Classifications

• • G—PHYSICS
  • G01—MEASURING; TESTING
  • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
  • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
  • G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
  • G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
  • G01N23/041—Phase-contrast imaging, e.g. using grating interferometers
• • G—PHYSICS
  • G01—MEASURING; TESTING
  • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
  • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
  • G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
  • G01N23/06—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and measuring the absorption
  • G01N23/083—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and measuring the absorption the radiation being X-rays
• • G—PHYSICS
  • G01—MEASURING; TESTING
  • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
  • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
  • G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
• • G—PHYSICS
  • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
  • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
  • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
  • G21K1/06—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diffraction, refraction or reflection, e.g. monochromators
• • G—PHYSICS
  • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
  • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
  • G21K2201/00—Arrangements for handling radiation or particles
  • G21K2201/06—Arrangements for handling radiation or particles using diffractive, refractive or reflecting elements
• • G—PHYSICS
  • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
  • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
  • G21K2201/00—Arrangements for handling radiation or particles
  • G21K2201/06—Arrangements for handling radiation or particles using diffractive, refractive or reflecting elements
  • G21K2201/067—Construction details
• • G—PHYSICS
  • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
  • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
  • G21K2207/00—Particular details of imaging devices or methods using ionizing electromagnetic radiation such as X-rays or gamma rays
  • G21K2207/005—Methods and devices obtaining contrast from non-absorbing interaction of the radiation with matter, e.g. phase contrast

Definitions

• the present invention relates to an X-ray imaging
• the X-ray refers to an electromagnetic
• the X-ray with a short wavelength (about 2 keV or more) is referred to as a hard X-ray, and the X-ray with a long wavelength (about 0.1 keV to about 2 keV) is referred to as a soft X-ray.
• the method using a high X-ray transmittance has been practically used for an internal crack inspection of an iron and steel material and an application in a security field such as a
• X-ray phase contrast imaging is effective in detecting an X-ray phase shift through the object.
• the X-ray phase contrast imaging is expected to be applied to imaging of a polymer blend and a medical application.
• the method is such that an X-ray source with a micro focus is used; the object and the detector are spaced away from each other; and thereby, the object is
• the method of using the refraction effect is characterized in that a high coherence X-ray beam such as a synchrotron radiation beam is not always required.
• phase information X-ray differential phase contrast image and X-ray phase shift image
• the conventional methods have a problem in that the absorption information and the phase information cannot be obtained in a separate and independent manner.
• an X-ray apparatus and an X-ray measuring method capable of obtaining absorption information (X-ray transmittance image) and phase information (X-ray differential phase contrast image and X-ray phase shift image) about an X-rayed object as separate and independent information.
• absorption information X-ray transmittance image
• phase information X-ray differential phase contrast image and X-ray phase shift image
• the present invention provides an X-ray apparatus and an X-ray measuring method having the following
• calculating unit for calculating an X-ray transmittance image as the X-ray absorbing information, and an X-ray differential phase contrast image or an X-ray phase sift image as the X-ray phase information, wherein the splitting element splits the X-ray into two or more the X-rays having different widths, and emitting the X-rays onto the detector unit, and the calculating unit calculates the X-ray absorbing information and the X- ray phase information based on a difference, between the two or more X-rays, in correlation between the changing of the phase of the X-ray and the changing the intensity of the X-ray in the detector unit.
• an X-ray measuring method for deriving X-ray absorbing information and X-ray phase information of an object to be detected comprises steps of: splitting spatially an X-ray generated by an X-ray generator into two or more X-rays having different widths; detecting intensities of the X-rays, based on the X-rays split by the
• the present invention can provide an X-ray apparatus and an X-ray measuring method capable of obtaining absorption information (X-ray transmittance image) and phase information (X-ray differential phase contrast image and X-ray phase shift image) about an object as separate and independent information.
• absorption information X-ray transmittance image
• phase information X-ray differential phase contrast image and X-ray phase shift image
• Fig. 1 is a drawing illustrating a
• FIG. 2 is a drawing illustrating a configuration example of a splitting element according to the first embodiment.
• FIG. 3 is a drawing illustrating a configuration example of an X-ray optical element according to the first embodiment.
• Fig. 4 is a graph illustrating a relation between an X-ray intensity ratio and a moving quantity after X-rays with different widths are transmitted through the X-ray optical element to be described in the first embodiment.
• Fig. 5 is a flowchart illustrating a process flow of a calculating unit to be described in the first embodiment .
• Fig. 6 is a drawing illustrating a configuration example of the X-ray optical element to be described in the second embodiment.
• Fig. 7 is a drawing illustrating a configuration example of the X-ray optical element to be described in the third embodiment.
• Fig. 8 is a drawing illustrating a configuration example of the X-ray optical element to be described in the fourth embodiment.
• Fig. 9 is a drawing illustrating a configuration example of the X-ray optical element to be described in the fourth embodiment.
• Fig. 10 is a drawing illustrating a configuration of an apparatus to be described in an example .
• Embodiments of the present invention relate to an X-ray apparatus using a phase shift through an object, and the X-ray apparatus and the X-ray measuring method capable of obtaining absorption information and phase information about the X-rayed object as separate and independent information will be described.
• the X-ray apparatus obtaining absorption information (X-ray transmittance image) and phase information (X- ray differential phase contrast image and X-ray phase shift image) about the X-rayed object has the following configuration .
• the X-ray apparatus includes an X-ray generator
• the detecting unit is configured to be able to divide the X-ray into X-rays with two or more widths and emit the X-rays onto the detecting unit.
• the splitting element is configured to allow the detecting unit to detect the X-rays each having a different correlation between an X-ray positional change quantity and an X-ray intensity change quantity between the X-rays with two or more widths, based on which the absorption information and the phase
• the X-ray apparatus includes the detecting unit detecting an X-ray intensity by
• the X-ray apparatus includes a calculating unit calculating an X- ray transmittance image which is object absorption information; and an X-ray differential phase contrast image or an X-ray phase shift image which is phase information, from the X-ray intensity obtained from the detecting unit. Furthermore, the calculating unit is configured to be able to perform calculation on the basis that the correlation between the X-ray positional change quantity and the X-ray intensity change quantity of the X-rays detected by the detecting unit is
• he detecting unit detects the X-ray intensity
• an X-ray optical element converting an X-ray incident position change quantity on the detector to an X-ray intensity change quantity based on the X-ray refraction effect by the object.
• the X-ray optical element converting the X-ray incident position change quantity on the detector to the X-ray intensity change quantity includes the following elements.
• the X-ray optical element includes an element whose X-ray absorbing quantity (transmitting quantity) gradually changes according to the X-ray incident position, and an element in which the light emission quantity of an X-ray-sensitive scintillator gradually changes according to the X-ray incident position .
• the X-ray optical element includes an element whose X-ray shielding area gradually changes according to the X-ray incident position, and an element in which the absorbing quantity (transmitting quantity) of the light emitted by an X-ray-sensitive scintillator gradually changes according to the X-ray incident position.
• the X-ray optical element includes an element in which the shielding area of the light emitted by a scintillator gradually changes according to the X-ray incident position or an element in which the transmittance of the light emitted by a
• the element can also be implemented by changing the X-ray absorbing quantity (transmitting quantity) per unit volume in a gradual or stepwise manner .
• the element in which the shielding area of the light emitted by the scintillator gradually changes can be implemented by using a light shielding element such as a mask for the X-ray or the light emitted by the scintillator.
• the X-ray splitting element spatially splitting an X- ray incident on the X-ray optical element is used such that the X-ray split by the X-ray splitting element has two or more widths on the detector.
• the X-ray splitting element has a slit
• the first embodiment will focus on an X-ray apparatus capable of independently obtaining the absorption information and the phase information using an element whose X-ray absorbing quantity
• the X-ray apparatus of the present embodiment includes a splitting element 103, an object 104, an X-ray optical element 105, and a
• detecting unit 106 along an optical path of an X-ray emitted by an X-ray source 101 as an X-ray generation source .
• stepping motor to move the splitting element 103, the object 104, and the X-ray optical element 105 may be provided separately.
• the object 104 can be moved as needed and thus a
• the X-ray emitted by the X-ray source 101 is spatially split by the splitting element 103. More specifically, the splitting element 103 functions as a sample mask having a plurality of apertures described in PTL 2, and thus the X-ray transmitted through the splitting element 103 becomes an X-ray beam.
• the splitting element 103 may have a slit array shape having a line and space or may have two-dimensionally arranged holes.
• the splitting element may be made of an array of slits having two or more widths periodically arranged in a line and space pattern.
• the splitting element 103 may include a substrate 201 and two types of slits 202 and 203 having different widths and being alternately arranged.
• the slits 202 and 203 provided in the substrate 201 may not be penetrated through the substrate made of an optical element as long as X-rays are transmitted through .
• the material of the substrate 201 is selected from Pt, Au, Pb, Ta, W, and others having high X-ray absorbing capability.
• the position of the detecting unit 106 detecting the X-ray split by the splitting element 103 is equal to or greater than the pixel size of the detecting unit 106.
• the size of the pixels forming the detecting unit is equal to or less than the spatial period of the X-ray at the position of the detecting unit 106.
• Each refracted X-ray is incident on the X-ray optical element 105.
• the intensity of each X-ray transmitted through the X-ray optical element 105 is detected by the detecting unit 106.
• detecting unit 106 is numerically processed by the calculating unit 107 and output to a display unit 108 such as a monitor.
• Examples of the object 104 include a human body and, as materials other than the human body, an inorganic material and an inorganic-organic composite material.
• the detecting unit 106 is selected, for example, from an X-ray flat panel detector, an X-ray CCD camera, a direct conversion X-ray two-dimensional detector, and the like.
• the detecting unit 106 may be close to the X-ray
• optical element 105 may be spaced at a specific distance from each other.
• the X-ray optical element 105 may be built in the detecting unit 106.
• monochromating unit 102 such as a monochromator
• a grid used for X-ray radiography may be
• FIG. 3 is a schematic drawing of an X-ray optical
• a reference X-ray 301 indicates an X-ray split in the absence of the object 104.
• An X-ray 302 indicates an X-ray refracted by the presence of the object 104.
• the moving quantity d indicates the amount of the reference X-ray 301 and the X-ray 302 moving on the X-ray optical element 303 in the X direction (direction perpendicular to the X-ray incident direction) .
• the X-ray optical element 303 has a triangular prism shaped array structure in which the thickness changes in the X direction.
• This structure changes the optical path length of the X-ray transmitted in the X direction inside the X-ray optical element 303.
• the X-ray optical element 303 has an absorption gradient such that the X- ray absorbing quantity (transmitting quantity) changes depending on the X-ray incident position.
• Fig. 4 is a graph illustrating a relation between an X- ray intensity ratio and a moving quantity after the splitting element 103 divides an X-ray into X-rays with different widths and the split X-rays are transmitted through the X-ray optical element.
• Fig. 4 plots the moving quantity from the reference
• a x , a 2 , bi, and b 2 are a constant, which can be obtained by fitting the data in Fig. 4.
• the following mathematical expression (2) can be derived .
• another measurement can be made by moving the object 104 or the splitting element 103 in the X direction by the length measurable using an X-ray with another width with respect to the already measured position of the object 104.
• splitting element 103 allows the X-ray absorption information and the phase information to be obtained as independent information.
• intensity information about each X-ray transmitted through the X-ray optical element 105 is obtained (S100) .
• each X-ray refraction angle ( ⁇ ) can be expressed by the following mathematical expression (3) .
• the mathematical expression (3) is used to calculate each X-ray refraction angle ( ⁇ ) (S102). [0080] he refraction angle ( ⁇ ) and the differential phase (dO/dx) have a relation of the following mathematical expression ( 4 ) . ⁇ _ 2 ⁇
• ⁇ denotes an X-ray wavelength
• phase ( ⁇ ) is calculated by integrating each of the obtained differential phases (dO/dx) in the X direction (S104) .
• This configuration enables detection of a fine X-ray positional change in one pixel of the detecting unit 106, thus eliminating the need to keep a long distance between the object 104 and the detecting unit 106 and achieving the miniaturization of the apparatus.
• the X-ray transmittance image, the X-ray differential phase contrast image or the X-ray phase shift image of the object can be separately obtained.
• a high coherence X-ray is not always required and the absorption image, the X-ray differential phase contrast image or the X-ray phase shift image can be obtained.
• differential phase contrast image or the X-ray phase shift image is obtained, but instead, the transmittance image obtained from the absorption information, the X- ray positional change quantity, and the refraction angle may be displayed on the display unit 108.
• the description will focus on an X-ray apparatus using a phosphor array including a plurality of phosphors having a light emission quantity gradient as an X-ray optical element instead of the X- ray optical element of the first embodiment.
• the present embodiment describes a structure in which the X-ray optical element 105 is in contact with the detecting unit 106, but the X-ray optical element 105 may be separated from the detecting unit 106.
• the phosphor can be implemented by gradually changing shape or gradually changing the light emission quantity per unit volume.
• stepwise in the description may include the concept of "stepwise”.
• a stepwise changing light emission quantity is also included in the present invention.
• the apparatus configuration is the same as that of the first embodiment. More specifically, the splitting element 103 periodically divides an X-ray into X-rays with two widths and the object 104 is irradiated with the X-rays. The transmitted X-rays are incident on the X-ray optical element 105.
• the schematic drawing of part of the X-ray optical element 105 is illustrated in Fig. 6.
• a reference X-ray 601 indicates the X-ray split in the absence of the object 104.
• An X-ray 602 indicates the X-ray refracted by the presence of the object 104.
• a phosphor array 603 has a light emission quantity gradient .
• the phosphor array 603 is made of a material emitting phosphor light by X-ray irradiation and has gradually different shapes in the X direction in the element as illustrated in Fig. 6. As a result, the phosphor array 603 exhibits a phosphor light emission quantity
• the material of the phosphor array 603 can be selected, for example, from the following generally used as an X- ray scintillator.
• the material of the phosphor array 603 can be selected from Nal (Tl-doped) , Csl (Tl-doped) Csl (Na-doped) , Csl (undoped) , LSO (Ce-doped) , YAP (Ce- doped) , GSO (Ce-doped), and the like.
• a visible light CCD and a COMS sensor can be used as the detecting unit 106.
• the light emission quantity change ratio of the phosphor array 603 with respect to the X-ray moving quantity from the reference X-ray 601 incident position is different depending on the widths.
• the light emission quantity data is preliminarily obtained while moving the splitting element 103, thereby subjecting the moving quantity and the light emission quantity change ratio to function fitting.
• the phase can be calculated by integrating the
• the information about the X-ray intensities in two adjacent elements namely, two regions of the X-ray optical element 105 is used to obtain the transmittance A and the X-ray position moving quantity d, and thus the spatial resolution is one-half (1/2) .
• another measurement can be made by moving the object 104 or the splitting element 103 in the X direction by the length measurable using an X-ray with another width with respect to the already measured position of the object 104.
• This configuration enables detection of a fine X-ray positional change in one pixel of the detecting unit 106, thus eliminating the need to keep a long distance between the object 104 and the detecting unit 106 and achieving the miniaturization of the apparatus.
• differential phase contrast image or the X-ray phase shift image of the object can be separately obtained.
• a high coherence X-ray is not always required and the absorption image, the X-ray differential phase contrast image or the X-ray phase shift image can be obtained.
• differential phase contrast image or the X-ray phase shift image is obtained, but instead, the transmittance image obtained from the absorption information, the X- ray positional change quantity, and the refraction angle may be displayed on the display unit 108.
• the description will focus on an X-ray apparatus using a shield array including a plurality of shields for shielding part of the X-ray as an X-ray optical element instead of the X-ray optical element 105 of the first embodiment.
• the present embodiment describes a structure in which the X-ray optical element 105 is in contact with the detecting unit 106, but the X-ray optical element 105 may be separated from the detecting unit 106.
• Reference X-rays 701 and 702 with two widths indicate X-rays split in a portion without the object 104 and incident so as to pass through a center portion of a pixel 705.
• X-rays 706 and 707 indicate X-rays
• a shield 704 shields part of the reference X-rays 701 and 702 and the X-rays 706 and 707.
• the shielding area of the X-rays 706 and 707 changes gradually from the shape of the shield 704.
• the moving quantity can be obtained from the intensity change.
• the intensity change ratio with respect to the X-ray moving quantity with two widths exhibits a linear change with two gradients.
• the X-ray transmittance A and the position change quantity d with respect to the reference X-rays 701 and 702 are calculated from the intensity information about each X-ray to calculate the differential phase.
• the information about the X-ray intensities in two adjacent elements, namely, two regions of the X- ray optical element 105 is used to obtain the
• another measurement can be made by moving the object 104 or the splitting element 103 in the X direction by the length measurable using an X-ray with another width with respect to the already measured position of the object 104.
• his configuration enables detection of a fine X-ray positional change in one pixel of the detecting unit 106, thus eliminating the need to keep a long distance between the object 104 and the detecting unit 106 and achieving the miniaturization of the apparatus.
• differential phase contrast image or the X-ray phase shift image of the object can be separately obtained.
• differential phase contrast image or the X-ray phase shift image is obtained, but instead, the transmittance image obtained from the absorption information, the X- ray positional change quantity, and the refraction angle may be displayed on the display unit 108.
• the description will focus on an optical element for shielding part of visible light in order to convert an X-ray movement to an intensity change of the detected visible light after the X-ray is changed to the visible light by a phosphor instead of the X-ray optical element 105 of the first embodiment.
• the present embodiment describes a structure in which the X-ray optical element 105 is in contact with the detecting unit 106, but the X-ray optical element 105 may be separated from the detecting unit 106.
• the X-ray optical element 105 and the detecting unit 106 in Fig. 1 include a scintillator 806, an optical element 803, and an optical detector 805 in the present example.
• the optical detectors 805 are arranged two dimensionally and thus each optical detector 805 corresponds to a pixel of a detected image.
• the scintillator 806 may be sensitive to X-rays and is made of cesium iodide (Csl) and the like.
• the optical detector 805 may be sensitive in a light- emitting wavelength region of the scintillator and is made of a CCD, a CMOS, or the like. [0131] Note that the scintillator 806, the optical element 803, and the optical detector 805 may be integrally formed as illustrated in Fig. 8, but may be spaced from each other .
• a reference X-ray 801 indicates an X-ray
• an X-ray 802 indicates an X-ray refracted by the presence of the object 104.
• he reference X-ray 801 can be set to pass through a
• the optical element 803 includes a plurality of optical filters 804.
• the optical filter 804 is a filter such that a light transmittance changes gradually in the X direction (direction perpendicular to an incident X- ray) .
• the optical filter 804 is formed, such as by laminating metal on a light transmitting substrate by gradually changing the film thickness. Note that the term
• Fig. 9 is a view of the X-ray optical element 105 and the detecting unit 106 as viewed from the X-ray
• the X-ray is converted to visible light by a
• the scintillator 903 may be sensitive to X-rays and is made of cesium iodide (Csl) and the like.
• the reference X-rays with two widths are converted to visible light by the scintillator, and the reference light beams 901 and 902 are incident so as to pass through a center portion of a pixel 905.
• Light beams 906 and 907 indicate light beams converted to visible light after the X-rays are refracted by the object 104 and incident on a scintillator portion located in a position shifted from the center portion of the pixel 905.
• the light shield 904 shields part of the reference
• the light shielding area of the light beams 906 and 907 changes gradually from the shape of the light shield 904. Consequently, the moving quantity can be obtained from the intensity change.
• the X-ray optical element 105 implementing a light
• reducing method and a light shielding method detects X- rays with two widths split by the splitting element 103.
• the detected intensity change ratio with respect to the moving quantity exhibits a linear change with two different gradients.
• the X-ray transmittance A and the position change quantity d are calculated from the intensity information about each X- ray to calculate the differential phase.
• the phase can be calculated by integrating the differential phase in the X direction.
• the spatial resolution is one-half (1/2) .
• another measurement can be made by moving the object 104 or the splitting element 103 in the X direction by the length measurable using an X-ray with another width with respect to the already measured position of the object 104.
• This configuration enables detection of a fine X-ray positional change in one pixel of the detecting unit 106, thus eliminating the need to keep a long distance between the object 104 and the detecting unit 106 and achieving the miniaturization of the apparatus.
• the X-ray transmittance image, the X-ray differential phase contrast image or the X-ray phase shift image of the object can be separately obtained.
• a high coherence X-ray is not always required and the absorption image, the X-ray differential phase contrast image or the X-ray phase shift image can be obtained.
• differential phase contrast image or the X-ray phase shift image is obtained, but instead, the transmittance image obtained from the absorption information, the X- ray positional change quantity, and the refraction angle may be displayed on the display unit 108.
• a rotating-anticathode-type X- ray generator having an Mo target illustrated in an X- ray source 1001 is used.
• the X-ray is spatially split by the splitting element 1003 arranged in a position spaced 100 cm from the X- ray source.
• the splitting element 1003 is formed by alternately arranging tungsten (w) with a thickness of 100 ⁇ and slit widths of 50 ⁇ and 30 ⁇ .
• the slit period is 100 ⁇ .
• the X-rays transmitted through the object 1004 are incident on the X-ray optical element 1005.
• moving units 1009, 1010, and 1011 each using a stepping motor are provided in the splitting element 1003, the object 1004, and the X-ray optical element 1005.
• the X-ray optical element 1005 is formed by arranging Ni triangular prisms on a carbon substrate with a thickness of 1 mm, a bottom length of 150 ⁇ and a height of 75 ⁇ .
• the X-ray detector 1006 is arranged such that the X- rays transmitted through the X-ray optical element 1005 are projected on the X-ray detector 1006 at a period of 200 ⁇ and the X-ray intensity is detected.
• the splitting element 1005 is moved 100 ⁇ in a periodic direction of the triangular prisms using the moving unit 1009 to perform similar
• the X-ray detector 1006 is a flat panel detector with a pixel size of 50 ⁇ * 50 ⁇ .
• the X-ray intensity values of four pixels in a periodic direction of the triangular prisms are totaled to produce the X-ray intensity of one X-ray optical element.
• splitting element 1003 in one direction. Thereby, data about the relation between the position change quantity and the X-ray intensity change ratio regarding the X- rays split by the splitting element 1003 and the X-ray optical element of each X-ray is obtained.
• the data subjected to function fitting is used by the calculating unit 1007 to calculate the X-ray
• the differential phases obtained from each X-ray are spatially integrated to obtain the X-ray phase shift image.
• 0.71 A which is an Mo characteristic X-ray is used as the wavelength.
• the X-ray transmittance image, the X-ray differential phase contrast image, and the X-ray phase shift image obtained by the calculating unit 1007 are displayed on a PC monitor as the display unit 1008.

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