EP2737107B1 - Composition de bain de nickelage autocatalytique - Google Patents
Composition de bain de nickelage autocatalytique Download PDFInfo
- Publication number
- EP2737107B1 EP2737107B1 EP12743909.9A EP12743909A EP2737107B1 EP 2737107 B1 EP2737107 B1 EP 2737107B1 EP 12743909 A EP12743909 A EP 12743909A EP 2737107 B1 EP2737107 B1 EP 2737107B1
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- EP
- European Patent Office
- Prior art keywords
- plating bath
- nickel
- ranges
- concentration
- hypophosphite
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000007747 plating Methods 0.000 title claims description 82
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 title claims description 64
- 229910052759 nickel Inorganic materials 0.000 title claims description 32
- 239000000203 mixture Substances 0.000 title claims description 23
- BHEPBYXIRTUNPN-UHFFFAOYSA-N hydridophosphorus(.) (triplet) Chemical compound [PH] BHEPBYXIRTUNPN-UHFFFAOYSA-N 0.000 claims description 28
- 229910045601 alloy Inorganic materials 0.000 claims description 22
- 239000000956 alloy Substances 0.000 claims description 22
- 239000003381 stabilizer Substances 0.000 claims description 22
- 229910052708 sodium Inorganic materials 0.000 claims description 16
- 239000011734 sodium Substances 0.000 claims description 16
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 claims description 15
- 239000000758 substrate Substances 0.000 claims description 15
- 239000008139 complexing agent Substances 0.000 claims description 13
- 229910052739 hydrogen Inorganic materials 0.000 claims description 13
- 239000001257 hydrogen Substances 0.000 claims description 13
- 125000004435 hydrogen atom Chemical class [H]* 0.000 claims description 13
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 claims description 12
- 229910052700 potassium Inorganic materials 0.000 claims description 12
- 239000011591 potassium Substances 0.000 claims description 12
- 150000002500 ions Chemical class 0.000 claims description 10
- VEQPNABPJHWNSG-UHFFFAOYSA-N Nickel(2+) Chemical compound [Ni+2] VEQPNABPJHWNSG-UHFFFAOYSA-N 0.000 claims description 8
- -1 hypophosphite compound Chemical class 0.000 claims description 8
- 229910001453 nickel ion Inorganic materials 0.000 claims description 8
- QGZKDVFQNNGYKY-UHFFFAOYSA-O Ammonium Chemical compound [NH4+] QGZKDVFQNNGYKY-UHFFFAOYSA-O 0.000 claims description 7
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 claims description 7
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 claims description 7
- 238000007772 electroless plating Methods 0.000 claims description 7
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 claims description 7
- 229910052744 lithium Inorganic materials 0.000 claims description 7
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 claims description 7
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 claims description 7
- 150000001735 carboxylic acids Chemical class 0.000 claims description 5
- 150000001875 compounds Chemical class 0.000 claims description 5
- 229910001385 heavy metal Inorganic materials 0.000 claims description 4
- KWSLGOVYXMQPPX-UHFFFAOYSA-N 5-[3-(trifluoromethyl)phenyl]-2h-tetrazole Chemical compound FC(F)(F)C1=CC=CC(C2=NNN=N2)=C1 KWSLGOVYXMQPPX-UHFFFAOYSA-N 0.000 claims description 3
- 229910052793 cadmium Inorganic materials 0.000 claims description 3
- BDOSMKKIYDKNTQ-UHFFFAOYSA-N cadmium atom Chemical compound [Cd] BDOSMKKIYDKNTQ-UHFFFAOYSA-N 0.000 claims description 3
- 229910001379 sodium hypophosphite Inorganic materials 0.000 claims description 3
- 229910052716 thallium Inorganic materials 0.000 claims description 3
- BKVIYDNLLOSFOA-UHFFFAOYSA-N thallium Chemical compound [Tl] BKVIYDNLLOSFOA-UHFFFAOYSA-N 0.000 claims description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 3
- GJYJYFHBOBUTBY-UHFFFAOYSA-N alpha-camphorene Chemical compound CC(C)=CCCC(=C)C1CCC(CCC=C(C)C)=CC1 GJYJYFHBOBUTBY-UHFFFAOYSA-N 0.000 claims description 2
- 229920000768 polyamine Polymers 0.000 claims description 2
- 229910001380 potassium hypophosphite Inorganic materials 0.000 claims description 2
- CRGPNLUFHHUKCM-UHFFFAOYSA-M potassium phosphinate Chemical compound [K+].[O-]P=O CRGPNLUFHHUKCM-UHFFFAOYSA-M 0.000 claims description 2
- 238000000034 method Methods 0.000 claims 2
- 229910052787 antimony Inorganic materials 0.000 claims 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 claims 1
- 238000000151 deposition Methods 0.000 claims 1
- ISIJQEHRDSCQIU-UHFFFAOYSA-N tert-butyl 2,7-diazaspiro[4.5]decane-7-carboxylate Chemical compound C1N(C(=O)OC(C)(C)C)CCCC11CNCC1 ISIJQEHRDSCQIU-UHFFFAOYSA-N 0.000 claims 1
- UMGDCJDMYOKAJW-UHFFFAOYSA-N thiourea Chemical compound NC(N)=S UMGDCJDMYOKAJW-UHFFFAOYSA-N 0.000 description 12
- 239000000243 solution Substances 0.000 description 10
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 9
- 230000008021 deposition Effects 0.000 description 9
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 8
- XSQUKJJJFZCRTK-UHFFFAOYSA-N Urea Natural products NC(N)=O XSQUKJJJFZCRTK-UHFFFAOYSA-N 0.000 description 6
- 239000003638 chemical reducing agent Substances 0.000 description 6
- JVTAAEKCZFNVCJ-UHFFFAOYSA-N lactic acid Chemical compound CC(O)C(O)=O JVTAAEKCZFNVCJ-UHFFFAOYSA-N 0.000 description 6
- BJEPYKJPYRNKOW-UHFFFAOYSA-N malic acid Chemical compound OC(=O)C(O)CC(O)=O BJEPYKJPYRNKOW-UHFFFAOYSA-N 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 5
- 238000013019 agitation Methods 0.000 description 4
- 229910021529 ammonia Inorganic materials 0.000 description 4
- 239000007864 aqueous solution Substances 0.000 description 4
- 239000000080 wetting agent Substances 0.000 description 4
- 239000000654 additive Substances 0.000 description 3
- 239000000470 constituent Substances 0.000 description 3
- 235000014655 lactic acid Nutrition 0.000 description 3
- 235000011090 malic acid Nutrition 0.000 description 3
- BJEPYKJPYRNKOW-REOHCLBHSA-N (S)-malic acid Chemical compound OC(=O)[C@@H](O)CC(O)=O BJEPYKJPYRNKOW-REOHCLBHSA-N 0.000 description 2
- OBDVFOBWBHMJDG-UHFFFAOYSA-N 3-mercapto-1-propanesulfonic acid Chemical compound OS(=O)(=O)CCCS OBDVFOBWBHMJDG-UHFFFAOYSA-N 0.000 description 2
- QNAYBMKLOCPYGJ-UHFFFAOYSA-N Alanine Chemical compound CC([NH3+])C([O-])=O QNAYBMKLOCPYGJ-UHFFFAOYSA-N 0.000 description 2
- KCXVZYZYPLLWCC-UHFFFAOYSA-N EDTA Chemical compound OC(=O)CN(CC(O)=O)CCN(CC(O)=O)CC(O)=O KCXVZYZYPLLWCC-UHFFFAOYSA-N 0.000 description 2
- DHMQDGOQFOQNFH-UHFFFAOYSA-N Glycine Chemical compound NCC(O)=O DHMQDGOQFOQNFH-UHFFFAOYSA-N 0.000 description 2
- AEMRFAOFKBGASW-UHFFFAOYSA-N Glycolic acid Chemical compound OCC(O)=O AEMRFAOFKBGASW-UHFFFAOYSA-N 0.000 description 2
- 230000002378 acidificating effect Effects 0.000 description 2
- 230000000996 additive effect Effects 0.000 description 2
- 229910001439 antimony ion Inorganic materials 0.000 description 2
- 239000000872 buffer Substances 0.000 description 2
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 description 2
- XBDQKXXYIPTUBI-UHFFFAOYSA-N dimethylselenoniopropionate Natural products CCC(O)=O XBDQKXXYIPTUBI-UHFFFAOYSA-N 0.000 description 2
- 229960001484 edetic acid Drugs 0.000 description 2
- 239000004310 lactic acid Substances 0.000 description 2
- 239000001630 malic acid Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 150000002763 monocarboxylic acids Chemical class 0.000 description 2
- LGQLOGILCSXPEA-UHFFFAOYSA-L nickel sulfate Chemical compound [Ni+2].[O-]S([O-])(=O)=O LGQLOGILCSXPEA-UHFFFAOYSA-L 0.000 description 2
- 229910000363 nickel(II) sulfate Inorganic materials 0.000 description 2
- 230000000737 periodic effect Effects 0.000 description 2
- ACVYVLVWPXVTIT-UHFFFAOYSA-M phosphinate Chemical compound [O-][PH2]=O ACVYVLVWPXVTIT-UHFFFAOYSA-M 0.000 description 2
- ACVYVLVWPXVTIT-UHFFFAOYSA-N phosphinic acid Chemical group O[PH2]=O ACVYVLVWPXVTIT-UHFFFAOYSA-N 0.000 description 2
- 238000002203 pretreatment Methods 0.000 description 2
- 150000003839 salts Chemical class 0.000 description 2
- 150000000000 tetracarboxylic acids Chemical class 0.000 description 2
- 231100000331 toxic Toxicity 0.000 description 2
- 230000002588 toxic effect Effects 0.000 description 2
- 150000003628 tricarboxylic acids Chemical class 0.000 description 2
- 230000007306 turnover Effects 0.000 description 2
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical class [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 1
- BVKZGUZCCUSVTD-UHFFFAOYSA-M Bicarbonate Chemical class OC([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-M 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- CKLJMWTZIZZHCS-UHFFFAOYSA-N D-OH-Asp Natural products OC(=O)C(N)CC(O)=O CKLJMWTZIZZHCS-UHFFFAOYSA-N 0.000 description 1
- FEWJPZIEWOKRBE-JCYAYHJZSA-N Dextrotartaric acid Chemical compound OC(=O)[C@H](O)[C@@H](O)C(O)=O FEWJPZIEWOKRBE-JCYAYHJZSA-N 0.000 description 1
- 239000004129 EU approved improving agent Substances 0.000 description 1
- CKLJMWTZIZZHCS-REOHCLBHSA-N L-aspartic acid Chemical compound OC(=O)[C@@H](N)CC(O)=O CKLJMWTZIZZHCS-REOHCLBHSA-N 0.000 description 1
- 229910001096 P alloy Inorganic materials 0.000 description 1
- OFOBLEOULBTSOW-UHFFFAOYSA-N Propanedioic acid Natural products OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 description 1
- KDYFGRWQOYBRFD-UHFFFAOYSA-N Succinic acid Natural products OC(=O)CCC(O)=O KDYFGRWQOYBRFD-UHFFFAOYSA-N 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- FEWJPZIEWOKRBE-UHFFFAOYSA-N Tartaric acid Natural products [H+].[H+].[O-]C(=O)C(O)C(O)C([O-])=O FEWJPZIEWOKRBE-UHFFFAOYSA-N 0.000 description 1
- 229960000583 acetic acid Drugs 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- 125000003277 amino group Chemical group 0.000 description 1
- 235000011114 ammonium hydroxide Nutrition 0.000 description 1
- 150000003863 ammonium salts Chemical class 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 1
- KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical compound OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 description 1
- 239000004327 boric acid Substances 0.000 description 1
- 238000005282 brightening Methods 0.000 description 1
- 239000006172 buffering agent Substances 0.000 description 1
- KDYFGRWQOYBRFD-NUQCWPJISA-N butanedioic acid Chemical compound O[14C](=O)CC[14C](O)=O KDYFGRWQOYBRFD-NUQCWPJISA-N 0.000 description 1
- 150000004649 carbonic acid derivatives Chemical class 0.000 description 1
- 239000003183 carcinogenic agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 150000001991 dicarboxylic acids Chemical class 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- HCPOCMMGKBZWSJ-UHFFFAOYSA-N ethyl 3-hydrazinyl-3-oxopropanoate Chemical compound CCOC(=O)CC(=O)NN HCPOCMMGKBZWSJ-UHFFFAOYSA-N 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 229960002449 glycine Drugs 0.000 description 1
- 235000013905 glycine and its sodium salt Nutrition 0.000 description 1
- 229960004275 glycolic acid Drugs 0.000 description 1
- 125000004356 hydroxy functional group Chemical group O* 0.000 description 1
- 238000011534 incubation Methods 0.000 description 1
- 229910001410 inorganic ion Inorganic materials 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- OFNHPGDEEMZPFG-UHFFFAOYSA-N phosphanylidynenickel Chemical compound [P].[Ni] OFNHPGDEEMZPFG-UHFFFAOYSA-N 0.000 description 1
- 235000011118 potassium hydroxide Nutrition 0.000 description 1
- 235000019260 propionic acid Nutrition 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- IUVKMZGDUIUOCP-BTNSXGMBSA-N quinbolone Chemical compound O([C@H]1CC[C@H]2[C@H]3[C@@H]([C@]4(C=CC(=O)C=C4CC3)C)CC[C@@]21C)C1=CCCC1 IUVKMZGDUIUOCP-BTNSXGMBSA-N 0.000 description 1
- 235000011121 sodium hydroxide Nutrition 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 125000001424 substituent group Chemical group 0.000 description 1
- BDHFUVZGWQCTTF-UHFFFAOYSA-M sulfonate Chemical compound [O-]S(=O)=O BDHFUVZGWQCTTF-UHFFFAOYSA-M 0.000 description 1
- 150000003460 sulfonic acids Chemical class 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 235000002906 tartaric acid Nutrition 0.000 description 1
- 239000011975 tartaric acid Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/31—Coating with metals
- C23C18/32—Coating with nickel, cobalt or mixtures thereof with phosphorus or boron
- C23C18/34—Coating with nickel, cobalt or mixtures thereof with phosphorus or boron using reducing agents
- C23C18/36—Coating with nickel, cobalt or mixtures thereof with phosphorus or boron using reducing agents using hypophosphites
Definitions
- the present invention relates to an aqueous plating bath composition for the electroless deposition of nickel phosphorous alloys.
- Electroless plating of nickel-phosphorous alloys is used in various industries.
- the deposits derived are used e.g. as wear resistant coatings and barrier layers.
- Such plating bath compositions generally comprise a source of nickel ions, a hypophosphite compound as the reducing agent, at least one complexing agent and at least one stabilizing agent.
- the at least one stabilizing agent present is required in order to provide a sufficient bath lifetime, a reasonable deposition rate and to control the phosphorous content in the as deposited nickel phosphorous alloy.
- plating baths for deposition of nickel-phosphorous alloys known in the art comprise more than one stabilizing agent.
- Common stabilizing agents are selected from heavy metal ions such as cadmium, thallium, bismuth, lead and antimony ions, inorganic ions such as SCN- and various organic compounds such as thiourea.
- the patent document US 2,830,014 discloses plating bath compositions for electroplating of nickel which comprise thioalkane sulfonic acids or salts thereof such as mercaptopropane-1-sodium sulfonate as brightening and ductility-improving agents.
- the patent application US 2005/0013928 A1 discloses an electroless plating pre-treatment solution which comprises 3-mercaptopropanesulfonic acid.
- the pre-treatment solution reduces the incubation time (time from the start of the supply of an electroless plating solution to the start of the plating reaction) of nickel plating from an electroless plating bath on a copper surface.
- the patent application US 2006/024043 A1 discloses an alkaline aqueous plating bath for deposition of nickel phosphorous alloys which optionally comprises further additives such as thiourea and/or 3-mercapto-1-propane sulfonic acid. Such plating bath compositions are not acceptable for industrial applications (see Examples 2 to 5). Furthermore, thiourea is a carcinogenic substance.
- CH620710 discloses an acidic electroless nickel plating bath comprising hypophosphite, complexing agent and a sulfur containing stabilising agent, namely thiourea, whereby a deposition of a nickel phosphorous alloy having a phosphorous concentration in the range between 7 and 10 wt.% is given.
- an aqueous plating bath composition according to claim 1 for electroless plating of a nickel phosphorous alloy comprising
- a nickel phosphorous alloy having a phosphorous content in the range of 5 to 12 wt.-% of phosphorous is derived by electroless plating.
- the aqueous plating bath composition according to the present invention comprises a water soluble source of nickel ions such as nickel sulfate, a reducing agent such as sodium hypophosphite, at least one complexing agent and a stabilizing agent selected from compounds according to formulae (1) and (2).
- the concentration of nickel ions ranges from 1 to 18 g/l, more preferably from 3 to 9 g/l.
- the reducing agent is selected from hypophosphite compounds such as hypophosphorous acid or a bath soluble salt thereof such as sodium hypophosphite, potassium hypophosphite and ammonium hypophosphite.
- the amount of the reducing agent employed in the plating bath ranges from 2 to 60 g/l, more preferably from 12 to 50 g/l and most preferably from 20 to 45 g/l. As a conventional practice the reducing agent is replenished during the reaction.
- the complexing agents are employed in amounts of 1 to 200 g/l, more preferably from 15 to 75 g/l.
- carboxylic acids, polyamines or mixtures thereof are selected as complexing agents.
- Useful carboxylic acids include mono-, di-, tri- and tetra-carboxylic acids.
- the carboxylic acids may be substituted with various substituent moieties such as hydroxy or amino groups and the acids may be introduced into the plating solutions as their sodium, potassium or ammonium salts.
- Some complexing agents such as acetic acid, for example, may also act as a buffering agent, and the appropriate concentration of such additive components can be optimised for any plating solution in consideration of their dual functionality.
- carboxylic acids which are useful as the complexing agents include: monocarboxylic acids such as acetic acid, hydroxyacetic acid, aminoacetic acid, 2-amino propanoic acid, 2-hydroxy propanoic acid, lactic acid; dicarboxylic acids such as succinic acid, amino succinic acid, hydroxy succinic acid, propanedioic acid, hydroxybutanedioic acid, tartaric acid, malic acid; tricarboxylic acids such as 2-hydroxy-1,2,3 propane tricarboxylic acid; and tetra-carboxylic acids such as ethylene diamine tetra acetic acid (EDTA).
- monocarboxylic acids such as acetic acid, hydroxyacetic acid, aminoacetic acid, 2-amino propanoic acid, 2-hydroxy propanoic acid, lactic acid
- dicarboxylic acids such as succinic acid, amino succinic acid, hydroxy succinic acid, propanedioic acid, hydroxybutaned
- the most preferred complexing agents are selected from the group consisting of mono-carboxylic acids and di-carboxylic acids.
- mixtures of two or more of the above complexing agents are utilized.
- the stabilizing agent is selected from compounds according to formulae (1) and (2): R 1 S-(CH 2 ) n -SO 3 R 2 (1) R 3 SO 3 -(CH 2 ) m -S-S-(CH 2 ) m -SO 3 R 3 (2) wherein
- R 1 is selected from the group consisting of hydrogen, sodium and potassium.
- n ranges from 2 to 4.
- R 2 is selected from the group consisting of hydrogen, sodium and potassium.
- R 3 is selected from the group consisting of hydrogen, sodium and potassium.
- m ranges from 2 to 4.
- the concentration of the stabilizing agent according to formulae (1) and (2) in the plating bath composition ranges from 1 to 100 ppm, more preferably from 2 to 50 ppm and most preferably from 3 to 30 ppm.
- the pH may be periodically or continuously adjusted by adding bath-soluble and bath-compatible alkaline substances such as sodium, potassium or ammonium hydroxides, carbonates and bicarbonates.
- bath-soluble and bath-compatible alkaline substances such as sodium, potassium or ammonium hydroxides, carbonates and bicarbonates.
- the stability of the operating pH of the plating solutions can be improved by the addition of various buffer compounds such as acetic acid, propionic acid, boric acid, or the like, in amounts of up to 30 g/l, more preferably from 2 to 10 g/l.
- the pH value of the aqueous plating bath according to the present invention preferably ranges from 3.5 to 6.5, more preferably from 4 to 6.
- nickel plating solutions such as buffers and wetting agents. These materials are known in the art.
- the nickel plating solutions optionally may employ one or more wetting agents of any of the various types heretofore known which are soluble and compatible with the other bath constituents.
- wetting agents prevents or hinders pitting of the nickel phosphorous alloy deposit, and the wetting agents can be employed in amounts up to about 1 g/l.
- the substrate to be plated is contacted with the plating bath at a temperature of at least 40°C up to 95 °C.
- the electroless nickel plating baths according to the present invention are employed, in one embodiment, at a temperature of from 70°C to 95°C, and more often, at a temperature of from 80°C to 90°C.
- the duration of contact of the electroless nickel plating bath with the substrate being plated is a function which is dependent on the desired thickness of the nickel phosphorus alloy.
- a contact time can range from 1 to 30 min.
- the substrate to be coated with a nickel phosphorous alloy can be contacted with the plating bath according to the present invention by dipping the substrate into the plating bath or by spraying the plating bath onto the substrate.
- mild agitation may be employed. Agitation may be a mild air agitation, mechanical agitation, bath circulation by pumping, rotation of a barrel plating, etc.
- the plating solution may also be subjected to a periodic or continuous filtration treatment to reduce the level of contaminants therein. Replenishment of the constituents of the bath may also be performed, in some embodiments, on a periodic or continuous basis to maintain the concentration of constituents, and in particular, the concentration of nickel ions and hypophosphite ions, as well as the pH level within the desired limits.
- the phosphorous concentration in the deposited nickel phosphorous alloys increases from 7.0 wt.-% at 1 MTO to 8.3 wt.-% at 3 MTO.
- the plating rate of this plating bath is 0 ⁇ m/h.
- the plating rate of this plating bath is 0 ⁇ m/h.
- the plating rate of this plating bath is 0 ⁇ m/h.
- the plating rate of this plating bath is 0 ⁇ m/h.
- the stabilizing agent according to the present invention shows the desired properties in respect to the stable phosphorous concentration in the deposited nickel phosphorous alloy layers when using the plating bath. Furthermore, the plating rate is sufficient for industrial application.
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- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemically Coating (AREA)
Claims (8)
- Composition de bain aqueux de placage pour le dépôt autocatalytique d'un alliage de nickel-phosphore, le bain de placage comprenant(i) une source hydrosoluble d'ions nickel,(ii) un composé hypophosphite,(iii) au moins un agent complexant choisi dans le groupe comprenant les acides carboxyliques, les polyamines et les mélanges de ceux-ci et(iv) un agent stabilisant choisi dans le groupe constitué des composés répondant aux formules (1) et (2) :et ayant une valeur de pH dans la plage de 3,5 à 6,5, dans laquelle la concentration de l'agent stabilisant répondant aux formules (1) et (2) va de 1 à 100 ppm.
R1S-(CH2)n-SO3R2 (1)
R3SO3-(CH2)m-S-S-(CH2)m-SO3R3 (2)
dans lesquellesR1, R2 et R3 sont indépendamment choisis dans le groupe constitué par l'atome d'hydrogène, le groupe méthyle, le groupe éthyle, le groupe propyle, le groupe butyle, l'ion lithium, l'ion sodium, l'ion potassium et l'ion ammonium,n va de 1 à 6 etm va de 1 à 6 - Bain aqueux de placage selon la revendication 1 dans lequel la concentration d'ions nickel va de 1 à
- Composition de bain aqueux de placage selon l'une quelconque des revendications précédentes dans laquelle le composé hypophosphite est choisi dans le groupe comprenant l'acide phosphoreux, l'hypophosphite de sodium, l'hypophosphite de potassium et l'hypophosphite d'ammonium.
- Bain aqueux de placage selon l'une quelconque des revendications précédentes dans lequel la concentration du composé hypophosphite va de 2 à 60 g/l.
- Bain aqueux de placage selon l'une quelconque des revendications précédentes dans lequel la concentration de l'au moins un agent complexant va de 1 à 200 g/l.
- Bain aqueux de placage selon l'une quelconque des revendications précédentes dans lequel la composition de bain de placage est exempte d'ions de métaux lourds choisis parmi le cadmium, le thallium, le plomb et l'antimoine.
- Bain aqueux de placage selon l'une quelconque des revendications précédentes ayant une valeur de pH dans la plage de 4 à 6.
- Procédé pour le dépôt d'un alliage de nickel-phosphore ayant une concentration en phosphore dans la plage de 5 à 12 % en poids, le procédé comprenant les étapes consistant à(i) fournir un substrat et(ii) mettre en contact ledit substrat avec un bain aqueux de placage selon les revendications 1 à 7.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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EP12743909.9A EP2737107B1 (fr) | 2011-07-26 | 2012-07-04 | Composition de bain de nickelage autocatalytique |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP11175295A EP2551375A1 (fr) | 2011-07-26 | 2011-07-26 | Composition de bain pour placage autocatalytique de nickel |
EP12743909.9A EP2737107B1 (fr) | 2011-07-26 | 2012-07-04 | Composition de bain de nickelage autocatalytique |
PCT/EP2012/062967 WO2013013941A1 (fr) | 2011-07-26 | 2012-07-04 | Composition de bain de nickelage autocatalytique |
Publications (2)
Publication Number | Publication Date |
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EP2737107A1 EP2737107A1 (fr) | 2014-06-04 |
EP2737107B1 true EP2737107B1 (fr) | 2015-09-09 |
Family
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Family Applications (2)
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EP11175295A Withdrawn EP2551375A1 (fr) | 2011-07-26 | 2011-07-26 | Composition de bain pour placage autocatalytique de nickel |
EP12743909.9A Active EP2737107B1 (fr) | 2011-07-26 | 2012-07-04 | Composition de bain de nickelage autocatalytique |
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EP11175295A Withdrawn EP2551375A1 (fr) | 2011-07-26 | 2011-07-26 | Composition de bain pour placage autocatalytique de nickel |
Country Status (7)
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US (1) | US20140150689A1 (fr) |
EP (2) | EP2551375A1 (fr) |
JP (1) | JP6053785B2 (fr) |
KR (1) | KR101936977B1 (fr) |
CN (1) | CN103946420B (fr) |
TW (1) | TWI555878B (fr) |
WO (1) | WO2013013941A1 (fr) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2551375A1 (fr) | 2011-07-26 | 2013-01-30 | Atotech Deutschland GmbH | Composition de bain pour placage autocatalytique de nickel |
US11685999B2 (en) | 2014-06-02 | 2023-06-27 | Macdermid Acumen, Inc. | Aqueous electroless nickel plating bath and method of using the same |
CN104152877B (zh) * | 2014-07-17 | 2017-02-15 | 广东致卓精密金属科技有限公司 | 一种化学镀镍液 |
ES2639300T3 (es) | 2014-12-16 | 2017-10-26 | Atotech Deutschland Gmbh | Composiciones de baño de chapado para el chapado no electrolítico de metales y aleaciones metálicas |
SG11201706122SA (en) | 2015-03-20 | 2017-10-30 | Atotech Deutschland Gmbh | Activation method for silicon substrates |
EP3190208B1 (fr) * | 2016-01-06 | 2018-09-12 | ATOTECH Deutschland GmbH | Bains de nickelage autocatalytique comprenant des aminonitriles et procédé de dépôt de nickel et d'alliages de nickel |
Citations (6)
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CH620710A5 (en) | 1975-10-06 | 1980-12-15 | Fedor Petrovich Potapov | Process for chemical nickel-plating of workpieces having a catalytic surface, and installation for carrying out the process |
GB2155041A (en) | 1984-03-05 | 1985-09-18 | Omi Int Corp | Aqueous electroless nickel plating |
EP1489201A2 (fr) | 2003-06-18 | 2004-12-22 | Raschig GmbH | Alcoxylats d'alkylamines substitués par un groupe propanesulfonique ou 2-hydroxy-propanesulfonique, leur preparation et utilisation comme additives pour la déposition des couches métalliques |
US20060264043A1 (en) | 2005-03-18 | 2006-11-23 | Stewart Michael P | Electroless deposition process on a silicon contact |
WO2010069810A1 (fr) | 2008-12-19 | 2010-06-24 | Basf Se | Composition pour dépôt électrolytique de métaux comprenant un agent d'écoulement |
EP2551375A1 (fr) | 2011-07-26 | 2013-01-30 | Atotech Deutschland GmbH | Composition de bain pour placage autocatalytique de nickel |
Family Cites Families (13)
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DE1075398B (de) | 1954-03-22 | 1960-02-11 | DEHYDAG Deutsche Hydrierwerke G.m.b.H., Düsseldorf | Bad zur galvanischen Herstellung von Metallüberzügen |
JPS502861B1 (fr) * | 1970-05-09 | 1975-01-29 | ||
US4150180A (en) * | 1975-12-08 | 1979-04-17 | Potapov Fedor P | Method for chemical nickel-plating of parts having a catalytic surface employing a vessel having an upper heated zone and a lower cooled zone |
US4483711A (en) * | 1983-06-17 | 1984-11-20 | Omi International Corporation | Aqueous electroless nickel plating bath and process |
TW390915B (en) * | 1995-10-23 | 2000-05-21 | Uyemura C & Co Ltd | Electroless nickel plating solution and method |
JP3594894B2 (ja) * | 2000-02-01 | 2004-12-02 | 新光電気工業株式会社 | ビアフィリングめっき方法 |
JP2005036285A (ja) | 2003-07-15 | 2005-02-10 | Tokyo Electron Ltd | 無電解メッキ用前処理液及び無電解メッキ方法 |
JP4731851B2 (ja) | 2004-07-28 | 2011-07-27 | キヤノン株式会社 | 画像転送システム |
CA2575410A1 (fr) * | 2004-07-30 | 2006-02-09 | Ultra-Scan Corporation | Systeme et procedes de gestion de dossiers medicaux |
KR100961011B1 (ko) * | 2005-10-07 | 2010-06-01 | 닛코킨조쿠 가부시키가이샤 | 무전해 니켈 도금액 |
TWI348499B (en) * | 2006-07-07 | 2011-09-11 | Rohm & Haas Elect Mat | Electroless copper and redox couples |
EP2145986B1 (fr) * | 2008-07-15 | 2010-03-24 | Atotech Deutschland Gmbh | Solution et procédé pour le dépôt électrochimique d'un métal sur un substrat |
ATE503037T1 (de) * | 2008-10-17 | 2011-04-15 | Atotech Deutschland Gmbh | Spannungsreduzierte ni-p/pd-stapel für waferoberfläche |
-
2011
- 2011-07-26 EP EP11175295A patent/EP2551375A1/fr not_active Withdrawn
-
2012
- 2012-07-04 EP EP12743909.9A patent/EP2737107B1/fr active Active
- 2012-07-04 KR KR1020147001368A patent/KR101936977B1/ko active IP Right Grant
- 2012-07-04 WO PCT/EP2012/062967 patent/WO2013013941A1/fr active Application Filing
- 2012-07-04 CN CN201280036718.5A patent/CN103946420B/zh active Active
- 2012-07-04 JP JP2014522015A patent/JP6053785B2/ja active Active
- 2012-07-04 US US14/131,949 patent/US20140150689A1/en not_active Abandoned
- 2012-07-26 TW TW101127003A patent/TWI555878B/zh active
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CH620710A5 (en) | 1975-10-06 | 1980-12-15 | Fedor Petrovich Potapov | Process for chemical nickel-plating of workpieces having a catalytic surface, and installation for carrying out the process |
GB2155041A (en) | 1984-03-05 | 1985-09-18 | Omi Int Corp | Aqueous electroless nickel plating |
EP1489201A2 (fr) | 2003-06-18 | 2004-12-22 | Raschig GmbH | Alcoxylats d'alkylamines substitués par un groupe propanesulfonique ou 2-hydroxy-propanesulfonique, leur preparation et utilisation comme additives pour la déposition des couches métalliques |
US20060264043A1 (en) | 2005-03-18 | 2006-11-23 | Stewart Michael P | Electroless deposition process on a silicon contact |
WO2010069810A1 (fr) | 2008-12-19 | 2010-06-24 | Basf Se | Composition pour dépôt électrolytique de métaux comprenant un agent d'écoulement |
EP2551375A1 (fr) | 2011-07-26 | 2013-01-30 | Atotech Deutschland GmbH | Composition de bain pour placage autocatalytique de nickel |
Non-Patent Citations (4)
Title |
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GLENN O. MALLO RY ET AL.: "Electroless Plating: Fundamentals and Applications", ELECTROLESS PLATING: FUNDAMENTALS AND APPLICATIONS, 1990, XP055290733 |
H.-P. LIU ET AL.: "Effect of organic additives on the corrosion resistance properties of electroless nickel deposits", THIN SOLID FILMS, vol. 516, 2008, pages 1883 - 1889, XP022449729 |
LIU ET AL.: "Effect of organic additives on the corrosion resistance properties of electroless nickel deposits", THIN SOLID FILMS, 11 October 2007 (2007-10-11), pages 1883 - 1889, XP022449729 |
MALLORY ET AL.: "Electroless Plating: Fundamentals and Applications", AMERICAN ELECTROPLATERS AND SURFACE FINISHERS SOCIETY, 1990, pages 1 - 3, XP055290733 |
Also Published As
Publication number | Publication date |
---|---|
TWI555878B (zh) | 2016-11-01 |
EP2551375A1 (fr) | 2013-01-30 |
KR101936977B1 (ko) | 2019-01-09 |
CN103946420B (zh) | 2015-11-25 |
US20140150689A1 (en) | 2014-06-05 |
WO2013013941A1 (fr) | 2013-01-31 |
EP2737107A1 (fr) | 2014-06-04 |
CN103946420A (zh) | 2014-07-23 |
JP6053785B2 (ja) | 2016-12-27 |
KR20140041762A (ko) | 2014-04-04 |
TW201309844A (zh) | 2013-03-01 |
JP2014521834A (ja) | 2014-08-28 |
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