CH529927A - Turbomolekularpumpe - Google Patents

Turbomolekularpumpe

Info

Publication number
CH529927A
CH529927A CH947471A CH947471A CH529927A CH 529927 A CH529927 A CH 529927A CH 947471 A CH947471 A CH 947471A CH 947471 A CH947471 A CH 947471A CH 529927 A CH529927 A CH 529927A
Authority
CH
Switzerland
Prior art keywords
molecular pump
turbo molecular
turbo
pump
molecular
Prior art date
Application number
CH947471A
Other languages
English (en)
Inventor
Becker Willi Dr H C
Original Assignee
Pfeiffer Vakuumtechnik
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vakuumtechnik filed Critical Pfeiffer Vakuumtechnik
Publication of CH529927A publication Critical patent/CH529927A/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
    • F04D29/324—Blades
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers
    • F04D29/544—Blade shapes

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
CH947471A 1970-07-15 1971-06-28 Turbomolekularpumpe CH529927A (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2035063A DE2035063C3 (de) 1970-07-15 1970-07-15 Laufrad für eine Turbomolekularpumpe

Publications (1)

Publication Number Publication Date
CH529927A true CH529927A (de) 1972-10-31

Family

ID=5776829

Family Applications (1)

Application Number Title Priority Date Filing Date
CH947471A CH529927A (de) 1970-07-15 1971-06-28 Turbomolekularpumpe

Country Status (10)

Country Link
US (1) US3748055A (de)
JP (1) JPS5224683B1 (de)
BE (1) BE769932A (de)
CA (1) CA950872A (de)
CH (1) CH529927A (de)
DE (1) DE2035063C3 (de)
FR (1) FR2097945A5 (de)
GB (1) GB1308263A (de)
NL (1) NL157387B (de)
SE (1) SE371867B (de)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4645413A (en) * 1983-05-17 1987-02-24 Leybold-Heraeus Gmbh Friction pump
WO2010052056A1 (de) * 2008-11-07 2010-05-14 Oerlikon Leybold Vacuum Gmbh Vakuumpumpenrotor

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2229724B2 (de) * 1972-06-19 1980-06-04 Leybold-Heraeus Gmbh, 5000 Koeln Turbomolekularpumpe
DE2554995A1 (de) * 1975-12-06 1977-06-16 Pfeiffer Vakuumtechnik Turbomolekularpumpe
DE3507274A1 (de) * 1985-03-01 1986-09-04 Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh, 6334 Asslar Scheiben mit schaufeln hoher stabilitaet fuer turbomolekularpumpen
CH674552A5 (de) * 1988-02-26 1990-06-15 Nikolai Mikhailovich Novikov
IT1238201B (it) * 1989-11-03 1993-07-09 Varian Spa Metodo di fabbricazione mediante elettroerosione di una girante o di un rotore a una o piu' giranti di una turbopompa, particolarmente di una pompa turbomolecolare, e prodotti cosi' ottenuti.
DE10052637B4 (de) * 2000-10-24 2021-03-11 Pfeiffer Vacuum Gmbh 16.02.2001 Scheiben für eine Turbomolekularpumpe
DE10203648B4 (de) * 2001-02-10 2016-05-25 Pfeiffer Vacuum Gmbh Rotor-und Statorscheiben für eine Turbomolekularpumpe
EP1249613B1 (de) * 2001-03-15 2004-01-28 VARIAN S.p.A. Turbinenpumpe mit einer Statorstufe integriert mit einem Distanzring
DE102004012713A1 (de) * 2004-03-16 2005-10-06 Pfeiffer Vacuum Gmbh Turbomolekularpumpe
CN105179021B (zh) * 2014-09-11 2018-04-10 摩尔动力(北京)技术股份有限公司 对转叶轮机构及包括其的装置
CN205189965U (zh) * 2014-09-29 2016-04-27 摩尔动力(北京)技术股份有限公司 压胀一体对转叶轮机构
EP3734078B1 (de) * 2020-03-05 2022-01-12 Pfeiffer Vacuum Technology AG Turbomolekularpumpe und verfahren zur herstellung einer statorscheibe für eine solche

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL281280A (de) *
FR519759A (fr) * 1919-12-24 1921-06-15 Anciens Ets Sautter Harle Hélice à aile métallique
US1767786A (en) * 1927-05-06 1930-06-24 William Braat Propeller
US2011672A (en) * 1933-06-07 1935-08-20 Barker Auriol Screw propeller
US2500071A (en) * 1948-03-12 1950-03-07 Edmund E Hans Fan
DE1503704C3 (de) * 1966-12-30 1972-03-23 Arthur Pfeiffer Hochvakuumtechnik Gmbh, 6330 Wetzlar Schaufelkranz fuer ein lauf und oder leitrad einer turbomolekularpumpe
BE757354A (fr) * 1969-10-27 1971-03-16 Sargent Welch Scientific Co Pompe turbomoleculaire a stators et rotors perfectionnes

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4645413A (en) * 1983-05-17 1987-02-24 Leybold-Heraeus Gmbh Friction pump
WO2010052056A1 (de) * 2008-11-07 2010-05-14 Oerlikon Leybold Vacuum Gmbh Vakuumpumpenrotor
EP2775149A1 (de) * 2008-11-07 2014-09-10 Oerlikon Leybold Vacuum GmbH Vakuumpumpenrotor

Also Published As

Publication number Publication date
NL157387B (nl) 1978-07-17
DE2035063B2 (de) 1973-10-31
GB1308263A (en) 1973-02-21
US3748055A (en) 1973-07-24
JPS5224683B1 (de) 1977-07-02
BE769932A (fr) 1971-11-16
NL7109533A (de) 1972-01-18
FR2097945A5 (de) 1972-03-03
CA950872A (en) 1974-07-09
SE371867B (de) 1974-12-02
DE2035063A1 (de) 1972-01-20
DE2035063C3 (de) 1974-05-30

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Legal Events

Date Code Title Description
PL Patent ceased