Classifications

• • C—CHEMISTRY; METALLURGY
  • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
  • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
  • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
  • C23C14/58—After-treatment
  • C23C14/5873—Removal of material
• • C—CHEMISTRY; METALLURGY
  • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
  • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
  • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
  • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
  • C23C14/08—Oxides
  • C23C14/086—Oxides of zinc, germanium, cadmium, indium, tin, thallium or bismuth
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
  • H01L31/02—Details
  • H01L31/0236—Special surface textures
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
  • H01L31/02—Details
  • H01L31/0236—Special surface textures
  • H01L31/02366—Special surface textures of the substrate or of a layer on the substrate, e.g. textured ITO/glass substrate or superstrate, textured polymer layer on glass substrate
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
  • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
  • H01L31/1884—Manufacture of transparent electrodes, e.g. TCO, ITO
• • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
  • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
  • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
  • Y02E10/00—Energy generation through renewable energy sources
  • Y02E10/50—Photovoltaic [PV] energy

Definitions

• the invention relates to a method for producing a zinc oxide layer and to a zinc oxide layer.
• ZnO sputtered zinc oxide layers
• ITO B. tin-doped indium oxide
• zinc oxide can be etched in hydrochloric acid.
• the layer is laterally structured on its surface by wet-chemical etching of the zinc oxide layer.
• An anisotropic etching process results in a texture with structures in the nanometer or micrometer range.
• polycrystalline, sputtered zinc oxide layers are used as a front contact layer and as a so-called intermediate reflector or in combination with a reflector as a back contact layer.
• polycrystalline, sputtered and subsequently wet-chemically structured zinc oxide layers are used as transparent contact layers.
• Sputtered zinc oxide films regularly have rms roughnesses less than 5 to 15 nanometers.
• a ZnO layer can be etched at high speed. This increases the rms roughness of the zinc oxide surface and creates craters, which are needed for light scattering.
• the craters can be varied in diameter and depth by changing the etch time. Their number or density is only slightly changed. Also, the pH can not change the structures significantly. With increasing pH In the acidic range, the etching time increases until a certain crater depth is reached.
• the resulting texture in terms of size and density of the structures after the etching process rather depends on the ZnO layer properties even before the etching. These properties in turn are influenced by various parameters during the production of the ZnO layers by means of sputtering.
• the influencing parameters include (a) the substrate and its pretreatment, (b) the sputtering conditions, such as. For example, the substrate temperature, the discharge power, the sputtering pressure, the gas composition and the doping.
• the shape of the structures and craters developing during the etching can be influenced within narrow limits by the etching solution and duration. The number and size of the craters changes only insignificantly with the choice of the etching time or the etching medium. For etching in acids, essentially three types of etched surfaces are distinguished:
• Type 1 The surface topography of type 1 is microscopically rough and has sharp-edged surface structures with lateral dimensions of about 300 nm and very steep flanks. As the prior art, FIG. 1 a shows such a rough surface, which is almost a
• Gaussian statistical distribution of heights Typical opening angles of the structures are 40 ° to 80 °.
• the lateral dimensions of the craters are less than 300 nm.
• the topography of the surface after etching depends on the etching time. For an approximately 800 nm thick zinc oxide layer, from which about 150 nm are removed by wet-chemical removal in hydrochloric acid, the rms roughness is about 50 to 120 nm and the lateral correlation length between 100 and 300 nm.
• Type 2 In the surface topography of type 2, the surface is almost evenly covered with large craters (Fig. 1b).
• the lateral crater diameters are 0.5 ⁇ m to 3 ⁇ m and the crater depths are in the range between 150 nm and 400 nm.
• the craters have a typical opening angle of about 120 ° to 135 °.
• the topography of the surface after etching depends on the etching time. For a layer about 800 nm thick, of which about 150 nm are removed by wet chemical removal in hydrochloric acid, the rms roughness is between 100 and 180 nm, typically about 135 nm, and the lateral correlation length is 400 to 1000 nm.
• Type 3 The surface topography type 3 also has large craters (Figure 1c) surrounded by relatively smooth areas.
• the smooth area comprises only shallow and small craters with a depth of up to about 100 nm.
• the occasionally large craters with a lateral extent of up to 3 ⁇ m extend partly to the substrate, so that a plateau is formed there.
• the topography of the surface after etching depends on the etching time. For a layer about 800 nm thick, from which about 150 nm are removed by wet-chemical removal in hydrochloric acid, the rms roughness is below 100 nm, typically around 20 to 50 nm, and the lateral correlation length is 250 to 800 nm.
• the height distribution is usually very unsymmetrical. This is due to the surface structures, which form crater-shaped by the etching. Typical opening angles of the structures are 120 ° to 140 °. The rms roughness strongly depends on the etching time.
• Type 2 ( Figure lb) differs from Type 3 ( Figure 1c) in the number of craters per area.
• Type 2 shows a higher crater density. Therefore, a layer with a surface of type 2 with the same layer removal compared to type 3 has a higher rms roughness.
• a type 2 surface is better suited for thin-film solar cells than the type 3 or type 1 surface.
• the surface texture of the zinc oxide layer resulting from the etching process leads to scattering of the light striking a solar cell.
• the light is scattered in the incident after passing through the zinc oxide layer in the absorber layer and ideally reflected multiple times within the cell ("Light Trapping" effect), which leads to the improvement of cell efficiency.
• the choice of sputtering parameters determines what type of surface topography is obtained after etching.
• deposition conditions such as 2 kW discharge power, 200 sccm argon gas flow and 10 ⁇ bar deposition pressure, a type 2 surface is obtained after etching in hydrochloric acid.
• the non-reactive sputtering of ceramic zinc oxide tube targets with an alumina doping of 0.5 % wt. at medium frequency excitation (MF) at 40 kHz.
• MF medium frequency excitation
• a surface similar to type 3 is obtained after etching in hydrochloric acid.
• Type 2 surfaces are obtained in a narrow process window with respect to the temperature between Type 1 and Type 3 at low to medium temperatures, eg. B. at 1% wt. A1 2 0 3 doping and about 300 ° C substrate temperature. As the target doping decreases, the process window becomes even narrower, allowing the zinc oxide layer to etch after etching into a Type 2 surface.
• a surface of type 1 is produced for a sputtering pressure of 20 ⁇ bar at a substrate temperature of 270 ° C.
• a surface according to type 2 is produced after etching in 0.5% wt. HCl.
• etching properties being essentially determined by the layer properties determined by the choice of sputtering parameters.
• the location of the crater formation in the etching process of the ZnO layer is apparently already impressed by the production conditions of the zinc oxide layer as an inherent layer property. Since these parameters and in particular the substrate temperature during sputtering can not be adjusted satisfactorily uniformly even on a large industrial scale, large amounts of undesired rejects or partial areas of a ZnO layer with layers occur disadvantageously with the prior art etching methods Type 1 and 3 on. Namely, the etching medium in the further progress of the production determines exclusively the shape of the etching structures, but not its area density. Type 2 layers are therefore partly random and not with the required degree of homogeneity and reproducibility.
• Double structures are desirable because they lead to improved light scattering in SnO 2 layers.
• the craters in the etched zinc oxide layers are only very limited in size and number controllable by the sputtering process or the etching process in various liquid media, such as acids or alkalis. 3.
• the process windows for the production of the zinc oxide layer, in which suitable surface structures are produced by the etching process, are narrow. In particular, highly conductive zinc oxide layers produced at high deposition rates regularly show only a low crater density after etching. This leads disadvantageously to a low efficiency of the photovoltaic solar modules produced on these zinc oxide layers.
• the object of the invention is to provide a cost-effective method and an etching solution for producing a zinc oxide layer, with which the crater density and the crater size homogeneous and reproducible, that is largely independent of deposition conditions and material properties, but rather by the etching solution and the etching process itself can be adjusted.
• Another object of the invention is to provide a process for producing double structures in zinc oxide layers.
• the object is achieved by a method according to claim 1.
• Advantageous embodiments emerge from the claims referring back to this.
• the method for producing the zinc oxide layer according to the invention comprises the step of providing the zinc oxide by wet chemical etching with hydrofluoric acid.
• a reproducible crater size and crater density in the layer can be set.
• the zinc oxide layer is reproducibly changed by the etching process with hydrofluoric acid, even if the layer was prepared in different ways before the etching.
• etching a particularly high crater density can be generated regularly.
• the points of attack for hydrofluoric acid can be determined by the etching process and the The etching solution itself controls and are not exclusively determined by the deposition conditions and other properties of the zinc oxide layer.
• the crater density and crater size which are produced by etching in hydrofluoric acid, are particularly advantageously dependent on the acid concentration.
• Low acid concentrations 1% wt.
• One up to 2 N hydrofluoric acid (equivalent to 4% wt.) Is particularly advantageous, since in this area the surface structure of broad, flat craters (low concentration) can vary into narrow, steep craters (high concentration). This advantageously allows the surface structure to be optimized for the corresponding application.
• An etching time of more than one second is advantageous in order to achieve an effect on the surface structure.
• An etching time exceeding 300 seconds can lead to inhomogeneous surface structures.
• the named etching period also applies to dynamic etching processes with a moving substrate in the etching medium.
• an acid mixture with hydrofluoric acid and other acids such as. Hydrochloric acid.
• the crater size can be set reproducibly by the choice of the mixing ratio.
• a second etching step is carried out with another acid. It is possible to etch first with another acid or alkali.
• other acid also includes a hydrofluoric acid having a different concentration, but it may also be a hydrochloric acid or any other chemical of hydrofluoric acid. which other acids are etched.
• a further etching step which is carried out before or after the etching process in hydrofluoric acid, the resulting surface structure is modified by the subsequent etching process.
• etching steps can be provided by hydrofluoric zinc oxide layers with a rough surface, which hardly develop craters by etching in other acids. This effect applies in particular to zinc oxide layers which have been deposited at high deposition rates. Zinc oxide layers etched using hydrofluoric acid and their mixtures with other acids have sharp-edged surfaces. Deposited solar cells have improved optical properties.
• An executed after the hydrofluoric etching step in another acid, for. B. dilute hydrochloric acid (HCl) leads to the smoothing of the sharp edges. This has a positive effect on the fill factor and on the electrical properties of the solar cell.
• the unetched zinc oxide layer should have a specific resistance which, prior to the etching step, advantageously does not exceed 10 " ohm * cm, in particular 10 " ohm * cm. This results in a sheet resistance of less than 100 ohms, especially less than 10 ohms.
• the zinc oxide to be etched should advantageously be deposited on a substrate before etching by a sputtering process.
• Sputtered zinc oxide regularly has a strong c-axis texture, which is advantageous for the etching behavior.
• Zinc oxide layers with crystal orientations whose c-axis is not perpendicular to the substrate plane regularly show no significant light scattering after a wet-chemical etching process.
• a flexible substrate for.
• a metal or plastic film can be used as a substrate.
• the low weight and flexibility of the solar modules made from them offer more applications than rigid and heavy substrates, such as roof integration with low load capacity or the integration of PV modules in clothing. It can but also rigid substrates can be used, on which the zinc oxide layer is deposited. These substrates place less demands on mechanical properties such as film stress and adhesion.
• the zinc oxide layer to be etched is advantageously between 300 to 1500 nanometers thick.
• the layer thickness after the etching step is advantageously 200 to 1400 nm, in particular 400 to 900 nm.
• the etching process advantageously removes 50 to 1000 nm, in particular 100 to 500 nm.
• a target of approximately 150 nanometers has been targeted. This erosion has been found in the prior art etching processes to be sufficient for assessing the quality of the etched layer.
• the layers are measured with a surface profilometer.
• the zinc oxide layers are doped or alloyed with other materials and then etched for better conductivity, optical property, and long-term stability. Suitable doping atoms are in particular the elements of the third main group such. As aluminum, gallium and indium. Alloys of zinc oxide with other metal oxides such as MgO or SnO 2 can also be used.
• the cumulative fraction of the metallic foreign atoms based on the totality of the atoms in the zinc oxide is advantageously 0.1 to 20 at%, in particular between 0.2 and 10 at%, and between 0.3 and 4 at%.
• a zinc oxide layer is etched, which has been deposited at high deposition rates. This depresses the prices for the production. Suitable deposition rates are advantageously above 5 nm / s, in particular above 10 nm / s. For dynamic sputtering processes, the static deposition rate must be correspondingly converted into a dynamic rate so that cycle times of less than 2 minutes, in particular less than 1 minute, are achieved.
• the zinc oxide layer according to the invention advantageously has a double structure in which small craters are etched in large craters. The large craters can be more than 300 nm in size, while the small craters are less than 300 nm in size.
• the crater density of the large craters is 0.3 to 3 ⁇ m ⁇ "2.
• the crater density of the small craters is advantageously 5 to 100 ⁇ m " so that several small craters find space in a large crater.
• the target size for the ZnO layer is an erosion of approximately 100 to 500 nm. This erosion has been found in the prior art etching processes to be sufficient for assessing the quality of the etched layer. The layers were measured with a surface profilometer.
• FIG. 1 SEM image of etched ZnO surfaces according to the state of the art: according to FIG.
• HCl etching step Type 1 (a), Type 2 (b), Type 3 (c) and after an etching step in OH (d)
• FIG. 2 SEM image of the surface of a double structure of a zinc oxide layer
• Embodiment 1 which was first etched for 30 s in hydrochloric acid and then for 30 s in hydrofluoric acid.
• Figure 3 SEM images of the surfaces of ZnO layers, which were etched in accordance with Embodiment 2-4 in acid mixtures of HF and HCl. The mixing ratios, the associated etching times and rms roughnesses and lateral correlation lengths are summarized in Table 1. Fig. 3d) relates to the prior art.
• FIG. 4 SEM images of the surfaces of high-rate ZnO layers under etching conditions: (a) 120 seconds in 1% wt. HF solution after etching step according to the invention, (b) for 30 seconds in 0.5% wt. HCl solution according to the prior art ,
• FIG. 5 SEM image of the surfaces of a high-rate ZnO layer, which according to embodiment 5 was first etched for 120 seconds in 1% wt. HF solution and then for 4 seconds in 0.5% wt. HCl.
• FIG. 6 SEM images of the surfaces of zinc oxide layers etched in hydrofluoric acid of various concentrations under etching conditions: (a) 4% wt. HF, 120 seconds (b) 2% wt. HF, 120 seconds (c) 1% wt. HF, 70 seconds (d) 0.5% wt. HF, 120 seconds (e) 0.25% wt. HF, 120 sec., Or (f) 0.125% wt. HF, 120 sec
• An 800nm thin ZnO film was sputtered onto a glass substrate.
• the following coating parameters were selected: Planar, ceramic ZnO: Al 2 O 3 target with 1 percent by weight Al 2 O 3 content; a radio frequency (rf) excitation at 13.56 MHz, purified Corning Glass Eagle XG; Process gas: argon; Working pressure 1 * 10 "3 mbar, generator power 2 W / cm 2 , argon gas flow 2x50 standard cubic centimeter (sccm), substrate temperature 300 ° C, sputtering system: Von Ardenne Anlagentechnik (VISS 300) The static deposition rate was 0.5 nm / s.
• the zinc oxide-coated glass sheet is etched for 30 seconds in 0.5% wt. Hydrochloric acid (HCl). This produces the known craters of type 2 (see, for example, Fig. Lb). Subsequently, the sample is etched for 30 seconds in 1% wt. Hydrofluoric acid (HF). Since the hydrofluoric acid chooses other etch attack points, it creates a double structure with several small craters in large craters ( Figure 2).
• concentrations of hydrofluoric acid and hydrochloric acid are not limiting but merely exemplary. It is thus readily possible to select other concentrations for the hydrofluoric acid and the hydrochloric acid, as for the other embodiments and for intermediate concentrations which are between the concentrations mentioned there.
• Example 2 An 800nm thin ZnO film was sputtered on a glass substrate.
• the coating parameters were chosen as in Example 1.
• the zinc oxide-coated glass sheet is etched for various etch times in mixtures of different ratios of hydrochloric acid to hydrofluoric acid (HC1: HF).
• HC1: HF hydrochloric acid to hydrofluoric acid
• Table 1 Depending on the mixing ratio of both acids zuein- On the other hand, craters of different sizes are formed in the ZnO layer (see FIG. 3 ac).
• the rms roughness tends to increase only slightly (from 105 nm for pure 1% wt. HF over 125 nm for mixtures of both acids to 139 nm for pure 0.5% wt.
• the lateral correlation length which is a measure of the mean crater diameter here, increases for a higher relative HCl content in the etching solution (from 181 nm for 0% HCl to 644 nm for 100% HCl).
• the layer removal was about 150 nm for all etched layers.
• the rms roughnesses and the lateral correlation lengths are shown in Table 1.
• concentrations of hydrofluoric acid and hydrochloric acid are not limiting, but merely exemplary. So it can readily be selected other concentrations for the hydrofluoric acid and hydrochloric acid, eg. B. as for the other embodiments and, of course, even intermediate concentrations, which are between the concentrations mentioned there.
• a 800 nm thin zinc oxide layer was sputtered at high dynamic deposition rate with moving substrate of more than 100 nm * rn / min (about 7 nm / s) applied to a glass substrate.
• the following coating parameters were selected: ceramic ZnO: Al 2 O 3 tube target with 0.5% by weight Al 2 O 3 content; Center frequency (MF) excitation of the double cathode at 40 kHz; purified Corning glass Eagle XG; Process gas: argon; Working pressure 20 * 10 "3 mbar, generator power 14 kW, argon gas flow: 200 standard cubic centimeters (sccm), substrate temperature: 350 ° C, sputtering system: Von Ardenne Anlagentechnik (VISS 300).
• the zinc oxide coated glass sheet is etched for 120 seconds in 1% wt. HF solution. Sharp-edged craters are distributed over the surface (see FIG. 4a), whereas a layer etched in 0.5% wt. HCl has as prior art only flat craters similar to the surface of type 3 (see FIG. 4b).
• the ZnO layers shown allow good light scattering and thus increased quantum yields in silicon thin-film solar cells.
• the zinc oxide layer of FIG. 5 also shows good light scattering with high quantum efficiency and at the same time good electrical properties in thin-film solar cells.
• concentrations of hydrofluoric acid and hydrochloric acid are not limiting, but merely exemplary. It is thus readily possible to select other concentrations for the hydrofluoric acid and the hydrochloric acid, eg. B. such as for the other embodiments and of course also intermediate concentrations that are between the concentrations mentioned there.
• Zinc oxide films were etched in HF of various concentrations. An ablation of about 50 to 500 nm has been announced. For this ZnO layers were used as described in Example 1. Samples were etched in 4% wt., 2% wt., 1% wt., 0.5% wt., 0.25% wt., And 0.125% wt. Hydrofluoric acid. With the exception of the 1% wt. Solution (70 seconds), all samples were etched for 120 seconds. The resulting surfaces are shown in FIGS. 6a-f. For low acid concentrations (less than 0.125% wt.), Shallow craters with a diameter of up to 1000 nm are formed.
• concentrations of hydrofluoric acid and other acids in the embodiments are not limiting, but merely by way of example. It is understood that so readily other concentrations for these acids can be chosen, for. B. Intermediate concentrations between these concentrations.
• hydrochloric acid in the embodiments, phosphoric acid, sulfuric acid, nitric acid, acetic acid or citric acid or a suitable other, optionally also organic acid can be used.

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