EP2676916A4 - Hochbahn-transportfahrzeug - Google Patents

Hochbahn-transportfahrzeug

Info

Publication number
EP2676916A4
EP2676916A4 EP11858523.1A EP11858523A EP2676916A4 EP 2676916 A4 EP2676916 A4 EP 2676916A4 EP 11858523 A EP11858523 A EP 11858523A EP 2676916 A4 EP2676916 A4 EP 2676916A4
Authority
EP
European Patent Office
Prior art keywords
transport vehicle
overhead transport
overhead
vehicle
transport
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP11858523.1A
Other languages
English (en)
French (fr)
Other versions
EP2676916B1 (de
EP2676916A1 (de
Inventor
Makoto Kobayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Machinery Ltd
Original Assignee
Murata Machinery Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Machinery Ltd filed Critical Murata Machinery Ltd
Publication of EP2676916A1 publication Critical patent/EP2676916A1/de
Publication of EP2676916A4 publication Critical patent/EP2676916A4/de
Application granted granted Critical
Publication of EP2676916B1 publication Critical patent/EP2676916B1/de
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B61—RAILWAYS
    • B61B—RAILWAY SYSTEMS; EQUIPMENT THEREFOR NOT OTHERWISE PROVIDED FOR
    • B61B3/00—Elevated railway systems with suspended vehicles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B66—HOISTING; LIFTING; HAULING
    • B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
    • B66C13/00—Other constructional features or details
    • B66C13/04—Auxiliary devices for controlling movements of suspended loads, or preventing cable slack
    • B66C13/06—Auxiliary devices for controlling movements of suspended loads, or preventing cable slack for minimising or preventing longitudinal or transverse swinging of loads
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67733—Overhead conveying

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Transportation (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Carriers, Traveling Bodies, And Overhead Traveling Cranes (AREA)
  • Load-Engaging Elements For Cranes (AREA)
  • Machines For Laying And Maintaining Railways (AREA)
  • Chain Conveyers (AREA)
EP11858523.1A 2011-02-15 2011-12-08 Hochbahn-transportfahrzeug Not-in-force EP2676916B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2011029674A JP5750926B2 (ja) 2011-02-15 2011-02-15 天井搬送車
PCT/JP2011/078410 WO2012111221A1 (ja) 2011-02-15 2011-12-08 天井搬送車

Publications (3)

Publication Number Publication Date
EP2676916A1 EP2676916A1 (de) 2013-12-25
EP2676916A4 true EP2676916A4 (de) 2014-09-17
EP2676916B1 EP2676916B1 (de) 2017-03-01

Family

ID=46672171

Family Applications (1)

Application Number Title Priority Date Filing Date
EP11858523.1A Not-in-force EP2676916B1 (de) 2011-02-15 2011-12-08 Hochbahn-transportfahrzeug

Country Status (8)

Country Link
US (1) US8726811B2 (de)
EP (1) EP2676916B1 (de)
JP (1) JP5750926B2 (de)
KR (1) KR101532993B1 (de)
CN (1) CN103370272B (de)
SG (1) SG192035A1 (de)
TW (1) TWI543924B (de)
WO (1) WO2012111221A1 (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5273118B2 (ja) * 2010-10-04 2013-08-28 村田機械株式会社 搬送車及び搬送システム
JP5750926B2 (ja) * 2011-02-15 2015-07-22 村田機械株式会社 天井搬送車
CN105899444B (zh) * 2014-01-07 2017-11-10 村田机械株式会社 移载装置以及移载装置的控制方法
JP6477439B2 (ja) * 2015-11-17 2019-03-06 株式会社ダイフク 物品搬送設備
JP6471702B2 (ja) * 2016-01-12 2019-02-20 株式会社ダイフク 物品搬送装置
CN105668171B (zh) * 2016-03-31 2018-02-16 广东科技学院 传菜系统
US11084505B2 (en) 2017-02-06 2021-08-10 Murata Machinery, Ltd. Overhead conveyance vehicle
US10557262B2 (en) 2017-06-16 2020-02-11 Mccain Manufacturing, Inc. Modular panels and related elements to form a variety of wall segments and enclosures
JP6717275B2 (ja) * 2017-09-19 2020-07-01 井関農機株式会社 作業車両
KR102392495B1 (ko) 2018-01-24 2022-04-29 무라다기카이가부시끼가이샤 반송차
US20210039684A1 (en) * 2018-02-01 2021-02-11 Carl Anthony Salmon Multifunctional Track System With Independently Movable Vehicles
KR102615063B1 (ko) 2018-03-08 2023-12-19 엘지전자 주식회사 워터 디스펜싱 장치
JP6881486B2 (ja) * 2019-02-27 2021-06-02 村田機械株式会社 搬送車
JP7224728B2 (ja) * 2019-04-23 2023-02-20 株式会社ディスコ 搬送システム
US11570958B2 (en) * 2019-09-20 2023-02-07 Mjnn Llc Catch mechanism facilitating loading of vertical grow towers onto grow lines in a vertical farm system
KR102412362B1 (ko) * 2020-09-08 2022-06-23 주식회사 에스에프에이 이송대차 및 이를 구비하는 이송대차 시스템

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6111626U (ja) * 1984-06-27 1986-01-23 株式会社東芝 受渡装置
US20030127410A1 (en) * 2001-11-30 2003-07-10 Murata Kikai Kabushiki Kaisha Overhead travelling carriage
US20040253087A1 (en) * 2003-05-20 2004-12-16 Daifuku Co., Ltd. Transport apparatus
JP2009040563A (ja) * 2007-08-09 2009-02-26 Asyst Technologies Japan Inc 押さえ機構及び搬送装置

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2402258C3 (de) 1973-04-14 1980-01-03 Chemische Fabrik Pfersee Gmbh, 8900 Augsburg Verwendung von Kondensationsprodukten zum Behändem von Textilmaterialien
JPS503199U (de) * 1973-05-07 1975-01-14
EP2615625B2 (de) * 2002-10-11 2017-05-31 Murata Machinery, Ltd. Hängefahrzeug für ein automatisiertes Materialhandhabungssystem
JP4123383B2 (ja) * 2004-08-12 2008-07-23 村田機械株式会社 天井走行車システム
JP4794854B2 (ja) * 2004-12-14 2011-10-19 古河機械金属株式会社 ドラムのワイヤロープ乱巻防止装置
JP4221603B2 (ja) * 2005-03-31 2009-02-12 村田機械株式会社 天井走行車システム
JP4394027B2 (ja) * 2005-04-05 2010-01-06 村田機械株式会社 天井走行車システム
JP4720267B2 (ja) * 2005-04-14 2011-07-13 村田機械株式会社 天井走行車システム
JP2007191235A (ja) * 2006-01-17 2007-08-02 Murata Mach Ltd 天井走行車システム
JP4688824B2 (ja) * 2007-01-12 2011-05-25 村田機械株式会社 天井走行車システム及び天井走行車システムの周囲の処理装置の搬出入方法
JP4807424B2 (ja) * 2009-03-17 2011-11-02 村田機械株式会社 天井搬送システムと物品の移載方法
JP5518513B2 (ja) * 2010-02-04 2014-06-11 平田機工株式会社 フープオープナ及びその動作方法
EP2554494B1 (de) * 2010-04-02 2020-02-05 Murata Machinery, Ltd. Seitlicher dämpfer für ein entlang einer decke fahrendes transportfahrzeug und transportfahrzeugsystem
JP5273118B2 (ja) * 2010-10-04 2013-08-28 村田機械株式会社 搬送車及び搬送システム
JP5750926B2 (ja) * 2011-02-15 2015-07-22 村田機械株式会社 天井搬送車
US9360772B2 (en) * 2011-12-29 2016-06-07 Nikon Corporation Carrier method, exposure method, carrier system and exposure apparatus, and device manufacturing method

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6111626U (ja) * 1984-06-27 1986-01-23 株式会社東芝 受渡装置
US20030127410A1 (en) * 2001-11-30 2003-07-10 Murata Kikai Kabushiki Kaisha Overhead travelling carriage
US20040253087A1 (en) * 2003-05-20 2004-12-16 Daifuku Co., Ltd. Transport apparatus
JP2009040563A (ja) * 2007-08-09 2009-02-26 Asyst Technologies Japan Inc 押さえ機構及び搬送装置

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2012111221A1 *

Also Published As

Publication number Publication date
EP2676916B1 (de) 2017-03-01
CN103370272A (zh) 2013-10-23
KR101532993B1 (ko) 2015-07-01
CN103370272B (zh) 2015-04-15
WO2012111221A1 (ja) 2012-08-23
TW201236961A (en) 2012-09-16
EP2676916A1 (de) 2013-12-25
SG192035A1 (en) 2013-08-30
JP5750926B2 (ja) 2015-07-22
US8726811B2 (en) 2014-05-20
US20140047995A1 (en) 2014-02-20
JP2012166911A (ja) 2012-09-06
KR20130126692A (ko) 2013-11-20
TWI543924B (zh) 2016-08-01

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