RU2670640C9 - Насосная система для создания вакуума и способ откачивания с использованием данной насосной системы - Google Patents

Насосная система для создания вакуума и способ откачивания с использованием данной насосной системы Download PDF

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Publication number
RU2670640C9
RU2670640C9 RU2017114347A RU2017114347A RU2670640C9 RU 2670640 C9 RU2670640 C9 RU 2670640C9 RU 2017114347 A RU2017114347 A RU 2017114347A RU 2017114347 A RU2017114347 A RU 2017114347A RU 2670640 C9 RU2670640 C9 RU 2670640C9
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Russia
Prior art keywords
pump
vacuum
gas
vacuum pump
auxiliary
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RU2017114347A
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English (en)
Russian (ru)
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RU2670640C1 (ru
Inventor
Дидье МЮЛЛЕР
Жан-Эрик ЛЯРШЕ
Теодор ИЛЬЧЕВ
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Ателье Буш Са
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Application filed by Ателье Буш Са filed Critical Ателье Буш Са
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C11/00—Combinations of two or more machines or pumps, each being of rotary-piston or oscillating-piston type; Pumping installations
    • F04C11/001—Combinations of two or more machines or pumps, each being of rotary-piston or oscillating-piston type; Pumping installations of similar working principle
    • F04C11/003—Combinations of two or more machines or pumps, each being of rotary-piston or oscillating-piston type; Pumping installations of similar working principle having complementary function
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C15/00—Component parts, details or accessories of machines, pumps or pumping installations, not provided for in groups F04C2/00 - F04C14/00
    • F04C15/06—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2/00—Rotary-piston machines or pumps
    • F04C2/08—Rotary-piston machines or pumps of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C2/12—Rotary-piston machines or pumps of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C2/14—Rotary-piston machines or pumps of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C2/16—Rotary-piston machines or pumps of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/02—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/06—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for stopping, starting, idling or no-load operation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Reciprocating Pumps (AREA)
RU2017114347A 2014-09-26 2014-09-26 Насосная система для создания вакуума и способ откачивания с использованием данной насосной системы RU2670640C9 (ru)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/EP2014/070691 WO2016045753A1 (fr) 2014-09-26 2014-09-26 Système de pompage pour générer un vide et procédé de pompage au moyen de ce système de pompage

Publications (2)

Publication Number Publication Date
RU2670640C1 RU2670640C1 (ru) 2018-10-24
RU2670640C9 true RU2670640C9 (ru) 2018-12-04

Family

ID=51627293

Family Applications (1)

Application Number Title Priority Date Filing Date
RU2017114347A RU2670640C9 (ru) 2014-09-26 2014-09-26 Насосная система для создания вакуума и способ откачивания с использованием данной насосной системы

Country Status (15)

Country Link
US (1) US20170298935A1 (ja)
EP (1) EP3198148B1 (ja)
JP (1) JP2017531125A (ja)
KR (2) KR20210102478A (ja)
CN (1) CN107002680A (ja)
AU (1) AU2014406724B2 (ja)
BR (1) BR112017005927B1 (ja)
CA (1) CA2961977A1 (ja)
DK (1) DK3198148T3 (ja)
ES (1) ES2780873T3 (ja)
PL (1) PL3198148T3 (ja)
PT (1) PT3198148T (ja)
RU (1) RU2670640C9 (ja)
TW (1) TWI725943B (ja)
WO (1) WO2016045753A1 (ja)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT201800021148A1 (it) * 2018-12-27 2020-06-27 D V P Vacuum Tech S P A Pompa ausiliaria volumetrica per la generazione del vuoto.
BE1027005B9 (nl) 2019-01-30 2020-10-19 Atlas Copco Airpower Nv Werkwijze voor de sturing van een compressor naar een onbelaste toestand
FR3094762B1 (fr) * 2019-04-05 2021-04-09 Pfeiffer Vacuum Pompe à vide de type sèche et installation de pompage
GB2592573A (en) * 2019-12-19 2021-09-08 Leybold France S A S Lubricant-sealed vacuum pump, lubricant filter and method.

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU203136A1 (ru) * Б. Л. Гринпресс , Ю. И. Диментов Винтовой компрессор
DE3842886A1 (de) * 1987-12-21 1989-07-06 Rietschle Masch App Vakuumpumpstand
DE8816875U1 (de) * 1987-12-21 1991-04-11 Werner Rietschle Maschinen- Und Apparatebau Gmbh, 7860 Schopfheim Vakuumpumpstand
EP1243795A1 (fr) * 2001-03-19 2002-09-25 Alcatel Pompe à vide à deux étages
US20030068233A1 (en) * 2001-10-09 2003-04-10 Applied Materials, Inc. Device and method for reducing vacuum pump energy consumption
JP2007100562A (ja) * 2005-10-03 2007-04-19 Shinko Seiki Co Ltd 真空装置
WO2014012896A2 (fr) * 2012-07-19 2014-01-23 Adixen Vacuum Products Procede et dispositif de pompage d'une chambre de procedes

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2647853A1 (fr) * 1989-06-05 1990-12-07 Cit Alcatel Pompe primaire seche a deux etages
JP3723987B2 (ja) * 1992-09-03 2005-12-07 松下電器産業株式会社 真空排気装置及び方法
DE10131516B4 (de) * 2001-07-02 2004-05-06 Boehringer Ingelheim Pharma Gmbh & Co. Kg Steuereinheit zur Flussregulierung
WO2003023229A1 (fr) 2001-09-06 2003-03-20 Ulvac, Inc. Systeme de pompe a vide et procede de fonctionnement d'un systeme de pompe a vide
JP3992176B2 (ja) 2001-10-26 2007-10-17 株式会社アルバック 真空排気方法および真空排気装置
JP4045362B2 (ja) * 2001-09-06 2008-02-13 株式会社アルバック 多段式容積移送型ドライ真空ポンプ
JP4365059B2 (ja) * 2001-10-31 2009-11-18 株式会社アルバック 真空排気装置の運転方法
JP5438279B2 (ja) * 2008-03-24 2014-03-12 アネスト岩田株式会社 多段真空ポンプ及びその運転方法
TWI467092B (zh) * 2008-09-10 2015-01-01 Ulvac Inc 真空排氣裝置
FR2952683B1 (fr) * 2009-11-18 2011-11-04 Alcatel Lucent Procede et dispositif de pompage a consommation d'energie reduite
GB201007814D0 (en) * 2010-05-11 2010-06-23 Edwards Ltd Vacuum pumping system
GB2509182A (en) * 2012-12-21 2014-06-25 Xerex Ab Vacuum ejector with multi-nozzle drive stage and booster

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU203136A1 (ru) * Б. Л. Гринпресс , Ю. И. Диментов Винтовой компрессор
DE3842886A1 (de) * 1987-12-21 1989-07-06 Rietschle Masch App Vakuumpumpstand
DE8816875U1 (de) * 1987-12-21 1991-04-11 Werner Rietschle Maschinen- Und Apparatebau Gmbh, 7860 Schopfheim Vakuumpumpstand
EP1243795A1 (fr) * 2001-03-19 2002-09-25 Alcatel Pompe à vide à deux étages
US20030068233A1 (en) * 2001-10-09 2003-04-10 Applied Materials, Inc. Device and method for reducing vacuum pump energy consumption
JP2007100562A (ja) * 2005-10-03 2007-04-19 Shinko Seiki Co Ltd 真空装置
WO2014012896A2 (fr) * 2012-07-19 2014-01-23 Adixen Vacuum Products Procede et dispositif de pompage d'une chambre de procedes

Also Published As

Publication number Publication date
AU2014406724A1 (en) 2017-04-13
EP3198148B1 (fr) 2020-02-26
KR20210102478A (ko) 2021-08-19
PL3198148T3 (pl) 2020-08-10
BR112017005927A2 (pt) 2017-12-19
AU2014406724B2 (en) 2019-09-19
DK3198148T3 (da) 2020-04-06
BR112017005927B1 (pt) 2022-07-12
CN107002680A (zh) 2017-08-01
PT3198148T (pt) 2020-04-02
JP2017531125A (ja) 2017-10-19
ES2780873T3 (es) 2020-08-27
TWI725943B (zh) 2021-05-01
US20170298935A1 (en) 2017-10-19
EP3198148A1 (fr) 2017-08-02
TW201623801A (zh) 2016-07-01
RU2670640C1 (ru) 2018-10-24
WO2016045753A1 (fr) 2016-03-31
CA2961977A1 (fr) 2016-03-31
KR20170063839A (ko) 2017-06-08

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