EP2942800B1 - Tube a rayons x a anode fixe comprenant une traversee de vide haute tension en deux parties - Google Patents

Tube a rayons x a anode fixe comprenant une traversee de vide haute tension en deux parties Download PDF

Info

Publication number
EP2942800B1
EP2942800B1 EP15166319.2A EP15166319A EP2942800B1 EP 2942800 B1 EP2942800 B1 EP 2942800B1 EP 15166319 A EP15166319 A EP 15166319A EP 2942800 B1 EP2942800 B1 EP 2942800B1
Authority
EP
European Patent Office
Prior art keywords
insulating body
anode
ray tube
rear part
section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP15166319.2A
Other languages
German (de)
English (en)
Other versions
EP2942800A1 (fr
Inventor
Karl Hans
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
InCoaTec GmbH
Original Assignee
InCoaTec GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by InCoaTec GmbH filed Critical InCoaTec GmbH
Publication of EP2942800A1 publication Critical patent/EP2942800A1/fr
Application granted granted Critical
Publication of EP2942800B1 publication Critical patent/EP2942800B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/16—Vessels; Containers; Shields associated therewith
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H01J35/12—Cooling non-rotary anodes
    • H01J35/13—Active cooling, e.g. fluid flow, heat pipes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/14—Manufacture of electrodes or electrode systems of non-emitting electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/24—Manufacture or joining of vessels, leading-in conductors or bases
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/02—Electrical arrangements
    • H01J2235/023—Connecting of signals or tensions to or through the vessel
    • H01J2235/0233—High tension

Definitions

  • X-ray radiation is used in a variety of ways in instrumental analysis or for the production of image recordings of human and animal patients in medicine.
  • the generation of X-radiation is typically carried out in an X-ray tube by emission of electrons on an electrically heated electron emitter, and acceleration of the electrons in the electric field to a so-called target, is released at the characteristic X-rays; the target material differs depending on the application.
  • the electron emitter is part of a cathode, and the target part of an anode.
  • a high-voltage vacuum feedthrough usually comprises a ceramic body as an electrical insulator with a central opening into which a high-voltage supply and an electrode are inserted in a vacuum-tight manner, cf. to the EP 1 537 594 B1 ,
  • the anode is made of copper and is soldered vacuum-tight in a tubular ceramic insulation body made of aluminum nitride.
  • copper and ceramics such as aluminum nitride have quite different thermal expansion coefficients, so that when soldering or under load (and heating) in operation large mechanical Strains can occur, whereby the solder joint can be leaking; the x-ray tube is then unusable.
  • An anode with a hollow cylindrical section is only suitable for relatively small heat fluxes, that is to say X-ray tubes with comparatively low power; adds that the hollow cylindrical section can be easily deformed during installation and therefore the vacuum-tight soldering is in turn difficult.
  • the relatively complex installation process of an anode in a ceramic insulation body also ensures comparatively long delivery times, if not for each Targettyp manufactured vacuum feedthroughs should be stored. After installing an anode in the insulating body, it is hardly possible in the prior art to change the target at the front end of the anode.
  • the present invention provides for the anode to be formed in two parts in order to be able to better fulfill the practical requirements for this component.
  • a rear portion of the anode is mainly used for attachment in the ceramic insulation body.
  • the first metallic material of the rear portion is chosen so that its coefficient of thermal expansion ⁇ ht corresponds to the coefficient of thermal expansion of the ceramic material of the losations stressess ⁇ ker , so that during soldering and also during operation of the electron tube (in which the anode heats up) no or so low mechanical Tensions occur that the tightness of the soldering between the rear portion and the insulating body is not affected.
  • the rear portion with a very narrow gap (about 50 microns gap width or less) can be soldered into the insulation body, which can be easily vacuum-tight bridged or closed with a solder.
  • the rear portion is usually soldered vacuum-tight in the front half of the insulating body in the cavity.
  • the linear thermal expansion coefficients ⁇ ht and ⁇ ker correspond in particular when ⁇ ht differs from ⁇ ker by a maximum of 50%, preferably by a maximum of 25% (based on ⁇ ker ); Preferably, ⁇ ht is not greater than ⁇ ker .
  • ⁇ ht is about 5-6 * 10 -6 1 / K, more preferably about 5.5 * 10 -6 1 / K in Fernico, and ⁇ ker is about 6.5-8.9 * 10 -6 1 / K, in particular about 7 * 10 -6 1 / K with Al 2 O 3 ceramic.
  • the front part of the anode is mainly used to dissipate heat from the target, ie the area of the anode which is irradiated by electrons.
  • the target is formed in the simplest case of a front end of the front portion, or the target is a coating or a (mostly soldered) essay or use at the front end of the front portion.
  • the front portion consists wholly or partly (except for the target) of the second metallic material whose thermal conductivity ⁇ vt is greater than the thermal conductivity of the first metallic material ⁇ ht ; typically ⁇ vt ⁇ 5 * ⁇ ht , and preferably ⁇ vt ⁇ 10 * ⁇ ht . Due to the relatively high thermal conductivity of the second metallic material, the heat generated at the target can be efficiently dissipated.
  • ⁇ vt is about 300-400 W / (m * K), in particular about 380 W / (m * K) for copper, and ⁇ ht about 10-30 W / (m * K), in particular about 16.7 W / (m * K) at Fernico.
  • the rear section can be independent of the front section, and thus independent of the desired target material, in the insulation body be soldered. If it is established which target material is desired for the electron tube, then a corresponding front section can later be attached to the soldered rear section. For all types of target material, it is sufficient to maintain the same partially installed vacuum feedthrough (with insulation body and soldered rear section). For different target materials, various corresponding front sections (also called anode heads) can be stored.
  • connection of the rear section and the front section can be done in any suitable manner which allows a sufficiently good heat transfer between the front section and the rear section and ensures an electrically good contact; However, preference is not welded or soldered to not affect the strength or tightness of the solder joint between the rear portion and insulation body subsequently.
  • the connection generally provides for continuous, surface contact between the front section and the rear section. For connection in particular plugging / nesting and shrinking has proven. But it is also well, for example, by screwing / lngentschrauben, possibly with locking pin, well possible.
  • the rear section and the front section are inserted into one another.
  • a connector Through a connector, a large contact area can be easily set up.
  • the connector can also be fixed by shrinking, or with a locking pin.
  • An advantageous development of this embodiment provides that rear section front end a receiving portion with a recess in that the front section has a plug-in section at the rear end, and in that the plug-in section is inserted into the receiving section.
  • the heat can pass over a very short distance from the plug portion of the front portion radially through the wall of the receiving portion of the rear portion in the insulating body.
  • shrinking the easy-to-use and less sensitive front section to be frozen deep such as in liquid nitrogen
  • the insulation body together with the rear section to expand the receiving section gently heated (such as in an oven, eg at about 200 ° C).
  • the front portion has a longitudinal bore to the bottom of the recess of the receiving portion and a transverse bore which is connected to the longitudinal bore, and that the transverse bore opens out of the receiving portion. Due to the longitudinal bore and the transverse bore, gas (in particular air) can reliably escape to the outside of the recess of the receiving section when the front and rear sections are inserted one inside the other. Gas inclusions, which can cause poor heat transfer or mechanical stresses during operation, are avoided.
  • the rear portion and the front portion are connected by shrinking.
  • the male part typically the front part
  • the female part typically the rear part
  • the two sections are inserted into each other, with little play, for example, 4/100 mm or less based on the diameter of the Receiving portion.
  • the two sections each block the heat-related geometry change of the other section.
  • the two sections are elastically braced against each other and firmly connected.
  • the inserted section is then under compressive stress, and the female section under tension.
  • the ceramic material of the insulating body is Al 2 O 3
  • the stated weight fractions of the iron-nickel-cobalt alloy correspond to a so-called Fernico alloy.
  • Al 2 O 3 ceramic and Fernico have very good matching coefficients of thermal expansion, with ⁇ (Al 2 O 3 ) of about 7 * 10 -6 1 / K, and ⁇ (Fernico) of about 5.5 * 10 -6 1 / K. This material combination has proven itself well in practice.
  • the second metallic material of which the front section is partially or completely composed is Cu.
  • Copper has a very good thermal conductivity of about 380 W / (m * K), and can therefore very efficiently dissipate heat from the target.
  • the front portion is used directly as a target.
  • the front portion at the front of a coating, an attachment or an insert of molybdenum, tungsten, rhodium, silver, cobalt or chromium is applied or arranged.
  • the coating, the attachment or the insert is used as a target in order to use characteristic X-ray emission lines of the associated material.
  • an attachment to the front portion of the anode soldered; an insert is placed in a recess at the front of the front section, and usually by soldering or encapsulation (such as copper) attached.
  • a coating can be applied by sputtering, for example. Since only the coating, the attachment or the insert consists of the particular target material, the properties of the second metallic material (usually copper) can still be used, such as a high thermal conductivity.
  • the rear portion has a rear end socket portion with a recess for receiving a high voltage connector.
  • a connector for connecting the power line is easy to set up and has proven itself in practice.
  • the insulation body in a front region has a wall thickness WSv which is greater than a wall thickness WSm in a middle region, the back segment extending at least partially in the middle region, wherein WSm ⁇ 2/3 * WSv, and wherein at least 2/3 of the length of the rear portion extends in the central region.
  • the insulating body has a comparatively poor Wäremleitein.
  • the larger wall thickness in the front part improves the electrical insulation, in particular by a long path along the surface of the insulating body from the anode to a (usually grounded) housing or outdoor area.
  • the insulating body further has a rear portion, at which the wall thickness relative to the central region again is enlarged, so that the insulating body is constructed approximately dumbbell-shaped; this improves the grip of a seated cooling device.
  • a cooling device is seated on the outside of the insulating body in the central area.
  • the cooling device comprises a metallic casing of the insulating body, in particular wherein the metallic casing is made of copper or aluminum.
  • the metallic sheath with a higher thermal conductivity than the material of the insulating body, can carry heat away from the insulating body and spread over the length of the metallic sheath, thereby preventing local overheating in the region of the anode.
  • the metallic sheath is typically in several parts, approximately in two parts, designed to facilitate attachment to the insulating body.
  • the metallic sheath is typically significantly longer than the back section, approximately more than twice as long as the rear section.
  • the metallic sheath may comprise cooling fins and / or be impinged by a cooling air flow.
  • a coolant flow, such as air or water, through the cooling device is possible, but rarely required in practice.
  • the vacuum feedthrough in which the rear section is soldered into the insulation body with an Ag or Au-containing solder, wherein the insulation body has a nickel-plated MoMn coating at least in the soldered area.
  • the metallic rear section can reliably solder vacuum-tight with the ceramic insulation body.
  • the scope of the present invention also includes an electron tube, in particular a solid-state x-ray tube, comprising a vacuum feedthrough according to the invention as described above.
  • the electron tube is very reliable, and a failure due to a leak of the vacuum feedthrough, in particular by heating during operation, is not expected.
  • a preferred variant of the method according to the invention provides that in step c) the fastening of the front section takes place at the rear section by plugging and shrinking. This makes it possible in a simple manner, a high-strength connection of the front and rear portion of the anode without solder or additional connecting means, in particular easily after step b).
  • steps a) and b) are initially carried out for a large number of vacuum feedthroughs, and later the partially manufactured vacuum feedthroughs individually or in groups according to Step c) are provided with front sections, wherein several different types of front sections are used.
  • a supply of semi-finished vacuum feedthroughs can be used for various target materials.
  • the joining of the front and rear sections, such as over plugging and shrinking, is very quickly possible, so that an anode vacuum feed with a specific target material can be provided and delivered at short notice.
  • FIGS. 1 to 3 illustrate the manufacture of a high-voltage vacuum feedthrough according to the invention in various staggered stages.
  • a ceramic insulating body 1 is manufactured or provided, cf. Fig. 1 ,
  • the insulating body 1 is here made of alumina ceramic, for example by slip casting or other known per se molding processes, and then sintering;
  • the Al 2 O 3 ceramic may, if desired or required, contain sintering aids or other additives to optimize the manufacturing process or the quality of the sintered ceramic in a manner known per se.
  • the insulating body 1 has a substantially tubular construction, and has in particular a longitudinal cavity 10 extending in the longitudinal direction (see longitudinal axis LA), similar to a bore.
  • the insulating body 1 is constructed here rotationally symmetrical with respect to the longitudinal axis LA.
  • the cavity 10 has a step 11 which serves as a stop for a from the front (here right) End 12 ago to be introduced, rear portion of an anode is used (see. Fig. 2 ). From a rear (left here) end 13 fro a high voltage line to the anode can be performed (not shown).
  • the insulating body 1 also has in a front region VB over an (average) wall thickness WSv, which is greater than the (average) wall thickness WSm in a central region MB.
  • the (average) wall thickness WSh is again greater than in the middle region MB.
  • Front area VB, middle area MB and rear area HB extend together over the entire axial length of the insulation body 1.
  • a rear portion 2 of an anode is then introduced, see. Fig. 2 , and externally circumferentially soldered to the inner wall of the cavity 10.
  • the insulating body 1 at least in an area adjacent to the right of the stage 11 inside initially provided with a MoMn coating, about CVD method, and be soldered with an Ag or Au-containing solder.
  • the soldering is performed vacuum-tight, which is easily possible with sufficiently narrow gap between the rear portion 2 and the inner wall of the insulating body 1.
  • the rear section 2 is here made of a Fernico alloy whose coefficient of thermal expansion corresponds to the thermal expansion coefficient of the insulating body 1 (both with respect to the radial direction, as well as the axial longitudinal direction).
  • the rear portion 2 has the rear end via a socket portion 14 with a recess 15 for receiving a high voltage plug (the latter not shown in detail).
  • the rear portion 2 has a receiving portion 16 with a recess 17 for receiving a plug-in portion of a front portion of the anode (see Fig. 3 ).
  • the insulating body 1 with soldered rear section 2 of the anode, but without installed front section, is also referred to as a partially manufactured vacuum feedthrough 34.
  • This front section 3 has at the rear a plug-in section 18 which is inserted into the recess 17 of the rear section 2.
  • the front portion 3 is first strongly cooled here, typically to the temperature of liquid nitrogen (about 90 K), in which the front portion 3 is immersed, so that the plug portion 18 contracts radially.
  • the rear portion 2 is heated together with the insulating body 1, such as in an oven at 200 ° C, so that the recess 17 radially expands.
  • the plug-in section 18 can just be introduced into the recess 17.
  • a longitudinal bore 19 and a hitting the longitudinal bore 19 transverse bore 20 are provided. Air can then escape from the base 33 of the recess 17 through the holes 19, 20, if the gap between the side wall 21 of the receiving portion 16 and the outer wall of the plug portion 18 is too narrow for a gas outlet.
  • the front section 3 is made entirely of copper, in order to ensure rapid and efficient heat transport from the region of the target 22 at the front end of the front section 3 of the anode into the insulation body 1 during operation.
  • the heat flow takes place mainly by the front portion 3 to the plug portion 18, through the side wall 21 of the receiving portion 17 of the rear portion 2 and partially by the other rear portion 2, in the insulation body 1 instead.
  • a coating, an attachment or an insert of material other than copper may be provided at the front end of the front section 3 in order to generate X-radiation characteristic of the target 22 in accordance with this other material (cf. Fig. 7 ).
  • the front section 3 protrudes from the front of the insulation body 1.
  • the vacuum feedthrough 23 is intended to be integrated into an electron tube or X-ray tube (cf. Fig. 9 ).
  • the vacuum feedthrough 23 may be provided with a cooling device 4, which here consists of a metallic sheath, preferably made of copper or aluminum.
  • the casing comprises two half-shells 4a, 4b, which are placed around the insulating body 1 and enclose it over a large area over virtually the entire circumference and the entire length of the central region MB.
  • the Half shells 4a, 4b here each rear end a multi-slotted area 4c on.
  • Fig. 5 shows the vacuum duct 23 with installed half-shells 4a, 4b, applied to the insulating body 1, in longitudinal section.
  • the half-shells 4a, 4b are to be reached via short paths, namely by the reduced wall thickness WSm of the insulating body 1 in the middle region MB (compared to the larger wall thickness WSv in the front region VB) from the rear section 2 of the anode for the heat flow emanating from the target 22 ,
  • the rear section 2 extends here in the longitudinal direction to about 9/10 in the central region MB, and the (average) wall thickness WSm in the central region MB is here about 1/2 times the (average) wall thickness WSv in the front region VB.
  • the heat can be distributed and emitted / radiated in the half shells 4a, 4b of the cooling device 4 over its entire length, thereby avoiding local overheating of the anode, in particular the rear section 2, which is connected to a high-voltage connector.
  • the rear section 2 extends axially at least 2/3 in a region of the insulation body 1 in which the local radial wall thickness (see WSm in the middle region MB) of the insulation body 1 is at most 2/3 of the largest Radial wall thickness (see WSv in the front region VB) of the insulating body 1 is.
  • Fig. 6 shows a front portion 3 of an anode for the invention.
  • the section 3 is here completely made of copper.
  • the section is provided with a plug-in section 18, and the target 22 is formed through the front end.
  • the planar surface of the target 22 is slightly oblique to the longitudinal axis LA to provide a useful radiation characteristic (Angular distribution) of the incident by electrons in the copper triggered characteristic X-ray radiation.
  • the front section 3 can be provided at the front end with an insert 24 (shown in phantom) of the other material ("target material”), here tungsten, as the target 22, cf. Fig. 7 ,
  • the insert 24 is arranged on the front portion 3 in a local recess 24 a and fixed (soldered about), usually before the front portion 3 is attached to the rear portion 2.
  • the flat surface of the insert 24 is also inclined with respect to the longitudinal axis LA.
  • the Fig. 8 shows an alternative embodiment of a high voltage vacuum feedthrough 23 according to the invention, in which the ceramic insulating body 1 is formed with substantially uniform wall thickness WS.
  • This design is particularly simple, and can be used well with electron tubes or X-ray tubes with low power or low heat generation at the target 22.
  • FIG. 9 is a schematic longitudinal section of an electron tube 25 (here a solid anode X-ray tube) with a vacuum feedthrough 23 according to the invention as shown Fig. 5 known.
  • an electron tube 25 here a solid anode X-ray tube
  • a vacuum feedthrough 23 according to the invention as shown Fig. 5 known.
  • a vacuum-tight housing 30 is arranged, in which an evacuated space 31 is arranged.
  • a cathode 27 is further arranged with an electron emitter 26, here an electrically heated coil of tungsten wire.
  • From the electron emitter 26 occur in operation by annealing emission electrons, which by a high voltage between the cathode 27 and Anode 28 of typically 5 kV to 30 kV through the evacuated space 31 to the anode 28, more precisely to the target 22 at the front portion 3, are accelerated. There is then - in addition to the bremsstrahlung - characteristic X-rays 29 triggered, which emerge through a Beryllium lender 32 and can be used, such as for instrumental analysis or medical diagnostics.

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • X-Ray Techniques (AREA)

Claims (14)

  1. Tube à rayons X à anode fixe (25), comprenant une traversée sous vide haute tension (23) comprenant
    - un corps isolant (1) en matériau céramique, lequel corps isolant (1) présente une cavité continue (10),
    - et une anode (28), laquelle anode (28) est disposée par une extrémité arrière dans la cavité (10) du corps isolant (1) et ferme la cavité (10) de manière étanche au vide,
    l'anode (28) étant réalisée en deux parties avec une partie arrière (2) et une partie avant (3),
    la partie arrière (2) étant constituée d'un premier matériau métallique dont le coefficient de dilatation thermique αht correspondant au coefficient de dilatation thermique αker du matériau céramique,
    la partie arrière (2) étant disposée dans la cavité (10) du corps isolant (1) et étant brasée de manière étanche au vide dans le corps isolant (1),
    la partie avant (3) étant constituée au moins partiellement d'un deuxième matériau métallique dont la conductibilité thermique λvt est supérieure à la conductibilité thermique λht du premier matériau métallique de la partie arrière (2),
    et la partie avant (3) étant fixée à la partie arrière (2),
    caractérisé en ce
    que le corps isolant (1) présente dans une zone avant (VB) une épaisseur de paroi WSv plus grande qu'une épaisseur de paroi WSm dans une zone médiane (MB), la partie arrière (2) s'étendant au moins partiellement dans la zone médiane (MB), que WSm ≤ 2/3*WSv, qu'au moins 2/3 de la longueur de la partie arrière (2) s'étend dans la zone médiane (MB),
    et qu'un dispositif de refroidissement (4) est monté extérieurement sur le corps isolant (1) dans la partie médiane (MB).
  2. Tube à rayons X à anode fixe (25) selon la revendication 1, caractérisé en ce que la partie arrière (2) et la partie avant (3) sont emboîtées l'une dans l'autre.
  3. Tube à rayons X à anode fixe (25) selon la revendication 2, caractérisé en ce que la partie arrière (2) présente à l'extrémité avant une partie réceptrice (16) avec un évidement (17),
    que la partie avant (3) présente à l'extrémité arrière une partie d'enfichage (18) et que la partie d'enfichage (18) est enfichée dans la partie réceptrice (16).
  4. Tube à rayons X à anode fixe (25) selon la revendication 3, caractérisé en ce que la partie avant (3) présente un alésage longitudinal (19) vers le fond (33) de l'évidement (17) de la partie réceptrice (16) ainsi qu'un alésage transversal (20) qui est relié à l'alésage longitudinal (19), et que l'alésage transversal (20) débouche à l'extérieur de la partie réceptrice (16).
  5. Tube à rayons X à anode fixe (25) selon l'une des revendications 2 à 4, caractérisé en ce que la partie arrière (2) et la partie avant (3) sont reliées entre elles par rétraction.
  6. Tube à rayons X à anode fixe (25) selon l'une des revendications précédentes, caractérisé en ce que le matériau céramique du corps isolant (1) est Al2O3, et le premier matériau métallique, de la partie arrière (2) est composé d'un alliage fer-nickel-cobalt, en particulier avec les parties en poids de Fe = 53-54 %, Ni = 28-29 %, Co = 17-18 %.
  7. Tube à rayons X à anode fixe (25) selon l'une des revendications précédentes, caractérisé en ce que le deuxième matériau métallique dont la partie avant (3) est constituée en partie ou en totalité est Cu.
  8. Tube à rayons X à anode fixe (25) selon l'une des revendications précédentes, caractérisé en ce qu'un revêtement, un embout ou un insert (24) de molybdène, tungstène, rhodium, argent, cobalt ou chrome est appliqué ou disposé à l'extrémité avant de la partie avant (3).
  9. Tube à rayons X à anode fixe (25) selon l'une des revendications précédentes, caractérisé en ce que la partie arrière (2) présente à l'extrémité arrière une partie douille (14) avec un évidement (15) destiné à recevoir une fiche haute tension.
  10. Tube à rayons X à anode fixe (25) selon l'une des revendications précédentes, caractérisé en ce que le dispositif de refroidissement (4) entoure une enveloppe métallique du corps isolant (1).
  11. Tube à rayons X à anode fixe (25) selon l'une des revendications précédentes, caractérisé en ce que la partie arrière (2) est brasée dans le corps isolant (1) avec un métal d'apport contenant Ag ou Au, le corps isolant (1) présentant un revêtement MoMn nickelé au moins dans la zone brasée.
  12. Procédé de fabrication d'une traversée sous vide (23) d'un tube à rayons X à anode fixe (25) selon l'une des revendications 1 bis 11, comprenant les étapes suivantes :
    a) fabrication du corps isolant (1),
    b) insertion de la partie arrière (2) de l'anode (28) dans la cavité (10) du corps isolant (1) et brasage étanche au vide de la partie arrière (2) dans le corps isolant (1) ;
    c) fixation de la partie avant (3) de l'anode (28) à la partie arrière (2).
  13. Procédé selon la revendication 12, caractérisé en ce qu'à l'étape c), la fixation de la partie avant (3) à la partie arrière (2) s'effectue par enfichage et rétraction.
  14. Procédé selon la revendication 12 ou la revendication 13, caractérisé en ce que les étapes a) et b) sont exécutées d'abord pour une pluralité de traversées sous vide (23), et plus tard les traversées sous vide (34) partiellement fabriquées sont munies de parties avant (3) selon l'étape c) individuellement ou en groupes, plusieurs types différents de parties avant (3) étant utilisés.
EP15166319.2A 2014-05-09 2015-05-05 Tube a rayons x a anode fixe comprenant une traversee de vide haute tension en deux parties Active EP2942800B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102014208729.5A DE102014208729A1 (de) 2014-05-09 2014-05-09 Zweiteilige Hochspannungs-Vakuumdurchführung für eine Elektronenröhre

Publications (2)

Publication Number Publication Date
EP2942800A1 EP2942800A1 (fr) 2015-11-11
EP2942800B1 true EP2942800B1 (fr) 2017-04-12

Family

ID=53373238

Family Applications (1)

Application Number Title Priority Date Filing Date
EP15166319.2A Active EP2942800B1 (fr) 2014-05-09 2015-05-05 Tube a rayons x a anode fixe comprenant une traversee de vide haute tension en deux parties

Country Status (3)

Country Link
US (1) US9728369B2 (fr)
EP (1) EP2942800B1 (fr)
DE (1) DE102014208729A1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102017217181B3 (de) * 2017-09-27 2018-10-11 Siemens Healthcare Gmbh Stehanode für einen Röntgenstrahler und Röntgenstrahler
TWI791057B (zh) * 2017-10-24 2023-02-01 美商瓦特隆電子製造公司 用於真空腔室的電饋通及製作絕緣電饋通或電終端單元的方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE967320C (de) * 1941-04-10 1957-10-31 Quarzlampen Gmbh Verfahren zur Herstellung einer Stromeinfuehrung durch eine Wandung aus Glas, insbesondere aus Quarzglas oder aus keramischem Stoff
DE1045305B (de) * 1956-04-18 1958-11-27 Telefunken Gmbh Verfahren zum Verbinden nichtmetallischer Stoffe, wie Keramik, mit Metallen und danach hergestellte elektrische Entladungsroehre
CH563320A5 (fr) * 1973-10-01 1975-06-30 Bbc Brown Boveri & Cie
US4950962A (en) * 1985-05-20 1990-08-21 Quantum Diagnostics, Ltd. High voltage switch tube
US5903088A (en) * 1994-06-21 1999-05-11 Ushiodenki Kabushiki Kaisha Short arc lamp having a thermally conductive ring
US6353658B1 (en) * 1999-09-08 2002-03-05 The Regents Of The University Of California Miniature x-ray source
EP1537594B1 (fr) 2002-09-09 2006-01-25 Comet Holding AG Tube a vide haute tension
DE102004054835A1 (de) * 2004-11-12 2006-05-24 VACUTEC Hochvakuum- & Präzisionstechnik GmbH Verfahren zur Herstellung einer Elektrode bzw. mehrpoligen Elektrodenanordnung sowie mehrpolige Elektrodenanordnung und Elektrode für eine mehrpolige Elektrodenanordnung
DE102005039188B4 (de) * 2005-08-18 2007-06-21 Siemens Ag Röntgenröhre
DE102005058896A1 (de) 2005-12-09 2007-06-14 Patent-Treuhand-Gesellschaft für elektrische Glühlampen mbH Hochdruckentladungslampe mit keramischem Entladungsgefäß
CN101563754B (zh) * 2006-12-18 2012-05-16 皇家飞利浦电子股份有限公司 具有陶瓷放电管的高压放电灯
DE102009017924B4 (de) 2009-04-16 2012-05-31 rtw RÖNTGEN-TECHNIK DR. WARRIKHOFF GmbH & Co. KG Isolator für Röntgenröhren und Verwendung von zweiphasigem Aluminium-Nitrid als Isolator für Röntgenröhren
JP2011090924A (ja) * 2009-10-23 2011-05-06 Ushio Inc エキシマランプ

Also Published As

Publication number Publication date
US9728369B2 (en) 2017-08-08
EP2942800A1 (fr) 2015-11-11
US20150325400A1 (en) 2015-11-12
DE102014208729A1 (de) 2015-11-12

Similar Documents

Publication Publication Date Title
DE3889715T2 (de) Luftgekühlte Metallkeramik-Röntgenröhrenkonstruktion.
EP2740142B1 (fr) Anode munie d'une direction principale d'extension linéaire
DE102008058608B4 (de) Fadenbaugruppe mit reduzierter Elektronenstrahlzeitkonstanten
EP3213338B1 (fr) Générateur de rayons x
EP2942800B1 (fr) Tube a rayons x a anode fixe comprenant une traversee de vide haute tension en deux parties
DE1108336B (de) Konstruktiver Aufbau einer Wanderfeldwendelroehre
DE2014543B2 (de) Kollektorelektrodenanordnung fur eine Laufzeitröhre
DE2135439A1 (de) Vorrichtung mit hnienformigem Elek tronenstrahl
DE2901681A1 (de) Roentgenroehre
DE10353176A1 (de) Hochspannungssystem für eine monopolare CT-Röhre
DE1491509B1 (de) Elektronenstrahlerzeuger fuer eine hoechstleistungslaufzeit roehre
DE102009017924B4 (de) Isolator für Röntgenröhren und Verwendung von zweiphasigem Aluminium-Nitrid als Isolator für Röntgenröhren
EP0259606A1 (fr) Collecteur de faisceau électronique pour un tube à temps de transit
DE2166309A1 (de) Verfahren zur herstellung von abgeschirmten kollektorelektrodenanordnungen
DE102016000033B4 (de) Röntgenröhre
DE102021209350B3 (de) Röntgenröhre mit einem Isolationskörper, der einen Gusskörper umfasst
DE4340984C2 (de) Leitungsgekühlter Bremsfeld-Kollektor mit hoher thermischer Kapazität
CH370845A (de) Elektronenröhre und Verfahren zu ihrer Herstellung
DE2113976C3 (de) Impuls-Röntgenröhre
DE2532990B2 (de) Wanderfeldroehre
EP0458222B1 (fr) Borne de traversée à haute tension pour dispositif de rayons corpusculaires
DE102014209389B4 (de) Justageeinrichtung für einen Elektronenemitter einer Elektronenröhre
DE2157415C3 (de) Abgeschirmte Kollektorelektrodenanordnung und Verfahren zu ihrer Herstellung
DE888888C (de) Elektronen-Entladungsroehre, insbesondere fuer Hoechstfrequenzen
DE202022107101U1 (de) Hochspannungsanschluss der Röntgenquelle

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

AX Request for extension of the european patent

Extension state: BA ME

17P Request for examination filed

Effective date: 20160428

RBV Designated contracting states (corrected)

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

REG Reference to a national code

Ref country code: DE

Ref legal event code: R079

Ref document number: 502015000846

Country of ref document: DE

Free format text: PREVIOUS MAIN CLASS: H01J0035160000

Ipc: H01J0035120000

GRAP Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOSNIGR1

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: GRANT OF PATENT IS INTENDED

RIC1 Information provided on ipc code assigned before grant

Ipc: H01J 35/16 20060101ALI20160930BHEP

Ipc: H01J 35/12 20060101AFI20160930BHEP

INTG Intention to grant announced

Effective date: 20161103

GRAS Grant fee paid

Free format text: ORIGINAL CODE: EPIDOSNIGR3

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE PATENT HAS BEEN GRANTED

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

REG Reference to a national code

Ref country code: GB

Ref legal event code: FG4D

Free format text: NOT ENGLISH

REG Reference to a national code

Ref country code: CH

Ref legal event code: EP

Ref country code: CH

Ref legal event code: NV

Representative=s name: RIEDERER HASLER AND PARTNER PATENTANWAELTE AG, CH

REG Reference to a national code

Ref country code: IE

Ref legal event code: FG4D

Free format text: LANGUAGE OF EP DOCUMENT: GERMAN

REG Reference to a national code

Ref country code: AT

Ref legal event code: REF

Ref document number: 884656

Country of ref document: AT

Kind code of ref document: T

Effective date: 20170515

REG Reference to a national code

Ref country code: DE

Ref legal event code: R096

Ref document number: 502015000846

Country of ref document: DE

REG Reference to a national code

Ref country code: FR

Ref legal event code: PLFP

Year of fee payment: 3

REG Reference to a national code

Ref country code: NL

Ref legal event code: FP

REG Reference to a national code

Ref country code: LT

Ref legal event code: MG4D

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: ES

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170412

Ref country code: NO

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170712

Ref country code: LT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170412

Ref country code: FI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170412

Ref country code: GR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170713

Ref country code: HR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170412

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: BG

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170712

Ref country code: SE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170412

Ref country code: IS

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170812

Ref country code: RS

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170412

Ref country code: PL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170412

Ref country code: LV

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170412

REG Reference to a national code

Ref country code: DE

Ref legal event code: R097

Ref document number: 502015000846

Country of ref document: DE

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: EE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170412

Ref country code: DK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170412

Ref country code: RO

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170412

Ref country code: CZ

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170412

Ref country code: SK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170412

Ref country code: MC

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170412

PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

REG Reference to a national code

Ref country code: IE

Ref legal event code: MM4A

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170412

Ref country code: SM

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170412

26N No opposition filed

Effective date: 20180115

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LU

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20170505

REG Reference to a national code

Ref country code: BE

Ref legal event code: MM

Effective date: 20170531

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20170505

REG Reference to a national code

Ref country code: FR

Ref legal event code: PLFP

Year of fee payment: 4

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170412

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: BE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20170531

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: MT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170412

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: HU

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT; INVALID AB INITIO

Effective date: 20150505

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: CY

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170412

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: MK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170412

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: TR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170412

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: PT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170412

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: AL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170412

REG Reference to a national code

Ref country code: AT

Ref legal event code: MM01

Ref document number: 884656

Country of ref document: AT

Kind code of ref document: T

Effective date: 20200505

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: AT

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20200505

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: FR

Payment date: 20230517

Year of fee payment: 9

Ref country code: DE

Payment date: 20230525

Year of fee payment: 9

Ref country code: CH

Payment date: 20230605

Year of fee payment: 9

P01 Opt-out of the competence of the unified patent court (upc) registered

Effective date: 20230630

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: GB

Payment date: 20230522

Year of fee payment: 9

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: NL

Payment date: 20240522

Year of fee payment: 10