンバ(1)に連結されたガス吸い込み入口(2)と、前記圧送システムの外側のガスエグゾースト出口(8)の方向においてガス真空排気導管(5)内に至るガスディスチャージ出口(4)とを有する乾式スクリューポンプ(3)である主真空ポンプを備えることを特徴とする真空を生成するための圧送システム(SP)であって、
前記ガスディスチャージ出口(4)と前記ガスエグゾースト出口(8)との間に位置する逆止め弁(6)と、
前記逆止め弁に並列に連結された補助真空ポンプ(7)と、
を備えることをさらに特徴とする圧送システム。 - 請求項1記載の圧送システムにおいて、
前記補助真空ポンプ(7)は、乾式スクリューポンプ、クローポンプ、多段ルーツポンプ、ダイヤフラムポンプ、乾式回転羽根ポンプおよび潤滑回転羽根ポンプの中から選択されることを特徴とする圧送システム。 - 請求項1または2記載の圧送システムにおいて、
前記補助真空ポンプ(7)は、乾式スクリューポンプであることを特徴とする圧送システム。 - 請求項1または2記載の圧送システムにおいて、
前記補助真空ポンプ(7)は、クローポンプであることを特徴とする圧送システム。 - 請求項1または2記載の圧送システムにおいて、
前記補助真空ポンプ(7)は、多段ルーツポンプであることを特徴とする圧送システム。 - 請求項1または2記載の圧送システムにおいて、
前記補助真空ポンプ(7)は、ダイヤフラムポンプであることを特徴とする圧送システム。 - 請求項1または2記載の圧送システムにおいて、
前記補助真空ポンプ(7)は、乾式回転羽根ポンプであることを特徴とする圧送システム。 - 請求項1または2記載の圧送システムにおいて、
前記補助真空ポンプ(7)は、潤滑回転羽根ポンプであることを特徴とする圧送システム。 - 請求項1〜8のいずれか記載の圧送システムにおいて、
前記主真空ポンプ(3)が前記真空チャンバ(1)に含まれるガスを圧送している間じゅうおよび/または前記主真空ポンプ(3)が前記真空チャンバ(1)内の所定の圧力を維持している間じゅう、前記補助真空ポンプ(7)が圧送し得るように設計されることを特徴とする圧送システム。 - 請求項1〜9のいずれか記載の圧送システムにおいて、
前記補助真空ポンプ(7)は、前記逆止め弁(6)の下流側で前記ガス真空排気導管(5)に連結されるディスチャージ端部を含むことを特徴とする圧送システム。 - 請求項1〜10のいずれか記載の圧送システムにおいて、
前記補助真空ポンプ(7)の公称流量は、前記ガス真空排気導管(5)が前記主真空ポンプ(3)と前記逆止め弁(6)との間に画定する容積の関数として選択されることを特徴とする圧送システム。 - 請求項1〜11のいずれか記載の圧送システムにおいて、
前記補助真空ポンプ(7)の公称流量は、前記主真空ポンプ(3)の公称流量の1/500〜1/20であることを特徴とする圧送システム。 - 請求項1〜12のいずれか記載の圧送システムにおいて、
前記補助真空ポンプ(7)は、単段式または多段式であることを特徴とする圧送システム。 - 請求項1〜13のいずれか記載の圧送システムにおいて、
前記主真空ポンプ(3)の吸い込み端部における圧力が500mbar絶対圧より低いときに、前記逆止め弁(6)を閉じるように構成されることを特徴とする圧送システム。 - 請求項1〜14のいずれか記載の圧送システムにおいて、
前記補助真空ポンプ(7)は、半導体工業で一般的に使われる物質およびガスに対して大きな耐薬品性を有する材料から作られることを特徴とする圧送システム。 - 請求項1〜15のいずれか記載の圧送システム(SP)による圧送方法であって、
前記真空チャンバ(1)に含まれるガスを圧送してこれらのガスをそのガスディスチャージ出口(4)を通して排出するために前記主真空ポンプ(3)を始動するステップと、
前記補助真空ポンプ(7)を同時に始動するステップと、
前記主真空ポンプ(3)が前記真空チャンバ(1)に含まれるガスを圧送している間じゅうおよび/または前記主真空ポンプ(3)が前記真空チャンバ(1)内の所定の圧力を維持している間じゅう、前記補助真空ポンプ(7)が圧送し続けるステップと、
を含むことを特徴とする圧送方法。 - 請求項16記載の圧送方法において、
前記補助真空ポンプ(7)は、前記主真空ポンプ(3)の公称流量の1/500〜1/20のオーダの流量で圧送することを特徴とする圧送方法。 - 請求項16または17項記載の圧送方法において、
前記主真空ポンプ(3)の吸い込み端部における圧力が500mbar絶対圧より低いときに、前記逆止め弁(6)を閉じることを特徴とする圧送方法。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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PCT/EP2014/070691 WO2016045753A1 (fr) | 2014-09-26 | 2014-09-26 | Système de pompage pour générer un vide et procédé de pompage au moyen de ce système de pompage |
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JP2017531125A true JP2017531125A (ja) | 2017-10-19 |
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JP2017516050A Pending JP2017531125A (ja) | 2014-09-26 | 2014-09-26 | 真空を生成するための圧送システムおよびこの圧送システムによる圧送方法 |
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US (1) | US20170298935A1 (ja) |
EP (1) | EP3198148B1 (ja) |
JP (1) | JP2017531125A (ja) |
KR (2) | KR20170063839A (ja) |
CN (1) | CN107002680A (ja) |
AU (1) | AU2014406724B2 (ja) |
BR (1) | BR112017005927B1 (ja) |
CA (1) | CA2961977A1 (ja) |
DK (1) | DK3198148T3 (ja) |
ES (1) | ES2780873T3 (ja) |
PL (1) | PL3198148T3 (ja) |
PT (1) | PT3198148T (ja) |
RU (1) | RU2670640C9 (ja) |
TW (1) | TWI725943B (ja) |
WO (1) | WO2016045753A1 (ja) |
Cited By (1)
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JP7396561B2 (ja) | 2019-04-05 | 2023-12-12 | ファイファー バキユーム | ドライ真空ポンプおよびポンプ設備 |
Families Citing this family (3)
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IT201800021148A1 (it) * | 2018-12-27 | 2020-06-27 | D V P Vacuum Tech S P A | Pompa ausiliaria volumetrica per la generazione del vuoto. |
BE1027005B9 (nl) | 2019-01-30 | 2020-10-19 | Atlas Copco Airpower Nv | Werkwijze voor de sturing van een compressor naar een onbelaste toestand |
GB2592573A (en) * | 2019-12-19 | 2021-09-08 | Leybold France S A S | Lubricant-sealed vacuum pump, lubricant filter and method. |
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2014
- 2014-09-26 WO PCT/EP2014/070691 patent/WO2016045753A1/fr active Application Filing
- 2014-09-26 CA CA2961977A patent/CA2961977A1/fr active Pending
- 2014-09-26 PL PL14777077T patent/PL3198148T3/pl unknown
- 2014-09-26 AU AU2014406724A patent/AU2014406724B2/en active Active
- 2014-09-26 KR KR1020177011372A patent/KR20170063839A/ko not_active IP Right Cessation
- 2014-09-26 EP EP14777077.0A patent/EP3198148B1/fr not_active Revoked
- 2014-09-26 KR KR1020217025124A patent/KR20210102478A/ko not_active Application Discontinuation
- 2014-09-26 JP JP2017516050A patent/JP2017531125A/ja active Pending
- 2014-09-26 ES ES14777077T patent/ES2780873T3/es active Active
- 2014-09-26 PT PT147770770T patent/PT3198148T/pt unknown
- 2014-09-26 RU RU2017114347A patent/RU2670640C9/ru active
- 2014-09-26 BR BR112017005927-4A patent/BR112017005927B1/pt active IP Right Grant
- 2014-09-26 US US15/512,883 patent/US20170298935A1/en not_active Abandoned
- 2014-09-26 DK DK14777077.0T patent/DK3198148T3/da active
- 2014-09-26 CN CN201480082186.8A patent/CN107002680A/zh active Pending
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2015
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JPH06129384A (ja) * | 1992-09-03 | 1994-05-10 | Matsushita Electric Ind Co Ltd | 真空排気装置 |
JP2002339864A (ja) * | 2001-03-19 | 2002-11-27 | Alcatel | 低熱伝導率ガスをポンピングするためのシステム |
JP2003155988A (ja) * | 2001-09-06 | 2003-05-30 | Ulvac Japan Ltd | ドライ真空ポンプおよびドライ真空ポンプの省エネ方法 |
JP2003139055A (ja) * | 2001-10-31 | 2003-05-14 | Ulvac Japan Ltd | 真空排気装置 |
JP2007100562A (ja) * | 2005-10-03 | 2007-04-19 | Shinko Seiki Co Ltd | 真空装置 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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JP7396561B2 (ja) | 2019-04-05 | 2023-12-12 | ファイファー バキユーム | ドライ真空ポンプおよびポンプ設備 |
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RU2670640C1 (ru) | 2018-10-24 |
AU2014406724A1 (en) | 2017-04-13 |
TW201623801A (zh) | 2016-07-01 |
RU2670640C9 (ru) | 2018-12-04 |
CA2961977A1 (fr) | 2016-03-31 |
WO2016045753A1 (fr) | 2016-03-31 |
EP3198148A1 (fr) | 2017-08-02 |
KR20210102478A (ko) | 2021-08-19 |
CN107002680A (zh) | 2017-08-01 |
PL3198148T3 (pl) | 2020-08-10 |
EP3198148B1 (fr) | 2020-02-26 |
TWI725943B (zh) | 2021-05-01 |
US20170298935A1 (en) | 2017-10-19 |
KR20170063839A (ko) | 2017-06-08 |
DK3198148T3 (da) | 2020-04-06 |
AU2014406724B2 (en) | 2019-09-19 |
BR112017005927A2 (pt) | 2017-12-19 |
BR112017005927B1 (pt) | 2022-07-12 |
ES2780873T3 (es) | 2020-08-27 |
PT3198148T (pt) | 2020-04-02 |
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