EP2775149A1 - rotor de pompe à vide - Google Patents

rotor de pompe à vide Download PDF

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Publication number
EP2775149A1
EP2775149A1 EP14171260.4A EP14171260A EP2775149A1 EP 2775149 A1 EP2775149 A1 EP 2775149A1 EP 14171260 A EP14171260 A EP 14171260A EP 2775149 A1 EP2775149 A1 EP 2775149A1
Authority
EP
European Patent Office
Prior art keywords
rotor
elements
vacuum pump
projection
disk
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP14171260.4A
Other languages
German (de)
English (en)
Inventor
Rainer Hölzer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Oerlikon Leybold Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Leybold Vacuum GmbH filed Critical Oerlikon Leybold Vacuum GmbH
Publication of EP2775149A1 publication Critical patent/EP2775149A1/fr
Withdrawn legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors

Definitions

  • the invention relates to a vacuum pump rotor, in particular a turbomolecular pump rotor.
  • Vacuum pump rotors as used in particular in turbomolecular pumps, have a plurality of rotor disks arranged parallel to one another and connected to a rotor shaft. Since this is to be manufactured extremely accurately in close tolerances component, such pump rotors are often formed in one piece. The manufacture of the rotor disks, including the rotor blades having a complex geometry, takes place here from the solid. Such a production of vacuum pump rotors is extremely complex and time consuming. Furthermore, there is a high material removal, so that high material and tooling costs arise.
  • pump rotors are known in which rotor disks are shrunk onto a rotor shaft designed as a hollow or solid shaft. This has the advantage that the individual rotor disks, in particular the rotor blades of the rotor disks, can be produced easily.
  • rotors build relatively large because of the required stability of the rotor, the diameter of the shaft must be relatively large. Further a bell-shaped shape of the rotor in the bladed area is not possible.
  • the object of the invention is to provide a multi-part vacuum pump rotor with improved construction.
  • the vacuum pump rotor according to the invention which is in particular a rotor for a turbomolecular pump, has a plurality of separate rotor elements, so that the rotor disks and the rotor shaft are not formed in one piece.
  • Each of the rotor elements has a plurality, preferably a single rotor disk.
  • the rotor disk is preferably annular and has a cylindrical projection on its inside.
  • the approach forms a shaft portion of the rotor.
  • the projections forming the shaft sections are connected to one another, in particular by shrinking methods, so that the projections form a rotor shaft.
  • the rotor shaft is then surrounded in each case by associated with the individual approaches rotor discs. Since the rotor shaft is formed by the projections of the rotor elements, a separate rotor shaft can be omitted. As a result, the space of the pump rotor can be kept low.
  • an inner joining surface of a projection of a first rotor element bears against an outer joining surface of a projection of an adjacent rotor element. It is particularly preferred that the next rotor element is then formed at least with respect to the approach corresponding to the first rotor element, so that this rests with its inner joining surface on an outer joining surface of the preceding arranged between the two rotor elements rotor element.
  • each identical rotor elements can alternately be arranged so that alternately rotor elements are provided with an inner and an outer approach. The provision of particularly identical rotor elements has the advantage that the production costs can be significantly reduced.
  • the projections of the rotor elements are preferably designed such that they protrude from the rotor disk in both directions, wherein projections of adjacent rotor elements each overlap at least partially.
  • the rotor elements at the ends of the rotor have no outwardly facing lugs, this being appropriate for reasons of symmetry of the individual rotor element is expedient to avoid shrinkage during deformation of the rotor disk in the axial direction of the rotor or twisting the rotor disk.
  • the end elements of the rotor may also have a different structure.
  • the rotor elements are preferably mirror-symmetrical in the region of the projections to a center plane.
  • the median plane is the plane passing through the rotor center and perpendicular to the rotor longitudinal direction.
  • an example bell-shaped rotor carrier may be connected to the first rotor element.
  • the rotor carrier is preferably also connected to the rotor element by shrinking.
  • the rotor carrier can be designed in accordance with a rotor element, but in a preferred embodiment has a special design. This can for example consist in that the rotor carrier has a suitable guide or receptacle for a connection to the drive shaft.
  • the rotor carrier is connected to at least one rotor disk, in particular integrally formed therewith.
  • the rotor carrier is especially if it is a turbomolecular pump rotor preferably arranged on the inlet side of the rotor. With the last, ie in the direction of the outlet side last arranged rotor elements, a further pumping element, such as a drag stage can be connected. This connection can also be made by shrinkage.
  • stiffening elements such as reinforcements, which may in particular be made of CFRP, are connected to at least some of the rotor elements.
  • the stiffening elements are preferably connected to a free outer surface of the neck, i. a surface that does not abut a shoulder of an adjacent rotor element connected.
  • the stiffening elements are annular and surround the entire approach.
  • an inner diameter of the lugs is arranged close to the rotor disk, has a smaller diameter than a region of the lug which is more remote from the rotor disk. Starting from the rotor disk, the approach is thus preferably formed obliquely or conically outward.
  • FIG. 1 illustrated vacuum pump rotor has three rotor elements 10, 12, 10.
  • the two rotor elements 10 are formed identically.
  • Each rotor element 10, 12 has an annular, cylindrical projection 14, 16.
  • the lugs 14, 16 are each connected to a rotor disk 18 having wings with different inner diameters.
  • the three rotor elements 10, 12 are connected to each other via a shrinking process.
  • an inner joining surface 20 of the projection 14 of the first rotor element 10 is connected to an outer joining surface 22 of the projection 16 of the second rotor element 12.
  • the two lugs 16, 14 in this case overlap in the axial direction 24 such that the lug 14 rests against an outer side 26 of the rotor disk 18 of the second rotor element 12.
  • a further rotor element 10 the outer dimension of which substantially corresponds to the first rotor element 10, is arranged.
  • the corresponding projection 14 in turn overlaps the projection 16 in such a way that it bears against an outer side 28 of the rotor disk 18 of the second rotor element 12.
  • a rotor carrier 30 In the in FIG. 1 illustrated embodiment of the invention is connected to the first rotor element 10, a rotor carrier 30.
  • This also has a cylindrical, annular projection 32, the outer joining surface 34 rests against the inner joining surface 20 of the first rotor element 10, so that a connection by shrinking takes place.
  • the rotor carrier 30 is formed in one piece and has two rotor disks 18. Furthermore, the rotor carrier on a central to the longitudinal axis 36 of the rotor symmetrical recess 38. Through the recess 38, the rotor carrier 32 can be connected to a drive shaft.
  • FIG. 1 On the opposite side of the rotor is the in FIG. 1 lower rotor element 10 is connected to a further slightly different in geometry rotor member 40.
  • the rotor element 40 has a radially outwardly extending body 42, which is in turn connected to the inside with a lug 44.
  • An outer joining surface 46 of the projection 44 is connected to an inner joining surface 28 of the projection 14 by shrinking.
  • the rotor element 40 also has one integrally with the body 42 connected rotor disk 18.
  • the body 42 has an annular receiving surface 50 arranged symmetrically with respect to the longitudinal axis.
  • a further pumping element 52 such as a drag stage can also be connected by shrinking.
  • the lugs 14, 16, 44 each form shaft sections, which form a rotor shaft in the connected state.
  • a separate rotor shaft, to which the rotor elements are shrunk, is not required according to the invention.
  • annular stiffening elements 56 are in the in FIG. 1 illustrated embodiment formed annular stiffening elements 56. These may be annular reinforcements made of CFRP.
  • the free outer surfaces 54 of the lugs 14 are formed such that the diameters relative to the rotor disk are smaller in the near region 58 than in a remote region 60 relative to the rotor disk
  • FIG. 2 illustrated continuous transition between the different diameter thus creates a conically widening free outer surface 54.
  • a cylindrical step is provided in the distal region 60, which is related to the rotor disk 18, in order to ensure a defined edge in the region 60.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
EP14171260.4A 2008-11-07 2009-09-14 rotor de pompe à vide Withdrawn EP2775149A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE200810056352 DE102008056352A1 (de) 2008-11-07 2008-11-07 Vakuumpumpenrotor
EP09782947.7A EP2344769B1 (fr) 2008-11-07 2009-09-14 Rotor de pompe à vide

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
EP09782947.7A Division EP2344769B1 (fr) 2008-11-07 2009-09-14 Rotor de pompe à vide

Publications (1)

Publication Number Publication Date
EP2775149A1 true EP2775149A1 (fr) 2014-09-10

Family

ID=41343300

Family Applications (2)

Application Number Title Priority Date Filing Date
EP14171260.4A Withdrawn EP2775149A1 (fr) 2008-11-07 2009-09-14 rotor de pompe à vide
EP09782947.7A Not-in-force EP2344769B1 (fr) 2008-11-07 2009-09-14 Rotor de pompe à vide

Family Applications After (1)

Application Number Title Priority Date Filing Date
EP09782947.7A Not-in-force EP2344769B1 (fr) 2008-11-07 2009-09-14 Rotor de pompe à vide

Country Status (4)

Country Link
EP (2) EP2775149A1 (fr)
JP (1) JP2012508340A (fr)
DE (1) DE102008056352A1 (fr)
WO (1) WO2010052056A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2295813A3 (fr) * 2009-08-01 2015-08-19 Pfeiffer Vacuum GmbH Rotor de pompe turbo-moléculaire

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2722528B1 (fr) * 2011-06-16 2018-05-30 Edwards Japan Limited Ensemble rotor et pompe à vide équipée de celui-ci
DE102014100622A1 (de) * 2014-01-21 2015-07-23 Pfeiffer Vacuum Gmbh Verfahren zur Herstellung einer Rotoranordnung für eine Vakuumpumpe und Rotoranordnung für eine Vakuumpumpe
EP3034880B1 (fr) 2014-12-15 2019-10-16 Pfeiffer Vacuum Gmbh Rotor pour une pompe à vide et son procédé de fabrication
EP3462036B1 (fr) * 2017-10-02 2024-04-03 Pfeiffer Vacuum Gmbh Pompe à vide turbomoléculaire

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH529927A (de) * 1970-07-15 1972-10-31 Pfeiffer Vakuumtechnik Turbomolekularpumpe
DE2554995A1 (de) * 1975-12-06 1977-06-16 Pfeiffer Vakuumtechnik Turbomolekularpumpe
JPS60203375A (ja) * 1984-03-28 1985-10-14 Hitachi Ltd タ−ボ分子ポンプのロ−タの製作方法
DE10124339A1 (de) * 2001-05-18 2002-11-21 Pfeiffer Vacuum Gmbh Rotorscheiben mit Schaufeln für eine Turbomolekularpumpe
EP1496263A2 (fr) * 2003-07-10 2005-01-12 Ebara Corporation Pompe à vide et appareil de fabrication des semi-conducteurs

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62265496A (ja) * 1986-05-12 1987-11-18 Mitsubishi Electric Corp 動翼付きロ−タ
JPS62184190U (fr) * 1986-05-16 1987-11-21
JP3160039B2 (ja) * 1991-08-22 2001-04-23 エヌティエヌ株式会社 ターボ分子ポンプと動翼の加工方法
DE10331932B4 (de) * 2003-07-15 2017-08-24 Pfeiffer Vacuum Gmbh Turbomolekularpumpe
JP2007071139A (ja) * 2005-09-08 2007-03-22 Osaka Vacuum Ltd 複合真空ポンプのロータ
JP2007107480A (ja) * 2005-10-14 2007-04-26 Ebara Corp ターボ型真空ポンプ

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH529927A (de) * 1970-07-15 1972-10-31 Pfeiffer Vakuumtechnik Turbomolekularpumpe
DE2554995A1 (de) * 1975-12-06 1977-06-16 Pfeiffer Vakuumtechnik Turbomolekularpumpe
JPS60203375A (ja) * 1984-03-28 1985-10-14 Hitachi Ltd タ−ボ分子ポンプのロ−タの製作方法
DE10124339A1 (de) * 2001-05-18 2002-11-21 Pfeiffer Vacuum Gmbh Rotorscheiben mit Schaufeln für eine Turbomolekularpumpe
EP1496263A2 (fr) * 2003-07-10 2005-01-12 Ebara Corporation Pompe à vide et appareil de fabrication des semi-conducteurs

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2295813A3 (fr) * 2009-08-01 2015-08-19 Pfeiffer Vacuum GmbH Rotor de pompe turbo-moléculaire

Also Published As

Publication number Publication date
EP2344769A1 (fr) 2011-07-20
EP2344769B1 (fr) 2014-07-02
WO2010052056A1 (fr) 2010-05-14
JP2012508340A (ja) 2012-04-05
DE102008056352A1 (de) 2010-05-12

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