EP3146563A1 - Cellule de commutation - Google Patents

Cellule de commutation

Info

Publication number
EP3146563A1
EP3146563A1 EP15718847.5A EP15718847A EP3146563A1 EP 3146563 A1 EP3146563 A1 EP 3146563A1 EP 15718847 A EP15718847 A EP 15718847A EP 3146563 A1 EP3146563 A1 EP 3146563A1
Authority
EP
European Patent Office
Prior art keywords
commutation cell
semiconductor switch
controllable semiconductor
circuit carrier
circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP15718847.5A
Other languages
German (de)
English (en)
Inventor
Walter Daves
Knut Alexander KASPER
Silvia DUERNSTEINER
Martin Rittner
Michael Guenther
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of EP3146563A1 publication Critical patent/EP3146563A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
    • H01L25/16—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof the devices being of types provided for in two or more different main groups of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. forming hybrid circuits
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
    • H01L23/49833—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers the chip support structure consisting of a plurality of insulating substrates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
    • H01L23/49838—Geometry or layout
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L24/31—Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L24/33—Structure, shape, material or disposition of the layer connectors after the connecting process of a plurality of layer connectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L24/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03K—PULSE TECHNIQUE
    • H03K17/00—Electronic switching or gating, i.e. not by contact-making and –breaking
    • H03K17/51—Electronic switching or gating, i.e. not by contact-making and –breaking characterised by the components used
    • H03K17/56—Electronic switching or gating, i.e. not by contact-making and –breaking characterised by the components used by the use, as active elements, of semiconductor devices
    • H03K17/567—Circuits characterised by the use of more than one type of semiconductor device, e.g. BIMOS, composite devices such as IGBT
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/28—Structure, shape, material or disposition of the layer connectors prior to the connecting process
    • H01L2224/29—Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
    • H01L2224/29001—Core members of the layer connector
    • H01L2224/29099—Material
    • H01L2224/291—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
    • H01L2224/29138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
    • H01L2224/29139—Silver [Ag] as principal constituent
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • H01L2224/321—Disposition
    • H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/32225—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L2224/33—Structure, shape, material or disposition of the layer connectors after the connecting process of a plurality of layer connectors
    • H01L2224/331—Disposition
    • H01L2224/3318—Disposition being disposed on at least two different sides of the body, e.g. dual array
    • H01L2224/33181—On opposite sides of the body
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • H01L2224/838—Bonding techniques
    • H01L2224/8384—Sintering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Definitions

  • Commutation cells are known as parts of electrical circuits, such as those used in washing machines, blower fans, electric
  • FIG. 1 shows an exemplary embodiment of a conventional one
  • Commutation cell 1 in which a current change initiated by a switching process can take place.
  • the commutation cell 1 comprises a controllable semiconductor switch 2 and one in series with the controllable
  • Inductors are generated by the respective configuration of the electrical components and the respective construction and connection technology of the commutation cell 1.
  • Conventional commutation cells are usually constructed of electrical components which, for example in the arrangement shown in FIG. 1, are arranged next to one another on a circuit carrier and pass through Wiring elements, such as bonding wires, and required distances, in particular for heat spreading, between the electrical components high parasitic inductances.
  • the invention relates to a commutation cell having at least one electrical capacitance, at least one controllable semiconductor switch and at least one semiconductor, which is connected in series with the controllable semiconductor switch, characterized by three mutually parallel circuit carrier, wherein the controllable semiconductor switch over a partially between the controllable semiconductor switch and the semiconductor arranged circuit carrier is connected in series with the semiconductor, wherein the two remaining circuit carriers are electrically conductively connected to one another via a circuit formed from the controllable semiconductor switch, the semiconductor and the semi-conductor between the controllable semiconductor switch and the semiconductor circuit board, and wherein the electrical capacitance is connected separately from the module between the other two circuit carriers.
  • the electrical components are not arranged as conventionally next to one another on a circuit carrier. Furthermore, there are no conventionally required wiring elements, such as bonding wires, and conventionally required distances, in particular for heat spreading, between the electrical components.
  • the invention therefore provides a very compact commutation cell compared to conventional commutation cells
  • the commutation cell according to the invention thus has three superimposed wiring levels.
  • the use of simple materials, such as copper, for the circuit carrier also results in cost advantages over conventional commutation.
  • commutation cell according to the invention has optimal
  • the circuit carriers can be used as punched grids, printed circuit boards, laminates,
  • AMB active metal braze
  • DCB direct copper bonded substrates
  • conductor tracks or the like may be formed
  • Circuit carriers from each other is limited by the dimensions of the controllable semiconductor switch, the joint gap and the semiconductor.
  • the semiconductor may be formed as a passive semiconductor, for example as a semiconductor diode, or also as a controllable semiconductor switch.
  • SOI silicon-on-insulator
  • the commutation cell has two bodies which are essentially of the same physical construction and connectable to each other
  • Commutation cell parts wherein the partially arranged between the controllable semiconductor switch and the semiconductor circuit carrier has two parallel to one another, connectable to each other circuit board parts and the electrical capacitance has two electrodes, wherein the one
  • Commutation cell part is formed by the one circuit carrier part, the one electrode of the electrical capacitance, the controllable semiconductor switch and one of the remaining circuit carrier and the other Kommut réelleszellenteil by the other circuit carrier part, the other electrode of the electric capacitance, the semiconductor and the other of the other circuit carriers.
  • the two commutation cell parts can connect with each other before their connection
  • Commutation cell parts are constructed on two sides and then connected to each other with a simple assembly step.
  • a 2-sided construction a Kommutleiterszellenteils also causes a full-blown
  • Commutation cell parts connected to a commutation cell.
  • the circuit carrier parts and the electrodes of the electrical capacitor are each connected to one another via a joining layer formed by means of a joining method.
  • a joining method for example, a soldering, in particular soldering, Leitkleben, sintering, in particular silver sintering, or the like in question.
  • Commutation cell each one arranged by means of a joining process joining layer is arranged.
  • a joining process for example
  • Commutation cell are also connected via a soldering, the properties of the solders used to form the Kommut michmaschineszellenteils on the one hand and the commutation cell on the other hand must be coordinated.
  • soldering a Lothierarchie is to be observed, which prevents it when connecting the Kommutleiterszellenmaschine by means of a soldering process to a re-melting and Ablegieren the
  • Commutation cell each one arranged by means of a silver sintering process joining layer is arranged. This is beneficial as a through one
  • At least one is in at least one joining layer
  • a commutation cell can be designed to some extent independent of the particular geometry of the electrical capacitance, the controllable semiconductor switch and / or the semiconductor.
  • two or more spacer elements can also be arranged.
  • Compensation element may be formed, for example, of molybdenum.
  • the compensating element can also be used as a spacer at the same time.
  • In a marriage history can also be two or more
  • Compensating elements may be arranged.
  • the commutation cell has an external electrical insulation.
  • the external electrical insulation can be realized by a casting or a casting. Such a casting can also be used to provide sufficient mechanical stability of a commutation cell and to meet requirements with respect to the Moisture Sensitivity Level (MSL), which is a measure of the environmental capability of the circuit, and the exclusive provision of external electrical insulation on a commutation cell allows for maximum heat dissipation close to the commutation cell electrical components may also have TIM ("Thermal Interface Material") materials.
  • a circuit carrier may be formed as a ceramic-metal composite.
  • the commutation cell has at least one electronic control unit for controlling the controllable
  • the electronic control unit may be connected via a conventional bonding technology or via at least one circuit carrier with the controllable semiconductor switch and / or the semiconductor on which the electronic control unit is arranged.
  • FIG. 1 shows a circuit diagram of a conventional commutation cell
  • FIG. 2 is a schematic sectional view of an embodiment of a commutation cell according to the invention.
  • Fig. 3 a schematic sectional view of another
  • FIG. 4 a schematic sectional view of a commutation cell part of the commutation cell shown in FIG.
  • FIG 2 shows a schematic representation of an embodiment of a commutation cell according to the invention 7.
  • the commutation cell 7 has an electrical capacitance 8, a controllable semiconductor switch 9 and a Semiconductor 10, which is connected in series with the controllable semiconductor switch 9. Furthermore, the commutation cell 7 comprises three parallel arranged circuit carriers 11, 12 and 13, wherein the controllable semiconductor switch 9 via a partially between the controllable
  • Semiconductor switch 9 and the semiconductor 10 arranged circuit carrier 12 is connected in series with the semiconductor 10.
  • the other two circuit carriers 11 and 13 are connected via a controllable semiconductor switch 9, the
  • Figure 3 shows a schematic sectional view of another
  • Exemplary embodiment of a commutation cell 16 which differs from the exemplary embodiment shown in FIG. 2 in that it has two commutation cell parts 17 and 18 which are physically substantially identically constructed and connectable to one another.
  • the circuit carrier 12, via which the controllable semiconductor switch 9 is connected in series with the semiconductor 10, has two circuit carrier parts 19 and 20 arranged parallel to one another and the electrical capacitor 8 has two electrodes 21 and 22.
  • the one commutation cell part 17 is formed by the circuit substrate 19, the electrode 21 of the electric capacitor 8, the controllable semiconductor switch 9 and the circuit carrier 11 and the other Kommutéesszellenteil 18 is through the circuit substrate part 20, the electrode 22 of the electric capacitor 8, the semiconductor 10 and
  • Circuit carrier 13 is formed.
  • the circuit carrier parts 19 and 20 and the electrodes 21 and 22 of the electrical capacitor 8 are each connected to one another via a joining layer 23 formed by means of a joining method.
  • a joining layer 15 formed by means of a joining method adapted to the aforementioned joining method is arranged in each case.

Abstract

L'invention concerne une cellule de commutation (7, 16) comprenant au moins un condensateur électrique (8), au moins un commutateur à semi-conducteurs (9) pouvant être commandé et au moins un semi-conducteur (10) qui est monté en série par rapport au commutateur à semi-conducteurs (9) pouvant être commandé. Ladite cellule de commutation est caractérisée par trois supports de circuit (11, 12, 13) disposés parallèlement les uns aux autres. Le commutateur à semi-conducteurs (9) pouvant être commandé est monté en série par rapport au semi-conducteur (10) par l'intermédiaire d'un support de circuit (12) disposé en partie entre le commutateur à semi-conducteurs (9) pouvant être commandé et le semi-conducteur (10). Les deux autres supports de circuit (11, 13) sont interconnectés de manière électroconductrice par l'intermédiaire d'un ensemble (14) formé du commutateur à semi-conducteurs (9) pouvant être commandé, du semi-conducteur (10) et du support de circuit (12) disposé en partie entre le commutateur à semi-conducteurs (9) et le semi-conducteur (10). Le condensateur électrique (8) est monté entre les deux autres supports de circuit (11, 13), séparément du module (14).
EP15718847.5A 2014-05-21 2015-04-21 Cellule de commutation Withdrawn EP3146563A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102014209690.1A DE102014209690B4 (de) 2014-05-21 2014-05-21 Kommutierungszelle
PCT/EP2015/058559 WO2015176893A1 (fr) 2014-05-21 2015-04-21 Cellule de commutation

Publications (1)

Publication Number Publication Date
EP3146563A1 true EP3146563A1 (fr) 2017-03-29

Family

ID=53008477

Family Applications (1)

Application Number Title Priority Date Filing Date
EP15718847.5A Withdrawn EP3146563A1 (fr) 2014-05-21 2015-04-21 Cellule de commutation

Country Status (5)

Country Link
US (1) US9871025B2 (fr)
EP (1) EP3146563A1 (fr)
JP (1) JP6486390B2 (fr)
DE (1) DE102014209690B4 (fr)
WO (1) WO2015176893A1 (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102018126972A1 (de) 2018-07-25 2020-01-30 Infineon Technologies Ag Halbleitergehäuse mit überlappenden elektrisch leitfähigen bereichen und verfahren zu dessen herstellung
DE102018212436A1 (de) 2018-07-25 2020-01-30 Infineon Technologies Ag Halbleitergehäuse mit symmetrisch angeordneten leisungsanschlüssen und verfahren zu dessen herstellung
DE102018212443A1 (de) 2018-07-25 2020-01-30 Infineon Technologies Ag Halbleitergehäuse mit passivem elektrischem Bauteil und Verfahren zu dessen Herstellung
DE102018212438A1 (de) 2018-07-25 2020-01-30 Infineon Technologies Ag Halbleitergehäuse mit elektromagnetischer abschirmstruktur und verfahren zu dessen herstellung

Citations (3)

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Publication number Priority date Publication date Assignee Title
JP2004193476A (ja) * 2002-12-13 2004-07-08 Denso Corp 半導体装置
US20100237507A1 (en) * 2009-03-23 2010-09-23 Toyota Jidosha Kabushiki Kaisha Power module
JP2010251665A (ja) * 2009-04-20 2010-11-04 Nippon Soken Inc 電力変換用半導体装置

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JP4438489B2 (ja) * 2004-04-13 2010-03-24 富士電機システムズ株式会社 半導体装置
JP4635564B2 (ja) * 2004-11-04 2011-02-23 富士電機システムズ株式会社 半導体装置
JP4552810B2 (ja) * 2005-09-06 2010-09-29 株式会社デンソー 半導体装置
JP2007116013A (ja) 2005-10-24 2007-05-10 Renesas Technology Corp 半導体装置及びそれを用いた電源装置
FR2981200B1 (fr) * 2011-10-10 2017-01-13 Centre Nat De La Rech Scient (Cnrs) Cellule monolithique de circuit integre et notamment cellule de commutation monolithique
JP2013153010A (ja) * 2012-01-24 2013-08-08 Denso Corp 半導体モジュール及び半導体装置
DE102012207652A1 (de) * 2012-05-08 2013-11-14 Robert Bosch Gmbh Zweistufiges Verfahren zum Fügen eines Halbleiters auf ein Substrat mit Verbindungsmaterial auf Silberbasis
EP2982038B1 (fr) * 2013-04-04 2019-06-19 TM4 Inc. Cellule de commutation et circuit de compensation associé
DE202013104510U1 (de) * 2013-10-04 2013-11-14 Abb Technology Ag Halbleiterstapel für Umrichter mit Snubber-Kondensatoren
CA2928925A1 (fr) * 2013-11-01 2015-05-07 Tm4 Inc. Convertisseur de puissance servant a limiter la surtension de commutation
US9882465B2 (en) * 2013-11-14 2018-01-30 Tm4 Inc. Commutation cell, power converter and compensation circuit having dynamically controlled voltage gains
CA2930188A1 (fr) * 2013-11-14 2015-05-21 Tm4 Inc. Circuit de compensation, cellule de commutation et convertisseur de puissance commandant l'activation et la desactivation d'un commutateur electronique de puissance

Patent Citations (3)

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Publication number Priority date Publication date Assignee Title
JP2004193476A (ja) * 2002-12-13 2004-07-08 Denso Corp 半導体装置
US20100237507A1 (en) * 2009-03-23 2010-09-23 Toyota Jidosha Kabushiki Kaisha Power module
JP2010251665A (ja) * 2009-04-20 2010-11-04 Nippon Soken Inc 電力変換用半導体装置

Non-Patent Citations (1)

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Title
See also references of WO2015176893A1 *

Also Published As

Publication number Publication date
WO2015176893A1 (fr) 2015-11-26
US9871025B2 (en) 2018-01-16
JP6486390B2 (ja) 2019-03-20
US20170069608A1 (en) 2017-03-09
DE102014209690A1 (de) 2015-11-26
JP2017523596A (ja) 2017-08-17
DE102014209690B4 (de) 2020-02-20

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